uv scan Si)2 Wafer 250nm to 1000nm
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Mar 06 15:53:23 2012]
Original[calibration_scan.dat]
nm
250.000000	65.000000	7.2770953	0	69.8761	6.3597e+006
260.000000	65.000000	0.0024569929	126.4302	40919.6	7.04246e+008
270.000000	65.000000	1.3990574	0	46.1543	2.16305e+007
280.000000	65.000000	34.28569	128.64342	3.47733	9.42129
290.000000	65.000000	35.781521	139.46199	1.0872	3.52379
300.000000	65.000000	33.403152	146.49736	0.476101	1.87427
310.000000	65.000000	31.502018	147.13795	0.258198	1.06706
320.000000	65.000000	30.445364	148.03783	0.156238	0.675361
330.000000	65.000000	30.650116	149.67561	0.104761	0.473023
340.000000	65.000000	30.013414	150.06903	0.0690731	0.319553
350.000000	65.000000	30.061705	152.41333	0.0482472	0.240259
360.000000	65.000000	30.822891	154.43567	0.0356967	0.187959
370.000000	65.000000	30.805529	160.94113	0.0276801	0.192659
380.000000	65.000000	28.941488	166.44263	0.0217112	0.2186
390.000000	65.000000	27.100256	167.07361	0.0179369	0.197616
400.000000	65.000000	25.843859	168.27025	0.0158722	0.198908
410.000000	65.000000	24.782259	168.30307	0.0147113	0.190581
420.000000	65.000000	23.962437	169.40465	0.0141367	0.207055
430.000000	65.000000	23.22154	170.27994	0.013568	0.221652
440.000000	65.000000	22.677277	170.05351	0.0131247	0.213489
450.000000	65.000000	22.133902	170.30951	0.0127244	0.216475
460.000000	65.000000	21.680548	170.73271	0.0124534	0.225133
470.000000	65.000000	21.21755	170.92453	0.012155	0.228273
480.000000	65.000000	20.860931	171.0777	0.0120541	0.23342
490.000000	65.000000	20.491751	170.31659	0.0118504	0.214731
500.000000	65.000000	20.198423	170.88792	0.0117028	0.227919
510.000000	65.000000	19.918058	171.78511	0.0115649	0.252532
520.000000	65.000000	19.647264	171.65785	0.0114333	0.248703
530.000000	65.000000	19.374296	171.65868	0.0112861	0.248439
540.000000	65.000000	19.145382	172.01866	0.0111756	0.25961
550.000000	65.000000	18.986998	172.07381	0.0110994	0.261455
560.000000	65.000000	18.7614	172.60501	0.0109948	0.280302
570.000000	65.000000	18.601295	172.45793	0.0109235	0.275091
580.000000	65.000000	18.410816	171.99077	0.0108285	0.259182
590.000000	65.000000	18.251308	171.68825	0.0107571	0.250032
600.000000	65.000000	18.115299	172.15491	0.0107283	0.265792
610.000000	65.000000	18.005463	172.39598	0.0106659	0.274001
620.000000	65.000000	17.87661	173.28682	0.0106066	0.310332
630.000000	65.000000	17.726721	172.59171	0.0105537	0.282022
640.000000	65.000000	17.629824	172.57243	0.0105426	0.282339
650.000000	65.000000	17.508682	172.96413	0.0105054	0.298696
660.000000	65.000000	17.450281	172.84712	0.0105398	0.295672
670.000000	65.000000	17.329451	173.57899	0.010482	0.329367
680.000000	65.000000	17.211502	173.5627	0.0104376	0.329108
690.000000	65.000000	17.119329	173.11243	0.0103845	0.307583
700.000000	65.000000	17.0488	172.59883	0.0104691	0.289739
710.000000	65.000000	16.978798	173.76366	0.0104899	0.345468
720.000000	65.000000	16.909399	174.0883	0.0104681	0.364906
730.000000	65.000000	16.819778	174.12602	0.0105043	0.370239
740.000000	65.000000	16.740332	174.09267	0.0105494	0.371285
750.000000	65.000000	16.655045	174.44844	0.010618	0.399345
760.000000	65.000000	16.613245	173.86497	0.010797	0.368433
770.000000	65.000000	16.54015	173.9234	0.0109192	0.377639
780.000000	65.000000	16.505322	173.45815	0.0117585	0.378584
790.000000	65.000000	16.443007	174.5573	0.0115966	0.449925
800.000000	65.000000	16.370691	175.11974	0.0119669	0.519623
