VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Sat Apr 04 15:03:39 2009]
Original[040409513888-23pg si edge align in.dat]
nm
300.000000	65.000000	32.574501	149.12173	0.266009	1.14071
310.000000	65.000000	31.003614	151.24507	0.243251	1.14461
320.000000	65.000000	30.956291	150.71754	0.232709	1.0784
330.000000	65.000000	30.117218	151.90347	0.23902	1.16895
340.000000	65.000000	29.911091	153.06894	0.245262	1.25235
350.000000	65.000000	30.305014	154.09276	0.247489	1.29996
360.000000	65.000000	31.189644	157.03236	0.238925	1.38153
370.000000	65.000000	30.575813	162.72978	0.218551	1.6804
380.000000	65.000000	28.741705	167.35481	0.0557239	0.603361
390.000000	65.000000	26.961531	171.39973	0.0403746	0.667674
400.000000	65.000000	25.733772	169.61192	0.0301243	0.426909
410.000000	65.000000	24.641672	170.71635	0.0241893	0.39543
420.000000	65.000000	23.850386	171.185	0.0221223	0.390117
430.000000	65.000000	23.123989	172.34537	0.0191607	0.397999
440.000000	65.000000	22.543726	172.15729	0.0169298	0.350156
450.000000	65.000000	22.031565	172.16235	0.0145477	0.306588
460.000000	65.000000	21.570026	173.37651	0.0136474	0.345803
470.000000	65.000000	21.132595	172.51747	0.0120653	0.275322
480.000000	65.000000	20.756283	172.64079	0.012749	0.300126
490.000000	65.000000	20.433306	172.959	0.012455	0.310357
500.000000	65.000000	20.122368	173.3992	0.0120572	0.324455
510.000000	65.000000	19.857412	173.89391	0.0117277	0.344809
520.000000	65.000000	19.578344	173.41003	0.0114109	0.314677
530.000000	65.000000	19.3503	173.16492	0.0113585	0.305057
540.000000	65.000000	19.117128	173.46111	0.0111817	0.317068
550.000000	65.000000	18.932528	173.51305	0.011035	0.318008
560.000000	65.000000	18.698845	173.79361	0.0109159	0.332217
570.000000	65.000000	18.536211	173.5349	0.0108388	0.319106
580.000000	65.000000	18.397932	173.07542	0.0109382	0.302719
590.000000	65.000000	18.220263	174.25127	0.0108986	0.366028
600.000000	65.000000	18.092009	174.03079	0.0111497	0.362892
610.000000	65.000000	17.964104	174.2408	0.0109854	0.372804
620.000000	65.000000	17.781544	173.862	0.0108841	0.349751
630.000000	65.000000	17.690268	174.63901	0.0110176	0.406936
640.000000	65.000000	17.598017	174.73668	0.011296	0.426871
650.000000	65.000000	17.489244	174.54984	0.011388	0.417901
660.000000	65.000000	17.38151	174.96611	0.0119747	0.478207
670.000000	65.000000	17.25139	174.41678	0.0118112	0.428243
680.000000	65.000000	17.182978	174.42389	0.0118138	0.430379
690.000000	65.000000	17.075821	175.5619	0.0115843	0.532718
700.000000	65.000000	17.012062	174.30786	0.0124577	0.448543
710.000000	65.000000	16.920666	175.07605	0.0126531	0.528867
720.000000	65.000000	16.846014	174.77142	0.012678	0.501086
730.000000	65.000000	16.789524	175.91733	0.0130287	0.660905
740.000000	65.000000	16.719393	176.02213	0.0134534	0.702969
750.000000	65.000000	16.64459	174.81332	0.014014	0.56431
760.000000	65.000000	16.594738	175.87038	0.015031	0.761645
770.000000	65.000000	16.510784	174.88306	0.0157972	0.649379
780.000000	65.000000	16.468746	175.27217	0.0197871	0.882089
790.000000	65.000000	16.376677	174.3419	0.0185908	0.696425
