1 Si callibratrion wafer test
\r
2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, MaxRevs=10, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jun 29 18:40:16 2011]
\r
3 Original[290611_nick_si.dat]
\r
5 290.000000 65.000000 32.046005 152.68605 2.04569 9.8828
\r
6 300.000000 65.000000 31.502947 150.89607 0.907254 4.18573
\r
7 310.000000 65.000000 31.317411 152.24844 0.503207 2.43307
\r
8 320.000000 65.000000 30.373102 154.08992 0.307225 1.61078
\r
9 330.000000 65.000000 30.405107 152.37175 0.207693 1.02586
\r
10 340.000000 65.000000 30.116146 154.02287 0.140081 0.736708
\r
11 350.000000 65.000000 30.072403 154.53358 0.0974983 0.522787
\r
12 360.000000 65.000000 30.708654 157.74071 0.0703862 0.423106
\r
13 370.000000 65.000000 30.650436 163.66916 0.051632 0.418552
\r
14 380.000000 65.000000 28.921856 168.10014 0.0372266 0.426282
\r
15 390.000000 65.000000 27.132704 171.16084 0.0276004 0.442275
\r
16 400.000000 65.000000 25.791698 170.80878 0.021671 0.346112
\r
17 410.000000 65.000000 24.726686 172.2009 0.018641 0.361313
\r
18 420.000000 65.000000 23.888906 171.54384 0.0173083 0.317683
\r
19 430.000000 65.000000 23.250076 172.62019 0.0158954 0.340958
\r
20 440.000000 65.000000 22.585257 173.14079 0.0147187 0.347287
\r
21 450.000000 65.000000 22.08514 172.81633 0.0136907 0.314014
\r
22 460.000000 65.000000 21.611849 172.75539 0.0132176 0.305876
\r
23 470.000000 65.000000 21.19837 172.82118 0.0125235 0.297044
\r
24 480.000000 65.000000 20.828629 173.07587 0.0126881 0.316449
\r
25 490.000000 65.000000 20.464102 173.28914 0.0124349 0.324611
\r
26 500.000000 65.000000 20.17169 173.09158 0.0122145 0.313494
\r
27 510.000000 65.000000 19.887163 173.54128 0.0120088 0.333469
\r
28 520.000000 65.000000 19.611609 174.48628 0.0118211 0.388754
\r
29 530.000000 65.000000 19.376984 173.4968 0.0117096 0.330067
\r
30 540.000000 65.000000 19.157885 174.21858 0.0115829 0.370597
\r
31 550.000000 65.000000 18.937592 174.83971 0.0114604 0.414673
\r
32 560.000000 65.000000 18.734467 174.36249 0.011363 0.379947
\r
33 570.000000 65.000000 18.56299 173.91383 0.0112847 0.352384
\r
34 580.000000 65.000000 18.380749 174.57416 0.0112405 0.396879
\r
35 590.000000 65.000000 18.230419 174.13933 0.0111778 0.368091
\r
36 600.000000 65.000000 18.103258 174.44928 0.0112481 0.393368
\r
37 610.000000 65.000000 17.955786 174.38091 0.0111541 0.388082
\r
38 620.000000 65.000000 17.839153 174.80452 0.0110798 0.419162
\r
39 630.000000 65.000000 17.711496 174.8777 0.0110932 0.428306
\r
40 640.000000 65.000000 17.586954 175.13216 0.011178 0.456851
\r
41 650.000000 65.000000 17.488834 174.62877 0.011174 0.416059
\r
42 660.000000 65.000000 17.37265 174.23837 0.0114413 0.399583
\r
43 670.000000 65.000000 17.27944 174.26527 0.0113571 0.400378
\r
44 680.000000 65.000000 17.201418 175.37041 0.0113865 0.498815
\r
45 690.000000 65.000000 17.112494 175.491 0.011185 0.505341
\r
