VASEmethod[EllipsometerType=5, Isotropic, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Apr 03 16:06:29 2009]
Original[040409 calibration.dat]
nm
300.000000	65.000000	38.269272	105.73276	0.0947388	0.241452
310.000000	65.000000	37.041508	106.73617	0.0880722	0.227056
320.000000	65.000000	36.227055	107.8297	0.0818904	0.213546
330.000000	65.000000	35.655521	109.19736	0.0704762	0.188174
340.000000	65.000000	35.241875	110.72928	0.0769174	0.207458
350.000000	65.000000	34.988682	112.6065	0.0715895	0.19483
360.000000	65.000000	35.155975	115.65102	0.0553064	0.154245
370.000000	65.000000	34.453239	120.86811	0.0799437	0.229977
380.000000	65.000000	32.680763	124.37993	0.0574072	0.177058
390.000000	65.000000	31.00102	125.98117	0.0549079	0.178806
400.000000	65.000000	29.698009	127.02789	0.0550023	0.187899
410.000000	65.000000	28.654669	127.89477	0.0559036	0.191056
420.000000	65.000000	27.760326	128.65768	0.0518838	0.183533
430.000000	65.000000	26.997103	129.27199	0.0527519	0.192204
440.000000	65.000000	26.323807	130.05783	0.0546916	0.206825
450.000000	65.000000	25.722879	130.67534	0.0516479	0.201369
460.000000	65.000000	25.16404	131.36726	0.0528954	0.203207
470.000000	65.000000	24.656725	131.98933	0.0513068	0.202375
480.000000	65.000000	24.184631	132.65938	0.0538966	0.218901
490.000000	65.000000	23.769474	133.24388	0.051055	0.2128
500.000000	65.000000	23.377695	133.77834	0.0490899	0.209913
510.000000	65.000000	23.007557	134.45148	0.049915	0.209013
520.000000	65.000000	22.663012	135.05276	0.0528023	0.226551
530.000000	65.000000	22.33687	135.5585	0.0498506	0.218757
540.000000	65.000000	22.038145	136.11633	0.0470153	0.211557
550.000000	65.000000	21.764162	136.65906	0.0457951	0.210992
560.000000	65.000000	21.492697	137.14503	0.0418816	0.19746
570.000000	65.000000	21.236546	137.70155	0.0441592	0.201679
580.000000	65.000000	21.002316	138.21912	0.0446145	0.208496
590.000000	65.000000	20.783451	138.71986	0.0439227	0.209532
600.000000	65.000000	20.5751	139.17235	0.0456861	0.222469
610.000000	65.000000	20.372976	139.6602	0.0391558	0.194703
620.000000	65.000000	20.186695	140.11284	0.040612	0.194957
630.000000	65.000000	20.00297	140.63611	0.0404621	0.198259
640.000000	65.000000	19.829613	141.06367	0.0412502	0.205844
650.000000	65.000000	19.668253	141.45175	0.0406263	0.206368
660.000000	65.000000	19.516956	141.9416	0.039746	0.205761
670.000000	65.000000	19.36697	142.33102	0.0378449	0.199343
680.000000	65.000000	19.222891	142.74303	0.0386724	0.196097
690.000000	65.000000	19.099667	143.19701	0.0394014	0.20309
700.000000	65.000000	18.958618	143.57899	0.0387337	0.203361
710.000000	65.000000	18.834173	143.97563	0.0387519	0.20677
720.000000	65.000000	18.72117	144.35242	0.0399055	0.216509
730.000000	65.000000	18.592886	144.71339	0.0372714	0.20553
740.000000	65.000000	18.48806	145.12654	0.0329093	0.17438
750.000000	65.000000	18.391859	145.47009	0.0372852	0.200261
760.000000	65.000000	18.288237	145.81137	0.0384486	0.20929
770.000000	65.000000	18.19372	146.21159	0.0382302	0.211183
780.000000	65.000000	18.090433	146.55951	0.038468	0.215071
790.000000	65.000000	18.008959	146.8739	0.0367901	0.2093
800.000000	65.000000	17.920382	147.17114	0.0373033	0.215003