800.000000	65.000000	16.37883	174.57394	0.0202406	0.79043
810.000000	65.000000	16.248781	175.51369	0.0233907	1.1119
820.000000	65.000000	16.301611	174.59154	0.0151885	0.597563
830.000000	65.000000	16.187775	174.85368	0.0095383	0.396777
840.000000	65.000000	16.161089	174.79778	0.016411	0.676353
850.000000	65.000000	16.144211	178.25288	0.0539232	6.60285
860.000000	65.000000	16.189871	175.69476	0.0449817	2.23512
870.000000	65.000000	16.054703	175.9339	0.0255486	1.35403
880.000000	65.000000	15.994134	175.24762	0.00943236	0.429363
890.000000	65.000000	15.95706	176.78159	0.00994925	0.669385
900.000000	65.000000	15.914412	174.88481	0.00919593	0.390752
910.000000	65.000000	15.912244	175.52017	0.0094772	0.459668
920.000000	65.000000	15.84971	175.09763	0.00809501	0.360161
930.000000	65.000000	15.80787	175.17914	0.0101236	0.45909
940.000000	65.000000	15.782059	175.11746	0.00861146	0.386167
950.000000	65.000000	15.759136	175.90317	0.00858444	0.459126
960.000000	65.000000	15.72377	175.15527	0.0103558	0.469557
970.000000	65.000000	15.704477	176.41002	0.0101147	0.619047
980.000000	65.000000	15.682996	175.12041	0.00795763	0.359084
990.000000	65.000000	15.684958	174.94707	0.00854128	0.372204
1000.000000	65.000000	15.714981	174.30373	0.00962641	0.371645
1010.000000	65.000000	15.78147	173.18414	0.0124353	0.400055
1020.000000	65.000000	15.93134	170.5184	0.0133232	0.306255
1030.000000	65.000000	16.169754	168.35358	0.0195028	0.36104
1040.000000	65.000000	16.507181	166.28506	0.0247216	0.382599
1050.000000	65.000000	16.94627	164.39252	0.0237627	0.316646
1060.000000	65.000000	16.896513	163.7021	0.0251049	0.321556
1070.000000	65.000000	17.117878	162.54919	0.0227001	0.268977
1080.000000	65.000000	17.338242	162.37474	0.0155434	0.180363
1090.000000	65.000000	17.468357	162.10751	0.0128201	0.145687
1100.000000	65.000000	17.577192	161.2379	0.0164633	0.177743
1110.000000	65.000000	17.648777	161.11752	0.0120167	0.128482
1120.000000	65.000000	17.745981	160.67065	0.0119239	0.124057
1130.000000	65.000000	17.799551	160.8636	0.0149617	0.15676
1140.000000	65.000000	17.819267	160.73517	0.0159304	0.165678
1150.000000	65.000000	17.833353	160.59863	0.0156561	0.161612
1160.000000	65.000000	17.882439	160.60213	0.0147973	0.152408
1170.000000	65.000000	17.834175	160.4353	0.0122105	0.125029
1180.000000	65.000000	17.856268	160.42122	0.00948202	0.0969188
1190.000000	65.000000	17.846392	160.36821	0.0107892	0.110047
1200.000000	65.000000	17.83387	160.21689	0.0129335	0.131029
1210.000000	65.000000	17.845858	160.41145	0.0143471	0.14665
1220.000000	65.000000	17.818846	160.4816	0.0144545	0.148455
1230.000000	65.000000	17.797607	160.33221	0.0133187	0.135932
1240.000000	65.000000	17.789959	160.38309	0.0148484	0.151978
1250.000000	65.000000	17.787512	160.31435	0.0149331	0.152352
1260.000000	65.000000	17.746969	160.81322	0.0131533	0.137819
1270.000000	65.000000	17.734226	160.43961	0.00980362	0.100898
1280.000000	65.000000	17.747702	160.42091	0.0140146	0.144009
1290.000000	65.000000	17.717686	160.53352	0.0157522	0.163003
1300.000000	65.000000	17.694613	160.20407	0.0151908	0.154857