46 700.000000 65.000000 17.036961 175.45088 0.0116926 0.525671
\r
47 710.000000 65.000000 16.921902 174.49283 0.0117843 0.440546
\r
48 720.000000 65.000000 16.858557 174.40361 0.0117662 0.434318
\r
49 730.000000 65.000000 16.814362 174.75967 0.0119912 0.473672
\r
50 740.000000 65.000000 16.739025 175.29597 0.0122776 0.542217
\r
51 750.000000 65.000000 16.669476 175.91188 0.012592 0.641965
\r
52 760.000000 65.000000 16.600489 175.51724 0.0131505 0.613831
\r
53 770.000000 65.000000 16.538427 175.54579 0.0135796 0.64003
\r
54 780.000000 65.000000 16.498148 175.66962 0.0164107 0.797237
\r
55 790.000000 65.000000 16.430227 174.17456 0.0148162 0.537578
\r
56 800.000000 65.000000 16.38726 175.00211 0.0166697 0.70621
\r
57 810.000000 65.000000 16.357124 176.01639 0.0194113 1.03269
\r
58 820.000000 65.000000 16.281778 175.31871 0.0140314 0.638154
\r
59 830.000000 65.000000 16.245241 176.40028 0.0102704 0.608196
\r
60 840.000000 65.000000 16.186794 174.67641 0.0150464 0.605172
\r
61 850.000000 65.000000 16.137146 176.9828 0.0187675 1.33324
\r
62 860.000000 65.000000 16.107246 175.95383 0.0159802 0.848601
\r
63 870.000000 65.000000 16.067553 175.44437 0.011642 0.550501
\r
64 880.000000 65.000000 16.018183 175.60246 0.0095069 0.466933
\r
65 890.000000 65.000000 16.012045 176.64398 0.00954587 0.614093
\r
66 900.000000 65.000000 15.95464 175.53636 0.00945178 0.459
\r
67 910.000000 65.000000 15.937002 176.81216 0.00947483 0.644292
\r
68 920.000000 65.000000 15.893024 175.54568 0.00935575 0.456863
\r
69 930.000000 65.000000 15.851421 176.59624 0.00951479 0.608997
\r
70 940.000000 65.000000 15.834909 175.91754 0.00935916 0.500164
\r
71 950.000000 65.000000 15.784935 176.15981 0.00932444 0.531156
\r
72 960.000000 65.000000 15.780293 176.52916 0.009432 0.594452
\r
73 970.000000 65.000000 15.729781 175.65614 0.0093713 0.473584
\r
74 980.000000 65.000000 15.699099 177.30521 0.00925008 0.753864
\r
75 990.000000 65.000000 15.691611 176.13866 0.00926787 0.527851
\r
76 1000.000000 65.000000 15.655298 175.95235 0.00930233 0.506548
\r
77 290.000000 70.000000 35.775742 152.66623 2.36571 10.8176
\r
78 300.000000 70.000000 28.649239 141.52969 0.981054 3.7471
\r
79 310.000000 70.000000 28.145662 140.38881 0.5352 2.01704
\r
80 320.000000 70.000000 26.954367 139.28384 0.32769 1.24251
\r
81 330.000000 70.000000 26.189934 142.15161 0.222078 0.913602
\r
82 340.000000 70.000000 26.086143 142.83525 0.151341 0.634096
\r
83 350.000000 70.000000 26.246639 145.43422 0.105971 0.470772
\r
84 360.000000 70.000000 26.968899 149.39247 0.077392 0.376004
\r
85 370.000000 70.000000 26.616587 157.5809 0.0568428 0.372024
\r
86 380.000000 70.000000 24.126625 163.95076 0.0401539 0.388977
\r
87 390.000000 70.000000 21.922892 166.39073 0.0299374 0.367086
\r
88 400.000000 70.000000 20.280231 167.28995 0.0229883 0.32118
\r
89 410.000000 70.000000 19.017445 167.8614 0.0192098 0.296382
\r
90 420.000000 70.000000 18.005327 167.45616 0.0174697 0.273489
