VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Jul 06 16:49:56 2009]
Original[060709 si wafer.dat]
Angstroms
3000.000000	65.000000	32.775818	150.62402	0.215864	0.783458
3100.000000	65.000000	31.332031	151.17831	0.184336	0.710817
3200.000000	65.000000	30.591825	151.94846	0.145459	0.58609
3300.000000	65.000000	30.180307	153.11659	0.176924	0.66669
3400.000000	65.000000	29.92642	154.29079	0.153014	0.597742
3500.000000	65.000000	30.073675	155.72723	0.174391	0.699512
3600.000000	65.000000	30.749475	158.76254	0.131113	0.542324
3700.000000	65.000000	30.598108	164.85588	0.120616	0.471805
3800.000000	65.000000	28.812378	169.26054	0.101405	0.427226
3900.000000	65.000000	27.065746	171.06822	0.0944385	0.42564
4000.000000	65.000000	25.765156	171.91505	0.0833722	0.399358
4100.000000	65.000000	24.729595	172.4563	0.0882658	0.402702
4200.000000	65.000000	23.899942	172.83981	0.0783655	0.374901
4300.000000	65.000000	23.202583	173.14473	0.0744069	0.371049
4400.000000	65.000000	22.610647	173.38907	0.0681475	0.354809
4500.000000	65.000000	22.074343	173.61263	0.0624741	0.337903
4600.000000	65.000000	21.607214	173.81522	0.0611374	0.311922
4700.000000	65.000000	21.184874	173.96078	0.0592738	0.312683
4800.000000	65.000000	20.799944	174.16858	0.0540621	0.294489
4900.000000	65.000000	20.4694	174.27502	0.0513908	0.289484
5000.000000	65.000000	20.156761	174.4023	0.0462797	0.268738
5100.000000	65.000000	19.873972	174.5367	0.0526731	0.287242
5200.000000	65.000000	19.605835	174.6805	0.0498629	0.279431
5300.000000	65.000000	19.366325	174.78651	0.0479952	0.276885
5400.000000	65.000000	19.141439	174.87378	0.0438312	0.259438
5500.000000	65.000000	18.939945	174.97128	0.0417574	0.253409
5600.000000	65.000000	18.747705	175.06696	0.0387446	0.240904
5700.000000	65.000000	18.563242	175.14946	0.0415044	0.24212
5800.000000	65.000000	18.386265	175.22482	0.0380025	0.227308
5900.000000	65.000000	18.232706	175.33362	0.0372628	0.227854
6000.000000	65.000000	18.087523	175.43756	0.0357698	0.223459
6100.000000	65.000000	17.944725	175.47408	0.0335012	0.213712
6200.000000	65.000000	17.822262	175.55272	0.0338124	0.202593
6300.000000	65.000000	17.695461	175.64198	0.0324488	0.198276
6400.000000	65.000000	17.574375	175.70479	0.0314216	0.195681
6500.000000	65.000000	17.468801	175.75769	0.0296268	0.187919
6600.000000	65.000000	17.37302	175.84216	0.0294377	0.190622
6700.000000	65.000000	17.278522	175.90419	0.0271454	0.178852
6800.000000	65.000000	17.18264	175.95302	0.0288974	0.179189
6900.000000	65.000000	17.099316	175.98914	0.026909	0.169628
7000.000000	65.000000	17.01512	176.04895	0.0242619	0.155559
7100.000000	65.000000	16.935682	176.11346	0.0224034	0.146008
7200.000000	65.000000	16.861923	176.14276	0.0222038	0.146955
7300.000000	65.000000	16.789351	176.25394	0.0230424	0.154884
7400.000000	65.000000	16.723959	176.28825	0.0237085	0.15007
7500.000000	65.000000	16.659943	176.3477	0.0246048	0.158107
7600.000000	65.000000	16.605663	176.39281	0.021468	0.139917