810.000000	65.000000	17.834656	147.56627	0.0419209	0.231131
820.000000	65.000000	17.755806	147.89999	0.0389482	0.219121
830.000000	65.000000	17.680498	148.19899	0.0374693	0.21423
840.000000	65.000000	17.592434	148.57544	0.0372983	0.215514
850.000000	65.000000	17.549065	148.72142	0.0346945	0.199668
860.000000	65.000000	17.467693	149.16257	0.0397549	0.233288
870.000000	65.000000	17.389482	149.46765	0.0320333	0.181544
880.000000	65.000000	17.321095	149.81892	0.0364288	0.210628
890.000000	65.000000	17.26754	149.96053	0.0366732	0.214403
900.000000	65.000000	17.205692	150.23749	0.0334383	0.197902
910.000000	65.000000	17.153841	150.56686	0.0354779	0.21255
920.000000	65.000000	17.087687	150.8055	0.0318097	0.192847
930.000000	65.000000	17.030653	151.15761	0.0337862	0.207134
940.000000	65.000000	16.975431	151.33192	0.0289749	0.17026
950.000000	65.000000	16.920773	151.65532	0.0327578	0.194744
960.000000	65.000000	16.877556	151.8576	0.0324642	0.194901
970.000000	65.000000	16.817268	152.17473	0.0347705	0.211722
980.000000	65.000000	16.769073	152.37465	0.0349953	0.215502
990.000000	65.000000	16.717691	152.63962	0.0299157	0.186319
1000.000000	65.000000	16.682758	152.81804	0.0340348	0.21405
300.000000	70.000000	38.045708	88.580284	0.111198	0.274637
310.000000	70.000000	36.894691	89.508461	0.155758	0.382581
320.000000	70.000000	35.87635	90.581665	0.0956954	0.233986
330.000000	70.000000	35.21386	92.083679	0.0904016	0.232262
340.000000	70.000000	34.703415	93.64994	0.104401	0.267617
350.000000	70.000000	34.352684	95.553047	0.0822618	0.211007
360.000000	70.000000	34.323563	98.729736	0.0640328	0.163933
370.000000	70.000000	33.419167	104.24776	0.0607359	0.165051
380.000000	70.000000	31.116693	107.99953	0.0661029	0.1884
390.000000	70.000000	29.134403	109.32812	0.0608469	0.181813
400.000000	70.000000	27.647758	109.97625	0.0611846	0.190469
410.000000	70.000000	26.40522	110.48728	0.0521381	0.1697
420.000000	70.000000	25.363413	110.8957	0.0523179	0.175341
430.000000	70.000000	24.464199	111.28902	0.050214	0.173038
440.000000	70.000000	23.676947	111.66291	0.0508645	0.179724
450.000000	70.000000	22.940865	112.03096	0.047504	0.172855
460.000000	70.000000	22.271271	112.44804	0.051821	0.193849
470.000000	70.000000	21.662947	112.89388	0.0479496	0.183988
480.000000	70.000000	21.087761	113.25927	0.0455192	0.178709
490.000000	70.000000	20.566658	113.6854	0.0455498	0.183495
500.000000	70.000000	20.080643	113.99602	0.045013	0.185101
510.000000	70.000000	19.642601	114.44837	0.0488091	0.205255
520.000000	70.000000	19.190529	114.86172	0.0466782	0.200455
530.000000	70.000000	18.779278	115.20352	0.042335	0.185314
540.000000	70.000000	18.403664	115.61934	0.0457291	0.205163
550.000000	70.000000	18.041656	115.96532	0.0453118	0.207333
560.000000	70.000000	17.720392	116.3281	0.0420101	0.195882
570.000000	70.000000	17.389013	116.75542	0.0426977	0.201853
580.000000	70.000000	17.085512	117.10374	0.0420172	0.202315
590.000000	70.000000	16.785353	117.49012	0.0382297	0.187624
600.000000	70.000000	16.513618	117.89677	0.0383942	0.191786
610.000000	70.000000	16.250177	118.19791	0.0393845	0.201118
620.000000	70.000000	15.990517	118.59949	0.039696	0.204355
630.000000	70.000000	15.749962	118.99998	0.0405263	0.212171