\r
91 430.000000 70.000000 17.105976 168.72224 0.015629 0.284127
\r
92 440.000000 70.000000 16.406286 168.65057 0.0135064 0.253144
\r
93 450.000000 70.000000 15.747756 169.30304 0.0121163 0.249766
\r
94 460.000000 70.000000 15.187457 168.842 0.0111909 0.228596
\r
95 470.000000 70.000000 14.686779 169.53761 0.0100494 0.225533
\r
96 480.000000 70.000000 14.22284 169.39316 0.0105486 0.240489
\r
97 490.000000 70.000000 13.837603 169.6178 0.0100793 0.240682
\r
98 500.000000 70.000000 13.468875 169.12917 0.00994999 0.232802
\r
99 510.000000 70.000000 13.126602 169.26181 0.00959558 0.232728
\r
100 520.000000 70.000000 12.831952 169.46402 0.00929264 0.234546
\r
101 530.000000 70.000000 12.509687 169.52837 0.00922585 0.239927
\r
102 540.000000 70.000000 12.267384 169.95329 0.00905608 0.249891
\r
103 550.000000 70.000000 12.046311 169.81276 0.00890439 0.246519
\r
104 560.000000 70.000000 11.804544 170.21407 0.00878232 0.257868
\r
105 570.000000 70.000000 11.592168 170.04483 0.00892009 0.261983
\r
106 580.000000 70.000000 11.387053 170.31686 0.00884147 0.271433
\r
107 590.000000 70.000000 11.212399 170.60031 0.00879839 0.282274
\r
108 600.000000 70.000000 11.054549 170.83821 0.00910233 0.303589
\r
109 610.000000 70.000000 10.881466 170.30991 0.00895775 0.28689
\r
110 620.000000 70.000000 10.728773 170.68658 0.00884092 0.298468
\r
111 630.000000 70.000000 10.57031 170.14427 0.0093977 0.304297
\r
112 640.000000 70.000000 10.451164 170.79259 0.00980923 0.343456
\r
113 650.000000 70.000000 10.325837 170.74872 0.00987878 0.348254
\r
114 660.000000 70.000000 10.224872 170.72949 0.0105 0.37288
\r
115 670.000000 70.000000 10.105412 171.07541 0.0103662 0.386587
\r
116 680.000000 70.000000 10.005626 171.34727 0.010511 0.408056
\r
117 690.000000 70.000000 9.8947544 171.79863 0.0100459 0.415706
\r
118 700.000000 70.000000 9.8144894 171.4614 0.011494 0.460565
\r
119 710.000000 70.000000 9.7188091 171.48418 0.0118571 0.480872
\r
120 720.000000 70.000000 9.6239252 172.39667 0.0118676 0.543723
\r
121 730.000000 70.000000 9.5179043 171.17155 0.0124274 0.496137
\r
122 740.000000 70.000000 9.4643059 171.88652 0.0132355 0.577723
\r
123 750.000000 70.000000 9.3968201 171.23491 0.0140665 0.572598
\r
124 760.000000 70.000000 9.331955 170.75508 0.0153802 0.59781
\r
125 770.000000 70.000000 9.1915531 172.23903 0.016315 0.765495
\r
126 780.000000 70.000000 9.1737461 172.17554 0.0221836 1.03438
\r
127 790.000000 70.000000 9.0857019 172.92474 0.0190536 0.991096
\r
128 800.000000 70.000000 9.0564785 171.79248 0.0215873 0.971866
\r
129 810.000000 70.000000 8.9633369 170.17284 0.0338826 1.28899
\r
130 820.000000 70.000000 8.9240627 171.84749 0.00826762 0.380139
\r
131 830.000000 70.000000 8.8748751 171.81473 0.00740846 0.341098
\r
132 840.000000 70.000000 8.8344536 172.2504 0.0113031 0.551892
\r
133 850.000000 70.000000 8.7934914 170.69238 0.0233391 0.954413
\r
