2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=200, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 05 13:29:16 2009]
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3 Original[2009.02.05.silane1e.dat]
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267 dpolE 2.488890 85.000000 2.83642 0.566288
\r
268 dpolE 2.438890 85.000000 3.24854 0.487458
\r
269 dpolE 2.388890 85.000000 3.12055 0.637297
\r
270 dpolE 2.338890 85.000000 3.21502 0.513709
\r
271 dpolE 2.288890 85.000000 3.30409 0.782316
\r
272 dpolE 2.238890 85.000000 3.37974 0.65903
\r
273 dpolE 2.188890 85.000000 3.42135 0.745109
\r
274 dpolE 2.138890 85.000000 3.60696 1.0173
\r
275 dpolE 2.088890 85.000000 3.34155 0.617044
\r
276 dpolE 2.038890 85.000000 3.62366 0.864833
\r
277 dpolE 1.988890 85.000000 3.53189 1.05903
\r
278 dpolE 1.938890 85.000000 3.69264 0.839094
\r
279 dpolE 1.888890 85.000000 3.49403 0.736718
\r
280 dpolE 1.838890 85.000000 3.86711 0.800561
\r
281 dpolE 1.788890 85.000000 3.80618 0.732645
\r
282 dpolE 1.738890 85.000000 4.64631 0.741805
\r
283 dpolE 1.688890 85.000000 4.01266 0.706573
\r
284 dpolE 1.638890 85.000000 4.72852 0.827731
\r
285 dpolE 1.588890 85.000000 4.82454 0.853158
\r
286 dpolE 1.538890 85.000000 5.21832 1.02948
\r
287 dpolE 1.488890 85.000000 4.69517 0.807608
\r
288 dpolE 1.438890 85.000000 4.99122 0.465999
\r
289 dpolE 1.388890 85.000000 5.17395 0.62285
\r
290 dpolE 1.338890 85.000000 5.13879 0.545859
\r
291 dpolE 1.288890 85.000000 5.21118 0.677086
\r
292 dpolE 1.238890 85.000000 5.36191 0.597976
\r
293 dpolE 1.188890 85.000000 5.41204 0.754843
\r
294 dpolE 1.138890 85.000000 7.95864 0.750283
\r
295 dpolE 1.088890 85.000000 7.82278 1.30678
\r
296 dpolE 1.038890 85.000000 8.95523 0.582582
\r
297 dpolE 0.988890 85.000000 8.94183 1.1481
\r
298 dpolE 0.938890 85.000000 9.19349 1.08688
\r
299 dpolE 0.888890 85.000000 10.9615 1.52684
\r
300 dpolE 0.838890 85.000000 11.2257 0.692907
\r
301 dpolE 0.788890 85.000000 12.0913 1.60424
\r
302 dpolE 0.738890 85.000000 13.2806 1.24632