2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol<0, Revs=20, AutoSlit=2000, WVASE=3.632, HardVer=6.256, Sat Jan 31 09:57:45 2009]
\r
3 Original[2009.01.31.cw.1.dat]
\r
5 3000.000000 75.000000 39.131317 71.667534 0.91754 2.39047
\r
6 3100.000000 75.000000 37.155079 70.054161 0.478097 1.26583
\r
7 3200.000000 75.000000 36.060028 71.184059 0.223639 0.584115
\r
8 3300.000000 75.000000 35.536137 72.788246 0.134152 0.31155
\r
9 3400.000000 75.000000 34.842823 74.087044 0.150293 0.38824
\r
10 3500.000000 75.000000 34.398735 75.728508 0.109188 0.280469
\r
11 3600.000000 75.000000 34.186775 78.8564 0.0834007 0.211392
\r
12 3700.000000 75.000000 33.000507 84.213387 0.0677356 0.179583
\r
13 3800.000000 75.000000 30.314823 87.308899 0.0564684 0.154772
\r
14 3900.000000 75.000000 28.14814 87.745438 0.0677463 0.182206
\r
15 4000.000000 75.000000 26.54504 87.400841 0.0636353 0.187746
\r
16 4100.000000 75.000000 25.256643 87.1894 0.0543087 0.171498
\r
17 4200.000000 75.000000 24.142403 86.729446 0.0499902 0.161326
\r
18 4300.000000 75.000000 23.249439 86.373589 0.0466356 0.153365
\r
19 4400.000000 75.000000 22.390928 86.02697 0.041344 0.138943
\r
20 4500.000000 75.000000 21.633808 85.762863 0.0378586 0.129939
\r
21 4600.000000 75.000000 20.936039 85.453026 0.03662 0.132703
\r
22 4700.000000 75.000000 20.260559 85.119682 0.0475273 0.176009
\r
23 4800.000000 75.000000 19.682875 84.786545 0.0377227 0.141952
\r
24 4900.000000 75.000000 19.110777 84.532318 0.0342464 0.131137
\r
25 5000.000000 75.000000 18.596821 84.321106 0.0424003 0.165435
\r
26 5100.000000 75.000000 18.155684 84.017227 0.0553345 0.22727
\r
27 5200.000000 75.000000 17.684135 83.770287 0.0461682 0.192373
\r
28 5300.000000 75.000000 17.25148 83.422195 0.0408855 0.173458
\r
29 5400.000000 75.000000 16.876232 83.150223 0.0497783 0.214042
\r
30 5500.000000 75.000000 16.463503 82.961128 0.047469 0.207693
\r
31 5600.000000 75.000000 16.124535 82.638359 0.0406374 0.179759
\r
32 5700.000000 75.000000 15.77107 82.39257 0.0449869 0.208363
\r
33 5800.000000 75.000000 15.449722 82.139702 0.042025 0.197747
\r
34 5900.000000 75.000000 15.148183 81.941658 0.0467182 0.221625
\r
35 6000.000000 75.000000 14.849362 81.665634 0.049542 0.237867
\r
36 6100.000000 75.000000 14.566253 81.397766 0.0529467 0.25868
\r
37 6200.000000 75.000000 14.299769 81.278015 0.061331 0.312417
\r
38 6300.000000 75.000000 14.029967 80.903442 0.0553741 0.28566
\r
39 6400.000000 75.000000 13.786235 80.670036 0.050462 0.263337
\r
40 6500.000000 75.000000 13.546805 80.530144 0.0444988 0.234579
\r
41 6600.000000 75.000000 13.317742 80.239212 0.0457465 0.245922
\r
42 6700.000000 75.000000 13.094158 80.022957 0.057279 0.31056
\r
43 6800.000000 75.000000 12.869748 79.728119 0.0591771 0.333902
\r
44 6900.000000 75.000000 12.682401 79.567566 0.0450051 0.255938
\r
45 7000.000000 75.000000 12.476959 79.319809 0.044875 0.258199
