Spectroscopic Scan - Test on Si
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Dec 02 12:54:44 2010]
Original[021210 nick si.dat]
nm
300.000000	65.000000	33.994041	151.68646	0.780621	3.54043
310.000000	65.000000	31.594711	150.99149	0.372199	1.71794
320.000000	65.000000	30.37096	149.4348	0.227787	1.02642
330.000000	65.000000	30.176195	151.27986	0.153209	0.733594
340.000000	65.000000	30.096066	152.89154	0.103786	0.52488
350.000000	65.000000	30.267073	154.98099	0.0724917	0.39367
360.000000	65.000000	30.824764	158.28825	0.0526305	0.323235
370.000000	65.000000	30.713722	163.5369	0.0390995	0.314102
380.000000	65.000000	28.902493	169.58473	0.0291309	0.38063
390.000000	65.000000	27.177462	169.71048	0.0226144	0.311409
400.000000	65.000000	25.809721	171.29762	0.0186263	0.313893
410.000000	65.000000	24.801975	171.57579	0.0166267	0.297858
420.000000	65.000000	23.997162	172.46933	0.0157081	0.322376
430.000000	65.000000	23.250698	173.07089	0.0147125	0.335983
440.000000	65.000000	22.673855	172.5303	0.0139293	0.301029
450.000000	65.000000	22.139507	173.35281	0.0132023	0.326475
460.000000	65.000000	21.652313	172.98605	0.0128276	0.306098
470.000000	65.000000	21.244453	173.53108	0.0123455	0.324202
480.000000	65.000000	20.850016	174.11232	0.0123708	0.362255
490.000000	65.000000	20.531076	173.35091	0.0121662	0.319673
500.000000	65.000000	20.226995	173.91252	0.0119736	0.347743
510.000000	65.000000	19.924379	173.44739	0.0117883	0.322179
520.000000	65.000000	19.669729	174.35471	0.011635	0.372828
530.000000	65.000000	19.38426	173.83292	0.0114876	0.341261
540.000000	65.000000	19.186098	173.56102	0.0113758	0.326558
550.000000	65.000000	18.993137	173.50471	0.0112754	0.323643
560.000000	65.000000	18.809414	174.48146	0.0111892	0.38087
570.000000	65.000000	18.615326	174.23875	0.0110979	0.365128
580.000000	65.000000	18.433537	174.05693	0.011027	0.354719
590.000000	65.000000	18.289368	174.40755	0.0109642	0.377248
600.000000	65.000000	18.147921	175.11356	0.0109767	0.434931
610.000000	65.000000	17.997169	175.39313	0.0108831	0.460603
620.000000	65.000000	17.868437	175.26755	0.0108064	0.448036
630.000000	65.000000	17.74338	174.86115	0.0107924	0.414704
640.000000	65.000000	17.644785	175.60422	0.0108272	0.488478
650.000000	65.000000	17.523012	175.0712	0.0107929	0.437059
660.000000	65.000000	17.419415	174.61302	0.0109218	0.406901
670.000000	65.000000	17.334204	174.56325	0.0108438	0.402032
680.000000	65.000000	17.24192	174.77467	0.0108296	0.419643
690.000000	65.000000	17.149738	175.78317	0.0106904	0.515373
700.000000	65.000000	17.040937	175.64923	0.0109409	0.514124
710.000000	65.000000	16.982199	175.79036	0.010991	0.535365
720.000000	65.000000	16.883394	176.00671	0.0109478	0.564963
730.000000	65.000000	16.820311	174.96957	0.0110424	0.454185
740.000000	65.000000	16.764814	175.0182	0.0112083	0.46685
750.000000	65.000000	16.697771	175.01663	0.0113616	0.474763
760.000000	65.000000	16.635332	174.72739	0.0116575	0.462028
770.000000	65.000000	16.581215	174.78539	0.0119016	0.478307
780.000000	65.000000	16.501141	174.89165	0.0135367	0.557679
790.000000	65.000000	16.453056	176.00461	0.0128323	0.677153
800.000000	65.000000	16.413532	176.02284	0.0135968	0.722318
810.000000	65.000000	16.334785	174.75754	0.015207	0.616052