7700.000000	65.000000	16.537495	176.43295	0.0201695	0.133396
7800.000000	65.000000	16.486586	176.50485	0.0208539	0.139709
7900.000000	65.000000	16.427326	176.54341	0.0180877	0.12296
8000.000000	65.000000	16.371515	176.54866	0.0168133	0.116148
8100.000000	65.000000	16.323824	176.70773	0.0245799	0.1601
8200.000000	65.000000	16.278458	176.7122	0.0212152	0.140058
8300.000000	65.000000	16.2304	176.77431	0.021373	0.143026
8400.000000	65.000000	16.184181	176.80658	0.0212132	0.143671
8500.000000	65.000000	16.131924	176.87735	0.0328811	0.225056
8600.000000	65.000000	16.089031	176.90887	0.019735	0.13678
8700.000000	65.000000	16.047873	176.89774	0.0223522	0.146615
8800.000000	65.000000	16.001223	176.97725	0.023501	0.156313
8900.000000	65.000000	15.970836	176.9915	0.022032	0.148245
9000.000000	65.000000	15.928037	177.03569	0.0225896	0.153923
9100.000000	65.000000	15.892679	177.05644	0.0205085	0.141311
9200.000000	65.000000	15.855597	177.09082	0.0194272	0.135418
9300.000000	65.000000	15.822295	177.09421	0.0213766	0.150603
9400.000000	65.000000	15.785945	177.19234	0.0227459	0.151778
9500.000000	65.000000	15.762205	177.23732	0.0218014	0.146973
9600.000000	65.000000	15.732348	177.29379	0.0221615	0.151049
9700.000000	65.000000	15.702115	177.27986	0.0212093	0.145998
9800.000000	65.000000	15.669098	177.30199	0.0196206	0.136504
9900.000000	65.000000	15.645563	177.33502	0.0222372	0.156271
10000.000000	65.000000	15.626003	177.33394	0.021257	0.150923
3000.000000	70.000000	29.62575	140.87277	0.233754	0.861268
3100.000000	70.000000	28.035173	140.44882	0.253367	0.969475
3200.000000	70.000000	27.019905	142.00273	0.193855	0.795535
3300.000000	70.000000	26.410215	142.66057	0.218171	0.847738
3400.000000	70.000000	26.097561	144.15701	0.168312	0.676665
3500.000000	70.000000	26.127602	146.16371	0.155333	0.64713
3600.000000	70.000000	26.821194	150.12396	0.141724	0.609654
3700.000000	70.000000	26.46711	158.4705	0.139625	0.587618
3800.000000	70.000000	24.010691	164.69389	0.10477	0.491982
3900.000000	70.000000	21.814348	166.95801	0.093118	0.487171
4000.000000	70.000000	20.197348	168.04709	0.0920785	0.527828
4100.000000	70.000000	18.932299	168.61917	0.0914143	0.512559
4200.000000	70.000000	17.913124	169.07245	0.0825949	0.496832
4300.000000	70.000000	17.074848	169.36224	0.0776926	0.498062
4400.000000	70.000000	16.352703	169.58557	0.0680521	0.461159
4500.000000	70.000000	15.716121	169.84244	0.0650833	0.468363
4600.000000	70.000000	15.156276	170.0379	0.0677715	0.466095
4700.000000	70.000000	14.660115	170.20306	0.0630295	0.456602
4800.000000	70.000000	14.213017	170.35992	0.0578452	0.438092
4900.000000	70.000000	13.80714	170.4994	0.0514508	0.406599
5000.000000	70.000000	13.44984	170.63113	0.0507219	0.419913
5100.000000	70.000000	13.11274	170.77158	0.0534062	0.420564
5200.000000	70.000000	12.801723	170.90193	0.0474645	0.387897
5300.000000	70.000000	12.515085	171.0085	0.045995	0.391457
5400.000000	70.000000	12.254183	171.08475	0.0421771	0.371835
