VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Jan 09 13:43:32 2012]
Original[au_si_test1_spectr.dat]
Angstroms
3000.000000	35.000000	12.181169	3.3916368	25.5613	2097.88
3100.000000	35.000000	85.309029	173.43027	25.8331	2760.5
3200.000000	35.000000	76.269226	166.40422	32.1824	592.32
3300.000000	35.000000	81.663841	174.52458	11.1847	816.247
3400.000000	35.000000	89.99839	168.52834	72.2247	6.24954e+006
3500.000000	35.000000	83.673203	0	27.5519	2.90717e+006
3600.000000	35.000000	89.489792	0	95.9324	1.22447e+008
3700.000000	35.000000	82.289413	156.14304	14.6519	270.917
3800.000000	35.000000	89.997292	124.33974	64965.6	9.3991e+008
3900.000000	35.000000	76.297928	0	45.7983	2.27902e+006
4000.000000	35.000000	75.529617	98.843567	13.2541	55.3492
4100.000000	35.000000	61.562878	90.736061	22.921	53.6677
4200.000000	35.000000	20.83967	52.4007	19.4409	73.5612
4300.000000	35.000000	7.886477	87.869492	9.08959	65.0251
4400.000000	35.000000	16.642672	63.144726	15.0282	58.6465
4500.000000	35.000000	11.752634	179.63908	10.5388	8507.26
4600.000000	35.000000	53.244728	75.354424	43.9482	60.2532
4700.000000	35.000000	20.586094	118.43565	15.9649	45.625
4800.000000	35.000000	17.228552	107.51789	8.27171	30.1571
4900.000000	35.000000	20.354353	82.910255	10.0084	30.4436
5000.000000	35.000000	35.481819	105.33198	7.27826	15.7886
5100.000000	35.000000	31.001244	150.65503	10.6934	49.2468
5200.000000	35.000000	37.808239	169.98936	8.49362	100.784
5300.000000	35.000000	29.3916	149.57455	9.28109	42.7988
5400.000000	35.000000	32.418396	177.76404	9.86713	557.59
5500.000000	35.000000	17.679382	179.24435	7.23169	1882.64
5600.000000	35.000000	24.013227	179.74324	5.75902	3391.28
5700.000000	35.000000	34.507767	139.23438	6.91649	22.6558
5800.000000	35.000000	24.559299	134.98351	6.7982	24.3599
5900.000000	35.000000	30.798033	132.92444	6.1146	18.9507
6000.000000	35.000000	28.523193	123.23363	7.38218	20.9719
6100.000000	35.000000	30.916599	155.56216	7.19128	39.3956
6200.000000	35.000000	19.750006	104.61605	6.05981	19.6503
6300.000000	35.000000	32.209198	178.03683	7.03518	454.208
6400.000000	35.000000	27.600641	156.99254	7.76828	47.7035
6500.000000	35.000000	25.170177	179.57503	31.7294	11245.2
6600.000000	35.000000	21.942074	179.33537	7.70968	1932.07
6700.000000	35.000000	27.663593	176.19913	13.7429	504.731
6800.000000	35.000000	30.560337	132.02347	8.06863	24.7095
6900.000000	35.000000	33.906979	131.91748	7.3777	21.3146
7000.000000	35.000000	37.565067	121.78306	9.55048	23.0965
7100.000000	35.000000	33.769711	118.16645	7.68242	18.7163
7200.000000	35.000000	38.722622	138.06737	8.84305	26.9155
7300.000000	35.000000	36.840008	124.90128	9.22889	23.2738
7400.000000	35.000000	21.239746	126.61326	11.2421	39.0926
7500.000000	35.000000	21.227545	109.07391	7.99251	25.0555
7600.000000	35.000000	47.452599	120.02915	14.7816	34.1286
7700.000000	35.000000	38.246407	177.79442	41.9475	2246.72
7800.000000	35.000000	36.79528	173.36026	30.4544	549.54