134 860.000000 70.000000 8.7104883 172.08075 0.0188245 0.911942
\r
135 870.000000 70.000000 8.6643248 172.46146 0.0109729 0.561119
\r
136 880.000000 70.000000 8.6300154 172.15919 0.00565909 0.279371
\r
137 890.000000 70.000000 8.5908012 172.89787 0.00578976 0.316755
\r
138 900.000000 70.000000 8.5617676 172.4642 0.00555843 0.287637
\r
139 910.000000 70.000000 8.5164375 172.27467 0.00564334 0.286377
\r
140 920.000000 70.000000 8.4768829 172.84923 0.00529383 0.291404
\r
141 930.000000 70.000000 8.4418325 172.91759 0.00588737 0.328502
\r
142 940.000000 70.000000 8.4049435 172.51062 0.00537377 0.284846
\r
143 950.000000 70.000000 8.3683949 172.79749 0.00532248 0.294539
\r
144 960.000000 70.000000 8.3400421 173.07684 0.00567676 0.327829
\r
145 970.000000 70.000000 8.3004026 172.47905 0.00554218 0.296114
\r
146 980.000000 70.000000 8.2682276 172.95331 0.00516482 0.295529
\r
147 990.000000 70.000000 8.2302523 172.82959 0.00521676 0.294689
\r
148 1000.000000 70.000000 8.2144413 172.62538 0.00539624 0.296985
\r
149 290.000000 75.000000 33.940731 115.2794 2.19254 5.23358
\r
150 300.000000 75.000000 27.071531 123.97619 1.08442 3.22663
\r
151 310.000000 75.000000 24.565632 121.03437 0.555422 1.7074
\r
152 320.000000 75.000000 22.45895 120.26434 0.349622 1.1422
\r
153 330.000000 75.000000 22.278561 123.99647 0.253555 0.871694
\r
154 340.000000 75.000000 21.758316 125.33086 0.171377 0.609857
\r
155 350.000000 75.000000 21.419605 127.76673 0.119054 0.442574
\r
156 360.000000 75.000000 21.961887 134.50545 0.0905906 0.36611
\r
157 370.000000 75.000000 20.779236 145.09833 0.0665641 0.350623
\r
158 380.000000 75.000000 17.437267 153.76134 0.046953 0.369666
\r
159 390.000000 75.000000 14.617636 155.88144 0.0368917 0.368585
\r
160 400.000000 75.000000 12.653976 155.97958 0.0289791 0.332384
\r
161 410.000000 75.000000 11.107265 156.01967 0.0244269 0.317398
\r
162 420.000000 75.000000 9.8861437 155.80338 0.0229977 0.331266
\r
163 430.000000 75.000000 8.8887472 154.76689 0.0206705 0.317138
\r
164 440.000000 75.000000 8.0873604 154.28624 0.016488 0.271617
\r
165 450.000000 75.000000 7.3513665 154.53026 0.0129219 0.234722
\r
166 460.000000 75.000000 6.7340083 152.1463 0.0112227 0.20294
\r
167 470.000000 75.000000 6.1851687 151.33063 0.00847591 0.160989
\r
168 480.000000 75.000000 5.6714411 150.33647 0.0100753 0.200054
\r
169 490.000000 75.000000 5.2585521 148.84254 0.00942103 0.190555
\r
170 500.000000 75.000000 4.8701935 147.37477 0.00900855 0.186083
\r
171 510.000000 75.000000 4.5244741 146.27058 0.00865841 0.184261
\r
172 520.000000 75.000000 4.1824169 144.8172 0.0083592 0.182157
\r
173 530.000000 75.000000 3.9031804 142.75102 0.00826914 0.179865
\r
174 540.000000 75.000000 3.6157637 141.96919 0.00820454 0.186077
\r
175 550.000000 75.000000 3.3708749 139.26184 0.00829003 0.18463
\r
176 560.000000 75.000000 3.1507051 138.19539 0.00840704 0.192187
\r
177 570.000000 75.000000 2.9441755 135.98119 0.00862196 0.196002
