3 2 WVASE32
\99 as a Windows
\99 application=WVASE32TasaWindowsTapplication
\r
4 2 Organization of this manual=Organizationofthismanual
\r
5 2 How to use this manual
\r
6 3 How to use this manual=Howtousethismanual
\r
8 3 VASE? users=VASE.users
\r
9 3 M-44? users=M.44.users
\r
10 1 A Short Course in Ellipsometry
\r
11 2 Short course overview=Shortcourseoverview
\r
12 2 What is ellipsometry?
\r
13 3 What is ellipsometry?=Whatisellipsometry.
\r
14 3 Why variable angle spectroscopic ellipsometry (VASE?)?=Whyvariableanglespectroscopicellipsometry.VASE...
\r
15 3 What does an ellipsometer measure?=Whatdoesanellipsometermeasure.
\r
16 3 What parameters can be determined?=Whatparameterscanbedetermined.
\r
17 3 What are the regimes of applicability?=Whataretheregimesofapplicability.
\r
18 3 Accuracy and precision of ellipsometric experiments=Accuracyandprecisionofellipsometricexperiments
\r
19 2 General procedure for optical experiments
\r
20 3 General procedure for optical experiments=Generalprocedureforopticalexperiments
\r
21 3 Measurement=Measurement
\r
22 3 Development of a model=Developmentofamodel
\r
23 3 Fit model to measured data=Fitmodeltomeasureddata
\r
24 3 Evaluate the best-fit model=Evaluatethebest.fitmodel
\r
26 3 Polarized light=Polarizedlight
\r
27 3 Maxwell's equations and the electromagnetic plane wave=Maxwell.sequationsandtheelectromagneticplanewave
\r
28 3 Jones vectors and matrices=Jonesvectorsandmatrices
\r
29 3 Light polarization states=Lightpolarizationstates
\r
30 3 Unpolarized (randomly polarized) light=Unpolarized.randomlypolarized.light
\r
31 3 Partially polarized light=Partiallypolarizedlight
\r
32 2 Optical components used in ellipsometers
\r
33 3 Optical components used in ellipsometers=Opticalcomponentsusedinellipsometers
\r
34 3 Light sources=Lightsources
\r
35 3 Optical fibers=Opticalfibers
\r
36 3 Beam modulators=Beammodulators
\r
37 3 Polarizers=Polarizers
\r
38 3 Retarders=Retarders
\r
39 3 Detectors=Detectors
\r
40 2 Ellipsometer principles and configurations
\r
41 3 Ellipsometer principles and configurations=Ellipsometerprinciplesandconfigurations
\r
42 3 Principles of ellipsometer design=Principlesofellipsometerdesign
\r
43 3 Null ellipsometry=Nullellipsometry
\r
44 3 Polarization modulation ellipsometers=Polarizationmodulationellipsometers
\r
45 3 Rotating element ellipsometers=Rotatingelementellipsometers
\r
46 3 Rotating analyzer vs. rotating polarizer ellipsometers=Rotatinganalyzervs.rotatingpolarizerellipsometers
\r
47 3 Rotating analyzer with variable retarder ellipsometry=Rotatinganalyzerwithvariableretarderellipsometry
\r
48 3 Variable vs. fixed angle of incidence=Variablevs.fixedangleofincidence
\r
49 2 The rotating analyzer ellipsometer
\r
50 3 The rotating analyzer ellipsometer=Therotatinganalyzerellipsometer
\r
51 3 Configuration=Configuration
\r
52 3 Measurement of the reflected beam polarization state=Measurementofthereflectedbeampolarizationstate
\r
53 3 Jones matrix analysis of the rotating analyzer ellipsometer=Jonesmatrixanalysisoftherotatinganalyzerellipsometer
\r
54 3 Anisotropic or depolarizing samples=Anisotropicordepolarizingsamples
\r
55 3 Calibration of the polarizer angles=Calibrationofthepolarizerangles
\r
56 3 Error (sensitivity) analysis - polarizer tracking=Error.sensitivity.analysis.polarizertracking
\r
57 2 The J. A. Woollam Co., Inc. VASE? instrument
\r
58 3 The J. A. Woollam Co., Inc. VASE? instrument=TheJ.A.WoollamCo..Inc.VASE.instrument
\r
59 2 Reflection of polarized light from planar structures
\r
60 3 Reflection of polarized light from planar structures=Reflectionofpolarizedlightfromplanarstructures
\r
61 3 Measurement geometry=Measurementgeometry
\r
62 3 Optical constants and what they mean=Opticalconstantsandwhattheymean
\r
63 3 Bulk materials=Bulkmaterials
\r
64 3 Single films on thick substrates=Singlefilmsonthicksubstrates
\r
65 3 Multilayer formalisms=Multilayerformalisms
\r
66 3 Superlattices=Superlattices
\r
68 3 Composite materials and roughness - EMA models=Compositematerialsandroughness.EMAmodels
\r
69 2 Regression analysis of optical data
\r
70 3 Regression analysis of optical data=Regressionanalysisofopticaldata
\r
71 3 Description of the problem=Descriptionoftheproblem
\r
72 3 The gradient method=Thegradientmethod
\r
73 3 The inverse Hessian method=TheinverseHessianmethod
\r
74 3 The Levenberg-Marquardt algorithm=TheLevenberg.Marquardtalgorithm
\r
75 3 Evaluating the best-fit results=Evaluatingthebest.fitresults
\r
76 3 Interpretation of confidence limits=Interpretationofconfidencelimits1
\r
77 2 Optical properties of materials and thin films
\r
78 3 Optical properties of materials and thin films=Opticalpropertiesofmaterialsandthinfilms
\r
79 3 Optical constants - what are they?=Opticalconstants.whatarethey.
\r
80 3 Kramers-Kronig relations=Kramers.Kronigrelations
\r
81 3 Interband absorption=Interbandabsorption
\r
82 3 Intraband absorption=Intrabandabsorption
\r
83 3 Free carrier absorption=Freecarrierabsorption
\r
84 3 Dielectric materials and semiconductors=Dielectricmaterialsandsemiconductors
\r
86 3 Bulk vs. thin film optical constants=Bulkvs.thinfilmopticalconstants
\r
87 1 Navigating WVASE32
\99\r
88 2 Working in the Windows
\99 operating system
\r
89 3 Working in the Windows
\99 operating system=WorkingintheWindowsToperatingsystem
\r
90 3 Starting Windows?=StartingWindows.
\r
91 3 Windows
\99 basics=WindowsTbasics
\r
92 3 Working with windows and menus
\r
93 4 Working with windows and menus=Workingwithwindowsandmenus
\r
95 4 Minimizing and maximizing windows=Minimizingandmaximizingwindows
\r
97 4 Dialog boxes=Dialogboxes
\r
99 4 Directories=Directories
\r
100 4 List files of type=Listfilesoftype
\r
101 4 File name=Filename
\r
102 4 Ok button=Okbutton1
\r
103 4 Cancel button=Cancelbutton1
\r
104 3 Summary of Windows
\99 functions
\r
105 4 Summary of Windows
\99 functions=SummaryofWindowsTfunctions
\r
106 2 Starting WVASE32
\99\r
107 3 Starting WVASE32
\99=StartingWVASE32T
\r
108 2 The "V.A.S.E. for Windows" frame
\r
109 3 The "V.A.S.E. for Windows" frame=The.V.A.S.E.forWindows.frame
\r
110 2 Summary of main window functions
\r
111 3 Summary of main window functions=Summaryofmainwindowfunctions
\r
112 3 Experimental Data window=ExperimentalDatawindow
\r
113 3 Model window=Modelwindow
\r
114 3 Generated Data window=GeneratedDatawindow
\r
115 3 Graph window=Graphwindow
\r
116 3 Fit window=Fitwindow
\r
117 3 Hardware window=Hardwarewindow
\r
118 2 The menubar and menu naming convention
\r
119 3 The menubar and menu naming convention=Themenubarandmenunamingconvention
\r
121 3 |Window menu=.Windowmenu
\r
123 3 |Global menu=.Globalmenu
\r
124 3 |Global|Help item=.Global.Helpitem
\r
125 3 |Global|Defaults item=.Global.Defaultsitem
\r
126 3 |Global|Save_Current_Environment item=.Global.Save.Current.Environmentitem
\r
127 3 |Global|Load_New_Environment item=.Global.Load.New.Environmentitem
\r
128 3 |Global|Run_WVASE_Tools item=.Global.Run.WVASE.Toolsitem
\r
129 3 |Global|About item=.Global.Aboutitem
\r
130 2 |File|Exit_WVASE item
\r
131 3 |File|Exit_WVASE item=.File.Exit.WVASEitem
\r
132 1 Hardware Window: VASE®
\r
133 2 Hardware window overview for VASE® systems
\r
134 3 Hardware window overview for VASE® systems=HardwarewindowoverviewforVASErsystems
\r
135 3 Features displayed in the Hardware window
\r
136 4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow1
\r
137 4 Title bar=Titlebar1
\r
138 4 Motor position=Motorposition1
\r
139 4 Calibration constants=Calibrationconstants1
\r
140 4 Translator position=Translatorposition
\r
141 3 Hardware window menubar
\r
142 4 Hardware window menubar=Hardwarewindowmenubar1
\r
143 3 Summary of VASE® system options
\r
144 4 Summary of VASE® system options=SummaryofVASErsystemoptions
\r
145 4 Translator equipped systems=Translatorequippedsystems
\r
146 4 Infrared extended system=Infraredextendedsystem
\r
147 4 PTI monochromator=PTImonochromator
\r
148 4 CVI monochromator=CVImonochromator
\r
149 3 Common Hardware window message boxes
\r
150 4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes1
\r
151 2 Hardware|File menu
\r
152 3 Hardware|File menu=Hardware.Filemenu1
\r
153 3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem1
\r
154 2 Hardware|Initialize command
\r
155 3 Hardware|Initialize command=Hardware.Initializecommand1
\r
156 2 Hardware|Acquire_Data menu
\r
157 3 Hardware|Acquire_Data menu=Hardware.Acquire.Datamenu
\r
158 2 Hardware|Acquire_Data|Align item
\r
159 3 Hardware|Acquire_Data|Align item=Hardware.Acquire.Data.Alignitem
\r
160 2 Hardware|Acquire_Data|Calibrate item
\r
161 3 Hardware|Acquire_Data|Calibrate item=Hardware.Acquire.Data.Calibrateitem
\r
162 3 When and why to calibrate=Whenandwhytocalibrate
\r
163 3 Overview of calibration procedure=Overviewofcalibrationprocedure
\r
164 3 What happens during the calibration=Whathappensduringthecalibration
\r
165 3 The calibration dialog box
\r
166 4 The calibration dialog box=Thecalibrationdialogbox1
\r
167 4 Calibration mode=Calibrationmode
\r
168 4 Revs per measurement=Revspermeasurement1
\r
169 4 # of points=.ofpoints1
\r
170 4 Degree span=Degreespan
\r
171 3 Evaluating the calibration results
\r
172 4 Evaluating the calibration results=Evaluatingthecalibrationresults
\r
173 4 Bad calibration=Badcalibration
\r
174 4 Calibration error, but calibration OK=Calibrationerror.butcalibrationOK
\r
175 4 Check for polarizer off by 90°=Checkforpolarizeroffby90.