5500.000000	70.000000	12.011223	171.19218	0.0402315	0.366806
5600.000000	70.000000	11.787832	171.29065	0.0371626	0.349808
5700.000000	70.000000	11.577309	171.41159	0.0424181	0.379917
5800.000000	70.000000	11.380417	171.49141	0.0376674	0.347862
5900.000000	70.000000	11.202356	171.56691	0.03513	0.334026
6000.000000	70.000000	11.031219	171.68567	0.0363449	0.355282
6100.000000	70.000000	10.878661	171.79036	0.031673	0.318024
6200.000000	70.000000	10.724383	171.83406	0.032072	0.304751
6300.000000	70.000000	10.585742	171.93456	0.0327943	0.321388
6400.000000	70.000000	10.453135	172.02119	0.0307774	0.30937
6500.000000	70.000000	10.328361	172.08559	0.0292217	0.300808
6600.000000	70.000000	10.212941	172.16437	0.0279758	0.294757
6700.000000	70.000000	10.090558	172.26755	0.0236333	0.255256
6800.000000	70.000000	9.9902716	172.30702	0.0267888	0.273254
6900.000000	70.000000	9.8906364	172.38641	0.0236807	0.246787
7000.000000	70.000000	9.7909956	172.48412	0.024489	0.260486
7100.000000	70.000000	9.7042952	172.57974	0.0218877	0.237599
7200.000000	70.000000	9.6177731	172.58333	0.0241324	0.267206
7300.000000	70.000000	9.5360355	172.75929	0.0227054	0.256217
7400.000000	70.000000	9.4599075	172.82785	0.0235648	0.251357
7500.000000	70.000000	9.3842278	172.89221	0.0179682	0.195128
7600.000000	70.000000	9.3096056	172.99358	0.0187805	0.207506
7700.000000	70.000000	9.2463894	173.03041	0.0183853	0.206479
7800.000000	70.000000	9.1720133	173.10149	0.0168128	0.192017
7900.000000	70.000000	9.1091814	173.19861	0.0198793	0.230679
8000.000000	70.000000	9.0485086	173.3293	0.0147054	0.173519
8100.000000	70.000000	9.0078278	173.13702	0.045412	0.511161
8200.000000	70.000000	8.9250326	173.44049	0.0231767	0.26597
8300.000000	70.000000	8.8873491	173.51996	0.0206969	0.241222
8400.000000	70.000000	8.8335953	173.59688	0.025658	0.302999
8500.000000	70.000000	8.7717447	173.58762	0.0231614	0.277026
8600.000000	70.000000	8.7458591	173.67155	0.0296894	0.360277
8700.000000	70.000000	8.7017384	173.80804	0.0196992	0.225646
8800.000000	70.000000	8.6423903	173.83247	0.0190983	0.224136
8900.000000	70.000000	8.6053762	173.85516	0.017584	0.209234
9000.000000	70.000000	8.562952	173.87842	0.0174254	0.210189
9100.000000	70.000000	8.5156898	173.98416	0.0175339	0.214354
9200.000000	70.000000	8.4771986	174.01569	0.0150306	0.186347
9300.000000	70.000000	8.4458847	174.1216	0.0142044	0.178004
9400.000000	70.000000	8.407156	174.17378	0.0159834	0.190298
9500.000000	70.000000	8.3712225	174.18452	0.016993	0.20475
9600.000000	70.000000	8.3382826	174.25468	0.0138076	0.168291
9700.000000	70.000000	8.3020411	174.32098	0.0171561	0.211726
9800.000000	70.000000	8.2690449	174.37628	0.0154326	0.192896
9900.000000	70.000000	8.2378407	174.40781	0.0156144	0.197353
10000.000000	70.000000	8.2181978	174.43683	0.0132495	0.169268
3000.000000	75.000000	26.493214	122.86343	0.227206	0.782881
3100.000000	75.000000	24.083914	122.59608	0.210167	0.765909
3200.000000	75.000000	22.866121	123.02678	0.217567	0.849174