7900.000000	35.000000	39.029648	93.638466	30.0612	38.5336
8000.000000	35.000000	45.808533	116.80827	12.2637	27.4699
3000.000000	45.000000	67.789009	50.181942	14.0353	51.2715
3100.000000	45.000000	67.577614	0	119.916	3.87922e+006
3200.000000	45.000000	67.57032	179.02461	52.2603	8660.46
3300.000000	45.000000	72.123421	16.740934	17.4738	207.242
3400.000000	45.000000	73.886757	128.92015	17.5378	84.225
3500.000000	45.000000	44.251114	151.6714	123.599	518.869
3600.000000	45.000000	48.582699	170.80441	86.4266	1088.34
3700.000000	45.000000	88.536659	0	174.043	7.76584e+007
3800.000000	45.000000	86.527908	0	11.0902	2.10091e+006
3900.000000	45.000000	86.753746	32.594803	8.19368	241.926
4000.000000	45.000000	81.034531	49.00029	6.28961	53.9508
4100.000000	45.000000	60.599804	124.37592	16.7518	45.5899
4200.000000	45.000000	1.7575697	0	61.7224	2.30781e+007
4300.000000	45.000000	39.66993	179.67529	20.4422	7455.25
4400.000000	45.000000	43.458176	94.943481	52.7124	80.1186
4500.000000	45.000000	21.471081	122.61913	25.559	60.7182
4600.000000	45.000000	14.72009	98.975471	10.9727	36.9885
4700.000000	45.000000	13.80634	68.128448	8.08623	37.5274
4800.000000	45.000000	15.619807	103.05718	8.9341	35.3012
4900.000000	45.000000	11.155248	84.800781	4.71679	23.9682
5000.000000	45.000000	54.595879	1.5791212	35.3325	2723.08
5100.000000	45.000000	23.579584	121.30782	9.06661	25.014
5200.000000	45.000000	19.693014	164.86484	55.8317	668.423
5300.000000	45.000000	24.209911	179.71558	10.4205	5712.81
5400.000000	45.000000	72.97525	0	116.478	4.76428e+006
5500.000000	45.000000	19.454546	125.3427	6.6752	24.6253
5600.000000	45.000000	23.733093	145.85934	7.74113	35.1459
5700.000000	45.000000	22.260824	127.57607	6.82766	24.5312
5800.000000	45.000000	23.683819	105.80202	5.44198	15.3401
5900.000000	45.000000	23.089899	104.79211	7.33817	21.0294
6000.000000	45.000000	26.154993	175.6963	11.2335	377.802
6100.000000	45.000000	27.841089	145.85486	13.7165	56.3582
6200.000000	45.000000	31.014782	87.911873	24.2279	36.6856
6300.000000	45.000000	35.175613	88.861252	8.0072	16.7951
6400.000000	45.000000	38.469097	110.32344	22.9792	37.5492
6500.000000	45.000000	14.618432	115.10352	5.51786	24.0937
6600.000000	45.000000	49.451668	179.8725	25.7804	22568
6700.000000	45.000000	38.850845	98.913612	9.23757	17.4672
6800.000000	45.000000	27.52063	179.66493	32.804	13486.8
6900.000000	45.000000	31.690973	108.4785	7.94512	18.4995
7000.000000	45.000000	35.630512	103.00717	6.21671	12.8532
7100.000000	45.000000	14.161415	77.085793	9.71282	35.152
7200.000000	45.000000	29.751993	157.0746	13.0941	77.561
7300.000000	45.000000	20.884569	87.705925	12.0851	35.6502
7400.000000	45.000000	32.711502	118.25096	9.8027	24.186
7500.000000	45.000000	12.056933	166.3204	32.0862	663.244
7600.000000	45.000000	22.005743	104.32276	20.7772	61.2226
7700.000000	45.000000	20.307926	104.34969	8.37432	26.4596
7800.000000	45.000000	24.857803	96.783798	15.8534	37.8772
7900.000000	45.000000	7.8808546	101.85588	4.23119	30.9604