820.000000	65.000000	16.274643	175.46095	0.0118926	0.557994
830.000000	65.000000	16.242807	175.41022	0.00993409	0.461771
840.000000	65.000000	16.186335	176.57315	0.0123884	0.773024
850.000000	65.000000	16.156155	179.99913	0.0188871	984.856
860.000000	65.000000	16.089434	179.24551	0.0159977	4.53238
870.000000	65.000000	16.057352	174.7253	0.011651	0.476333
880.000000	65.000000	16.01689	175.84708	0.00950876	0.494483
890.000000	65.000000	15.975212	175.502	0.00954874	0.459648
900.000000	65.000000	15.942911	176.8804	0.00946503	0.657454
910.000000	65.000000	15.917706	176.30583	0.00948557	0.557438
920.000000	65.000000	15.889108	176.50839	0.00936907	0.583383
930.000000	65.000000	15.850423	175.48732	0.00952761	0.460363
940.000000	65.000000	15.811296	175.8938	0.00936182	0.49809
950.000000	65.000000	15.772105	175.9471	0.00933391	0.504237
960.000000	65.000000	15.749515	176.41974	0.00944253	0.57799
970.000000	65.000000	15.715625	177.40985	0.00938548	0.794975
980.000000	65.000000	15.692449	176.48697	0.0092617	0.579625
990.000000	65.000000	15.66902	175.83289	0.00927011	0.489978
1000.000000	65.000000	15.640765	175.62393	0.00931722	0.469784
300.000000	70.000000	30.859047	139.27477	0.729956	2.54026
310.000000	70.000000	28.406599	140.5594	0.392366	1.47432
320.000000	70.000000	27.476318	140.08336	0.243302	0.925898
330.000000	70.000000	26.451265	141.62878	0.158571	0.639602
340.000000	70.000000	26.040339	143.73169	0.112702	0.482909
350.000000	70.000000	26.349072	144.97136	0.0785995	0.344249
360.000000	70.000000	26.976156	149.60497	0.0572173	0.279672
370.000000	70.000000	26.646479	157.68727	0.042393	0.278494
380.000000	70.000000	24.103197	163.50635	0.0306131	0.289037
390.000000	70.000000	21.81888	165.66299	0.023371	0.273329
400.000000	70.000000	20.246645	167.23007	0.0186553	0.2598
410.000000	70.000000	18.960466	167.3519	0.0159878	0.23749
420.000000	70.000000	17.999723	168.88147	0.014839	0.261698
430.000000	70.000000	17.123327	168.59288	0.013289	0.238631
440.000000	70.000000	16.392868	168.8638	0.0121922	0.233033
450.000000	70.000000	15.773048	168.94971	0.0109448	0.218155
460.000000	70.000000	15.186138	168.93636	0.0104203	0.214685
470.000000	70.000000	14.678907	169.33121	0.00950983	0.209432
480.000000	70.000000	14.247296	169.26913	0.009843	0.221504
490.000000	70.000000	13.84284	169.49075	0.00945358	0.222985
500.000000	70.000000	13.482148	169.69962	0.00915849	0.225776
510.000000	70.000000	13.110812	169.80867	0.00897627	0.229516
520.000000	70.000000	12.806112	169.70935	0.0087138	0.225555
530.000000	70.000000	12.529678	169.72775	0.00852078	0.225488
540.000000	70.000000	12.280512	169.91682	0.00836223	0.229665
550.000000	70.000000	12.020915	169.8542	0.0083262	0.231917
560.000000	70.000000	11.818844	170.69809	0.00822064	0.253542
570.000000	70.000000	11.586029	170.1812	0.00810056	0.241293
580.000000	70.000000	11.411372	170.20204	0.00802736	0.243075
590.000000	70.000000	11.203205	170.35535	0.00794038	0.248512
600.000000	70.000000	11.050305	170.68974	0.00830924	0.272873
610.000000	70.000000	10.905523	170.43604	0.00817518	0.264712
620.000000	70.000000	10.749909	170.69228	0.00805116	0.271489
630.000000	70.000000	10.604679	170.82213	0.00811646	0.281144
640.000000	70.000000	10.4567	170.71738	0.00831351	0.288588
