2 VASEmethod[EllipsometerType=5, Isotropic, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Apr 03 16:06:29 2009]
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