\r
176 4 Check the log file=Checkthelogfile
\r
177 3 Choice of calibration sample
\r
178 4 Choice of calibration sample=Choiceofcalibrationsample
\r
179 2 Hardware|Acquire_Data|Spectroscopic_Scan item
\r
180 3 Hardware|Acquire_Data|Spectroscopic_Scan item=Hardware.Acquire.Data.Spectroscopic.Scanitem
\r
181 3 The spectroscopic scan dialog box
\r
182 4 The spectroscopic scan dialog box=Thespectroscopicscandialogbox
\r
183 4 Wavelength range boxes=Wavelengthrangeboxes1
\r
184 4 Angle range boxes=Anglerangeboxes1
\r
185 4 Revs per measurement=Revspermeasurement2
\r
186 4 Acquisition settings list=Acquisitionsettingslist
\r
187 4 Change settings button=Changesettingsbutton
\r
188 4 Cancel button=Cancelbutton2
\r
189 4 Ok button=Okbutton2
\r
190 3 Ellipsometric data acquisition options
\r
191 4 Ellipsometric data acquisition options=Ellipsometricdataacquisitionoptions
\r
192 4 Optical components box=Opticalcomponentsbox
\r
193 4 Track polarizer option=Trackpolarizeroption
\r
194 4 Fixed polarizer setting option=Fixedpolarizersettingoption
\r
195 4 Zone average polarizer checkbox=Zoneaveragepolarizercheckbox
\r
196 4 Use auto retarder=Useautoretarder
\r
197 4 Revs/Measurement=Revs.Measurement
\r
198 4 Sample type box=Sampletypebox
\r
199 4 Isotropic Jones matrix option=IsotropicJonesmatrixoption
\r
200 4 Anisotropic Jones matrix option=AnisotropicJonesmatrixoption
\r
201 4 Dynamic averaging box=Dynamicaveragingbox
\r
202 4 Dynamic averaging enabled check box=Dynamicaveragingenabledcheckbox
\r
203 4 Maximum # of revs=Maximum.ofrevs
\r
204 4 Threshold intensity=Thresholdintensity
\r
205 4 Monochromator slit width box=Monochromatorslitwidthbox
\r
206 4 Max. slit width box=Max.slitwidthbox
\r
207 4 Auto slit adjustment check box=Autoslitadjustmentcheckbox
\r
208 4 Reset to defaults button=Resettodefaultsbutton
\r
209 4 Cancel button=Cancelbutton3
\r
210 4 Ok button=Okbutton3
\r
211 2 Hardware|Acquire_Data|Dynamic_Scan item
\r
212 3 Hardware|Acquire_Data|Dynamic_Scan item=Hardware.Acquire.Data.Dynamic.Scanitem
\r
213 3 The dynamic scan dialog box
\r
214 4 The dynamic scan dialog box=Thedynamicscandialogbox
\r
215 4 # of wavelengths=.ofwavelengths
\r
216 4 Wavelength list=Wavelengthlist
\r
217 4 Revs/meas=Revs.meas1
\r
218 4 Ellipsometric data acquisition settings=Ellipsometricdataacquisitionsettings
\r
219 4 Change settings=Changesettings
\r
220 4 Dynamic fit=Dynamicfit
\r
221 2 Hardware|Acquire_Data|R&T_Data item
\r
222 3 Hardware|Acquire_Data|R&T_Data item=Hardware.Acquire.Data.R.T.Dataitem
\r
223 3 The R&T scan dialog box
\r
224 4 The R&T scan dialog box=TheR.Tscandialogbox
\r
225 4 Data acquisition mode=Dataacquisitionmode
\r
226 4 Data type=Datatype1
\r
227 4 Polarizer angle=Polarizerangle
\r
228 4 Wavelength range boxes=Wavelengthrangeboxes2
\r
229 4 Angle range boxes=Anglerangeboxes2
\r
230 4 Revs per measurement=Revspermeasurement3
\r
231 4 Go to white light for alignment=Gotowhitelightforalignment
\r
232 4 Use auxiliary detector=Useauxiliarydetector
\r
233 4 Acquire baseline from reference sample=Acquirebaselinefromreferencesample
\r
234 2 Hardware|Acquire_Data|Translation_Scan item
\r
235 3 Hardware|Acquire_Data|Translation_Scan item=Hardware.Acquire.Data.Translation.Scanitem
\r
236 3 The translation scan dialog box
\r
237 4 The translation scan dialog box=Thetranslationscandialogbox
\r
238 4 Discrete wavelengths=Discretewavelengths
\r
239 4 VASE? data=VASE.data
\r
240 4 Reflection/Transmission data=Reflection.Transmissiondata
\r
242 4 Translator scan parameters=Translatorscanparameters
\r
243 4 Revs/meas=Revs.meas2
\r
244 4 Polarizer=Polarizer1
\r
245 2 Hardware|Move menu
\r
246 3 Hardware|Move menu=Hardware.Movemenu
\r
247 3 Hardware|Move|Monochromator item
\r
248 4 Hardware|Move|Monochromator item=Hardware.Move.Monochromatoritem
\r
249 4 Enter new position=Enternewposition1
\r
250 4 White light button=Whitelightbutton
\r
251 3 Hardware|Move|Angle_of_Incidence item
\r
252 4 Hardware|Move|Angle_of_Incidence item=Hardware.Move.Angle.of.Incidenceitem
\r
253 4 Enter new angle=Enternewangle
\r
254 3 Hardware|Move|Polarizer item
\r
255 4 Hardware|Move|Polarizer item=Hardware.Move.Polarizeritem
\r
256 4 Enter new position=Enternewposition2
\r
257 3 Hardware|Move|Translator item
\r
258 4 Hardware|Move|Translator item=Hardware.Move.Translatoritem
\r
261 4 Home stages button=Homestagesbutton
\r
262 2 Hardware|Setup menu
\r
263 3 Hardware|Setup menu=Hardware.Setupmenu
\r
264 3 Hardware|Setup|Current_Motor_Settings item
\r
265 4 Hardware|Setup|Current_Motor_Settings item=Hardware.Setup.Current.Motor.Settingsitem
\r
266 4 Monochromator=Monochromator
\r
267 4 Sample stage=Samplestage
\r
268 4 Detector stage=Detectorstage
\r
269 4 Auto home goniometers button=Autohomegoniometersbutton
\r
270 4 Jog buttons=Jogbuttons
\r
271 4 Grating position=Gratingposition
\r
272 4 Slit width=Slitwidth
\r
273 4 Enable auto slit adjustment=Enableautoslitadjustment
\r
274 4 Detector system=Detectorsystem
\r
275 3 Hardware|Setup|Display_Signal item
\r
276 4 Hardware|Setup|Display_Signal item=Hardware.Setup.Display.Signalitem
\r
277 4 <Esc> exits=.Esc.exits1
\r
283 4 alpha and beta=alphaandbeta
\r
284 4 Psi and Delta=PsiandDelta
\r
285 3 Hardware|Setup|Home_Filter item
\r
286 4 Hardware|Setup|Home_Filter item=Hardware.Setup.Home.Filteritem
\r
287 4 Enter home filter constant=Enterhomefilterconstant
\r
288 1 Hardware Window: M-44®
\r
289 2 Hardware window overview, M-44® system
\r
290 3 Hardware window overview, M-44® system=Hardwarewindowoverview.M.44rsystem
\r
291 3 Features displayed in the Hardware window
\r
292 4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow2
\r
293 4 Title bar=Titlebar2
\r
294 4 Motor position=Motorposition2
\r
295 4 Calibration constants=Calibrationconstants2
\r
296 3 Hardware window menubar
\r
297 4 Hardware window menubar=Hardwarewindowmenubar2
\r
298 3 Common Hardware window message boxes
\r
299 4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes2
\r
300 2 Hardware|File menu
\r
301 3 Hardware|File menu=Hardware.Filemenu2
\r
302 3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem2
\r
303 2 Hardware|Initialize command
\r
304 3 Hardware|Initialize command=Hardware.Initializecommand2
\r
305 2 Hardware|Align command
\r
306 3 Hardware|Align command=Hardware.Aligncommand
\r
307 2 Hardware|Calibrate command
\r
308 3 Hardware|Calibrate command=Hardware.Calibratecommand
\r
309 3 The calibration dialog box
\r
310 4 The calibration dialog box=Thecalibrationdialogbox2
\r
313 4 Straight-through=Straight.through
\r
314 4 Revs per measurement=Revspermeasurement4
\r
315 4 # of points=.ofpoints2
\r
316 4 Degree span (of polarizer)=Degreespan.ofpolarizer.
\r
317 4 Short wavelength / Long wavelength=Shortwavelength.Longwavelength
\r
318 3 Effect on other windows
\r
319 4 Effect on other windows=Effectonotherwindows1
\r
320 2 Hardware|Ellipsometric_Data command
\r
321 3 Hardware|Ellipsometric_Data command=Hardware.Ellipsometric.Datacommand
\r
322 3 The ellipsometric data dialog box
\r
323 4 The ellipsometric data dialog box=Theellipsometricdatadialogbox
\r
324 4 Revs/meas=Revs.meas3
\r
325 4 Polarizer setting=Polarizersetting
\r
326 4 Current angle of incidence=Currentangleofincidence
\r
327 4 Fit data to model in real-time=Fitdatatomodelinreal.time
\r
328 4 Don't save dynamic data=Don.tsavedynamicdata
\r
329 4 Data type=Datatype2
\r
330 4 Acquire single scan=Acquiresinglescan
\r
331 4 Update graph, every n points=Updategraph.everynpoints
\r
332 4 Selected channels=Selectedchannels
\r
333 3 Effect on other windows
\r
334 4 Effect on other windows=Effectonotherwindows2
\r
335 2 Hardware|Signal command
\r
336 3 Hardware|Signal command=Hardware.Signalcommand
\r
337 3 Signal display options
\r
338 4 Signal display options=Signaldisplayoptions
\r
339 4 Channel #=Channel.