1310.000000	65.000000	17.668261	160.0305	0.014383	0.145588
1320.000000	65.000000	17.650755	160.37254	0.0138338	0.142493
1330.000000	65.000000	17.674767	160.34079	0.0135498	0.139187
1340.000000	65.000000	17.64016	160.34329	0.0131298	0.13512
1350.000000	65.000000	17.607706	160.82825	0.0132941	0.140361
1360.000000	65.000000	17.627705	160.33601	0.0139017	0.143101
1370.000000	65.000000	17.605267	160.42647	0.00976816	0.101109
1380.000000	65.000000	17.624334	160.285	0.0118425	0.121621
1390.000000	65.000000	17.600174	160.62935	0.0138219	0.144545
1400.000000	65.000000	17.6115	160.71811	0.0143409	0.150552
1410.000000	65.000000	17.552118	160.49474	0.0134031	0.139568
1420.000000	65.000000	17.565798	160.58318	0.0105355	0.110113
1430.000000	65.000000	17.541845	160.44514	0.010837	0.11263
1440.000000	65.000000	17.553436	160.53555	0.011882	0.12397
1450.000000	65.000000	17.526857	160.64114	0.0130861	0.13743
1460.000000	65.000000	17.543619	160.67995	0.014084	0.148073
1470.000000	65.000000	17.508638	160.63017	0.012604	0.132416
1480.000000	65.000000	17.496901	160.64076	0.00893297	0.0939529
1490.000000	65.000000	17.471516	160.71747	0.0110098	0.116386
1500.000000	65.000000	17.472261	160.38927	0.0134152	0.139528
310.000000	70.000000	28.375689	141.39174	1.04134	3.98952
320.000000	70.000000	27.616983	141.88083	0.621627	2.44925
330.000000	70.000000	26.352327	142.44554	0.396051	1.63249
340.000000	70.000000	26.085236	142.34467	0.268001	1.11067
350.000000	70.000000	26.480185	145.12221	0.182729	0.80055
360.000000	70.000000	26.96483	149.55501	0.128537	0.627509
370.000000	70.000000	26.326469	156.81137	0.0914098	0.583907
380.000000	70.000000	24.036991	163.56422	0.0637729	0.605438
390.000000	70.000000	21.709034	165.45424	0.0460475	0.533105
400.000000	70.000000	20.153141	166.6342	0.0349272	0.466879
410.000000	70.000000	18.903559	167.11879	0.0281198	0.411322
420.000000	70.000000	17.844353	167.53198	0.0256476	0.407065
430.000000	70.000000	17.046703	167.43507	0.0224877	0.368647
440.000000	70.000000	16.3395	167.80946	0.0184089	0.322723
450.000000	70.000000	15.671422	168.51656	0.0157747	0.304511
460.000000	70.000000	15.139185	168.33699	0.0139336	0.273245
470.000000	70.000000	14.617348	168.35051	0.0117897	0.238986
480.000000	70.000000	14.185511	168.43771	0.0131499	0.275987
490.000000	70.000000	13.785179	169.23582	0.012275	0.283817
500.000000	70.000000	13.421827	168.74925	0.0123401	0.280003
510.000000	70.000000	13.095853	168.66553	0.0117358	0.270436
520.000000	70.000000	12.776227	169.45723	0.0111617	0.282686
530.000000	70.000000	12.480565	169.64781	0.0112928	0.297677
540.000000	70.000000	12.240335	168.99495	0.0110064	0.278131
550.000000	70.000000	12.014957	169.47893	0.0107493	0.288965
560.000000	70.000000	11.78448	169.81528	0.0105847	0.299225
570.000000	70.000000	11.56966	169.8479	0.0104625	0.301893
580.000000	70.000000	11.389984	169.94154	0.0110919	0.32787
590.000000	70.000000	11.198201	169.60701	0.0110784	0.322184
600.000000	70.000000	11.021613	170.83954	0.0116584	0.39001
610.000000	70.000000	10.864868	169.64059	0.0113145	0.339704
620.000000	70.000000	10.72508	170.31039	0.0112103	0.364037