3300.000000	75.000000	22.129601	123.90607	0.18739	0.72596
3400.000000	75.000000	21.492044	126.17488	0.19794	0.812326
3500.000000	75.000000	21.40801	128.86795	0.15467	0.657867
3600.000000	75.000000	21.848848	134.92145	0.152846	0.683995
3700.000000	75.000000	20.751179	146.6635	0.148249	0.708107
3800.000000	75.000000	17.341835	154.89658	0.108408	0.62851
3900.000000	75.000000	14.533258	157.22267	0.0992614	0.703019
4000.000000	75.000000	12.549748	157.78883	0.0948091	0.793059
4100.000000	75.000000	11.049432	157.88951	0.091965	0.808111
4200.000000	75.000000	9.8542795	157.44994	0.0805575	0.804977
4300.000000	75.000000	8.8836203	156.91414	0.0767962	0.864217
4400.000000	75.000000	8.047575	156.29694	0.0696839	0.861802
4500.000000	75.000000	7.3219566	155.55597	0.0577896	0.778987
4600.000000	75.000000	6.6943235	154.75598	0.0604494	0.802951
4700.000000	75.000000	6.139183	153.86996	0.0518776	0.734985
4800.000000	75.000000	5.6415162	152.93008	0.0442184	0.659595
4900.000000	75.000000	5.2081494	151.87158	0.0399166	0.624401
5000.000000	75.000000	4.8083239	150.68073	0.0390139	0.634388
5100.000000	75.000000	4.4428935	149.51788	0.0360228	0.563347
5200.000000	75.000000	4.1155205	148.18509	0.0333497	0.537746
5300.000000	75.000000	3.8137634	146.76501	0.033464	0.554069
5400.000000	75.000000	3.5454078	145.27553	0.0300633	0.509343
5500.000000	75.000000	3.3010578	143.63084	0.0266529	0.459832
5600.000000	75.000000	3.0737369	141.88512	0.0263457	0.460399
5700.000000	75.000000	2.8681254	140.04665	0.0250063	0.417073
5800.000000	75.000000	2.6774821	137.98288	0.0232976	0.391158
5900.000000	75.000000	2.5082614	135.88403	0.0253184	0.427353
6000.000000	75.000000	2.3586864	133.48683	0.0210444	0.35552
6100.000000	75.000000	2.2011564	131.12964	0.0224295	0.375957
6200.000000	75.000000	2.0749166	128.52217	0.0248797	0.402205
6300.000000	75.000000	1.9593102	125.78465	0.0157648	0.253303
6400.000000	75.000000	1.8431052	122.86828	0.0200083	0.316205
6500.000000	75.000000	1.74781	119.80753	0.0149176	0.232909
6600.000000	75.000000	1.6577355	116.70155	0.0142626	0.218452
6700.000000	75.000000	1.5931089	113.27239	0.0138393	0.208935
6800.000000	75.000000	1.5186169	109.67276	0.0131872	0.195579
6900.000000	75.000000	1.4558412	106.00867	0.0125978	0.183687
7000.000000	75.000000	1.4023894	102.58112	0.0151127	0.216819
7100.000000	75.000000	1.36305	98.591759	0.0171899	0.24233
7200.000000	75.000000	1.3326777	94.819695	0.0204941	0.286306
7300.000000	75.000000	1.3022994	91.182777	0.00924996	0.129065
7400.000000	75.000000	1.2597272	87.073647	0.0290732	0.408947
7500.000000	75.000000	1.2595415	83.335182	0.0259128	0.371741
7600.000000	75.000000	1.2175857	79.588661	0.0184887	0.260799
7700.000000	75.000000	1.2440435	76.234558	0.0175845	0.256027
7800.000000	75.000000	1.2096676	72.884987	0.0320679	0.465722
7900.000000	75.000000	1.2455183	69.339096	0.0147425	0.22306
8000.000000	75.000000	1.2324553	66.753105	0.0249067	0.379787
8100.000000	75.000000	1.250481	64.299248	0.0238121	0.579344