\r
340 4 All channels=Allchannels
\r
341 4 Revs per measurement=Revspermeasurement5
\r
343 4 Auto switching=Autoswitching
\r
344 4 Calc. DC offset=Calc.DCoffset
\r
345 4 Polarizer=Polarizer2
\r
346 4 Angle of incidence=Angleofincidence
\r
347 1 The Experimental Data Window
\r
348 2 Experimental data window overview
\r
349 3 Experimental data window overview=Experimentaldatawindowoverview
\r
350 3 Features displayed in the Experimental Data window
\r
351 4 Features displayed in the Experimental Data window=FeaturesdisplayedintheExperimentalDatawindow
\r
352 4 Title bar=Titlebar3
\r
353 4 Comment line=Commentline1
\r
354 4 Scroll bar=Scrollbar1
\r
355 4 Selected column=Selectedcolumn
\r
356 4 Type column=Typecolumn1
\r
357 4 Wavelength column=Wavelengthcolumn1
\r
358 4 Angle column=Anglecolumn1
\r
359 4 Data columns=Datacolumns1
\r
360 4 Time column=Timecolumn1
\r
361 3 The Experimental Data window menubar
\r
362 4 The Experimental Data window menubar=TheExperimentalDatawindowmenubar
\r
363 3 Data from samples with transparent substrates
\r
364 4 Data from samples with transparent substrates=Datafromsampleswithtransparentsubstrates
\r
365 3 The experimental data types
\r
366 4 The experimental data types=Theexperimentaldatatypes
\r
367 3 Ellipsometric data types
\r
368 4 Ellipsometric data types=Ellipsometricdatatypes
\r
369 4 E - Ellipsometry, standard=E.Ellipsometry.standard
\r
370 4 Eb - Ellipsometry, back-side corrected=Eb.Ellipsometry.back.sidecorrected
\r
371 4 Er - Ellipsometry, reverse side=Er.Ellipsometry.reverseside
\r
372 4 Et - Ellipsometry, transmission=Et.Ellipsometry.transmission
\r
373 4 aEp - Ellipsometry, special anisotropic=aEp.Ellipsometry.specialanisotropic
\r
374 4 aEs - Ellipsometry, special anisotropic=aEs.Ellipsometry.specialanisotropic
\r
375 4 aEpb - Ellipsometry, special anisotropic and backside corrected=aEpb.Ellipsometry.specialanisotropicandbacksidecorrected
\r
376 4 aEsb - Ellipsometry, special anisotropic and backside corrected=aEsb.Ellipsometry.specialanisotropicandbacksidecorrected
\r
377 3 Reflected intensity data types
\r
378 4 Reflected intensity data types=Reflectedintensitydatatypes
\r
379 4 pR - Reflection, p-polarized=pR.Reflection.p.polarized
\r
380 4 sR - Reflection, s-polarized=sR.Reflection.s.polarized
\r
381 4 uR - Reflection, unpolarized=uR.Reflection.unpolarized
\r
382 4 pRb - Reflection, p-polarized and backside corrected=pRb.Reflection.p.polarizedandbacksidecorrected
\r
383 4 sRb - Reflection, s-polarized and backside corrected=sRb.Reflection.s.polarizedandbacksidecorrected
\r
384 4 uRb - Reflection, unpolarized and backside corrected=uRb.Reflection.unpolarizedandbacksidecorrected
\r
385 3 Transmitted intensity data types
\r
386 4 Transmitted intensity data types=Transmittedintensitydatatypes
\r
387 4 pT - Transmission, p-polarized=pT.Transmission.p.polarized
\r
388 4 sT - Transmission, s-polarized=sT.Transmission.s.polarized
\r
389 4 uT - Transmission, unpolarized=uT.Transmission.unpolarized
\r
390 3 Generalized anisotropic ellipsometric data types
\r
391 4 Generalized anisotropic ellipsometric data types=Generalizedanisotropicellipsometricdatatypes
\r
392 4 Ane - Anisotropic Ellipsometry, normal component=Ane.AnisotropicEllipsometry.normalcomponent
\r
393 4 Aps - Anisotropic Ellipsometry, p into s component=Aps.AnisotropicEllipsometry.pintoscomponent
\r
394 4 Asp - Anisotropic Ellipsometry, s into p component=Asp.AnisotropicEllipsometry.sintopcomponent
\r
395 3 Other data types recognized by WVASE32?
\r
396 4 Other data types recognized by WVASE32?=OtherdatatypesrecognizedbyWVASE32.
\r
397 4 N - Neutron reflection=N.Neutronreflection
\r
398 4 Tph - Transmitted phase=Tph.Transmittedphase
\r
399 2 Exp_Data|File menu
\r
400 3 Exp_Data|File menu=Exp.Data.Filemenu
\r
401 3 Exp_Data|File|Open_Exp_File item=Exp.Data.File.Open.Exp.Fileitem
\r
402 3 Exp_Data|File|Append_Exp_File item=Exp.Data.File.Append.Exp.Fileitem
\r
403 3 Exp_Data|File|Merge_Exp_Data item=Exp.Data.File.Merge.Exp.Dataitem
\r
404 3 Exp_Data|File|Save_Exp_Data item=Exp.Data.File.Save.Exp.Dataitem
\r
405 3 Exp_Data|File|Comment_Data item=Exp.Data.File.Comment.Dataitem
\r
406 3 Exp_Data|File|Copy_to_Clipboard item=Exp.Data.File.Copy.to.Clipboarditem
\r
407 2 Exp_Data|Range_Select item
\r
408 3 Exp_Data|Range_Select item=Exp.Data.Range.Selectitem
\r
409 3 Range select for static spectroscopic data
\r
410 4 Range select for static spectroscopic data=Rangeselectforstaticspectroscopicdata
\r
412 4 Wavelengths=Wavelengths
\r
413 4 Selected data types=Selecteddatatypes
\r
414 4 All data button=Alldatabutton1
\r
415 4 Add to button=Addtobutton
\r
416 4 Remove from button=Removefrombutton
\r
417 4 OK button=OKbutton1
\r
418 4 Global select box=Globalselectbox
\r
419 3 Range select for dynamic data
\r
420 4 Range select for dynamic data=Rangeselectfordynamicdata
\r
421 4 Time boxes=Timeboxes
\r
422 4 # to skip=.toskip
\r
423 4 Selected wavelengths list=Selectedwavelengthslist
\r
424 4 OK button=OKbutton2
\r
425 4 All data button=Alldatabutton2
\r
426 4 Spectroscopic mode=Spectroscopicmode
\r
427 4 Select all wavelengths=Selectallwavelengths
\r
428 4 Time slice list=Timeslicelist
\r
429 4 Add to list button=Addtolistbutton
\r
430 4 Delete button=Deletebutton1
\r
431 4 Delete all button=Deleteallbutton
\r
432 2 Exp_Data|Angles item
\r
433 3 Exp_Data|Angles item=Exp.Data.Anglesitem
\r
434 3 The angles of incidence dialog box
\r
435 4 The angles of incidence dialog box=Theanglesofincidencedialogbox
\r
436 4 Nominal angles=Nominalangles
\r
437 4 Actual angles=Actualangles
\r
438 2 Exp_Data|Delete_Data command
\r
439 3 Exp_Data|Delete_Data command=Exp.Data.Delete.Datacommand
\r
440 2 Exp_Data|Change_Data_Type command
\r
441 3 Exp_Data|Change_Data_Type command=Exp.Data.Change.Data.Typecommand
\r
442 3 The change data type dialog box
\r
443 4 The change data type dialog box=Thechangedatatypedialogbox
\r
444 4 Current data type=Currentdatatype
\r
445 4 Change to=Changeto
\r
447 2 Model window overview
\r
448 3 Model window overview=Modelwindowoverview
\r
449 3 Features displayed in the Model window
\r
450 4 Features displayed in the Model window=FeaturesdisplayedintheModelwindow
\r
451 4 Title bar=Titlebar4
\r
452 4 Comment line=Commentline2
\r
454 4 Current layer=Currentlayer
\r
455 3 The Model window menubar
\r
456 4 The Model window menubar=TheModelwindowmenubar
\r
457 3 Layers and optical constants
\r
458 4 Layers and optical constants=Layersandopticalconstants
\r
459 3 Special properties of the substrate
\r
460 4 Special properties of the substrate=Specialpropertiesofthesubstrate
\r
461 3 Ideal and non-ideal models
\r
462 4 Ideal and non-ideal models=Idealandnon.idealmodels
\r
464 4 Multiple models=Multiplemodels
\r
466 3 Model|File menu=Model.Filemenu
\r
467 3 Model|File|Open_Model item=Model.File.Open.Modelitem
\r
468 3 Model|File|Save_Model item=Model.File.Save.Modelitem
\r
469 3 Model|File|Comment_Model item=Model.File.Comment.Modelitem
\r
470 3 Model|File|Copy_to_Clipboard item=Model.File.Copy.to.Clipboarditem
\r
471 2 Model|AddLayer command
\r
472 3 Model|AddLayer command=Model.AddLayercommand
\r
473 3 File searching pattern for Model|AddLayer=FilesearchingpatternforModel.AddLayer
\r
474 3 Coupling of layers=Couplingoflayers
\r
476 3 Tabulated layers=Tabulatedlayers
\r
478 4 Standard layers=Standardlayers
\r
479 4 Layer name=Layername
\r
481 4 Spectral range=Spectralrange
\r
482 4 Thickness=Thickness1
\r
483 4 Thickness fit box=Thicknessfitbox
\r
484 4 Opt. con. fit boxes=Opt.con.fitboxes1
\r
485 4 Reset n&k button=Resetn.kbutton
\r
486 4 OK button=OKbutton3
\r
487 4 Cancel button=Cancelbutton4
\r
488 4 Replace layer button=Replacelayerbutton
\r
489 4 Delete layer button=Deletelayerbutton1
\r
490 4 Optical constants>> button=Opticalconstants..button1
\r
491 4 Edit n&k button=Editn.kbutton
\r
492 4 Smooth opt. const. button=Smoothopt.const.button
\r
493 4 Revert to previous button=Reverttopreviousbutton
\r
494 4 Save button=Savebutton
\r
495 4 Cancel button=Cancelbutton5
\r
497 4 Alloy layers=Alloylayers
\r
498 4 Alloy fraction=Alloyfraction
\r
499 4 Alloy fraction fit box=Alloyfractionfitbox
\r