640.000000	70.000000	15.520956	119.36867	0.036906	0.196389
650.000000	70.000000	15.297334	119.72433	0.0378432	0.204425
660.000000	70.000000	15.085538	120.09734	0.0359453	0.19834
670.000000	70.000000	14.887763	120.45547	0.0388855	0.218536
680.000000	70.000000	14.674568	120.83349	0.0351712	0.197898
690.000000	70.000000	14.500594	121.15018	0.0335021	0.191139
700.000000	70.000000	14.313156	121.49102	0.0345742	0.200155
710.000000	70.000000	14.138526	121.839	0.0324188	0.190621
720.000000	70.000000	13.974668	122.20883	0.0344013	0.205871
730.000000	70.000000	13.805737	122.59376	0.0372679	0.227196
740.000000	70.000000	13.650086	122.91909	0.0368111	0.223466
750.000000	70.000000	13.500754	123.2304	0.0329508	0.202199
760.000000	70.000000	13.349442	123.50718	0.0333207	0.207016
770.000000	70.000000	13.228203	123.87577	0.0333839	0.210206
780.000000	70.000000	13.077242	124.30944	0.0355629	0.226653
790.000000	70.000000	12.934566	124.62531	0.0313886	0.204118
800.000000	70.000000	12.820485	124.90517	0.0310779	0.204742
810.000000	70.000000	12.702296	125.43643	0.0326444	0.202711
820.000000	70.000000	12.54827	125.74118	0.0302204	0.201244
830.000000	70.000000	12.46114	125.89333	0.0281052	0.190032
840.000000	70.000000	12.33452	126.24393	0.0240791	0.163141
850.000000	70.000000	12.22355	126.64812	0.0296138	0.202035
860.000000	70.000000	12.128697	126.8877	0.0259102	0.179041
870.000000	70.000000	12.026973	127.23686	0.0236138	0.163173
880.000000	70.000000	11.911776	127.55788	0.0264316	0.18888
890.000000	70.000000	11.831413	127.7608	0.0263625	0.190039
900.000000	70.000000	11.737819	128.09923	0.0258281	0.188982
910.000000	70.000000	11.648998	128.35896	0.0277679	0.205407
920.000000	70.000000	11.553323	128.66093	0.0249424	0.188457
930.000000	70.000000	11.456622	129.00197	0.0257115	0.196146
940.000000	70.000000	11.371799	129.31638	0.026102	0.196885
950.000000	70.000000	11.291584	129.6149	0.0263097	0.20073
960.000000	70.000000	11.208106	129.88913	0.0250591	0.192812
970.000000	70.000000	11.14167	130.17989	0.0198956	0.155061
980.000000	70.000000	11.054983	130.44759	0.0203402	0.161148
990.000000	70.000000	10.980982	130.74315	0.021637	0.173411
1000.000000	70.000000	10.918332	130.95093	0.0209598	0.169343
300.000000	75.000000	38.476513	69.471306	0.155382	0.402327
310.000000	75.000000	37.330921	70.224907	0.195296	0.509266
320.000000	75.000000	36.353245	70.982597	0.103881	0.273074
330.000000	75.000000	35.704357	71.881409	0.104885	0.277804
340.000000	75.000000	35.039207	73.325531	0.0667371	0.177016
350.000000	75.000000	34.578056	75.214088	0.100013	0.263752
360.000000	75.000000	34.462677	78.183411	0.0895943	0.232699
370.000000	75.000000	33.197514	83.437798	0.0609772	0.162642
380.000000	75.000000	30.59268	86.351059	0.0759782	0.208449
390.000000	75.000000	28.429218	86.742302	0.0495909	0.141361
400.000000	75.000000	26.875961	86.595238	0.0497635	0.14621
410.000000	75.000000	25.571291	86.340706	0.0542249	0.171046
420.000000	75.000000	24.479174	85.999283	0.0471352	0.152167
430.000000	75.000000	23.546268	85.622536	0.0459186	0.15135
440.000000	75.000000	22.709984	85.356461	0.0439986	0.147737
450.000000	75.000000	21.955435	85.066734	0.0464741	0.15947
460.000000	75.000000	21.240643	84.79007	0.043545	0.1582
