2 VASEmethod[EllipsometerType=0, Aniso=Highly+Regressed, AutoRetarder=0, Revs=5, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Jul 12 15:35:54 2011]
\r
3 Original[12-07-11-spectr-35d-nob-t10.dat]
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6 AnE 5000.000000 35.000000 30.8417 149.803 0.0736335 0.321865 0.210500 0.210500
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7 AnE 5000.000000 35.000000 30.8464 149.754 0.0547384 0.238869 0.494333 0.494333
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8 AnE 5000.000000 35.000000 30.8471 149.73 0.0605762 0.264151 0.785417 0.785417
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9 AnE 5000.000000 35.000000 30.858 149.842 0.0659442 0.288504 1.076917 1.076917
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10 AnE 5000.000000 35.000000 30.8666 149.779 0.0648216 0.282988 1.360250 1.360250
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11 AnE 5000.000000 35.000000 30.8724 149.812 0.0692232 0.302494 1.652333 1.652333
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12 AnE 5000.000000 35.000000 30.8515 149.724 0.0565815 0.246643 1.943917 1.943917
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13 AnE 5000.000000 35.000000 30.8571 149.774 0.0661353 0.288732 2.227250 2.227250
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14 AnE 5000.000000 35.000000 30.8682 149.801 0.0520029 0.227182 2.519250 2.519250
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15 AnE 5000.000000 35.000000 30.8682 149.795 0.0592909 0.25897 2.810333 2.810333
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16 AnE 5000.000000 35.000000 30.8457 149.775 0.0677304 0.295776 3.093667 3.093667
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17 AnE 5000.000000 35.000000 30.8813 149.823 0.0670564 0.29307 3.385750 3.385750
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18 AnE 5000.000000 35.000000 30.8539 149.714 0.070001 0.305042 3.677750 3.677750
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19 AnE 5000.000000 35.000000 30.8485 149.726 0.0686134 0.299138 3.960583 3.960583
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20 AnE 5000.000000 35.000000 30.8484 149.8 0.0734953 0.321192 4.252167 4.252167
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21 AnE 5000.000000 35.000000 30.8424 149.793 0.0642988 0.280965 4.544167 4.544167
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22 AnE 5000.000000 35.000000 30.8411 149.789 0.068237 0.298141 4.827417 4.827417
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23 AnE 5000.000000 35.000000 30.8573 149.779 0.0627406 0.273945 5.119500 5.119500
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24 AnE 5000.000000 35.000000 30.8377 149.773 0.0636145 0.27782 5.411083 5.411083
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25 AnE 5000.000000 35.000000 30.8524 149.787 0.0616958 0.269488 5.694417 5.694417
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26 AnE 5000.000000 35.000000 30.8294 149.748 0.0604461 0.263798 5.985500 5.985500
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27 AnE 5000.000000 35.000000 30.8454 149.852 0.0627788 0.274826 6.277083 6.277083
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28 AnE 5000.000000 35.000000 30.8395 149.769 0.0611147 0.266863 6.560833 6.560833
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29 AnE 5000.000000 35.000000 30.8436 149.818 0.056446 0.246844 6.851917 6.851917
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30 AnE 5000.000000 35.000000 30.8613 149.79 0.0676682 0.295561 7.143917 7.143917
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31 AnE 5000.000000 35.000000 30.8428 149.723 0.0763102 0.332701 7.427250 7.427250
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32 AnE 5000.000000 35.000000 30.8479 149.792 0.0583688 0.255014 7.719333 7.719333
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33 AnE 5000.000000 35.000000 30.8341 149.768 0.07013 0.306251 8.010417 8.010417
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34 AnE 5000.000000 35.000000 30.8436 149.77 0.0639654 0.279305 8.294250 8.294250