500 4 Opt. con. fit boxes=Opt.con.fitboxes2
\r
501 4 Optical constants>> button=Opticalconstants..button2
\r
503 4 Temp layers=Templayers
\r
504 4 Temperature=Temperature
\r
505 4 Temperature fit box=Temperaturefitbox
\r
506 3 Alloy-temp layers
\r
507 4 Alloy-temp layers=Alloy.templayers
\r
508 2 Function based layers
\r
509 3 Function based layers=Functionbasedlayers
\r
511 4 Cauchy layer=Cauchylayer
\r
512 4 Opt. con. fit boxes=Opt.con.fitboxes3
\r
513 4 Optical constants>> button=Opticalconstants..button3
\r
514 3 Lorentz oscillator layer
\r
515 4 Lorentz oscillator layer=Lorentzoscillatorlayer
\r
516 4 # of terms=.ofterms
\r
521 3 User-defined dispersion model layer
\r
522 4 User-defined dispersion model layer=User.defineddispersionmodellayer
\r
523 4 Wvl units=Wvlunits
\r
524 4 In terms of=Intermsof
\r
525 4 Operators list>>=Operatorslist..1
\r
528 4 Parameter name=Parametername1
\r
529 4 Parameter value=Parametervalue1
\r
530 4 Value button=Valuebutton1
\r
531 4 Parameter fit box=Parameterfitbox
\r
532 4 Fit button=Fitbutton1
\r
533 4 Delete button=Deletebutton2
\r
534 3 Parametric semiconductor layer
\r
535 4 Parametric semiconductor layer=Parametricsemiconductorlayer
\r
537 3 Composite layers=Compositelayers
\r
538 3 Effective Medium Approximation (EMA) layer
\r
539 4 Effective Medium Approximation (EMA) layer=EffectiveMediumApproximation.EMA.layer
\r
540 4 # of constituents box=.ofconstituentsbox
\r
541 4 Material #1 button=Material.1button1
\r
542 4 Material #2 button=Material.2button1
\r
543 4 Fraction #2 box=Fraction.2box
\r
544 4 Material #3 button=Material.3button
\r
545 4 Fraction #3 box=Fraction.3box
\r
546 4 EMA type setting=EMAtypesetting
\r
547 4 Depolarization factor box=Depolarizationfactorbox
\r
548 3 EMA layer applications
\r
549 4 EMA layer applications=EMAlayerapplications
\r
550 4 Simulate interfacial intermixing=Simulateinterfacialintermixing
\r
551 4 Simulate surface roughness=Simulatesurfaceroughness
\r
552 4 Simulate oxidized surface roughness=Simulateoxidizedsurfaceroughness
\r
553 4 Simulate index shifts=Simulateindexshifts
\r
554 4 Model partially crystallized silicon (polysilicon)=Modelpartiallycrystallizedsilicon.polysilicon.
\r
556 4 Graded layer=Gradedlayer
\r
557 4 Opt. const. calc.=Opt.const.calc.1
\r
558 4 Material #1 button=Material.1button2
\r
559 4 Material #2 button=Material.2button2
\r
561 4 Profile definition=Profiledefinition1
\r
562 4 # of nodes box=.ofnodesbox
\r
563 4 Node position % box=Nodeposition.box
\r
564 4 Value % box=Value.box
\r
565 4 Slices per node box=Slicespernodebox
\r
566 4 Opt. const. calc.=Opt.const.calc.2
\r
567 4 Material button=Materialbutton1
\r
568 4 Profile definition=Profiledefinition2
\r
569 4 Operators list>>=Operatorslist..2
\r
571 4 Parameter name=Parametername2
\r
572 4 Parameter value=Parametervalue2
\r
573 4 Parameter fit=Parameterfit
\r
574 4 Fit button=Fitbutton2
\r
575 4 Value button=Valuebutton2
\r
576 4 Delete button=Deletebutton3
\r
577 4 Slices per layer=Slicesperlayer
\r
578 2 Anisotropic layers
\r
579 3 Anisotropic layers=Anisotropiclayers
\r
580 3 Standard anisotropic layers=Standardanisotropiclayers
\r
581 3 Anisotropic Cauchy layer=AnisotropicCauchylayer
\r
583 3 Specialty layers=Specialtylayers
\r
584 3 Kramers-Kronig layer
\r
585 4 Kramers-Kronig layer=Kramers.Kroniglayer
\r
586 4 Material button=Materialbutton2
\r
587 4 Integration range boxes=Integrationrangeboxes
\r
588 4 Step size box=Stepsizebox
\r
589 4 e1 offset box=e1offsetbox
\r
590 4 Pole #1 position=Pole.1position
\r
591 4 Pole #1 magnitude=Pole.1magnitude
\r
592 4 Pole #2 position=Pole.2position
\r
593 4 Pole #2 magnitude=Pole.2magnitude
\r
595 4 Delay layer=Delaylayer
\r
596 4 Delay time box=Delaytimebox
\r
597 4 Ok button=Okbutton4
\r
598 4 Delete layer button=Deletelayerbutton2
\r
599 3 Virtual interface layer
\r
600 4 Virtual interface layer=Virtualinterfacelayer
\r
601 4 Virtual type setting=Virtualtypesetting
\r
602 4 Fixed at time box=Fixedattimebox
\r
603 4 # of pts to average box=.ofptstoaveragebox
\r
604 4 Running separation box=Runningseparationbox
\r
605 4 Opt. const. fit boxes=Opt.const.fitboxes
\r
606 4 Pseudo opt. constants=Pseudoopt.constants
\r
607 3 Surface roughness layer
\r
608 4 Surface roughness layer=Surfaceroughnesslayer
\r
609 2 Model|DeleteMod command
\r
610 3 Model|DeleteMod command=Model.DeleteModcommand
\r
611 2 Model|Superlattice item
\r
612 3 Model|Superlattice item=Model.Superlatticeitem
\r
613 4 Superlattice #1/#2 enabled=Superlattice.1..2enabled
\r
614 4 Start layer=Startlayer
\r
615 4 End layer=Endlayer
\r
616 4 # of periods=.ofperiods
\r
617 2 Model|Growth item
\r
618 3 Model|Growth item=Model.Growthitem
\r
619 2 Model|Select item
\r
620 3 Model|Select item=Model.Selectitem
\r
621 3 Select model in standard mode
\r
622 4 Select model in standard mode=Selectmodelinstandardmode
\r
623 4 Current model=Currentmodel
\r
624 4 Active in fit=Activeinfit
\r
625 4 Model present=Modelpresent
\r
626 4 Exp. data present=Exp.datapresent
\r
627 3 Multiple models in dynamic-spectroscopic mode
\r
628 4 Multiple models in dynamic-spectroscopic mode=Multiplemodelsindynamic.spectroscopicmode
\r
629 2 Model|Options item
\r
630 3 Model|Options item=Model.Optionsitem
\r
631 3 The model options dialog box
\r
632 4 The model options dialog box=Themodeloptionsdialogbox
\r
633 4 Top layer is ambient=Toplayerisambient
\r
634 4 # of backside reflections box=.ofbacksidereflectionsbox
\r
635 4 % of first reflection collected box=.offirstreflectioncollectedbox
\r
636 4 Polarizer angle for polarized refl./trans. box=Polarizerangleforpolarizedrefl..trans.box
\r
637 4 Window effects retardation box=Windoweffectsretardationbox
\r
638 4 Window effects azimuth box=Windoweffectsazimuthbox
\r
639 4 Wavelength shift box=Wavelengthshiftbox
\r
640 4 Thickness non-uniformity option=Thicknessnon.uniformityoption
\r
641 4 Patterned layer option=Patternedlayeroption
\r
642 4 Light bandwidth option=Lightbandwidthoption
\r
643 4 Angular spread option=Angularspreadoption
\r
644 4 Convolution profile shape setting=Convolutionprofileshapesetting
\r
645 4 Convolution # of points box=Convolution.ofpointsbox
\r
646 4 Fit profile width box=Fitprofilewidthbox
\r
647 1 The Generated Data Window
\r
648 2 Generated Data window overview
\r
649 3 Generated Data window overview=GeneratedDatawindowoverview
\r
650 3 Features displayed in the Generated Data window
\r
651 4 Features displayed in the Generated Data window=FeaturesdisplayedintheGeneratedDatawindow
\r
652 4 Title bar=Titlebar5
\r
653 4 Comment line=Commentline3
\r
654 4 Scroll bar=Scrollbar2
\r
655 4 Type column=Typecolumn2
\r
656 4 Wavelength column=Wavelengthcolumn2
\r
657 4 Angle column=Anglecolumn2
\r
658 4 Data columns=Datacolumns2
\r
659 4 Time column=Timecolumn2
\r
660 3 The Generated Data window menubar
\r
661 4 The Generated Data window menubar=TheGeneratedDatawindowmenubar
\r
662 3 Calculations performed for the different data types
\r
663 4 Calculations performed for the different data types=Calculationsperformedforthedifferentdatatypes
\r
665 4 Simulated data=Simulateddata
\r
666 3 Simulated data standard deviations
\r
667 4 Simulated data standard deviations=Simulateddatastandarddeviations
\r
668 2 Gen_Data|File menu
\r
669 3 Gen_Data|File menu=Gen.Data.Filemenu
\r
670 3 Gen_Data|File|Open_Gen_File item=Gen.Data.File.Open.Gen.Fileitem
\r
671 3 Gen_Data|File|Append_Gen_File item=Gen.Data.File.Append.Gen.Fileitem
\r
672 3 Gen_Data|File|Save_Gen_Data item=Gen.Data.File.Save.Gen.Dataitem
\r
673 3 Gen_Data|File|Comment_Data item=Gen.Data.File.Comment.Dataitem
\r
674 3 Gen_Data|File|Copy_to_Clipboard item=Gen.Data.File.Copy.to.Clipboarditem
\r
675 2 Gen_Data|Range item
\r
676 3 Gen_Data|Range item=Gen.Data.Rangeitem
\r
677 3 The generation range dialog box
\r
678 4 The generation range dialog box=Thegenerationrangedialogbox
\r
679 4 Range setting=Rangesetting
\r
680 4 Angle range=Anglerange
\r
681 4 Wavelength range=Wavelengthrange
\r
682 4 Data type=Datatype3
\r
683 4 Dynamic data=Dynamicdata
\r
684 4 Time increment box=Timeincrementbox
\r
685 4 Random noise box=Randomnoisebox
\r
686 4 Generation mode setting=Generationmodesetting