630.000000	70.000000	10.581484	170.04938	0.011486	0.367991
640.000000	70.000000	10.460921	170.22957	0.0120876	0.398659
650.000000	70.000000	10.314276	169.98936	0.0132693	0.433105
660.000000	70.000000	10.194479	170.30092	0.0140293	0.477773
670.000000	70.000000	10.104118	170.23108	0.013803	0.470734
680.000000	70.000000	9.974061	170.39183	0.013787	0.483943
690.000000	70.000000	9.8890667	170.98215	0.0133963	0.504837
700.000000	70.000000	9.7762718	170.30414	0.0150754	0.534592
710.000000	70.000000	9.723217	170.64244	0.0156008	0.576025
720.000000	70.000000	9.6460571	171.59372	0.0156954	0.649461
730.000000	70.000000	9.5586309	170.69756	0.01638	0.618396
740.000000	70.000000	9.4437027	170.87727	0.0171099	0.666261
750.000000	70.000000	9.365015	170.66289	0.0181955	0.697999
760.000000	70.000000	9.3207197	172.00261	0.0201305	0.904597
770.000000	70.000000	9.2490721	173.22589	0.021574	1.15192
780.000000	70.000000	9.1431694	172.44539	0.0281586	1.36405
790.000000	70.000000	9.0806303	172.99112	0.0250499	1.31606
800.000000	70.000000	9.0572805	170.38889	0.0278261	1.07115
810.000000	70.000000	9.3047419	167.66458	0.125367	3.67577
820.000000	70.000000	8.9797487	169.32323	0.0341722	1.19552
830.000000	70.000000	8.8894281	171.82025	0.0214566	0.986996
840.000000	70.000000	8.827631	172.24614	0.0395642	1.93217
850.000000	70.000000	8.7951021	168.13966	0.0809224	2.60358
860.000000	70.000000	8.8267279	179.9959	0.0674878	2798.47
870.000000	70.000000	8.7034969	170.8894	0.0372059	1.56959
880.000000	70.000000	8.6265011	171.59209	0.00903205	0.416171
890.000000	70.000000	8.5957489	171.84128	0.0102883	0.490121
900.000000	70.000000	8.5633402	172.37785	0.00849044	0.434337
910.000000	70.000000	8.527256	172.44948	0.00918657	0.476321
920.000000	70.000000	8.4812346	172.11969	0.00547078	0.273287
930.000000	70.000000	8.4418964	172.65154	0.0107289	0.577088
940.000000	70.000000	8.4034863	172.17407	0.00706216	0.358399
950.000000	70.000000	8.376894	172.60617	0.00699441	0.37673
960.000000	70.000000	8.3310251	172.77347	0.0111855	0.619622
970.000000	70.000000	8.2959948	172.60788	0.0105988	0.576394
980.000000	70.000000	8.2821245	172.29649	0.00513814	0.268631
990.000000	70.000000	8.2560997	172.13432	0.00686183	0.35247
1000.000000	70.000000	8.2619524	171.96788	0.00956449	0.480851
1010.000000	70.000000	8.2905035	170.4494	0.015008	0.633274
1020.000000	70.000000	8.3541117	168.69778	0.0166459	0.5902
1030.000000	70.000000	8.5011301	165.49782	0.0272737	0.744024
1040.000000	70.000000	8.6532698	163.29678	0.0356647	0.833233
1050.000000	70.000000	8.9242249	161.58356	0.0344869	0.711626
1060.000000	70.000000	8.9576359	158.96742	0.0363969	0.65865
1070.000000	70.000000	9.0733471	160.68704	0.0329348	0.638946
1080.000000	70.000000	9.1885004	158.91731	0.0208848	0.36804
1090.000000	70.000000	9.2367725	158.57118	0.0167226	0.288702
1100.000000	70.000000	9.3061829	157.54361	0.0237158	0.388806
1110.000000	70.000000	9.3824787	157.27628	0.0151127	0.243097
1120.000000	70.000000	9.3446941	156.43285	0.0146607	0.228719
1130.000000	70.000000	9.471839	156.53572	0.0210738	0.3259
1140.000000	70.000000	9.3977509	155.56961	0.0227931	0.341901