\r
46 7100.000000 75.000000 12.306546 79.021591 0.0560189 0.326817
\r
47 7200.000000 75.000000 12.104671 78.944962 0.0471372 0.277229
\r
48 7300.000000 75.000000 11.916258 78.765793 0.0427299 0.254636
\r
49 7400.000000 75.000000 11.725657 78.382706 0.0591085 0.365402
\r
50 7500.000000 75.000000 11.569212 78.113457 0.0549 0.341849
\r
51 7600.000000 75.000000 11.389219 78.261322 0.0432086 0.266101
\r
52 7700.000000 75.000000 11.260108 77.693687 0.0411889 0.261074
\r
53 7800.000000 75.000000 11.107617 77.588272 0.0766057 0.493411
\r
54 7900.000000 75.000000 10.94045 77.260124 0.0668408 0.43217
\r
55 8000.000000 75.000000 10.811079 77.190781 0.0565324 0.369474
\r
56 8100.000000 75.000000 10.670317 76.758049 0.0558858 0.377538
\r
57 8200.000000 75.000000 10.538293 76.783272 0.0537393 0.363357
\r
58 8300.000000 75.000000 10.399337 76.56234 0.0649854 0.448409
\r
59 8400.000000 75.000000 10.238442 76.274658 0.0512977 0.359702
\r
60 8500.000000 75.000000 10.175324 76.196129 0.0656164 0.458256
\r
61 8600.000000 75.000000 10.02127 75.903366 0.0593005 0.418035
\r
62 8700.000000 75.000000 9.9037914 75.904778 0.0454685 0.322002
\r
63 8800.000000 75.000000 9.7805958 75.50016 0.0563961 0.411376
\r
64 8900.000000 75.000000 9.6857052 75.388374 0.0505961 0.372083
\r
65 9000.000000 75.000000 9.5896425 75.17305 0.0582954 0.429663
\r
66 9100.000000 75.000000 9.4805803 74.894432 0.0563713 0.419284
\r
67 9200.000000 75.000000 9.3690281 74.747406 0.0516859 0.38774
\r
68 9300.000000 75.000000 9.2648001 74.497765 0.0539237 0.410433
\r
69 9400.000000 75.000000 9.1594172 74.319603 0.0502842 0.388858
\r
70 9500.000000 75.000000 9.0593758 74.077965 0.0507528 0.395172
\r
71 9600.000000 75.000000 8.9741411 73.889473 0.0543435 0.427496
\r
72 9700.000000 75.000000 8.8879099 73.715324 0.0509376 0.402602
\r
73 9800.000000 75.000000 8.7907085 73.434471 0.0498945 0.39797
\r
74 9900.000000 75.000000 8.7049189 73.290413 0.0521751 0.413151
\r
75 10000.000000 75.000000 8.6314888 73.088974 0.0485114 0.390961
\r
76 dpolE 3000.000000 75.000000 5.3189 11.0156
\r
77 dpolE 3100.000000 75.000000 1.85907 5.88016
\r
78 dpolE 3200.000000 75.000000 1.94184 2.81917
\r
79 dpolE 3300.000000 75.000000 -1.20536 2.09638
\r
80 dpolE 3400.000000 75.000000 0.39192 1.75477
\r
81 dpolE 3500.000000 75.000000 0.551011 1.30487
\r
82 dpolE 3600.000000 75.000000 0.186296 1.03085
\r
83 dpolE 3700.000000 75.000000 0.440067 0.768769
\r
84 dpolE 3800.000000 75.000000 0.347662 0.626045
\r
85 dpolE 3900.000000 75.000000 0.0294842 0.870068
\r
86 dpolE 4000.000000 75.000000 0.458343 0.674154
\r
87 dpolE 4100.000000 75.000000 0.401374 0.515642
\r
88 dpolE 4200.000000 75.000000 0.282974 0.47073
\r
89 dpolE 4300.000000 75.000000 0.131714 0.436274
\r
90 dpolE 4400.000000 75.000000 0.218167 0.380646
\r
91 dpolE 4500.000000 75.000000 0.206639 0.347349
\r
92 dpolE 4600.000000 75.000000 0.195266 0.304612
\r