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35 AnE 5000.000000 35.000000 30.8405 149.746 0.0579918 0.253031 8.585750 8.585750
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36 AnE 5000.000000 35.000000 30.8558 149.722 0.0615415 0.268243 8.877250 8.877250
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37 AnE 5000.000000 35.000000 30.8451 149.829 0.0674318 0.294982 9.160583 9.160583
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38 AnE 5000.000000 35.000000 30.8339 149.768 0.0650975 0.284279 9.444834 9.444834
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39 AnE 5000.000000 35.000000 30.8344 149.728 0.0649447 0.283242 9.736417 9.736417
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40 AnE 5000.000000 35.000000 30.8312 149.867 0.0701965 0.307533 10.027083 10.027083
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41 AnE 5000.000000 35.000000 30.8146 149.84 0.0506192 0.221644 10.319167 10.319167
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42 AnE 5000.000000 35.000000 30.8476 149.807 0.0639783 0.279657 10.610666 10.610666
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43 AnE 5000.000000 35.000000 30.8532 149.753 0.0664693 0.290009 10.894917 10.894917
\r
44 AnE 5000.000000 35.000000 30.8394 149.629 0.0596978 0.259522 11.186500 11.186500
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45 AnE 5000.000000 35.000000 30.8401 149.863 0.0667248 0.292238 11.477083 11.477083
\r
46 AnE 5000.000000 35.000000 30.8315 149.734 0.0659162 0.287557 11.760417 11.760417
\r
47 AnE 5000.000000 35.000000 30.8381 149.757 0.0707859 0.308987 12.052500 12.052500
\r
48 AnE 5000.000000 35.000000 30.8386 149.814 0.0619084 0.270722 12.344084 12.344084
\r
49 Aps 5000.000000 35.000000 0.449463 144.534 0.239319 30.3676 0.210500 0.210500
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50 Aps 5000.000000 35.000000 0.542776 137.257 0.192485 16.9426 0.494333 0.494333
\r
51 Aps 5000.000000 35.000000 0.455827 139.938 0.207134 23.1669 0.785417 0.785417
\r
52 Aps 5000.000000 35.000000 0.538157 137.01 0.232991 20.5517 1.076917 1.076917
\r
53 Aps 5000.000000 35.000000 0.425787 148.621 0.199834 29.559 1.360250 1.360250
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54 Aps 5000.000000 35.000000 0.526337 139.168 0.23903 22.7203 1.652333 1.652333
\r
55 Aps 5000.000000 35.000000 0.577444 136.142 0.201029 16.184 1.943917 1.943917
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56 Aps 5000.000000 35.000000 0.530421 137.241 0.23273 20.9481 2.227250 2.227250
\r
57 Aps 5000.000000 35.000000 0.482652 139.713 0.178456 18.7463 2.519250 2.519250
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58 Aps 5000.000000 35.000000 0.485023 140.917 0.200792 21.6151 2.810333 2.810333
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59 Aps 5000.000000 35.000000 0.558038 136.524 0.240093 20.1873 3.093667 3.093667
\r
60 Aps 5000.000000 35.000000 0.536612 137.92 0.234487 21.2112 3.385750 3.385750
\r
61 Aps 5000.000000 35.000000 0.448344 142.343 0.232877 28.0806 3.677750 3.677750
\r
62 Aps 5000.000000 35.000000 0.449434 142.479 0.228097 27.5218 3.960583 3.960583
\r
63 Aps 5000.000000 35.000000 0.469041 140.473 0.250322 27.5639 4.252167 4.252167
\r
64 Aps 5000.000000 35.000000 0.457711 144.662 0.208669 26.0754 4.544167 4.544167
\r
65 Aps 5000.000000 35.000000 0.499535 138.13 0.238237 23.2631 4.827417 4.827417
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66 Aps 5000.000000 35.000000 0.513373 141.732 0.210517 21.8397 5.119500 5.119500
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67 Aps 5000.000000 35.000000 0.504932 141.711 0.213612 22.5184 5.411083 5.411083
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68 Aps 5000.000000 35.000000 0.554356 139.621 0.21194 19.3426 5.694417 5.694417
\r
69 Aps 5000.000000 35.000000 0.568385 133.571 0.220157 16.9187 5.985500 5.985500
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70 Aps 5000.000000 35.000000 0.489986 138.314 0.219056 21.9079 6.277083 6.277083
\r
71 Aps 5000.000000 35.000000 0.489287 137.742 0.21408 21.1447 6.560833 6.560833
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72 Aps 5000.000000 35.000000 0.510305 136.748 0.199919 18.4788 6.851917 6.851917
