2 RTmethod[PolRT=-0.00, RevsRT=100, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Tue Jul 07 14:17:39 2009]
\r
3 Original[070709 calibration wafer rt.dat]
\r
5 pT 400.000000 0.000000 3.4884e-005 0.00500035
\r
6 pT 410.000000 0.000000 9.76428e-007 0.00500001
\r
7 pT 420.000000 0.000000 1.12204e-005 0.00500011
\r
8 pT 430.000000 0.000000 1.57654e-005 0.00500016
\r
9 pT 440.000000 0.000000 9.49462e-006 0.00500009
\r
10 pT 450.000000 0.000000 5.84546e-007 0.00500001
\r
11 pT 460.000000 0.000000 4.93181e-006 0.00500005
\r
12 pT 470.000000 0.000000 6.64179e-007 0.00500001
\r
13 pT 480.000000 0.000000 2.76487e-006 0.00500003
\r
14 pT 490.000000 0.000000 1.43862e-006 0.00500001
\r
15 pT 500.000000 0.000000 5.59931e-006 0.00500006
\r
16 pT 510.000000 0.000000 3.69075e-006 0.00500004
\r
17 pT 520.000000 0.000000 2.7959e-006 0.00500003
\r
18 pT 530.000000 0.000000 3.26343e-006 0.00500003
\r
19 pT 540.000000 0.000000 3.91409e-006 0.00500004
\r
20 pT 550.000000 0.000000 1.12013e-006 0.00500001
\r
21 pT 560.000000 0.000000 8.91078e-007 0.00500001
\r
22 pT 570.000000 0.000000 1.84627e-006 0.00500002
\r
23 pT 580.000000 0.000000 5.74649e-006 0.00500006
\r
24 pT 590.000000 0.000000 6.11903e-006 0.00500006
\r
25 pT 600.000000 0.000000 1.03786e-006 0.00500001
\r
26 pT 610.000000 0.000000 5.54821e-006 0.00500006
\r
27 pT 620.000000 0.000000 6.24689e-006 0.00500006
\r
28 pT 630.000000 0.000000 5.05094e-006 0.00500005
\r
29 pT 640.000000 0.000000 5.60557e-006 0.00500006
\r
30 pT 650.000000 0.000000 2.36965e-006 0.00500002
\r
31 pT 660.000000 0.000000 3.402e-006 0.00500003
\r
32 pT 670.000000 0.000000 6.14766e-006 0.00500006
\r
33 pT 680.000000 0.000000 1.53657e-006 0.00500002
\r
34 pT 690.000000 0.000000 3.76018e-006 0.00500004
\r
35 pT 700.000000 0.000000 7.42488e-006 0.00500007
\r
36 pT 710.000000 0.000000 5.3544e-006 0.00500005
\r
37 pT 720.000000 0.000000 5.42022e-006 0.00500005
\r
38 pT 730.000000 0.000000 5.78343e-006 0.00500006
\r
39 pT 740.000000 0.000000 8.05188e-006 0.00500008
\r
40 pT 750.000000 0.000000 3.84137e-007 0.005
\r
41 pT 760.000000 0.000000 7.13857e-006 0.00500007
\r
42 pT 770.000000 0.000000 5.5287e-006 0.00500006
\r
43 pT 780.000000 0.000000 1.08254e-005 0.00500011
\r
44 pT 790.000000 0.000000 4.77834e-006 0.00500005
\r
45 pT 800.000000 0.000000 3.0008e-006 0.00500003
\r
46 pT 810.000000 0.000000 1.77579e-005 0.00500018
\r
47 pT 820.000000 0.000000 3.43512e-006 0.00500003
\r
48 pT 830.000000 0.000000 3.37727e-006 0.00500003
\r
49 pT 840.000000 0.000000 2.75491e-006 0.00500003
\r
50 pT 850.000000 0.000000 1.78205e-005 0.00500018
\r
51 pT 860.000000 0.000000 9.06222e-006 0.00500009
\r
52 pT 870.000000 0.000000 1.2649e-005 0.00500013
\r
53 pT 880.000000 0.000000 7.45274e-006 0.00500007
\r
54 pT 890.000000 0.000000 3.43898e-006 0.00500003
\r
55 pT 900.000000 0.000000 2.61441e-006 0.00500003
\r
56 pT 910.000000 0.000000 2.56314e-006 0.00500003
\r
57 pT 920.000000 0.000000 2.28952e-006 0.00500002
\r
58 pT 930.000000 0.000000 2.93631e-006 0.00500003
\r
59 pT 940.000000 0.000000 4.09497e-007 0.005
\r
60 pT 950.000000 0.000000 5.37045e-006 0.00500005
\r
61 pT 960.000000 0.000000 4.72701e-006 0.00500005
\r
62 pT 970.000000 0.000000 2.03349e-006 0.00500002
\r
63 pT 980.000000 0.000000 3.86599e-006 0.00500004
\r
64 pT 990.000000 0.000000 4.70758e-006 0.00500005
\r
65 pT 1000.000000 0.000000 2.0432e-005 0.0050002