\r
687 2 Gen_Data|Generate_Data command
\r
688 3 Gen_Data|Generate_Data command=Gen.Data.Generate.Datacommand
\r
689 3 Normal generation mode=Normalgenerationmode
\r
690 3 Sensitivity generation mode
\r
691 4 Sensitivity generation mode=Sensitivitygenerationmode
\r
692 4 Parameter name=Parametername3
\r
693 4 Increment value box=Incrementvaluebox
\r
694 3 Vary parameter generation mode
\r
695 4 Vary parameter generation mode=Varyparametergenerationmode
\r
696 4 Parameter name=Parametername4
\r
697 4 Start box=Startbox
\r
700 2 Gen_Data|Copy_to_Exp command
\r
701 3 Gen_Data|Copy_to_Exp command=Gen.Data.Copy.to.Expcommand
\r
702 2 Gen_Data|Delete_Data command
\r
703 3 Gen_Data|Delete_Data command=Gen.Data.Delete.Datacommand
\r
705 2 Graph window overview
\r
706 3 Graph window overview=Graphwindowoverview
\r
707 3 Features of a 2-D graph
\r
708 4 Features of a 2-D graph=Featuresofa2.Dgraph
\r
711 4 X-axis label=X.axislabel1
\r
713 4 Y1-axis label=Y1.axislabel
\r
715 4 Data curves=Datacurves
\r
716 3 Features of a 3-D graph
\r
717 4 Features of a 3-D graph=Featuresofa3.Dgraph
\r
720 4 X-axis label=X.axislabel2
\r
722 4 Y-axis label=Y.axislabel
\r
724 4 Z-axis label=Z.axislabel
\r
725 3 The Graph window menubar
\r
726 4 The Graph window menubar=TheGraphwindowmenubar
\r
727 3 Preparing formatted graphs
\r
728 4 Preparing formatted graphs=Preparingformattedgraphs
\r
730 3 Graph|File menu=Graph.Filemenu
\r
731 3 Graph|File|Print item=Graph.File.Printitem
\r
732 3 Graph|File|Copy_Graph_to_Clipboard item=Graph.File.Copy.Graph.to.Clipboarditem
\r
733 3 Graph|File|Copy_Data_Points_to_Clipboard item
\r
734 4 Graph|File|Copy_Data_Points_to_Clipboard item=Graph.File.Copy.Data.Points.to.Clipboarditem
\r
735 4 Data format #1=Dataformat.1
\r
736 4 Data format #2=Dataformat.2
\r
737 3 Graph|File|Output_Data_Points_to_Text_File item
\r
738 4 Graph|File|Output_Data_Points_to_Text_File item=Graph.File.Output.Data.Points.to.Text.Fileitem
\r
740 3 Graph|Edit menu=Graph.Editmenu
\r
741 3 Graph|Edit|Titles item
\r
742 4 Graph|Edit|Titles item=Graph.Edit.Titlesitem
\r
748 3 Graph|Edit|Legends item
\r
749 4 Graph|Edit|Legends item=Graph.Edit.Legendsitem
\r
751 4 Legend text=Legendtext
\r
755 4 Black default legends=Blackdefaultlegends
\r
756 4 Suppress legend display=Suppresslegenddisplay
\r
757 3 Graph|Edit|Font item
\r
758 4 Graph|Edit|Font item=Graph.Edit.Fontitem
\r
759 3 Graph|Edit|Scale item
\r
760 4 Graph|Edit|Scale item=Graph.Edit.Scaleitem
\r
762 4 Y1 column=Y1column
\r
763 4 Y2 column=Y2column
\r
764 4 Automatic=Automatic
\r
769 4 # of divisions=.ofdivisions
\r
770 4 Precision box=Precisionbox
\r
771 4 Scale box=Scalebox
\r
772 4 Grid lines vertical=Gridlinesvertical
\r
773 4 Grid lines horizontal=Gridlineshorizontal
\r
774 4 Tick marks=Tickmarks
\r
775 4 Log scale on Y axis=LogscaleonYaxis
\r
777 3 Graph|Data menu=Graph.Datamenu
\r
778 3 Generated and/or experimental data types
\r
779 4 Generated and/or experimental data types=Generatedand.orexperimentaldatatypes
\r
780 4 Generated and experimental=Generatedandexperimental
\r
781 4 Difference between gen. and exp.=Differencebetweengen.andexp.
\r
782 4 Generated only=Generatedonly
\r
783 4 Experimental only=Experimentalonly
\r
784 3 Optical constant data types
\r
785 4 Optical constant data types=Opticalconstantdatatypes
\r
786 4 Current layer (opt. const.)=Currentlayer.opt.const..
\r
787 4 All layers (opt. const.)=Alllayers.opt.const..
\r
788 4 Depth profile (opt. const.)=Depthprofile.opt.const..
\r
789 3 Point by point fit parameters data type
\r
790 4 Point by point fit parameters data type=Pointbypointfitparametersdatatype
\r
791 3 Calibration data type
\r
792 4 Calibration data type=Calibrationdatatype
\r
794 3 Graph|Type menu=Graph.Typemenu
\r
795 3 Displayable data types
\r
796 4 Displayable data types=Displayabledatatypes
\r
799 4 Tan(Psi)=Tan.Psi.
\r
800 4 Cos(Delta)=Cos.Delta.
\r
807 4 Transmission=Transmission
\r
808 4 Reflection=Reflection
\r
809 4 Absorption=Absorption
\r
810 4 Transmitted phase=Transmittedphase
\r
811 4 Neutron reflectivity=Neutronreflectivity
\r
814 3 Graph|Style menu=Graph.Stylemenu
\r
815 3 Graph|Style|2D item
\r
816 4 Graph|Style|2D item=Graph.Style.2Ditem
\r
817 4 Double Y-axis=DoubleY.axis
\r
818 4 Graph as a function of angle=Graphasafunctionofangle
\r
819 4 Trajectory plot=Trajectoryplot
\r
820 4 Plot derivatives=Plotderivatives
\r
821 3 Graph|Style|3D item
\r
822 4 Graph|Style|3D item=Graph.Style.3Ditem
\r
823 4 Elevation=Elevation
\r
824 4 Reverse axis=Reverseaxis
\r
825 4 Color surface=Colorsurface
\r
827 2 Fit window overview
\r
828 3 Fit window overview=Fitwindowoverview
\r
829 3 Features displayed in the Fit window
\r
830 4 Features displayed in the Fit window=FeaturesdisplayedintheFitwindow
\r
831 4 Title bar=Titlebar6
\r
834 4 Parameter names and values=Parameternamesandvalues
\r
837 4 <Esc> exits=.Esc.exits2
\r
838 3 The Fit window menubar
\r
839 4 The Fit window menubar=TheFitwindowmenubar
\r
840 3 Fit parameter naming conventions
\r
841 4 Fit parameter naming conventions=Fitparameternamingconventions
\r
842 4 Thickness=Thickness2
\r
843 4 Optical constants=Opticalconstants
\r
844 4 Cauchy parameters=Cauchyparameters
\r
845 4 EMA layer fraction=EMAlayerfraction
\r
846 3 Fitting optical constants at every wavelength
\r
847 4 Fitting optical constants at every wavelength=Fittingopticalconstantsateverywavelength
\r
849 3 Fit|File menu=Fit.Filemenu
\r
850 3 Fit|File|Copy_to_Clipboard item=Fit.File.Copy.to.Clipboarditem
\r
851 2 Fit|Normal_Fit command
\r
852 3 Fit|Normal_Fit command=Fit.Normal.Fitcommand
\r
853 2 Fit|Pt_by_Pt command
\r
854 3 Fit|Pt_by_Pt command=Fit.Pt.by.Ptcommand
\r
855 3 Point by point fitting of static spectroscopic data
\r
856 4 Point by point fitting of static spectroscopic data=Pointbypointfittingofstaticspectroscopicdata
\r
857 4 Starting position=Startingposition
\r
858 4 # pts to ave.=.ptstoave.1
\r
859 4 Show iterations=Showiterations
\r
860 4 Fit parameter boxes=Fitparameterboxes1
\r
863 3 Point by point fitting of dynamic data
\r
864 4 Point by point fitting of dynamic data=Pointbypointfittingofdynamicdata
\r
865 4 # pts to ave.=.ptstoave.2
\r
866 4 Fit parameter boxes=Fitparameterboxes2
\r
867 2 Fit|Reset command
\r
868 3 Fit|Reset command=Fit.Resetcommand
\r
870 3 Fit|MSE command=Fit.MSEcommand
\r
871 2 Fit|Edit_Parms item
\r
872 3 Fit|Edit_Parms item=Fit.Edit.Parmsitem
\r
873 3 The edit fit parameters dialog box
\r
874 4 The edit fit parameters dialog box=Theeditfitparametersdialogbox
\r
875 4 Parameter list=Parameterlist
\r
876 4 Change selected parms=Changeselectedparms
\r
877 4 Parameter limits=Parameterlimits
\r
878 4 Coupled parameter=Coupledparameter
\r
879 4 Do not fit all parameters option=Donotfitallparametersoption1
\r
880 4 Delete all parms=Deleteallparms
\r
881 3 Range limits on fit parameters
\r
882 4 Range limits on fit parameters=Rangelimitsonfitparameters
\r
883 3 Coupling fit parameters
\r
884 4 Coupling fit parameters=Couplingfitparameters
\r
885 3 Do not fit all parameters option
\r
886 4 Do not fit all parameters option=Donotfitallparametersoption2
\r
887 4 Parameter names=Parameternames
\r
888 4 Total # of parms=Total.ofparms
\r
889 4 Selected parms=Selectedparms
\r
890 4 Select all=Selectall
\r
891 2 Fit|Stats command
\r
892 3 Fit|Stats command=Fit.Statscommand
\r
893 3 The fit statistics dialog box
\r
894 4 The fit statistics dialog box=Thefitstatisticsdialogbox
\r
895 4 Confidence limits=Confidencelimits
\r
896 4 Correlation matrix=Correlationmatrix
\r
897 2 Fit|Defaults item
\r
898 3 Fit|Defaults item=Fit.Defaultsitem
\r
899 3 The fit defaults dialog box
\r
900 4 The fit defaults dialog box=Thefitdefaultsdialogbox
\r
901 4 Fit weighting=Fitweighting
\r
902 4 R&T weighting=R.Tweighting
\r
903 4 Maximum iterations=Maximumiterations
\r
904 4 Minimum MSE=MinimumMSE
\r
905 4 Change in MSE=ChangeinMSE
\r
906 4 Derivative increment=Derivativeincrement
\r
907 3 Weighting of ellipsometric data
\r
908 4 Weighting of ellipsometric data=Weightingofellipsometricdata
\r
909 4 Psi and delta=Psianddelta
\r
910 4 Tan(Psi) and cos(Delta)=Tan.Psi.andcos.Delta.