\r
73 Aps 5000.000000 35.000000 0.533996 138.95 0.234127 21.8183 7.143917 7.143917
\r
74 Aps 5000.000000 35.000000 0.449128 141.579 0.256312 30.2728 7.427250 7.427250
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75 Aps 5000.000000 35.000000 0.510961 136.716 0.206646 19.0613 7.719333 7.719333
\r
76 Aps 5000.000000 35.000000 0.477088 138.737 0.243191 25.2377 8.010417 8.010417
\r
77 Aps 5000.000000 35.000000 0.521543 138.48 0.222365 20.9779 8.294250 8.294250
\r
78 Aps 5000.000000 35.000000 0.479116 141.754 0.19451 21.629 8.585750 8.585750
\r
79 Aps 5000.000000 35.000000 0.443022 144.09 0.200682 25.5456 8.877250 8.877250
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80 Aps 5000.000000 35.000000 0.479904 139.033 0.233385 24.2526 9.160583 9.160583
\r
81 Aps 5000.000000 35.000000 0.474112 140.694 0.221026 24.2112 9.444834 9.444834
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82 Aps 5000.000000 35.000000 0.424959 145.003 0.209541 28.4384 9.736417 9.736417
\r
83 Aps 5000.000000 35.000000 0.49847 140.835 0.238625 24.9468 10.027083 10.027083
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84 Aps 5000.000000 35.000000 0.476335 141.667 0.170478 19.029 10.319167 10.319167
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85 Aps 5000.000000 35.000000 0.520303 139.641 0.219823 21.3878 10.610666 10.610666
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86 Aps 5000.000000 35.000000 0.500948 139.289 0.228911 22.9332 10.894917 10.894917
\r
87 Aps 5000.000000 35.000000 0.484754 137.44 0.208952 20.6844 11.186500 11.186500
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88 Aps 5000.000000 35.000000 0.471894 142.536 0.22251 25.607 11.477083 11.477083
\r
89 Aps 5000.000000 35.000000 0.490222 139.261 0.227105 23.2331 11.760417 11.760417
\r
90 Aps 5000.000000 35.000000 0.481762 139.081 0.244455 25.3366 12.052500 12.052500
\r
91 Aps 5000.000000 35.000000 0.575597 135.997 0.220861 17.7723 12.344084 12.344084
\r
92 Asp 5000.000000 35.000000 0.418564 18.9516 0.129692 31.9029 0.210500 0.210500
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93 Asp 5000.000000 35.000000 0.464296 25.912 0.111358 20.1961 0.494333 0.494333
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94 Asp 5000.000000 35.000000 0.403308 14.9011 0.097215 27.8728 0.785417 0.785417
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95 Asp 5000.000000 35.000000 0.490486 32.9465 0.152639 21.4825 1.076917 1.076917
\r
96 Asp 5000.000000 35.000000 0.436151 24.7069 0.128831 25.7506 1.360250 1.360250
\r
97 Asp 5000.000000 35.000000 0.442833 24.6998 0.137634 27.1062 1.652333 1.652333
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98 Asp 5000.000000 35.000000 0.488133 32.9535 0.130582 18.4575 1.943917 1.943917
\r
99 Asp 5000.000000 35.000000 0.456529 25.3098 0.133019 24.9645 2.227250 2.227250
\r
100 Asp 5000.000000 35.000000 0.447525 27.3167 0.108826 19.6758 2.519250 2.519250
\r
101 Asp 5000.000000 35.000000 0.446965 28.6651 0.127216 22.1629 2.810333 2.810333
\r
102 Asp 5000.000000 35.000000 0.404526 22.3105 0.128179 29.5934 3.093667 3.093667
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103 Asp 5000.000000 35.000000 0.471937 26.3496 0.137777 24.2842 3.385750 3.385750
\r
104 Asp 5000.000000 35.000000 0.463421 25.0186 0.139797 26.0518 3.677750 3.677750
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105 Asp 5000.000000 35.000000 0.44476 20.322 0.124299 27.6359 3.960583 3.960583
\r
106 Asp 5000.000000 35.000000 0.409148 18.361 0.127732 32.698 4.252167 4.252167
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107 Asp 5000.000000 35.000000 0.438175 27.058 0.133861 24.9056 4.544167 4.544167
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108 Asp 5000.000000 35.000000 0.460629 23.1145 0.131317 26.0242 4.827417 4.827417
\r
109 Asp 5000.000000 35.000000 0.494134 33.6642 0.146722 20.0852 5.119500 5.119500
\r
110 Asp 5000.000000 35.000000 0.435599 22.9368 0.121951 25.6827 5.411083 5.411083
\r
111 Asp 5000.000000 35.000000 0.441294 25.0896 0.123584 24.149 5.694417 5.694417