810.000000	65.000000	16.302109	175.86005	0.0128601	0.660376
820.000000	65.000000	16.27363	175.83397	0.0108022	0.552099
830.000000	65.000000	16.202271	173.6012	0.00978918	0.327548
840.000000	65.000000	16.203316	175.32849	0.0110721	0.506791
850.000000	65.000000	16.132179	174.57257	0.0113222	0.448054
860.000000	65.000000	16.126211	173.94385	0.0108162	0.383895
870.000000	65.000000	16.076897	174.56825	0.00989838	0.392598
880.000000	65.000000	16.027473	174.3273	0.00947372	0.360848
890.000000	65.000000	16.001501	174.28127	0.00946856	0.358279
900.000000	65.000000	15.959162	175.06334	0.00943775	0.414436
910.000000	65.000000	15.922361	175.06694	0.00942188	0.414896
920.000000	65.000000	15.877103	175.42139	0.00938148	0.446121
930.000000	65.000000	15.843402	174.64532	0.00939422	0.38292
940.000000	65.000000	15.80225	175.01608	0.00935073	0.410348
950.000000	65.000000	15.783232	174.62805	0.00933838	0.38072
960.000000	65.000000	15.759781	174.92781	0.0093425	0.403851
970.000000	65.000000	15.732325	174.70441	0.00932634	0.386811
980.000000	65.000000	15.692245	175.38377	0.00928865	0.442744
990.000000	65.000000	15.656824	175.39139	0.00927115	0.443536
1000.000000	65.000000	15.648756	175.90228	0.00927596	0.499145
250.000000	70.000000	12.579757	173.5507	37.5677	1571.66
260.000000	70.000000	7.951251	0	43.4295	3.6257e+006
270.000000	70.000000	18.546143	110.42294	8.40477	29.2983
280.000000	70.000000	21.773722	144.33752	3.01561	14.937
290.000000	70.000000	33.527012	132.48389	1.12968	3.29856
300.000000	70.000000	30.808937	133.27495	0.48725	1.51675
310.000000	70.000000	28.604958	134.95242	0.269192	0.903064
320.000000	70.000000	27.06778	137.3916	0.164946	0.600658
330.000000	70.000000	26.764362	138.75639	0.11083	0.418046
340.000000	70.000000	26.404264	139.83194	0.0741097	0.288368
350.000000	70.000000	26.584635	141.61751	0.0516279	0.207723
360.000000	70.000000	27.11692	144.95445	0.0377534	0.162033
370.000000	70.000000	26.826292	153.18649	0.0288615	0.158844
380.000000	70.000000	24.319538	159.44374	0.021784	0.165124
390.000000	70.000000	22.054958	161.82359	0.0173906	0.160053
400.000000	70.000000	20.432741	162.53796	0.0146367	0.149009
410.000000	70.000000	19.151951	163.33922	0.0130068	0.146309
420.000000	70.000000	18.129681	163.80579	0.0122003	0.14786
430.000000	70.000000	17.287743	163.85938	0.01139	0.144335
440.000000	70.000000	16.547007	164.55368	0.0106116	0.145843
450.000000	70.000000	15.90412	164.72458	0.0100059	0.144054
460.000000	70.000000	15.321588	164.7402	0.0095728	0.142638
470.000000	70.000000	14.816608	165.18578	0.00911337	0.144116
480.000000	70.000000	14.372539	164.87903	0.00901428	0.143639
490.000000	70.000000	13.97548	165.2713	0.00876632	0.14703
500.000000	70.000000	13.598036	165.00815	0.00855489	0.144664
510.000000	70.000000	13.253013	165.51396	0.00834437	0.149422
520.000000	70.000000	12.928979	165.87172	0.0081513	0.153048
530.000000	70.000000	12.650406	166.28554	0.00801458	0.158136
540.000000	70.000000	12.362059	165.99332	0.0078536	0.155093
550.000000	70.000000	12.120034	165.88507	0.00772077	0.154148
560.000000	70.000000	11.929187	165.71558	0.00762862	0.152791
570.000000	70.000000	11.682596	166.54626	0.00754062	0.163378
580.000000	70.000000	11.500575	165.98105	0.00745768	0.157507
590.000000	70.000000	11.314171	165.88335	0.00738373	0.157295
600.000000	70.000000	11.154671	166.45865	0.00742056	0.166884
610.000000	70.000000	10.991405	166.60039	0.00730646	0.168354
620.000000	70.000000	10.814034	166.74991	0.00722556	0.170947