650.000000	70.000000	10.35192	171.03477	0.00834551	0.302756
660.000000	70.000000	10.213247	171.03058	0.00866362	0.318221
670.000000	70.000000	10.107064	171.21916	0.0085413	0.323624
680.000000	70.000000	10.018345	171.70943	0.0090467	0.366001
690.000000	70.000000	9.9087257	170.88203	0.00867657	0.322813
700.000000	70.000000	9.7890778	172.14308	0.00963475	0.420381
710.000000	70.000000	9.7423906	170.56981	0.00988223	0.361432
720.000000	70.000000	9.6389046	171.0593	0.0098521	0.38379
730.000000	70.000000	9.5247555	171.56404	0.0101861	0.425182
740.000000	70.000000	9.4515238	171.45314	0.0107014	0.444226
750.000000	70.000000	9.3768854	171.29643	0.0112262	0.461195
760.000000	70.000000	9.3118954	171.68536	0.012115	0.524299
770.000000	70.000000	9.2149401	171.90981	0.0128316	0.576387
780.000000	70.000000	9.1590528	171.28473	0.0168643	0.707729
790.000000	70.000000	9.1595831	170.6104	0.0146392	0.570565
800.000000	70.000000	9.0524349	170.72668	0.0162531	0.648651
810.000000	70.000000	8.9702663	169.29546	0.0329073	1.14948
820.000000	70.000000	8.9160242	171.27269	0.00778688	0.334918
830.000000	70.000000	8.8948708	171.53996	0.00740632	0.329288
840.000000	70.000000	8.8131008	172.38979	0.0112179	0.559007
850.000000	70.000000	8.7546511	172.56642	0.0229777	1.17962
860.000000	70.000000	8.7043362	173.34904	0.0185526	1.06981
870.000000	70.000000	8.6584845	172.83943	0.0107841	0.580778
880.000000	70.000000	8.6395435	172.31009	0.00561288	0.282191
890.000000	70.000000	8.6048365	172.52031	0.00580984	0.301423
900.000000	70.000000	8.5595751	172.22049	0.00557383	0.279523
910.000000	70.000000	8.5183678	172.45399	0.0056629	0.294092
920.000000	70.000000	8.4719896	172.20711	0.00530115	0.268049
930.000000	70.000000	8.4431419	172.50188	0.00586832	0.309339
940.000000	70.000000	8.4129448	172.45612	0.00537948	0.28284
950.000000	70.000000	8.356967	172.91965	0.00532367	0.300058
960.000000	70.000000	8.3320265	172.89633	0.00569137	0.320662
970.000000	70.000000	8.2936583	173.08696	0.00554673	0.322525
980.000000	70.000000	8.2588892	173.12045	0.00516867	0.30323
990.000000	70.000000	8.2288971	173.3461	0.00522072	0.317738
1000.000000	70.000000	8.2020826	173.41513	0.00540462	0.333415
300.000000	75.000000	25.496092	118.06752	0.76292	2.22446
310.000000	75.000000	23.928795	122.16529	0.431891	1.37516
320.000000	75.000000	23.072758	122.60537	0.265034	0.870368
330.000000	75.000000	22.129684	123.56149	0.181674	0.62427
340.000000	75.000000	21.339108	125.27381	0.121998	0.43976
350.000000	75.000000	21.452082	127.11236	0.0905365	0.333507
360.000000	75.000000	21.881535	133.70383	0.0661378	0.264457
370.000000	75.000000	20.776533	145.40579	0.049338	0.261943
380.000000	75.000000	17.493862	153.77625	0.035218	0.276725
390.000000	75.000000	14.642323	155.51935	0.0278214	0.273645
400.000000	75.000000	12.644785	156.43034	0.0221974	0.25936
410.000000	75.000000	11.075486	155.88887	0.018861	0.244475
420.000000	75.000000	9.91257	156.43983	0.0179748	0.264856
430.000000	75.000000	8.880352	155.27879	0.0161497	0.252812
440.000000	75.000000	8.0826225	154.46664	0.0130352	0.216279
450.000000	75.000000	7.3504877	153.45879	0.0103439	0.180721
460.000000	75.000000	6.7313967	152.55756	0.00911928	0.167308