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112 Asp 5000.000000 35.000000 0.502292 32.1843 0.137835 19.3488 5.985500 5.985500
\r
113 Asp 5000.000000 35.000000 0.446434 19.6494 0.112384 25.4115 6.277083 6.277083
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114 Asp 5000.000000 35.000000 0.419488 22.6075 0.116341 25.684 6.560833 6.560833
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115 Asp 5000.000000 35.000000 0.460913 21.9616 0.106119 21.732 6.851917 6.851917
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116 Asp 5000.000000 35.000000 0.392323 18.1668 0.117062 31.4242 7.143917 7.143917
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117 Asp 5000.000000 35.000000 0.427434 21.1665 0.140791 31.7882 7.427250 7.427250
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118 Asp 5000.000000 35.000000 0.42432 23.1344 0.112386 24.162 7.719333 7.719333
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119 Asp 5000.000000 35.000000 0.419079 22.3332 0.132758 29.5696 8.010417 8.010417
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120 Asp 5000.000000 35.000000 0.436971 19.1117 0.11297 26.4886 8.294250 8.294250
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121 Asp 5000.000000 35.000000 0.477783 26.277 0.118804 20.723 8.585750 8.585750
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122 Asp 5000.000000 35.000000 0.45016 22.3133 0.116319 24.1232 8.877250 8.877250
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123 Asp 5000.000000 35.000000 0.451713 19.2999 0.119748 27.0272 9.160583 9.160583
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124 Asp 5000.000000 35.000000 0.443386 19.7143 0.116527 26.4592 9.444834 9.444834
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125 Asp 5000.000000 35.000000 0.468204 20.687 0.118635 24.7928 9.736417 9.736417
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126 Asp 5000.000000 35.000000 0.436218 24.9281 0.140437 27.9084 10.027083 10.027083
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127 Asp 5000.000000 35.000000 0.431063 19.3794 0.0900645 21.2615 10.319167 10.319167
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128 Asp 5000.000000 35.000000 0.461795 25.6663 0.129701 23.825 10.610666 10.610666
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129 Asp 5000.000000 35.000000 0.476862 31.1852 0.149019 22.6591 10.894917 10.894917
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130 Asp 5000.000000 35.000000 0.443886 16.8753 0.100048 24.5955 11.186500 11.186500
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131 Asp 5000.000000 35.000000 0.403276 16.5784 0.111521 30.5254 11.477083 11.477083
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132 Asp 5000.000000 35.000000 0.429796 19.0284 0.116163 27.747 11.760417 11.760417
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133 Asp 5000.000000 35.000000 0.426645 17.1804 0.119732 30.4003 12.052500 12.052500
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134 Asp 5000.000000 35.000000 0.463609 20.6938 0.113272 23.9229 12.344084 12.344084
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135 qJ 5000.000000 35.000000 0.00376562 0.00158357 0.210500 0.210500
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136 qJ 5000.000000 35.000000 0.0027013 0.00137565 0.494333 0.494333
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137 qJ 5000.000000 35.000000 0.00301665 0.0016626 0.785417 0.785417
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138 qJ 5000.000000 35.000000 0.0033253 0.00159283 1.076917 1.076917
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139 qJ 5000.000000 35.000000 0.0033578 0.000851845 1.360250 1.360250
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140 qJ 5000.000000 35.000000 0.00350726 0.00114259 1.652333 1.652333
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141 qJ 5000.000000 35.000000 0.00289585 0.00108525 1.943917 1.943917
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142 qJ 5000.000000 35.000000 0.00338816 0.000622524 2.227250 2.227250
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143 qJ 5000.000000 35.000000 0.00261136 0.00106068 2.519250 2.519250
