2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Oct 30 13:18:44 2009]
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3 Original[301009 500z30mg15 ss.dat]
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