630.000000	70.000000	10.691931	166.52142	0.0073285	0.172396
640.000000	70.000000	10.545556	166.9957	0.00738002	0.182199
650.000000	70.000000	10.395825	167.25531	0.0073776	0.188335
660.000000	70.000000	10.289392	168.03407	0.00750367	0.205827
670.000000	70.000000	10.180517	167.13992	0.00746452	0.192682
680.000000	70.000000	10.084693	166.74527	0.00747899	0.189106
690.000000	70.000000	9.9964161	167.54889	0.00742109	0.201224
700.000000	70.000000	9.8610153	168.2168	0.0077519	0.224836
710.000000	70.000000	9.7743235	168.48172	0.00790108	0.236347
720.000000	70.000000	9.6814928	168.38008	0.00790202	0.236486
730.000000	70.000000	9.6128502	167.83911	0.00813069	0.234245
740.000000	70.000000	9.5242653	168.3401	0.00835962	0.253273
750.000000	70.000000	9.4519005	167.38744	0.00866414	0.244731
760.000000	70.000000	9.3590612	167.69356	0.00921191	0.269107
770.000000	70.000000	9.2640533	166.48976	0.00959257	0.258153
780.000000	70.000000	9.2356386	168.34413	0.0118713	0.370556
790.000000	70.000000	9.161438	170.07773	0.0110369	0.407102
800.000000	70.000000	9.0761738	169.4364	0.0119248	0.417143
810.000000	70.000000	8.9987726	167.29095	0.0148861	0.43768
820.000000	70.000000	8.9708099	168.81325	0.00610919	0.2043
830.000000	70.000000	8.9385014	169.25957	0.00598973	0.20925
840.000000	70.000000	8.8811007	169.27654	0.0069801	0.245751
850.000000	70.000000	8.8048248	169.23384	0.0103175	0.364846
860.000000	70.000000	8.77742	169.07747	0.00915184	0.320009
870.000000	70.000000	8.7187881	169.03592	0.00675927	0.23699
880.000000	70.000000	8.6797857	169.20343	0.00544388	0.194636
890.000000	70.000000	8.6515808	169.03418	0.00545405	0.192629
900.000000	70.000000	8.605134	169.32703	0.00539896	0.196873
910.000000	70.000000	8.5704212	169.45068	0.00539322	0.19972
920.000000	70.000000	8.5222292	169.65593	0.00530727	0.201488
930.000000	70.000000	8.4759331	169.92279	0.00539289	0.211212
940.000000	70.000000	8.4416676	170.12582	0.0052943	0.212401
950.000000	70.000000	8.3997164	170.13579	0.00526361	0.212401
960.000000	70.000000	8.3666487	170.42769	0.00530475	0.22137
970.000000	70.000000	8.3312893	170.06963	0.00527982	0.213328
980.000000	70.000000	8.2986612	170.20486	0.00518853	0.213314
990.000000	70.000000	8.2621632	170.36734	0.00518394	0.217612
1000.000000	70.000000	8.2310696	170.39069	0.00520353	0.219761
250.000000	75.000000	14.062194	98.594711	8.84726	35.7885
260.000000	75.000000	0.11816531	0	107.442	5.96001e+008
270.000000	75.000000	28.248896	168.37717	20.2507	240.937
280.000000	75.000000	26.529585	106.19479	4.45987	9.32226
290.000000	75.000000	31.014442	112.78074	1.12164	2.74966
300.000000	75.000000	26.105986	117.36649	0.503077	1.41035
310.000000	75.000000	24.971535	116.29475	0.288191	0.839039
320.000000	75.000000	24.271727	118.71316	0.182158	0.554008
330.000000	75.000000	22.924635	118.24861	0.114638	0.361428
340.000000	75.000000	22.527145	119.98894	0.0816168	0.266222
350.000000	75.000000	22.170969	122.64626	0.0558583	0.189721
360.000000	75.000000	22.668509	128.25307	0.0412068	0.147534
370.000000	75.000000	21.41823	139.53615	0.0310563	0.140585
380.000000	75.000000	17.99124	147.3896	0.0234344	0.147247
390.000000	75.000000	15.126356	148.73502	0.0180339	0.137304
400.000000	75.000000	13.169113	149.18391	0.0144864	0.127109
410.000000	75.000000	11.634665	148.51434	0.0122026	0.118001
420.000000	75.000000	10.451925	147.51959	0.0113284	0.118023
430.000000	75.000000	9.4468269	146.28384	0.0101315	0.112531