1150.000000	70.000000	9.3959246	155.73534	0.0222219	0.335534
1160.000000	70.000000	9.4335022	157.4967	0.0207764	0.335562
1170.000000	70.000000	9.3854237	156.08281	0.0154329	0.23646
1180.000000	70.000000	9.3592463	156.14098	0.00875354	0.134786
1190.000000	70.000000	9.3491316	155.71846	0.0121159	0.183693
1200.000000	70.000000	9.3337345	155.50406	0.0168647	0.253985
1210.000000	70.000000	9.321208	156.07016	0.0196975	0.303632
1220.000000	70.000000	9.3189754	155.65453	0.0200989	0.30491
1230.000000	70.000000	9.2398472	155.90977	0.0177094	0.273547
1240.000000	70.000000	9.2639837	155.86406	0.0208584	0.320816
1250.000000	70.000000	9.1429939	155.72211	0.0207157	0.320855
1260.000000	70.000000	9.2647886	155.37393	0.0173727	0.262181
1270.000000	70.000000	9.2030287	156.35291	0.00982465	0.155022
1280.000000	70.000000	9.2040911	156.01248	0.01923	0.299335
1290.000000	70.000000	9.1544466	155.31786	0.0225246	0.343094
1300.000000	70.000000	9.1571703	155.8131	0.0217094	0.336939
1310.000000	70.000000	9.1321793	155.88834	0.0201927	0.315137
1320.000000	70.000000	9.1091509	156.65135	0.0191233	0.308378
1330.000000	70.000000	9.095109	155.97574	0.0182576	0.287021
1340.000000	70.000000	9.0976658	156.16698	0.0176625	0.279689
1350.000000	70.000000	9.1073151	156.17705	0.0181811	0.287727
1360.000000	70.000000	9.0342236	157.39642	0.0192424	0.3225
1370.000000	70.000000	9.0550365	156.22855	0.0098535	0.157113
1380.000000	70.000000	9.0382233	156.78296	0.0149273	0.243809
1390.000000	70.000000	9.019495	155.9222	0.0189175	0.299134
1400.000000	70.000000	9.0040064	156.35747	0.0198321	0.319558
1410.000000	70.000000	9.0269012	156.18188	0.0181661	0.289976
1420.000000	70.000000	8.9952564	156.53316	0.0118885	0.193095
1430.000000	70.000000	8.9963093	156.31094	0.0126531	0.203669
1440.000000	70.000000	8.9480734	156.23616	0.014987	0.24175
1450.000000	70.000000	8.9371319	155.60062	0.0174727	0.275244
1460.000000	70.000000	8.9832163	156.38358	0.0193877	0.31341
1470.000000	70.000000	8.9276342	156.58719	0.0163748	0.268458
1480.000000	70.000000	8.916419	156.38997	0.00740476	0.120583
1490.000000	70.000000	8.9030628	156.65045	0.0131052	0.215969
1500.000000	70.000000	8.9275408	157.05765	0.0183251	0.306263
320.000000	75.000000	22.360373	123.09269	0.675241	2.28771
330.000000	75.000000	22.245636	123.9104	0.45884	1.57772
340.000000	75.000000	21.270094	124.82304	0.294934	1.0616
350.000000	75.000000	21.367546	127.23486	0.209884	0.77687
360.000000	75.000000	21.622196	134.56123	0.150467	0.616375
370.000000	75.000000	20.438925	146.09367	0.1094	0.599063
380.000000	75.000000	17.340796	153.36375	0.0772613	0.602736
390.000000	75.000000	14.510571	156.08757	0.0607112	0.615593
400.000000	75.000000	12.482553	157.15758	0.0488914	0.595581
410.000000	75.000000	11.020942	155.5519	0.0413509	0.53161
420.000000	75.000000	9.8255339	156.74715	0.039864	0.599743
430.000000	75.000000	8.84519	154.94606	0.0357006	0.553974
440.000000	75.000000	8.0580111	154.22952	0.0284481	0.469262
450.000000	75.000000	7.3230591	152.95775	0.0219061	0.37733
460.000000	75.000000	6.673562	152.81485	0.0187588	0.350003
470.000000	75.000000	6.1036491	151.68535	0.0141093	0.274463