93 dpolE 4700.000000 75.000000 0.181995 0.391401
\r
94 dpolE 4800.000000 75.000000 0.220423 0.30832
\r
95 dpolE 4900.000000 75.000000 0.105165 0.279457
\r
96 dpolE 5000.000000 75.000000 0.0809016 0.34134
\r
97 dpolE 5100.000000 75.000000 0.148519 0.407354
\r
98 dpolE 5200.000000 75.000000 0.1545 0.337282
\r
99 dpolE 5300.000000 75.000000 0.187356 0.29511
\r
100 dpolE 5400.000000 75.000000 0.238718 0.361274
\r
101 dpolE 5500.000000 75.000000 0.202817 0.339926
\r
102 dpolE 5600.000000 75.000000 0.216388 0.290663
\r
103 dpolE 5700.000000 75.000000 0.0444433 0.295265
\r
104 dpolE 5800.000000 75.000000 0.119877 0.27393
\r
105 dpolE 5900.000000 75.000000 0.103536 0.303901
\r
106 dpolE 6000.000000 75.000000 0.0549857 0.320593
\r
107 dpolE 6100.000000 75.000000 0.0876429 0.341797
\r
108 dpolE 6200.000000 75.000000 0.095376 0.363511
\r
109 dpolE 6300.000000 75.000000 0.116849 0.325998
\r
110 dpolE 6400.000000 75.000000 0.0382147 0.295531
\r
111 dpolE 6500.000000 75.000000 0.0665752 0.262753
\r
112 dpolE 6600.000000 75.000000 0.196193 0.266455
\r
113 dpolE 6700.000000 75.000000 0.0771068 0.333393
\r
114 dpolE 6800.000000 75.000000 0.115295 0.315927
\r
115 dpolE 6900.000000 75.000000 0.0970067 0.240217
\r
116 dpolE 7000.000000 75.000000 0.119566 0.240717
\r
117 dpolE 7100.000000 75.000000 0.163691 0.298248
\r
118 dpolE 7200.000000 75.000000 0.0478957 0.249786
\r
119 dpolE 7300.000000 75.000000 0.040771 0.224847
\r
120 dpolE 7400.000000 75.000000 0.0814809 0.288327
\r
121 dpolE 7500.000000 75.000000 0.0964384 0.26698
\r
122 dpolE 7600.000000 75.000000 -0.0326485 0.225727
\r
123 dpolE 7700.000000 75.000000 -0.0126026 0.201327
\r
124 dpolE 7800.000000 75.000000 0.0892742 0.370113
\r
125 dpolE 7900.000000 75.000000 0.048165 0.323547
\r
126 dpolE 8000.000000 75.000000 -0.0636638 0.274066
\r
127 dpolE 8100.000000 75.000000 0.140156 0.250664
\r
128 dpolE 8200.000000 75.000000 0.00915174 0.242169
\r
129 dpolE 8300.000000 75.000000 0.0761481 0.290578
\r
130 dpolE 8400.000000 75.000000 0.0637905 0.227514
\r
131 dpolE 8500.000000 75.000000 -0.0111647 0.295374
\r
132 dpolE 8600.000000 75.000000 -0.0327796 0.264948
\r
133 dpolE 8700.000000 75.000000 0.0615683 0.222866
\r
134 dpolE 8800.000000 75.000000 0.0937036 0.235547
\r
135 dpolE 8900.000000 75.000000 0.076108 0.211235
\r
136 dpolE 9000.000000 75.000000 0.0207567 0.24323
\r
137 dpolE 9100.000000 75.000000 0.0590093 0.234988
\r
138 dpolE 9200.000000 75.000000 0.0138578 0.214994
\r
139 dpolE 9300.000000 75.000000 0.0472416 0.22174
\r
140 dpolE 9400.000000 75.000000 0.0398628 0.196412
\r
141 dpolE 9500.000000 75.000000 0.0533177 0.197732
\r
142 dpolE 9600.000000 75.000000 0.0452659 0.208073
\r
143 dpolE 9700.000000 75.000000 0.0477791 0.194766
\r
144 dpolE 9800.000000 75.000000 0.0492171 0.189893
\r
145 dpolE 9900.000000 75.000000 0.0473646 0.201107
\r
146 dpolE 10000.000000 75.000000 0.0539311 0.183914