VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Sep 03 15:42:01 2009] Original[030909 si+multilayers-sergey ss.dat] nm 400.000000 65.000000 34.200874 121.84917 0.111465 0.322897 410.000000 65.000000 34.277275 123.59097 0.101891 0.297672 420.000000 65.000000 34.174473 124.70093 0.102363 0.303188 430.000000 65.000000 34.126858 125.61754 0.0942741 0.283231 440.000000 65.000000 34.141708 126.4789 0.0750256 0.229517 450.000000 65.000000 34.137127 127.11579 0.0865144 0.269507 460.000000 65.000000 34.226803 127.92522 0.0778988 0.236965 470.000000 65.000000 34.348026 128.67328 0.0835003 0.258523 480.000000 65.000000 34.515198 129.69485 0.0857121 0.267643 490.000000 65.000000 34.549698 130.82706 0.061626 0.19639 500.000000 65.000000 34.50766 131.66714 0.0660551 0.214233 510.000000 65.000000 34.443577 132.56001 0.0698243 0.220233 520.000000 65.000000 34.401257 133.25644 0.0649178 0.207554 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