8000.000000	45.000000	37.707569	143.31033	13.6445	47.0269
3000.000000	55.000000	7.7715659	172.91515	79.7456	4826.64
3100.000000	55.000000	8.9646759	0.89322734	10.491	4396.64
3200.000000	55.000000	9.2177448	80.366608	5.94088	37.9826
3300.000000	55.000000	14.580359	69.100342	43.4137	178.962
3400.000000	55.000000	50.974819	0	724.325	1.6962e+007
3500.000000	55.000000	85.973816	2.9430671	14.5404	4047.47
3600.000000	55.000000	87.64238	15.819463	25.2509	2185.9
3700.000000	55.000000	82.873596	62.032188	9.56143	84.1033
3800.000000	55.000000	78.595947	5.6987371	83.3133	4332.09
3900.000000	55.000000	24.592094	0	129.632	3.92674e+006
4000.000000	55.000000	6.2205305	0	18.2817	1.94538e+006
4100.000000	55.000000	7.8050776	0	25.8024	2.19684e+006
4200.000000	55.000000	5.3160052	89.45237	6.17118	55.2328
4300.000000	55.000000	1.8623071	0	28.0697	9.88598e+006
4400.000000	55.000000	13.799349	0	72.0729	3.54181e+006
4500.000000	55.000000	51.339382	71.788071	25.0002	43.102
4600.000000	55.000000	19.980286	23.062119	11.4502	88.3188
4700.000000	55.000000	16.716139	179.59552	11.7299	6107.02
4800.000000	55.000000	13.289283	179.92691	7.57408	24841.1
4900.000000	55.000000	16.49501	104.51453	12.194	45.1796
5000.000000	55.000000	10.358217	0.49901265	7.52381	4933.35
5100.000000	55.000000	35.728729	64.469513	6.16707	14.1828
5200.000000	55.000000	26.870958	73.676102	10.6909	26.502
5300.000000	55.000000	25.109209	90.461128	5.89747	15.302
5400.000000	55.000000	24.594707	76.54818	6.31857	17.1631
5500.000000	55.000000	22.065351	77.377213	4.41114	12.8553
5600.000000	55.000000	21.678381	71.425301	5.47293	16.8171
5700.000000	55.000000	23.08882	85.045387	4.37701	12.1632
5800.000000	55.000000	27.718151	66.021553	6.12424	15.9879
5900.000000	55.000000	23.373917	97.813843	5.18759	14.1131
6000.000000	55.000000	21.383585	88.979149	4.36466	12.7953
6100.000000	55.000000	23.729717	87.893867	4.52396	12.2065
6200.000000	55.000000	27.130808	88.236717	5.68992	13.8632
6300.000000	55.000000	24.629913	87.573135	4.4352	11.6459
6400.000000	55.000000	27.001526	72.301178	8.05545	19.5416
6500.000000	55.000000	22.239677	89.649422	5.02064	13.991
6600.000000	55.000000	26.16963	100.62424	6.81836	17.2436
6700.000000	55.000000	28.35515	89.207916	6.16057	14.6765
6800.000000	55.000000	39.358437	54.525875	13.8565	29.3061
6900.000000	55.000000	26.141853	101.70013	6.94369	17.7381
7000.000000	55.000000	25.454092	93.169159	5.00881	12.9205
7100.000000	55.000000	39.076836	173.95883	135.676	2620.12
7200.000000	55.000000	30.282181	73.713219	8.72137	19.7276
7300.000000	55.000000	27.218521	75.725739	12.2181	28.5012
7400.000000	55.000000	11.628233	110.65897	5.7128	29.4562
7500.000000	55.000000	14.784952	133.42186	8.73024	47.9388
7600.000000	55.000000	14.521852	150.72531	8.41595	70.886
7700.000000	55.000000	20.70046	94.361221	8.33338	21.4245
7800.000000	55.000000	5.4291406	109.43657	24.1248	112.782
7900.000000	55.000000	19.151752	134.91096	17.6339	76.3451
8000.000000	55.000000	0.12631567	159.72308	4866.91	5.97673e+006