480.000000	75.000000	5.6678863	149.89714	0.0167903	0.328832
490.000000	75.000000	5.2260413	148.93864	0.0154924	0.31602
500.000000	75.000000	4.8611484	147.1991	0.0146614	0.301703
510.000000	75.000000	4.4719782	146.52899	0.0139185	0.301544
520.000000	75.000000	4.157948	145.13396	0.0133226	0.294536
530.000000	75.000000	3.8705294	142.81219	0.0130483	0.286326
540.000000	75.000000	3.6234586	141.81042	0.0128861	0.290395
550.000000	75.000000	3.3763328	139.84105	0.0128519	0.29051
560.000000	75.000000	3.1502287	138.0018	0.0129754	0.295055
570.000000	75.000000	2.9307761	136.54868	0.0131525	0.304853
580.000000	75.000000	2.7313385	134.62502	0.0136175	0.317053
590.000000	75.000000	2.5441809	133.31598	0.0140949	0.33538
600.000000	75.000000	2.4225819	129.5535	0.0159146	0.35509
610.000000	75.000000	2.2928174	128.04257	0.0158196	0.353676
620.000000	75.000000	2.1537583	125.16418	0.0165449	0.358643
630.000000	75.000000	2.0285778	122.60596	0.0180696	0.381651
640.000000	75.000000	1.8921884	120.13105	0.020392	0.422683
650.000000	75.000000	1.8865061	116.02847	0.0226528	0.418119
660.000000	75.000000	1.7549089	113.47464	0.0260705	0.468371
670.000000	75.000000	1.7179049	109.86469	0.0280497	0.458459
680.000000	75.000000	1.6732199	105.78672	0.0313119	0.460134
690.000000	75.000000	1.5536839	104.30348	0.0328204	0.477296
700.000000	75.000000	1.5333084	99.729065	0.0422506	0.541462
710.000000	75.000000	1.4731441	96.671249	0.0481432	0.578287
720.000000	75.000000	1.4652526	93.825233	0.0509957	0.582486
730.000000	75.000000	1.2747436	90.691544	0.0622548	0.696432
740.000000	75.000000	1.411966	86.861496	0.0587432	0.66704
750.000000	75.000000	1.3905746	83.227699	0.0595264	0.724382
760.000000	75.000000	1.3254429	81.851868	0.0658863	0.840863
770.000000	75.000000	1.288059	78.50412	0.0654044	0.940262
780.000000	75.000000	1.4207488	75.161201	0.0739397	1.14112
790.000000	75.000000	1.2377192	70.731636	0.0602954	1.18633
800.000000	75.000000	1.3372097	69.634544	0.0629393	1.22311
810.000000	75.000000	1.6657894	74.629822	0.279343	4.06431
820.000000	75.000000	1.14108	58.034004	0.055433	1.84525
830.000000	75.000000	1.177088	57.36153	0.0348867	1.156
840.000000	75.000000	1.1859243	52.303371	0.0576791	2.24899
850.000000	75.000000	1.5671967	63.197048	0.143587	3.09436
860.000000	75.000000	1.0770504	47.523354	0.0895834	4.47892
870.000000	75.000000	1.519788	57.02916	0.0577523	1.55174
880.000000	75.000000	1.4275162	50.222649	0.0113805	0.400983
890.000000	75.000000	1.464336	50.535206	0.0134883	0.459872
900.000000	75.000000	1.4565445	47.608948	0.0103318	0.38856
910.000000	75.000000	1.4735285	46.266716	0.0110459	0.429077
920.000000	75.000000	1.5252864	45.536903	0.00553729	0.213301
930.000000	75.000000	1.4798676	41.164501	0.0122615	0.560077
940.000000	75.000000	1.5377001	41.800587	0.00761158	0.328424
950.000000	75.000000	1.5776242	41.75425	0.00747987	0.31558
960.000000	75.000000	1.5498711	39.519203	0.0124919	0.57704
970.000000	75.000000	1.5575657	37.728004	0.0116663	0.569908
980.000000	75.000000	1.6012421	36.837761	0.00454763	0.223115
990.000000	75.000000	1.6477671	36.86451	0.00675968	0.32245