470.000000	75.000000	6.1813884	151.50618	0.00714348	0.136556
480.000000	75.000000	5.6834254	150.8205	0.00824831	0.166105
490.000000	75.000000	5.2502952	149.48224	0.00775485	0.160313
500.000000	75.000000	4.8660035	148.18622	0.00743406	0.157599
510.000000	75.000000	4.5213833	146.79645	0.00715366	0.154785
520.000000	75.000000	4.1911292	145.2151	0.00693531	0.152656
530.000000	75.000000	3.8434112	144.25339	0.00681142	0.156859
540.000000	75.000000	3.6065238	142.84383	0.00679056	0.158321
550.000000	75.000000	3.3837714	140.34489	0.00684562	0.156672
560.000000	75.000000	3.1461403	138.50406	0.00695451	0.160546
570.000000	75.000000	2.9452214	136.75122	0.00708733	0.164529
580.000000	75.000000	2.7562475	134.33015	0.0073351	0.168145
590.000000	75.000000	2.5881097	132.80133	0.0075446	0.174518
600.000000	75.000000	2.4529557	130.07362	0.00841355	0.188535
610.000000	75.000000	2.3086796	127.9203	0.00859519	0.190476
620.000000	75.000000	2.1733992	125.43182	0.00889365	0.192866
630.000000	75.000000	2.0583255	122.44914	0.00974845	0.202767
640.000000	75.000000	1.9571623	120.52979	0.0108346	0.221587
650.000000	75.000000	1.837539	117.03873	0.0119061	0.230365
660.000000	75.000000	1.8106	113.2496	0.0139911	0.244773
670.000000	75.000000	1.688838	110.85911	0.0149056	0.253512
680.000000	75.000000	1.7157663	105.90625	0.0168757	0.245963
690.000000	75.000000	1.5694242	103.66561	0.0177808	0.252541
700.000000	75.000000	1.5776911	99.269669	0.0229795	0.288821
710.000000	75.000000	1.4728061	97.341049	0.026077	0.317971
720.000000	75.000000	1.4318713	94.523178	0.0281728	0.32594
730.000000	75.000000	1.485145	90.507782	0.0296069	0.329127
740.000000	75.000000	1.3591516	87.401955	0.0338891	0.383349
750.000000	75.000000	1.3671207	84.541641	0.0342665	0.405876
760.000000	75.000000	1.2965471	80.960274	0.0358434	0.473014
770.000000	75.000000	1.3870176	79.662445	0.0354041	0.476236
780.000000	75.000000	1.3684187	74.902496	0.0418463	0.664196
790.000000	75.000000	1.3085378	71.438713	0.0326603	0.603064
800.000000	75.000000	1.306561	67.186348	0.0324332	0.699494
810.000000	75.000000	1.5407876	66.385811	0.0630108	1.2406
820.000000	75.000000	1.386431	62.819553	0.0117169	0.280922
830.000000	75.000000	1.3830124	61.345345	0.0105381	0.265991
840.000000	75.000000	1.4866264	61.671951	0.0179405	0.422855
850.000000	75.000000	1.4075274	55.842678	0.0347058	1.03394
860.000000	75.000000	1.4646951	54.954536	0.0270841	0.802133
870.000000	75.000000	1.4542288	53.256527	0.0144822	0.455602
880.000000	75.000000	1.4523407	51.393032	0.00539924	0.180448
890.000000	75.000000	1.4728633	50.047478	0.00569473	0.196161
900.000000	75.000000	1.4735733	47.620781	0.00507232	0.188671
910.000000	75.000000	1.4810408	45.88715	0.00513293	0.200886
920.000000	75.000000	1.5179199	45.258389	0.00445554	0.173942
930.000000	75.000000	1.5187007	43.248077	0.00533373	0.222079
940.000000	75.000000	1.5567095	42.636166	0.00447961	0.185935
950.000000	75.000000	1.5626246	40.587902	0.00431095	0.190694
960.000000	75.000000	1.5619391	38.764835	0.00482573	0.226973
970.000000	75.000000	1.5964456	38.823353	0.0046273	0.212772
980.000000	75.000000	1.5996903	36.638508	0.00393413	0.194528
990.000000	75.000000	1.6303227	36.473537	0.00403609	0.197125
1000.000000	75.000000	1.6440854	35.51318	0.00429897	0.215386