\r
912 4 Cos(Delta) only=Cos.Delta.only
\r
913 4 <?1> and <?2>=..1.and..2.
\r
914 4 <?1> only=..1.only
\r
915 4 <?2> only=..2.only
\r
917 3 Weighting of reflection / transmission data
\r
918 4 Weighting of reflection / transmission data=Weightingofreflection.transmissiondata
\r
919 1 Quick Start: VASE®
\r
920 2 Overview of the VASE? quick start=OverviewoftheVASE.quickstart
\r
921 2 Power-up and hardware initialization=Power.upandhardwareinitialization
\r
922 2 Initial inspection of the system
\r
923 3 Initial inspection of the system=Initialinspectionofthesystem
\r
924 3 Goniometer settings, vertical VASE? systems=Goniometersettings.verticalVASE.systems
\r
925 3 Goniometer settings, horizontal VASE? systems=Goniometersettings.horizontalVASE.systems
\r
926 3 Detector and monochromator settings=Detectorandmonochromatorsettings
\r
927 3 Correct fiber type=Correctfibertype
\r
928 3 Beam alignment, vertical VASE? instrument=Beamalignment.verticalVASE.instrument
\r
929 3 Beam alignment, horizontal VASE? instrument=Beamalignment.horizontalVASE.instrument
\r
931 3 Sample alignment=Samplealignment1
\r
932 3 Vertical VASE? sample alignment=VerticalVASE.samplealignment
\r
933 3 Horizontal VASE? sample alignment=HorizontalVASE.samplealignment
\r
934 2 Calibration of the VASE?
\r
935 3 Calibration of the VASE?=CalibrationoftheVASE.
\r
936 2 Acquisition of VASE? data
\r
937 3 Acquisition of VASE? data=AcquisitionofVASE.data
\r
939 3 Analysis of data=Analysisofdata
\r
942 1 VASE? Data Acquisition Procedures and Strategies
\r
943 2 Overview=Overview1
\r
944 2 General principles of VASE? data acquisition=GeneralprinciplesofVASE.dataacquisition
\r
945 2 Sample preparation
\r
946 3 Sample preparation=Samplepreparation
\r
947 3 Sample cleaning=Samplecleaning
\r
948 3 Roughening transparent substrates=Rougheningtransparentsubstrates
\r
949 3 Very thin transparent substrates=Verythintransparentsubstrates
\r
950 2 Choice of data type and acquisition parameters
\r
951 3 Choice of data type and acquisition parameters=Choiceofdatatypeandacquisitionparameters
\r
952 3 Choice of spectral range=Choiceofspectralrange
\r
953 3 Choice of angles of incidence=Choiceofanglesofincidence
\r
954 3 Choice of data types=Choiceofdatatypes
\r
955 2 Simulation of optical experiments with WVASE32?
\r
956 3 Simulation of optical experiments with WVASE32?=SimulationofopticalexperimentswithWVASE32.
\r
957 2 Ellipsometric data acquisition
\r
958 3 Ellipsometric data acquisition=Ellipsometricdataacquisition1
\r
959 3 Reflection from the top of the sample=Reflectionfromthetopofthesample
\r
960 3 Reflection from the bottom of the film, beam incident through the substrate=Reflectionfromthebottomofthefilm.beamincidentthroughthesubstrate
\r
961 3 Transmission ellipsometry=Transmissionellipsometry
\r
962 2 Advanced spectroscopic scans
\r
963 3 Advanced spectroscopic scans=Advancedspectroscopicscans
\r
964 2 Acquisition of dynamic data
\r
965 3 Acquisition of dynamic data=Acquisitionofdynamicdata
\r
966 2 Acquisition of intensity transmittance data
\r
967 3 Acquisition of intensity transmittance data=Acquisitionofintensitytransmittancedata
\r
968 2 Acquisition of intensity reflectance data
\r
969 3 Acquisition of intensity reflectance data=Acquisitionofintensityreflectancedata
\r
970 1 VASE? Data Analysis
\r
971 2 Introduction=Introduction2
\r
972 2 Modeling of experimental optical data
\r
973 3 Modeling of experimental optical data=Modelingofexperimentalopticaldata
\r
974 3 Building the 'most physical' model=Buildingthe.mostphysical.model
\r
975 3 Correlation and uniquenes=Correlationanduniquenes
\r
976 3 Interpretation of confidence limits=Interpretationofconfidencelimits2
\r
977 3 Errors due to random noise=Errorsduetorandomnoise
\r
978 3 Systematic errors due to model deficiencies=Systematicerrorsduetomodeldeficiencies
\r
979 3 Assessing the quality of a fit=Assessingthequalityofafit
\r
980 3 Assessing the quality of a best-fit model=Assessingthequalityofabest.fitmodel
\r
982 3 Bare substrates=Baresubstrates
\r
983 3 Opaque bulk samples=Opaquebulksamples
\r
984 3 Transparent bulk samples
\r
985 4 Transparent bulk samples=Transparentbulksamples
\r
987 4 Glass with UV absorption edge=GlasswithUVabsorptionedge
\r
988 4 Float glass=Floatglass
\r
989 4 Plastics=Plastics
\r
990 4 Semiconductors below the bandgap energy=Semiconductorsbelowthebandgapenergy
\r
991 3 Very thin transparent bulk samples
\r
992 4 Very thin transparent bulk samples=Verythintransparentbulksamples
\r
993 3 Anisotropic bulk samples
\r
994 4 Anisotropic bulk samples=Anisotropicbulksamples
\r
995 4 c-oriented=c.oriented
\r
996 4 a- or b-oriented=a.orb.oriented
\r
997 3 Modeling surface oxidation and roughness
\r
998 4 Modeling surface oxidation and roughness=Modelingsurfaceoxidationandroughness
\r
999 2 Single films - general principles
\r
1000 3 Single films - general principles=Singlefilms.generalprinciples
\r
1001 3 What do we want to measure?=Whatdowewanttomeasure.
\r
1002 3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates1
\r
1003 3 Substrate characterization=Substratecharacterization
\r
1004 3 Quick analysis with reference optical constants=Quickanalysiswithreferenceopticalconstants
\r
1005 3 Optical constant determination with the film thickness known=Opticalconstantdeterminationwiththefilmthicknessknown
\r
1006 3 Parameterization of the film optical constants=Parameterizationofthefilmopticalconstants
\r
1007 3 EMA models and surface roughness=EMAmodelsandsurfaceroughness
\r
1008 3 Film inhomogeneity=Filminhomogeneity
\r
1009 2 Single transparent or partially transparent films
\r
1010 3 Single transparent or partially transparent films=Singletransparentorpartiallytransparentfilms
\r
1011 3 Analysis with standard optical constants=Analysiswithstandardopticalconstants
\r
1012 3 Direct fit for n and t=Directfitfornandt
\r
1013 3 Cauchy parameterization to determine film thickness=Cauchyparameterizationtodeterminefilmthickness
\r
1014 3 Lorentz oscillators - Drude model for free electron absorption=Lorentzoscillators.Drudemodelforfreeelectronabsorption
\r
1015 3 User-defined dispersion models=User.defineddispersionmodels
\r
1016 3 Surface roughness=Surfaceroughness1
\r
1017 3 Index grading=Indexgrading
\r
1018 3 Anisotropic films
\r
1019 4 Anisotropic films=Anisotropicfilms
\r
1020 4 c-axis perpendicular to the film plane=c.axisperpendiculartothefilmplane
\r
1021 4 c-axis in the film plane=c.axisinthefilmplane
\r
1022 3 Very thin transparent films
\r
1023 4 Very thin transparent films=Verythintransparentfilms
\r
1024 3 Very thick transparent films
\r
1025 4 Very thick transparent films=Verythicktransparentfilms
\r
1026 2 Single absorbing films
\r
1027 3 Single absorbing films=Singleabsorbingfilms
\r
1028 3 Opaque substrates vs. transparent substrates=Opaquesubstratesvs.transparentsubstrates
\r
1029 3 Analysis of VASE? and T data for films on transparent substrates=AnalysisofVASE.andTdataforfilmsontransparentsubstrates
\r
1030 3 Lorentz oscillator models=Lorentzoscillatormodels
\r
1031 3 Surface oxidation of the film=Surfaceoxidationofthefilm
\r
1032 3 Surface roughness=Surfaceroughness2
\r
1033 2 Single films - special
\r
1034 3 Single films - special=Singlefilms.special
\r
1035 3 Alloy models=Alloymodels
\r
1036 3 Transparent conducting oxides=Transparentconductingoxides
\r
1037 3 Polycrystalline silicon=Polycrystallinesilicon
\r
1038 2 Single films - advanced modeling techniques
\r
1039 3 Single films - advanced modeling techniques=Singlefilms.advancedmodelingtechniques
\r
1040 3 Optical constant parameterization=Opticalconstantparameterization
\r
1042 4 Non-ideal films=Non.idealfilms
\r
1043 4 Graded dielectric films=Gradeddielectricfilms
\r
1044 4 Graded absorbing films=Gradedabsorbingfilms
\r
1045 2 Two layer systems
\r
1046 3 Two layer systems=Twolayersystems
\r
1047 3 General principles
\r
1048 4 General principles=Generalprinciples1
\r
1049 4 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates2
\r
1050 4 Characterization of reference films=Characterizationofreferencefilms
\r
1051 4 Surface and interfacial roughness=Surfaceandinterfacialroughness
\r
1052 4 Indistinct interfaces between the films=Indistinctinterfacesbetweenthefilms
\r
1053 3 Dielectric / dielectric / substrate
\r
1054 4 Dielectric / dielectric / substrate=Dielectric.dielectric.substrate
\r
1055 3 Dielectric / metal / substrate
\r
1056 4 Dielectric / metal / substrate=Dielectric.metal.substrate
\r
1057 3 Metal / dielectric / substrate
\r
1058 4 Metal / dielectric / substrate=Metal.dielectric.substrate
\r
1059 3 Metal / metal / substrate
\r
1060 4 Metal / metal / substrate=Metal.metal.substrate
\r
1061 2 Multilayer structures
\r
1062 3 Multilayer structures=Multilayerstructures
\r
1063 3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates3
\r
1064 3 Choice of optimal experimental data=Choiceofoptimalexperimentaldata
\r
1065 3 Transparent layers=Transparentlayers
\r
1066 3 Superlattices and other periodic structures=Superlatticesandotherperiodicstructures
\r
1067 3 Use of parametric models to suppress correlation=Useofparametricmodelstosuppresscorrelation
\r
1068 2 Advanced modeling techniques
\r
1069 3 Advanced modeling techniques=Advancedmodelingtechniques
\r
1070 3 Partial polarization effects and other non-idealities
\r
1071 4 Partial polarization effects and other non-idealities=Partialpolarizationeffectsandothernon.idealities
\r
1072 4 Back-surface reflection=Back.surfacereflection
\r
1073 4 Film thickness non-uniformity=Filmthicknessnon.uniformity
\r
1074 4 Patterned films and structures=Patternedfilmsandstructures
\r
1075 4 Monochromator bandwidth effects=Monochromatorbandwidtheffects
\r
1076 4 Angular spread of the beam entering the detector=Angularspreadofthebeamenteringthedetector
\r
1077 3 Use of multiple optical data types
\r
1078 4 Use of multiple optical data types=Useofmultipleopticaldatatypes
\r
1079 3 Fit parameter coupling and limiting
\r
1080 4 Fit parameter coupling and limiting=Fitparametercouplingandlimiting
\r
1081 3 Multiple sample analysis
\r
1082 4 Multiple sample analysis=Multiplesampleanalysis
\r
1083 2 The parametric semiconductor model
\r
1084 3 The parametric semiconductor model=Theparametricsemiconductormodel
\r
1085 3 Mathematical description=Mathematicaldescription
\r
1086 3 Parametric semiconductor model for GaAs=ParametricsemiconductormodelforGaAs
\r
1087 3 Parametric semiconductor model fits to other materials=Parametricsemiconductormodelfitstoothermaterials
\r
1088 3 Using the parametric semiconductor layer within WVASE32?=UsingtheparametricsemiconductorlayerwithinWVASE32.