1000.000000	75.000000	1.6981187	37.551495	0.0103684	0.469556
1010.000000	75.000000	1.667142	35.593815	0.0162663	0.801973
1020.000000	75.000000	1.7684427	38.183842	0.0187133	0.798553
1030.000000	75.000000	1.8406392	36.926506	0.0305764	1.31125
1040.000000	75.000000	1.8836651	38.599518	0.041071	1.62981
1050.000000	75.000000	2.1407423	46.403606	0.0428536	1.18832
1060.000000	75.000000	2.295716	49.917183	0.047556	1.12425
1070.000000	75.000000	2.293618	46.315063	0.0408265	1.07034
1080.000000	75.000000	2.1976635	44.413338	0.0249754	0.71836
1090.000000	75.000000	2.1376534	41.175247	0.0193424	0.629497
1100.000000	75.000000	2.3767846	46.781734	0.029159	0.732054
1110.000000	75.000000	2.2137287	43.510883	0.0176803	0.519215
1120.000000	75.000000	2.309329	41.994293	0.0169158	0.501219
1130.000000	75.000000	2.2975769	42.174725	0.0245047	0.725346
1140.000000	75.000000	2.3131225	39.282742	0.0259995	0.836721
1150.000000	75.000000	2.4155509	42.953949	0.0263469	0.729328
1160.000000	75.000000	2.4807563	43.12635	0.0239966	0.645922
1170.000000	75.000000	2.3830738	42.662251	0.0177196	0.500625
1180.000000	75.000000	2.4138281	40.226967	0.0092386	0.27793
1190.000000	75.000000	2.4028175	40.436848	0.0134491	0.403611
1200.000000	75.000000	2.4954588	43.258175	0.0197028	0.525628
1210.000000	75.000000	2.4061043	39.999809	0.0228845	0.695274
1220.000000	75.000000	2.3955929	38.598831	0.0224849	0.716601
1230.000000	75.000000	2.4117596	36.784695	0.0196181	0.658823
1240.000000	75.000000	2.3984323	37.720989	0.0232393	0.7609
1250.000000	75.000000	2.5052717	40.019535	0.0238593	0.69908
1260.000000	75.000000	2.4348817	36.560677	0.0191039	0.640709
1270.000000	75.000000	2.5105076	38.680107	0.0104009	0.317097
1280.000000	75.000000	2.4393144	36.34053	0.0210155	0.708757
1290.000000	75.000000	2.5866835	37.30484	0.0250508	0.776736
1300.000000	75.000000	2.5105193	37.869633	0.0241357	0.75491
1310.000000	75.000000	2.4110286	32.700783	0.0215333	0.830998
1320.000000	75.000000	2.5192091	37.929394	0.0211887	0.659438
1330.000000	75.000000	2.5470045	35.409203	0.0198274	0.663064
1340.000000	75.000000	2.5532923	35.040192	0.0188843	0.637904
1350.000000	75.000000	2.4908595	34.475239	0.0195089	0.687008
1360.000000	75.000000	2.5534902	35.35437	0.0208902	0.698267
1370.000000	75.000000	2.5660188	35.829975	0.0101436	0.332294
1380.000000	75.000000	2.6374285	36.489052	0.0161038	0.503736
1390.000000	75.000000	2.5503771	34.719051	0.0204672	0.699585
1400.000000	75.000000	2.5792871	33.585411	0.0213725	0.751464
1410.000000	75.000000	2.5164595	30.820808	0.0190359	0.755476
1420.000000	75.000000	2.6706319	36.135014	0.012563	0.393072
1430.000000	75.000000	2.5779395	32.636673	0.0130763	0.475407
1440.000000	75.000000	2.615917	32.388905	0.015826	0.572645
1450.000000	75.000000	2.6250191	33.192795	0.0185377	0.650121
1460.000000	75.000000	2.6405401	33.478603	0.0207924	0.718161
1470.000000	75.000000	2.6104133	31.945772	0.0172274	0.63445
1480.000000	75.000000	2.665436	33.19648	0.00711295	0.245956
1490.000000	75.000000	2.6083329	32.36087	0.0135689	0.492776
1500.000000	75.000000	2.715718	35.824455	0.0197488	0.614866