Calibration Wafer
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Feb 06 15:47:40 2012]
Original[calibration_si.dat]
Angstroms
3000.000000	75.000000	28.549303	117.28966	0.430163	1.15135
3050.000000	75.000000	26.126379	117.17491	0.309719	0.876811
3100.000000	75.000000	25.701864	115.44431	0.247675	0.701738
3150.000000	75.000000	24.474777	115.76173	0.183936	0.540398
3200.000000	75.000000	24.156651	115.89487	0.152335	0.453438
3250.000000	75.000000	23.783367	116.34887	0.120628	0.364601
3300.000000	75.000000	23.245188	117.3326	0.0980612	0.303981
3350.000000	75.000000	23.026472	117.73214	0.0826686	0.259416
3400.000000	75.000000	22.671682	119.40088	0.0681286	0.219792
3450.000000	75.000000	22.558371	120.1098	0.0564887	0.184232
3500.000000	75.000000	22.445713	121.12538	0.0475148	0.157194
3550.000000	75.000000	22.642271	123.60079	0.0405269	0.136893
3600.000000	75.000000	22.853458	126.96262	0.0353092	0.123451
3650.000000	75.000000	22.628443	132.62883	0.0310903	0.118947
3700.000000	75.000000	21.578161	139.00424	0.0272173	0.121125
3750.000000	75.000000	19.885717	142.32521	0.0243626	0.12442
3800.000000	75.000000	18.142447	145.37878	0.0216961	0.128834
3850.000000	75.000000	16.535406	147.12115	0.0190912	0.128691
3900.000000	75.000000	15.282735	147.08716	0.0170321	0.123138
3950.000000	75.000000	14.266438	147.25352	0.0152384	0.117846
4000.000000	75.000000	13.308693	147.28548	0.0136506	0.112646
4050.000000	75.000000	12.539703	146.92683	0.012242	0.105553
4100.000000	75.000000	11.783708	147.27222	0.0115041	0.106357
4150.000000	75.000000	11.156564	146.6358	0.0103091	0.0985154
4200.000000	75.000000	10.578347	145.67133	0.0106491	0.104575
4250.000000	75.000000	10.082393	145.29361	0.00985724	0.100255
4300.000000	75.000000	9.6430092	144.59552	0.00957877	0.100068
4350.000000	75.000000	9.2360249	143.68483	0.00884792	0.0941601
4400.000000	75.000000	8.7885971	143.39709	0.00808762	0.0895062
4450.000000	75.000000	8.4515181	142.96419	0.00765761	0.0869375
4500.000000	75.000000	8.0687008	142.63054	0.00689581	0.08099
4550.000000	75.000000	7.7218361	141.9724	0.00673376	0.080985
4600.000000	75.000000	7.4414859	141.39764	0.00629067	0.0771204
4650.000000	75.000000	7.1586919	140.35165	0.00590052	0.0730566
4700.000000	75.000000	6.9185824	139.75745	0.00558129	0.0702045
4750.000000	75.000000	6.6519108	139.26457	0.00566412	0.0728329
4800.000000	75.000000	6.4230871	138.4789	0.00576956	0.0750685
4850.000000	75.000000	6.1986117	137.97017	0.00555832	0.0736272
4900.000000	75.000000	5.9795313	137.52026	0.00556144	0.0750935
4950.000000	75.000000	5.7917142	136.60928	0.00537526	0.0730062
5000.000000	75.000000	5.6103511	135.85153	0.00545165	0.0747018
5050.000000	75.000000	5.4280925	134.69389	0.00539938	0.0740839
5100.000000	75.000000	5.2593031	134.50923	0.00536491	0.0751
5150.000000	75.000000	5.0777035	133.24477	0.00533126	0.0746482
5200.000000	75.000000	4.9261479	132.65565	0.00531492	0.0751851
5250.000000	75.000000	4.7937326	131.99419	0.00530897	0.0755777
5300.000000	75.000000	4.6467223	130.84805	0.00532647	0.075764
5350.000000	75.000000	4.5380754	129.91966	0.00534696	0.0759126
5400.000000	75.000000	4.3983274	128.7886	0.00538481	0.0763935