\r
1089 3 Fitting the silicon dielectric function with the parametric semiconductor model=Fittingthesilicondielectricfunctionwiththeparametricsemiconductormodel
\r
1090 1 VASE? Data Analysis Examples
\r
1091 2 Overview=Overview2
\r
1092 2 Important WVASE32? procedures
\r
1093 3 Important WVASE32? procedures=ImportantWVASE32.procedures
\r
1094 3 Activate a WVASE32? window=ActivateaWVASE32.window
\r
1095 3 Loading an experimental data file=Loadinganexperimentaldatafile
\r
1096 3 Saving an experimental data file=Savinganexperimentaldatafile
\r
1097 3 Adding a substrate to the model=Addingasubstratetothemodel
\r
1098 3 Adding a layer to the model=Addingalayertothemodel
\r
1099 3 Viewing the optical constants of a layer=Viewingtheopticalconstantsofalayer
\r
1100 3 Saving the optical constants of a layer=Savingtheopticalconstantsofalayer
\r
1101 3 Saving a model=Savingamodel
\r
1102 3 Loading a model=Loadingamodel
\r
1103 3 Changing data types=Changingdatatypes
\r
1104 3 Setting the range of active data=Settingtherangeofactivedata
\r
1105 3 Defining layer thicknesses as fit variables=Defininglayerthicknessesasfitvariables
\r
1106 3 Fitting for the optical constants of a layer=Fittingfortheopticalconstantsofalayer
\r
1107 3 Fitting for parameters in a function-based layer dispersion model=Fittingforparametersinafunction.basedlayerdispersionmodel
\r
1108 3 Setting the fit weighting=Settingthefitweighting
\r
1109 3 Performing a normal fit=Performinganormalfit
\r
1110 3 Performing a point-by-point fit=Performingapoint.by.pointfit
\r
1111 3 Viewing the fit statistics after a fit=Viewingthefitstatisticsafterafit
\r
1112 3 Generating data from the model=Generatingdatafromthemodel
\r
1113 3 Choosing the set of data to be graphed=Choosingthesetofdatatobegraphed
\r
1114 3 Choosing the type of data to be graphed=Choosingthetypeofdatatobegraphed
\r
1115 3 Comparing different sets of optical constants=Comparingdifferentsetsofopticalconstants
\r
1116 3 Deleting all existing fit parameters=Deletingallexistingfitparameters
\r
1118 3 Troubleshooting=Troubleshooting
\r
1119 3 Singular matrix error=Singularmatrixerror
\r
1120 3 Obviously incorrect layer thicknesses=Obviouslyincorrectlayerthicknesses
\r
1121 3 Unphysical optical constants=Unphysicalopticalconstants
\r
1122 3 Tiny MSE values=TinyMSEvalues
\r
1123 3 Huge MSE values=HugeMSEvalues
\r
1124 3 Huge 90% confidence limits=Huge90.confidencelimits
\r
1125 3 'NAN' displayed for correlation matrix element=.NAN.displayedforcorrelationmatrixelement
\r
1126 3 Can't reproduce example analysis results=Can.treproduceexampleanalysisresults
\r
1127 3 Abrupt discontinuity in optical constants=Abruptdiscontinuityinopticalconstants
\r
1128 3 Abrupt discontinuity in EMA optical constants=AbruptdiscontinuityinEMAopticalconstants
\r
1129 3 Strange behaviour using anisotropic Cauchy layer=StrangebehaviourusinganisotropicCauchylayer
\r
1130 3 Very large roughness thickness=Verylargeroughnessthickness
\r
1131 2 WVASE32? settings for the examples
\r
1132 3 WVASE32? settings for the examples=WVASE32.settingsfortheexamples
\r
1133 3 Memory allocation=Memoryallocation
\r
1134 3 Fit defaults=Fitdefaults
\r
1135 3 Global units=Globalunits
\r
1136 2 Example 1: Bare silicon wafer (?)
\r
1137 3 Example 1: Bare silicon wafer (?)=Example1.Baresiliconwafer...
\r
1138 3 Determination of native oxide thickness=Determinationofnativeoxidethickness
\r
1139 3 Optical constant determination with no native oxide=Opticalconstantdeterminationwithnonativeoxide
\r
1140 3 Optical constant determination with native oxide=Opticalconstantdeterminationwithnativeoxide
\r
1141 3 Further experiments=Furtherexperiments1
\r
1142 2 Example 2: Optically thick chromium film (?)
\r
1143 3 Example 2: Optically thick chromium film (?)=Example2.Opticallythickchromiumfilm...
\r
1144 3 Determination of optical constants with no native oxide=Determinationofopticalconstantswithnonativeoxide
\r
1145 3 Determination of optical constants with native oxide=Determinationofopticalconstantswithnativeoxide
\r
1146 3 Further experiments=Furtherexperiments2
\r
1147 2 Example 3: Bulk HgCdTe (??)
\r
1148 3 Example 3: Bulk HgCdTe (??)=Example3.BulkHgCdTe....
\r
1149 3 Determination of alloy fraction and surface roughness=Determinationofalloyfractionandsurfaceroughness
\r
1150 3 Further experiments=Furtherexperiments3
\r
1151 2 Example 4: Uncoated glass cover slip (???)
\r
1152 3 Example 4: Uncoated glass cover slip (???)=Example4.Uncoatedglasscoverslip.....
\r
1153 3 General principles=Generalprinciples2
\r
1154 3 Analysis of psi to obtain the glass index=Analysisofpsitoobtaintheglassindex
\r
1155 3 Analysis of transmission to obtain the extinction coefficient=Analysisoftransmissiontoobtaintheextinctioncoefficient
\r
1156 3 Further experiments=Furtherexperiments4
\r
1157 2 Example 5: Organic film on silicon (??)
\r
1158 3 Example 5: Organic film on silicon (??)=Example5.Organicfilmonsilicon....
\r
1159 3 General information=Generalinformation
\r
1160 3 Cauchy fit for thickness and index=Cauchyfitforthicknessandindex
\r
1161 3 Determination of optical constants with thickness fixed=Determinationofopticalconstantswiththicknessfixed
\r
1162 3 Further experiments=Furtherexperiments5
\r
1163 2 Example 6: Anisotropic organic film on silicon (???)
\r
1164 3 Example 6: Anisotropic organic film on silicon (???)=Example6.Anisotropicorganicfilmonsilicon.....
\r
1165 3 Anisotropic Cauchy fit for thickness and index=AnisotropicCauchyfitforthicknessandindex
\r
1166 3 Direct fit for isotropic optical constants in the UV=DirectfitforisotropicopticalconstantsintheUV
\r
1167 3 Further experiments=Furtherexperiments6
\r
1168 2 Example 7: Silver film on fused silica (??)
\r
1169 3 Example 7: Silver film on fused silica (??)=Example7.Silverfilmonfusedsilica....
\r
1170 3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants1
\r
1171 3 Further experiments=Furtherexperiments7
\r
1172 2 Example 8: Indium tin oxide (ITO) on glass (?????)
\r
1173 3 Example 8: Indium tin oxide (ITO) on glass (?????)=Example8.Indiumtinoxide.ITO.onglass.......
\r
1174 3 Uniform Lorentz oscillator layer model=UniformLorentzoscillatorlayermodel
\r
1175 3 Graded Lorentz oscillator layer model=GradedLorentzoscillatorlayermodel
\r
1176 3 Further experiments=Furtherexperiments8
\r
1177 2 Example 9: Diamond-like carbon (DLC) on glass (??)
\r
1178 3 Example 9: Diamond-like carbon (DLC) on glass (??)=Example9.Diamond.likecarbon.DLC.onglass....