470.000000	75.000000	20.598803	84.494385	0.0483731	0.179267
480.000000	75.000000	20.000689	84.20961	0.0439616	0.165516
490.000000	75.000000	19.460825	83.989807	0.0440031	0.168773
500.000000	75.000000	18.950357	83.726082	0.0383904	0.149425
510.000000	75.000000	18.467136	83.480927	0.0444714	0.182722
520.000000	75.000000	18.006857	83.197105	0.0388486	0.161918
530.000000	75.000000	17.569864	82.902138	0.0353005	0.148979
540.000000	75.000000	17.165461	82.644814	0.0401639	0.172804
550.000000	75.000000	16.777309	82.429306	0.0310896	0.135659
560.000000	75.000000	16.427618	82.183197	0.0366508	0.161713
570.000000	75.000000	16.067598	82.00428	0.0363379	0.168576
580.000000	75.000000	15.755409	81.783508	0.0367275	0.17239
590.000000	75.000000	15.432391	81.485565	0.0298212	0.141815
600.000000	75.000000	15.13518	81.251099	0.0355499	0.170993
610.000000	75.000000	14.855609	81.062637	0.0351937	0.171999
620.000000	75.000000	14.575798	80.82444	0.0370417	0.188866
630.000000	75.000000	14.314411	80.584236	0.0315835	0.162755
640.000000	75.000000	14.057679	80.390251	0.0321354	0.167404
650.000000	75.000000	13.814635	80.134209	0.0287941	0.152189
660.000000	75.000000	13.573496	79.935593	0.0308922	0.165232
670.000000	75.000000	13.350784	79.760078	0.0275585	0.14918
680.000000	75.000000	13.14264	79.468536	0.0300655	0.168966
690.000000	75.000000	12.918896	79.315735	0.0287633	0.163155
700.000000	75.000000	12.730634	79.134224	0.0260481	0.149646
710.000000	75.000000	12.534142	78.885849	0.0315001	0.183105
720.000000	75.000000	12.348103	78.717583	0.0277063	0.162558
730.000000	75.000000	12.15908	78.483833	0.0264311	0.156853
740.000000	75.000000	11.985844	78.24662	0.0266354	0.1633
750.000000	75.000000	11.820689	78.046089	0.0288038	0.177909
760.000000	75.000000	11.646724	77.824394	0.0305364	0.191577
770.000000	75.000000	11.490605	77.569443	0.0285128	0.180719
780.000000	75.000000	11.338382	77.445694	0.023681	0.151482
790.000000	75.000000	11.181501	77.093758	0.0302278	0.195726
800.000000	75.000000	11.028892	77.013893	0.0279731	0.182151
810.000000	75.000000	10.886596	76.825615	0.0252122	0.168061
820.000000	75.000000	10.712634	76.568596	0.0255984	0.174422
830.000000	75.000000	10.624168	76.481995	0.0240462	0.164375
840.000000	75.000000	10.484648	76.270714	0.0283004	0.194885
850.000000	75.000000	10.367595	76.085114	0.0223149	0.154938
860.000000	75.000000	10.226795	75.877022	0.0211212	0.148548
870.000000	75.000000	10.111827	75.564606	0.0223561	0.162165
880.000000	75.000000	9.988081	75.422211	0.0243679	0.179938
890.000000	75.000000	9.8921261	75.306816	0.0221026	0.163797
900.000000	75.000000	9.7861547	75.079163	0.0242746	0.181507
910.000000	75.000000	9.6737328	74.91996	0.0227488	0.1715
920.000000	75.000000	9.5668306	74.725861	0.0217446	0.165538
930.000000	75.000000	9.4547291	74.481361	0.0215954	0.165591
940.000000	75.000000	9.3561516	74.257187	0.0229525	0.180554
950.000000	75.000000	9.2582474	74.060768	0.0206361	0.163524
960.000000	75.000000	9.1611834	73.903145	0.0213305	0.16985
970.000000	75.000000	9.0670853	73.69281	0.0209968	0.168388
980.000000	75.000000	8.9798946	73.467888	0.019841	0.160878
990.000000	75.000000	8.8844223	73.26696	0.0191241	0.156199
1000.000000	75.000000	8.8113861	73.129959	0.0200498	0.164153