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144 qJ 5000.000000 35.000000 0.00302833 0.000834495 2.810333 2.810333
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145 qJ 5000.000000 35.000000 0.00347571 0.00106586 3.093667 3.093667
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146 qJ 5000.000000 35.000000 0.00349675 0.000957089 3.385750 3.385750
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147 qJ 5000.000000 35.000000 0.00355917 0.00134665 3.677750 3.677750
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148 qJ 5000.000000 35.000000 0.00343291 0.0011668 3.960583 3.960583
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149 qJ 5000.000000 35.000000 0.00364307 0.00173479 4.252167 4.252167
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150 qJ 5000.000000 35.000000 0.00312962 0.00186797 4.544167 4.544167
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151 qJ 5000.000000 35.000000 0.00328673 0.00222895 4.827417 4.827417
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152 qJ 5000.000000 35.000000 0.00314082 0.0013501 5.119500 5.119500
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153 qJ 5000.000000 35.000000 0.00327325 0.000760163 5.411083 5.411083
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154 qJ 5000.000000 35.000000 0.0030851 0.00120623 5.694417 5.694417
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155 qJ 5000.000000 35.000000 0.00300203 0.00127427 5.985500 5.985500
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156 qJ 5000.000000 35.000000 0.00302291 0.00161383 6.277083 6.277083
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157 qJ 5000.000000 35.000000 0.00305919 0.00151096 6.560833 6.560833
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158 qJ 5000.000000 35.000000 0.00276452 0.00171192 6.851917 6.851917
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159 qJ 5000.000000 35.000000 0.00340782 0.00103186 7.143917 7.143917
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160 qJ 5000.000000 35.000000 0.00395632 0.000776336 7.427250 7.427250
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161 qJ 5000.000000 35.000000 0.00299289 0.000866618 7.719333 7.719333
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162 qJ 5000.000000 35.000000 0.00360548 0.00115042 8.010417 8.010417
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163 qJ 5000.000000 35.000000 0.00322721 0.00109851 8.294250 8.294250
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164 qJ 5000.000000 35.000000 0.00297357 0.00109803 8.585750 8.585750
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165 qJ 5000.000000 35.000000 0.00292243 0.0020112 8.877250 8.877250
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166 qJ 5000.000000 35.000000 0.00321166 0.00200047 9.160583 9.160583
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167 qJ 5000.000000 35.000000 0.00319138 0.00180482 9.444834 9.444834
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168 qJ 5000.000000 35.000000 0.00332368 0.000940415 9.736417 9.736417
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169 qJ 5000.000000 35.000000 0.00347381 0.00162436 10.027083 10.027083
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170 qJ 5000.000000 35.000000 0.00242224 0.00118341 10.319167 10.319167
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171 qJ 5000.000000 35.000000 0.00323702 0.00100997 10.610666 10.610666
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172 qJ 5000.000000 35.000000 0.00336947 0.00135246 10.894917 10.894917
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173 qJ 5000.000000 35.000000 0.00298884 0.00117041 11.186500 11.186500
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174 qJ 5000.000000 35.000000 0.0033141 0.00113268 11.477083 11.477083
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175 qJ 5000.000000 35.000000 0.00336232 0.00115689 11.760417 11.760417
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176 qJ 5000.000000 35.000000 0.00354611 0.00134034 12.052500 12.052500
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177 qJ 5000.000000 35.000000 0.00315085 0.00114664 12.344084 12.344084