\r
1179 3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants2
\r
1180 3 Further experiments=Furtherexperiments9
\r
1181 2 Example 10: GaAs / AlGaAs / GaAs (?)
\r
1182 3 Example 10: GaAs / AlGaAs / GaAs (?)=Example10.GaAs.AlGaAs.GaAs...
\r
1183 3 Determination of AlGaAs alloy fraction and thickness=DeterminationofAlGaAsalloyfractionandthickness
\r
1184 3 Further experiments=Furtherexperiments10
\r
1185 2 Example 11: Polycrystalline silicon / SiO2 / silicon (????)
\r
1186 3 Example 11: Polycrystalline silicon / SiO2 / silicon (????)=Example11.Polycrystallinesilicon.SiO2.silicon......
\r
1187 3 EMA model for poly-Si=EMAmodelforpoly.Si1
\r
1188 3 Parametric semiconductor model for poly-Si=Parametricsemiconductormodelforpoly.Si
\r
1189 3 Further experiments=Furtherexperiments11
\r
1190 2 Example 12: TiN / SiO2 / silicon (??)
\r
1191 3 Example 12: TiN / SiO2 / silicon (??)=Example12.TiN.SiO2.silicon....
\r
1192 3 Determination of both film thicknesses and the TiN optical constants=DeterminationofbothfilmthicknessesandtheTiNopticalconstants
\r
1193 3 Further experiments=Furtherexperiments12
\r
1194 2 Example 13: Five layer high-low stack on silicon (???)
\r
1195 3 Example 13: Five layer high-low stack on silicon (???)=Example13.Fivelayerhigh.lowstackonsilicon.....
\r
1196 3 Determination of layer thicknesses and index spectra=Determinationoflayerthicknessesandindexspectra
\r
1197 3 Further experiments=Furtherexperiments13
\r
1198 2 Example 14: SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???)
\r
1199 3 Example 14: SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???)=Example14.SiO2.Si3N4.SiO2.poly.Si.SiO2.Si.....
\r
1200 3 EMA model for poly-Si=EMAmodelforpoly.Si2
\r
1201 3 Further experiments=Furtherexperiments14
\r
1202 2 Example 15: Thermal oxides on silicon - multiple sample analysis (?????)
\r
1203 3 Example 15: Thermal oxides on silicon - multiple sample analysis (?????)=Example15.Thermaloxidesonsilicon.multiplesampleanalysis.......
\r
1204 3 Direct fit for silicon optical constants=Directfitforsiliconopticalconstants
\r
1205 3 Parametric semiconductor model for silicon=Parametricsemiconductormodelforsilicon
\r
1206 3 Inclusion of thin interfacial layer
\r
1207 4 Inclusion of thin interfacial layer=Inclusionofthininterfaciallayer
\r
1208 4 Further experiments=Furtherexperiments15
\r
1209 1 Quick Start: M-44®
\r
1210 2 Quick start overview for M-44® systems
\r
1211 3 Quick start overview for M-44® systems=QuickstartoverviewforM.44rsystems
\r
1212 3 System alignment=Systemalignment1
\r
1213 3 System calibration=Systemcalibration1
\r
1214 3 Sample alignment=Samplealignment2
\r
1215 3 Sample calibration=Samplecalibration1
\r
1217 3 Basic setup=Basicsetup
\r
1218 2 Basic system alignment
\r
1219 3 Basic system alignment=Basicsystemalignment
\r
1220 2 Fundamental system calibration
\r
1221 3 Fundamental system calibration=Fundamentalsystemcalibration
\r
1222 2 Sample alignment
\r
1223 3 Sample alignment=Samplealignment3
\r
1224 2 Normal system calibration
\r
1225 3 Normal system calibration=Normalsystemcalibration
\r
1226 2 Ex-situ data acquisition
\r
1227 3 Ex-situ data acquisition=Ex.situdataacquisition
\r
1228 2 Ex-situ data analysis
\r
1229 3 Ex-situ data analysis=Ex.situdataanalysis
\r
1230 2 In-situ data acquisition
\r
1231 3 In-situ data acquisition=In.situdataacquisition
\r
1232 1 M-44? Data Acquisition Procedures and Strategies
\r
1233 2 Overview=Overview3
\r
1234 2 Ex-situ operation
\r
1235 3 Ex-situ operation=Ex.situoperation
\r
1236 3 Powering up the system=Poweringupthesystem
\r
1237 3 Calibration and alignment procedures
\r
1238 4 Calibration and alignment procedures=Calibrationandalignmentprocedures
\r
1239 4 System alignment=Systemalignment2
\r
1240 4 System calibration=Systemcalibration2
\r
1241 4 Sample alignment=Samplealignment4
\r
1242 4 Sample calibration=Samplecalibration2
\r
1243 3 System alignment
\r
1244 4 System alignment=Systemalignment3
\r
1245 3 System calibration
\r
1246 4 System calibration=Systemcalibration3
\r
1247 3 Sample alignment
\r
1248 4 Sample alignment=Samplealignment5
\r
1249 3 Sample calibration
\r
1250 4 Sample calibration=Samplecalibration3
\r
1251 3 Ellipsometric data acquisition
\r
1252 4 Ellipsometric data acquisition=Ellipsometricdataacquisition2
\r
1253 3 Turning off the M-44? system after data acquisition
\r
1254 4 Turning off the M-44? system after data acquisition=TurningofftheM.44.systemafterdataacquisition
\r
1255 2 In-situ operation
\r
1256 3 In-situ operation=In.situoperation
\r
1257 3 Removal of the M-44? from the multiple angle base=RemovaloftheM.44.fromthemultipleanglebase
\r
1258 3 Window hardware requirements for a UHV chamber=WindowhardwarerequirementsforaUHVchamber
\r
1259 3 Installation of the window mounts on the process chamber=Installationofthewindowmountsontheprocesschamber
\r
1260 3 Installation of the M-44? on the window hardware=InstallationoftheM.44.onthewindowhardware
\r
1261 3 In-situ sample alignment=In.situsamplealignment
\r
1262 3 In-situ sample calibration=In.situsamplecalibration
\r
1263 3 Ellipsometric data acquisition=Ellipsometricdataacquisition3
\r
1264 3 Real-time feedback control of processes=Real.timefeedbackcontrolofprocesses
\r
1265 1 Dynamic Data Analysis
\r
1266 2 In-situ, real-time VASE? data
\r
1267 3 In-situ, real-time VASE? data=In.situ.real.timeVASE.data
\r
1268 3 Etching of SiO2 on silicon=EtchingofSiO2onsilicon
\r
1269 3 MBE growth of III-V film=MBEgrowthofIII.Vfilm
\r
1270 3 MBE growth of 2-layer AlGaAs structure=MBEgrowthof2.layerAlGaAsstructure
\r
1271 2 In-situ, real-time M-44? data
\r
1272 3 In-situ, real-time M-44? data=In.situ.real.timeM.44.data
\r
1273 3 DLC etching by electron cyclotron resonance (ECR)=DLCetchingbyelectroncyclotronresonance.ECR.
\r
1274 3 GaAs and AlGaAs growth at 600°C
\r
1275 4 GaAs and AlGaAs growth at 600°C=GaAsandAlGaAsgrowthat600.C
\r
1276 4 Determination of the substrate optical constants at 600°C=Determinationofthesubstrateopticalconstantsat600.C
\r
1277 4 Growth of Al0.1Ga0.9As on GaAs at 600°C=GrowthofAl0.1Ga0.9AsonGaAsat600.C
\r
1278 4 GaAs layer=GaAslayer
\r
1279 3 Growth of AlGaAs/GaAs/AlGaAs quantum wells
\r
1280 4 Growth of AlGaAs/GaAs/AlGaAs quantum wells=GrowthofAlGaAs.GaAs.AlGaAsquantumwells
\r
1281 4 500 Angstrom AlGaAs layer=500AngstromAlGaAslayer
\r
1282 4 100 Angstrom GaAs Layer=100AngstromGaAsLayer
\r
1283 3 Growth of ZnS/cryolite multilayer stack on BK7 glass
\r
1284 4 Growth of ZnS/cryolite multilayer stack on BK7 glass=GrowthofZnS.cryolitemultilayerstackonBK7glass
\r
1285 4 Stage 1: Determination of the angle of incidence=Stage1.Determinationoftheangleofincidence
\r
1286 4 Stage 2: Determination of the film optical constants and the first six layer thicknesses=Stage2.Determinationofthefilmopticalconstantsandthefirstsixlayerthicknesses
\r
1287 4 Stage 3: Determination of the remaining layer thicknesses=Stage3.Determinationoftheremaininglayerthicknesses
\r
1288 1 Appendix A: Installation of WVASE32?
\r
1289 2 System requirements=Systemrequirements
\r
1290 2 Installation of WVASE32? and Win32s
\r
1291 3 Installation of WVASE32? and Win32s=InstallationofWVASE32.andWin32s
\r
1292 3 Win32s installation=Win32sinstallation
\r
1293 3 WVASE32? installation=WVASE32.installation
\r
1294 3 Special instructions for upgrade customers=Specialinstructionsforupgradecustomers
\r
1295 3 Special instructions for hardware customers=Specialinstructionsforhardwarecustomers
\r
1296 1 Appendix B: Analysis File Formats
\r
1297 2 Experimental and generated data files
\r
1298 3 Experimental and generated data files=Experimentalandgenerateddatafiles
\r
1299 3 Ellipsometric data=Ellipsometricdata
\r
1300 3 Reflection and transmission data=Reflectionandtransmissiondata
\r
1301 3 Neutron reflection data=Neutronreflectiondata
\r
1302 3 Experimental data file examples=Experimentaldatafileexamples
\r
1303 2 Optical constant files (material files)
\r
1304 3 Optical constant files (material files)=Opticalconstantfiles.materialfiles.
\r
1305 3 Interpolation table=Interpolationtable
\r
1306 3 Semiconductor alloy=Semiconductoralloy
\r
1307 3 Temperature dependent=Temperaturedependent
\r
1308 1 Appendix C: Configuration File Formats
\r
1309 2 Overview=Overview4
\r
1310 2 WVASE.CNF=WVASE.CNF
\r
1311 2 HARDWARE.CNF=HARDWARE.CNF
\r
1312 1 Glossary of Terms
\r
1313 2 Glossary of Terms=GlossaryOfTerms.D2H
\r