5450.000000	75.000000	4.2784128	128.09538	0.0054042	0.0770637
5500.000000	75.000000	4.1461825	127.49039	0.00544232	0.0783206
5550.000000	75.000000	4.0523567	126.58267	0.00549232	0.0788267
5600.000000	75.000000	3.9303472	125.52081	0.0055646	0.0797919
5650.000000	75.000000	3.8242803	124.49376	0.00564446	0.0807292
5700.000000	75.000000	3.6952479	123.85548	0.00571535	0.0824916
5750.000000	75.000000	3.6400232	122.50233	0.00581276	0.0824747
5800.000000	75.000000	3.5539153	121.6181	0.00590675	0.083587
5850.000000	75.000000	3.4265497	120.97737	0.00601468	0.0859063
5900.000000	75.000000	3.4453428	118.98569	0.00615114	0.0842995
5950.000000	75.000000	3.3179293	118.85745	0.0062723	0.0875862
6000.000000	75.000000	3.2386012	117.66785	0.00661454	0.0915006
6050.000000	75.000000	3.1796122	116.94576	0.00664566	0.0915764
6100.000000	75.000000	3.107759	115.62932	0.00677976	0.0922126
6150.000000	75.000000	3.0317245	114.54662	0.00691483	0.0933081
6200.000000	75.000000	2.9775805	113.51713	0.00707263	0.0944358
6250.000000	75.000000	2.9319923	112.51187	0.00726544	0.0959043
6300.000000	75.000000	2.8794537	111.61867	0.00748918	0.0980441
6350.000000	75.000000	2.8222919	109.85087	0.0078317	0.100142
6400.000000	75.000000	2.7709272	109.21078	0.00811797	0.1034
6450.000000	75.000000	2.6686714	108.42262	0.00851764	0.108588
6500.000000	75.000000	2.681392	106.76665	0.00868264	0.107283
6550.000000	75.000000	2.6479535	105.50875	0.00911077	0.11069
6600.000000	75.000000	2.5128276	104.9517	0.00962152	0.117839
6650.000000	75.000000	2.5624721	103.45406	0.00972623	0.1155
6700.000000	75.000000	2.5500016	102.25524	0.00989701	0.115562
6750.000000	75.000000	2.4977834	101.84543	0.0101403	0.118336
6800.000000	75.000000	2.418339	100.553	0.0105961	0.122334
6850.000000	75.000000	2.4282506	98.988373	0.0104715	0.118301
6900.000000	75.000000	2.388341	98.373581	0.0109272	0.122927
6950.000000	75.000000	2.3506131	97.16465	0.0115784	0.128843
7000.000000	75.000000	2.2882867	95.867821	0.0125402	0.13831
7050.000000	75.000000	2.3171115	94.698029	0.0128905	0.140547
7100.000000	75.000000	2.2944198	93.612755	0.0131875	0.142916
7150.000000	75.000000	2.2493937	92.696228	0.013153	0.142159
7200.000000	75.000000	2.1901474	91.447449	0.0139857	0.150862
7250.000000	75.000000	2.2028439	90.475906	0.0148396	0.159723
7300.000000	75.000000	2.1716094	89.703468	0.0147689	0.159138
7350.000000	75.000000	2.1224172	88.656693	0.0143091	0.15473
7400.000000	75.000000	2.1629908	87.479744	0.0154873	0.167898
7450.000000	75.000000	2.1206119	86.020996	0.0159641	0.174938
7500.000000	75.000000	2.1066377	84.920486	0.0165326	0.182999
7550.000000	75.000000	2.0929744	83.102631	0.0172934	0.19548
7600.000000	75.000000	2.1008039	83.466743	0.0177701	0.199859
7650.000000	75.000000	2.0629132	82.142311	0.0128646	0.147674
7700.000000	75.000000	2.0085824	81.695549	0.0192401	0.223454
7750.000000	75.000000	2.0088184	79.37381	0.0217292	0.262736
7800.000000	75.000000	2.02161	79.938713	0.0239258	0.28585
7850.000000	75.000000	2.1678159	78.552574	0.0232261	0.27951
7900.000000	75.000000	1.9742153	76.994522	0.0216042	0.275668
7950.000000	75.000000	2.0276327	75.875969	0.0235861	0.305712
8000.000000	75.000000	2.0663972	75.237701	0.022294	0.291106