440.000000	75.000000	8.6215935	145.29184	0.00851574	0.100274
450.000000	75.000000	7.9145155	143.95921	0.00721127	0.0886639
460.000000	75.000000	7.2735324	143.10927	0.00655451	0.0849589
470.000000	75.000000	6.7129469	141.80948	0.00572751	0.0770263
480.000000	75.000000	6.2520585	140.20076	0.00602927	0.0828142
490.000000	75.000000	5.828546	139.2179	0.00580461	0.0824862
500.000000	75.000000	5.4426308	137.4313	0.00564499	0.0820724
510.000000	75.000000	5.099369	135.86644	0.00554901	0.0819953
520.000000	75.000000	4.7517796	134.47432	0.00547918	0.082865
530.000000	75.000000	4.4975362	132.40073	0.0054915	0.0827409
540.000000	75.000000	4.2306499	130.60907	0.0055478	0.0841064
550.000000	75.000000	3.9806392	129.17538	0.00560322	0.0860209
560.000000	75.000000	3.7766631	127.44626	0.00572301	0.0878428
570.000000	75.000000	3.5626271	125.32536	0.00589527	0.0900015
580.000000	75.000000	3.3752134	123.10867	0.00611489	0.0923126
590.000000	75.000000	3.2493935	121.19955	0.00634276	0.0942552
600.000000	75.000000	3.097749	118.79955	0.00691394	0.100642
610.000000	75.000000	2.9626646	117.11237	0.00705609	0.101776
620.000000	75.000000	2.8277514	114.39725	0.00742967	0.103991
630.000000	75.000000	2.7227004	112.51431	0.00791521	0.108715
640.000000	75.000000	2.6640689	109.48648	0.00865555	0.113203
650.000000	75.000000	2.5625784	107.54177	0.00923742	0.118343
660.000000	75.000000	2.4499171	105.36173	0.0102573	0.128355
670.000000	75.000000	2.3704424	102.93686	0.0108254	0.131209
680.000000	75.000000	2.2805889	100.85904	0.0115829	0.137131
690.000000	75.000000	2.2501185	98.43206	0.0119505	0.13702
700.000000	75.000000	2.2132995	95.737122	0.0136275	0.151941
710.000000	75.000000	2.1504951	93.864281	0.0147071	0.162025
720.000000	75.000000	2.0598564	91.632072	0.0155482	0.170025
730.000000	75.000000	2.0528584	89.184982	0.0164469	0.179545
740.000000	75.000000	2.0463986	87.078362	0.0171941	0.189228
750.000000	75.000000	1.9852561	84.291451	0.0183054	0.207062
760.000000	75.000000	1.9331049	82.346535	0.0200473	0.233748
770.000000	75.000000	1.9419168	80.468369	0.0207308	0.249263
780.000000	75.000000	1.8889277	77.847496	0.0261671	0.334251
790.000000	75.000000	1.8944099	74.638161	0.0226025	0.311175
800.000000	75.000000	1.9025046	73.721214	0.0243145	0.341949
810.000000	75.000000	1.8757318	72.05233	0.0285456	0.42204
820.000000	75.000000	1.8747162	69.4879	0.00825872	0.130971
830.000000	75.000000	1.8647181	68.197845	0.00782738	0.129077
840.000000	75.000000	1.8879949	66.384583	0.00986122	0.169877
850.000000	75.000000	1.8530031	64.433968	0.016151	0.297751
860.000000	75.000000	1.851122	62.993702	0.0135484	0.260599
870.000000	75.000000	1.9131085	62.496479	0.00878581	0.167566
880.000000	75.000000	1.8784267	59.994209	0.00567872	0.11793
890.000000	75.000000	1.8793968	58.408474	0.00556583	0.120996
900.000000	75.000000	1.8914338	57.196533	0.00536901	0.120321
910.000000	75.000000	1.8752311	55.829193	0.00526976	0.123748
920.000000	75.000000	1.9053185	54.853962	0.00504308	0.120319
930.000000	75.000000	1.9109532	53.410656	0.00514149	0.127659
940.000000	75.000000	1.9229723	52.102856	0.00486913	0.124989
950.000000	75.000000	1.9081714	50.686592	0.00474647	0.127876
960.000000	75.000000	1.9383526	50.11578	0.00480902	0.130039
970.000000	75.000000	1.9003108	47.671616	0.00462995	0.137014
980.000000	75.000000	1.9426751	47.710312	0.00448796	0.130142
990.000000	75.000000	1.9364388	46.110729	0.00441541	0.134762
1000.000000	75.000000	1.9702139	46.434944	0.00448807	0.1336