\r
178 580.000000 75.000000 2.7838781 133.35469 0.00894826 0.198154
\r
179 590.000000 75.000000 2.6057038 131.53152 0.00929794 0.206626
\r
180 600.000000 75.000000 2.4663565 128.65346 0.0104783 0.224994
\r
181 610.000000 75.000000 2.3034024 127.21901 0.0106653 0.232283
\r
182 620.000000 75.000000 2.2344828 123.13329 0.0112851 0.225129
\r
183 630.000000 75.000000 2.0369868 121.83449 0.0122661 0.252749
\r
184 640.000000 75.000000 1.9043649 119.46942 0.0139312 0.281987
\r
185 650.000000 75.000000 1.883921 115.38365 0.0153914 0.279168
\r
186 660.000000 75.000000 1.7991301 113.05562 0.017946 0.313472
\r
187 670.000000 75.000000 1.7259065 109.3699 0.0195592 0.314238
\r
188 680.000000 75.000000 1.6801722 104.64394 0.0226584 0.321709
\r
189 690.000000 75.000000 1.5609517 103.40665 0.023018 0.325202
\r
190 700.000000 75.000000 1.4985896 99.780617 0.0308008 0.397919
\r
191 710.000000 75.000000 1.5476795 95.807716 0.0339449 0.397717
\r
192 720.000000 75.000000 1.4251146 93.733223 0.0377296 0.431535
\r
193 730.000000 75.000000 1.3793603 89.832542 0.0423255 0.471785
\r
194 740.000000 75.000000 1.4368627 87.008522 0.0431064 0.488076
\r
195 750.000000 75.000000 1.3304161 83.396347 0.046392 0.567086
\r
196 760.000000 75.000000 1.3703707 79.824097 0.0457868 0.615416
\r
197 770.000000 75.000000 1.3335459 76.550316 0.0451705 0.685318
\r
198 780.000000 75.000000 1.4014449 73.2117 0.0549391 0.913304
\r
199 790.000000 75.000000 1.4415561 71.006302 0.0436208 0.769453
\r
200 800.000000 75.000000 1.4376944 68.994072 0.0468424 0.886591
\r
201 810.000000 75.000000 1.3678758 64.994888 0.0638992 1.43781
\r
202 820.000000 75.000000 1.3750401 62.083847 0.0124954 0.309141
\r
203 830.000000 75.000000 1.3895907 61.013195 0.0104256 0.265069
\r
204 840.000000 75.000000 1.3743631 57.829262 0.0167352 0.477033
\r
205 850.000000 75.000000 1.2817296 53.213673 0.03351 1.1814
\r
206 860.000000 75.000000 1.3905541 53.282234 0.0266699 0.87218
\r
207 870.000000 75.000000 1.4985989 53.755367 0.014779 0.44578
\r
208 880.000000 75.000000 1.4761547 50.95145 0.00543646 0.181609
\r
209 890.000000 75.000000 1.4758823 49.180355 0.00557945 0.1972
\r
210 900.000000 75.000000 1.4852053 47.282475 0.00501237 0.187121
\r
211 910.000000 75.000000 1.5000799 45.898571 0.00509334 0.196938
\r
212 920.000000 75.000000 1.51442 44.139229 0.00437319 0.177372
\r
213 930.000000 75.000000 1.5355268 42.601734 0.00530889 0.223442
\r
214 940.000000 75.000000 1.5536515 41.308815 0.00440108 0.191136
\r
215 950.000000 75.000000 1.5685475 39.960682 0.0042699 0.192172
\r
216 960.000000 75.000000 1.5935202 39.278904 0.0048228 0.218776
\r
217 970.000000 75.000000 1.6195701 38.677101 0.00460793 0.210061
\r
218 980.000000 75.000000 1.6278176 36.862617 0.00393591 0.189946
\r
219 990.000000 75.000000 1.6571352 36.532291 0.0040342 0.193614
\r
220 1000.000000 75.000000 1.6740266 35.915588 0.004298 0.208717