Testing Ellipsometer with calibration wafer
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 02 10:33:33 2012]
Original[si_test.dat]
Angstroms
4000.000000	65.000000	25.842506	167.0533	0.0155809	0.177065
5000.000000	65.000000	20.235922	170.56262	0.0116777	0.219329
6000.000000	65.000000	18.132879	171.83423	0.0107136	0.254831
7000.000000	65.000000	17.059975	172.11714	0.0102658	0.266702
4000.000000	70.000000	20.312319	160.75272	0.0154761	0.143902
5000.000000	70.000000	13.630883	163.81598	0.00851043	0.133274
6000.000000	70.000000	11.182261	165.36273	0.0072666	0.150898
7000.000000	70.000000	9.9043617	165.54015	0.00706528	0.166848
4000.000000	75.000000	13.141752	145.59216	0.0183561	0.144931
5000.000000	75.000000	5.6647544	133.53009	0.00551169	0.0716936
6000.000000	75.000000	3.3658845	115.49657	0.00639433	0.083641
7000.000000	75.000000	2.4735098	94.62114	0.0106218	0.115605