2 VASEmethod[EllipsometerType=5, Isotropic, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=5, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Jul 18 15:36:18 2011]
\r
3 Original[18-7-11-dyn1-with_mod.dat]
\r
5 3000.000000 40.000000 38.611023 153.29556 0.840329 2.98448
\r
6 3100.000000 40.000000 38.063175 154.59895 0.652968 2.33961
\r
7 3200.000000 40.000000 38.107956 155.08974 0.569634 2.12496
\r
8 3300.000000 40.000000 37.663441 154.70309 0.211652 0.728251
\r
9 3400.000000 40.000000 38.035004 154.85063 0.181448 0.639494
\r
10 3500.000000 40.000000 38.233662 155.35326 0.173361 0.625148
\r
11 3600.000000 40.000000 38.294525 155.49254 0.151763 0.556085
\r
12 3700.000000 40.000000 38.573299 155.95407 0.140147 0.47721
\r
13 3800.000000 40.000000 38.692799 156.59317 0.116758 0.409697
\r
14 3900.000000 40.000000 38.833424 156.93265 0.106681 0.383774
\r
15 4000.000000 40.000000 38.979301 157.21593 0.112148 0.413524
\r
16 4100.000000 40.000000 39.111439 157.6628 0.113982 0.391747
\r
17 4200.000000 40.000000 39.256008 158.03123 0.0871089 0.305609
\r
18 4300.000000 40.000000 39.350948 158.4122 0.0892444 0.319206
\r
19 4400.000000 40.000000 39.473202 158.76411 0.0841473 0.306909
\r
20 4500.000000 40.000000 39.558708 159.15001 0.0831416 0.309167
\r
21 4600.000000 40.000000 39.675327 159.5264 0.083556 0.289313
\r
22 4700.000000 40.000000 39.783596 159.80347 0.0715184 0.252275
\r
23 4800.000000 40.000000 39.862843 160.23969 0.0884211 0.317314
\r
24 4900.000000 40.000000 39.946072 160.52835 0.079126 0.289043
\r
25 5000.000000 40.000000 39.989307 160.80965 0.0668299 0.248316
\r
26 5100.000000 40.000000 40.0779 161.16653 0.0764937 0.265396
\r
27 5200.000000 40.000000 40.157566 161.40822 0.0709341 0.250015
\r
28 5300.000000 40.000000 40.203362 161.73523 0.0791911 0.283535
\r
29 5400.000000 40.000000 40.269215 161.95766 0.0754977 0.274581
\r
30 5500.000000 40.000000 40.317604 162.15199 0.068158 0.251802
\r
31 5600.000000 40.000000 40.378963 162.36856 0.0609265 0.228565
\r
32 5700.000000 40.000000 40.442268 162.7202 0.0665293 0.23336
\r
33 5800.000000 40.000000 40.494564 163.05887 0.0775159 0.275835
\r
34 5900.000000 40.000000 40.523727 163.17824 0.0674547 0.243581
\r
35 6000.000000 40.000000 40.578693 163.38513 0.0648763 0.237644
\r
36 6100.000000 40.000000 40.617527 163.64891 0.0731336 0.271653
\r
37 6200.000000 40.000000 40.698769 163.80501 0.0738379 0.256841
\r
38 6300.000000 40.000000 40.727966 164.03008 0.0809648 0.285791
\r
39 6400.000000 40.000000 40.785625 164.21957 0.0654696 0.234032
\r
40 6500.000000 40.000000 40.794029 164.39441 0.0603715 0.218914
\r
41 6600.000000 40.000000 40.853661 164.50867 0.0633061 0.232396
\r
42 6700.000000 40.000000 40.860367 164.7708 0.0499904 0.18607
\r
43 6800.000000 40.000000 40.930092 164.87041 0.0615664 0.215027
\r
44 6900.000000 40.000000 40.946362 165.04662 0.0590659 0.208739
\r
45 7000.000000 40.000000 40.979801 165.2771 0.0675069 0.241333
\r
46 7100.000000 40.000000 41.018108 165.32503 0.0593147 0.214782
\r
47 7200.000000 40.000000 41.018429 165.45255 0.0559791 0.205018
\r
48 7300.000000 40.000000 41.069126 165.68156 0.0553462 0.205041
\r
49 7400.000000 40.000000 41.120975 165.79749 0.0576687 0.201062
\r
50 7500.000000 40.000000 41.135685 165.9819 0.0734217 0.2591
\r
51 7600.000000 40.000000 41.175667 166.15332 0.0594645 0.212085
\r
52 7700.000000 40.000000 41.188244 166.26599 0.0587606 0.21186
\r
53 7800.000000 40.000000 41.227585 166.42674 0.0648624 0.236432
\r
54 7900.000000 40.000000 41.24691 166.48766 0.0439474 0.161986
\r
55 8000.000000 40.000000 41.27354 166.71248 0.061693 0.229887