fi
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Jun 30 18:49:45 2011]
Original[011210 nick si.dat]
nm
500.000000	65.000000	20.194006	174.33911	0.011653	0.364314
510.000000	65.000000	19.951635	174.38928	0.0115258	0.367208
520.000000	65.000000	19.66077	173.70792	0.0113784	0.327413
530.000000	65.000000	19.418938	173.82315	0.0112605	0.333482
540.000000	65.000000	19.140234	173.04245	0.0111312	0.296434
550.000000	65.000000	18.991276	174.71024	0.0110496	0.389124
560.000000	65.000000	18.793444	172.9977	0.0109545	0.294417
570.000000	65.000000	18.600565	173.75716	0.0108648	0.330229
580.000000	65.000000	18.435396	173.17863	0.0107905	0.302592
590.000000	65.000000	18.27669	174.17366	0.010723	0.354407
600.000000	65.000000	18.110155	174.33231	0.0106732	0.365465
610.000000	65.000000	17.989761	175.04604	0.010607	0.417719
620.000000	65.000000	17.890814	174.09126	0.0105641	0.350714
630.000000	65.000000	17.739435	175.41847	0.0105101	0.4529
640.000000	65.000000	17.631756	174.81058	0.0104907	0.401399
650.000000	65.000000	17.467562	174.21449	0.0104332	0.361155
660.000000	65.000000	17.412836	175.85419	0.0104516	0.505679
670.000000	65.000000	17.310225	175.02397	0.0104075	0.421949
680.000000	65.000000	17.229292	174.28563	0.010383	0.368267
690.000000	65.000000	17.141705	175.705	0.0103445	0.489845
700.000000	65.000000	17.023031	178.47568	0.0103901	1.3907
710.000000	65.000000	16.935493	174.64883	0.0104385	0.401284
720.000000	65.000000	16.869287	175.06302	0.0104377	0.436291
730.000000	65.000000	16.797504	176.23361	0.0104814	0.57597
740.000000	65.000000	16.747194	174.8847	0.0105505	0.428422
750.000000	65.000000	16.674484	174.5746	0.0106487	0.409357
760.000000	65.000000	16.576551	176.2276	0.0108169	0.60045
770.000000	65.000000	16.55378	175.56757	0.0109975	0.520444
780.000000	65.000000	16.475492	174.42854	0.0118962	0.450134
790.000000	65.000000	16.454714	175.13879	0.0116214	0.504291
800.000000	65.000000	16.352262	174.79478	0.0119747	0.488098
500.000000	70.000000	13.473255	169.18201	0.00857641	0.20137
510.000000	70.000000	13.128844	169.87404	0.00826079	0.212299
520.000000	70.000000	12.823443	169.86807	0.00806704	0.211781
530.000000	70.000000	12.529144	170.18742	0.00789866	0.218719
540.000000	70.000000	12.299702	170.174	0.00777955	0.218875
550.000000	70.000000	12.032143	169.63605	0.00765781	0.208676
560.000000	70.000000	11.80053	170.08934	0.00753789	0.218659
570.000000	70.000000	11.592952	170.22603	0.00743629	0.222385
580.000000	70.000000	11.404377	170.31969	0.00735479	0.225518
590.000000	70.000000	11.227838	170.62447	0.00728976	0.234147
600.000000	70.000000	11.061769	170.25467	0.00736764	0.231024
610.000000	70.000000	10.88015	170.40273	0.00725156	0.234516
620.000000	70.000000	10.756668	170.09816	0.00720978	0.228531
630.000000	70.000000	10.598473	170.45299	0.00719784	0.239905
640.000000	70.000000	10.469839	171.16699	0.00725383	0.264187
650.000000	70.000000	10.318908	170.7345	0.00725025	0.255348
660.000000	70.000000	10.241956	170.76343	0.0073736	0.262366
670.000000	70.000000	10.107764	170.81119	0.00733371	0.265615
680.000000	70.000000	10.018291	172.31317	0.00757795	0.330483
690.000000	70.000000	9.9157114	170.22873	0.00754735	0.262022
700.000000	70.000000	9.8161783	170.87407	0.00791931	0.297047
710.000000	70.000000	9.7009172	171.03828	0.00807361	0.31185
720.000000	70.000000	9.6164846	172.0657	0.00815972	0.35865
730.000000	70.000000	9.5200586	172.28593	0.00839924	0.383341
740.000000	70.000000	9.4799538	170.60551	0.00869819	0.327813
750.000000	70.000000	9.4228077	171.69228	0.00913322	0.3911
760.000000	70.000000	9.3287878	172.11827	0.00978422	0.445738
770.000000	70.000000	9.2255583	173.88657	0.0103162	0.611578
780.000000	70.000000	9.1786747	171.98036	0.012849	0.584424
790.000000	70.000000	9.1266727	173.7075	0.0121618	0.707883
800.000000	70.000000	9.077548	173.78139	0.0132093	0.782011
500.000000	75.000000	4.8896828	147.09946	0.0054461	0.111017
510.000000	75.000000	4.5302482	146.53987	0.00531613	0.113777
520.000000	75.000000	4.1983223	144.77077	0.00522453	0.113153
530.000000	75.000000	3.8938973	143.83246	0.00518044	0.116338
540.000000	75.000000	3.6122971	141.59909	0.00521931	0.117019
550.000000	75.000000	3.3832986	139.68562	0.00527606	0.118332
560.000000	75.000000	3.1610525	138.15198	0.00535833	0.121791
570.000000	75.000000	2.976352	136.05595	0.00549356	0.123795
580.000000	75.000000	2.8167031	134.21579	0.00565461	0.126714
590.000000	75.000000	2.6234837	131.48346	0.00592921	0.130598
600.000000	75.000000	2.4826841	129.16006	0.00639102	0.138077
610.000000	75.000000	2.3008595	127.3439	0.00656587	0.143274
620.000000	75.000000	2.1849616	124.95212	0.0069165	0.147053
630.000000	75.000000	2.1064694	120.936	0.00762428	0.149092
640.000000	75.000000	1.9774752	119.05212	0.00832624	0.161608
650.000000	75.000000	1.9316026	116.19276	0.00907143	0.165008
660.000000	75.000000	1.8412834	112.77776	0.0103293	0.175704
670.000000	75.000000	1.7090958	110.91924	0.0111319	0.187534
680.000000	75.000000	1.6997372	107.34252	0.012333	0.187208
690.000000	75.000000	1.5320286	104.19504	0.0140998	0.204445
700.000000	75.000000	1.5608835	100.17301	0.0168594	0.215845
710.000000	75.000000	1.4571308	97.986412	0.0194544	0.23956
720.000000	75.000000	1.4236609	94.297356	0.0217565	0.248581
730.000000	75.000000	1.4671783	90.238487	0.0229654	0.252764
740.000000	75.000000	1.4122036	87.471809	0.0248031	0.27695
750.000000	75.000000	1.4598771	84.256508	0.0246367	0.28811
760.000000	75.000000	1.3286693	79.544151	0.0257942	0.351179
770.000000	75.000000	1.4089531	77.387489	0.0251001	0.358811
780.000000	75.000000	1.4292406	75.681442	0.0307753	0.462808
790.000000	75.000000	1.3780253	71.161285	0.0255581	0.459395
800.000000	75.000000	1.4022627	68.591446	0.0259571	0.50492