8200.000000	75.000000	1.3022414	60.197483	0.0245576	0.400215
8300.000000	75.000000	1.2817957	58.108898	0.0285292	0.469373
8400.000000	75.000000	1.2656534	55.418777	0.0721299	1.1755
8500.000000	75.000000	1.2482508	53.304611	0.0704741	1.14134
8600.000000	75.000000	1.314234	50.64315	0.058338	1.01077
8700.000000	75.000000	1.3291888	48.385048	0.0534841	0.912543
8800.000000	75.000000	1.3472109	46.519508	0.0156983	0.269848
8900.000000	75.000000	1.3686841	45.325726	0.0210227	0.366434
9000.000000	75.000000	1.3764205	43.726501	0.00952329	0.167531
9100.000000	75.000000	1.38941	42.196335	0.0183928	0.325028
9200.000000	75.000000	1.4127556	40.553455	0.0107079	0.192212
9300.000000	75.000000	1.4430015	38.9212	0.0151082	0.277414
9400.000000	75.000000	1.4633117	37.673298	0.0118925	0.21149
9500.000000	75.000000	1.477162	36.402828	0.0124068	0.222894
9600.000000	75.000000	1.5003511	35.484131	0.0100101	0.181648
9700.000000	75.000000	1.5222521	34.509228	0.0160725	0.294526
9800.000000	75.000000	1.541597	33.23489	0.0131956	0.24544
9900.000000	75.000000	1.5666378	32.124939	0.0122599	0.231468
10000.000000	75.000000	1.5813929	31.540489	0.0136459	0.25987
dpolE	3000.000000	65.000000	0.0815607	1.94622
dpolE	3100.000000	65.000000	0.268785	1.62559
dpolE	3200.000000	65.000000	0.130599	1.26559
dpolE	3300.000000	65.000000	0.0598307	1.49291
dpolE	3400.000000	65.000000	-0.047167	1.27643
dpolE	3500.000000	65.000000	-0.358055	1.44572
dpolE	3600.000000	65.000000	0.232938	1.06704
dpolE	3700.000000	65.000000	0.218006	0.945034
dpolE	3800.000000	65.000000	-0.0671807	0.738162
dpolE	3900.000000	65.000000	-0.11647	0.648528
dpolE	4000.000000	65.000000	-0.0541818	0.546819
dpolE	4100.000000	65.000000	-0.108503	0.578688
dpolE	4200.000000	65.000000	-0.0921592	0.495831
dpolE	4300.000000	65.000000	-0.106637	0.455763
dpolE	4400.000000	65.000000	-0.0901629	0.40594
dpolE	4500.000000	65.000000	-0.0790244	0.362097
dpolE	4600.000000	65.000000	-0.109885	0.359363
dpolE	4700.000000	65.000000	-0.142535	0.339995
dpolE	4800.000000	65.000000	-0.141067	0.302928
dpolE	4900.000000	65.000000	-0.126556	0.282305
dpolE	5000.000000	65.000000	-0.0996059	0.249146
dpolE	5100.000000	65.000000	-0.132319	0.288853
dpolE	5200.000000	65.000000	-0.123856	0.268141
dpolE	5300.000000	65.000000	-0.120484	0.253808
dpolE	5400.000000	65.000000	-0.130128	0.227952
dpolE	5500.000000	65.000000	-0.10522	0.213738
dpolE	5600.000000	65.000000	-0.0876416	0.195327
dpolE	5700.000000	65.000000	-0.121967	0.213598
dpolE	5800.000000	65.000000	-0.120369	0.19282
dpolE	5900.000000	65.000000	-0.101896	0.186434
dpolE	6000.000000	65.000000	-0.0901294	0.176603
dpolE	6100.000000	65.000000	-0.092364	0.163324
dpolE	6200.000000	65.000000	-0.117048	0.16869
dpolE	6300.000000	65.000000	-0.102967	0.159798
dpolE	6400.000000	65.000000	-0.102388	0.152863
dpolE	6500.000000	65.000000	-0.0911242	0.142506
dpolE	6600.000000	65.000000	-0.0692429	0.140221
dpolE	6700.000000	65.000000	-0.102599	0.128065
dpolE	6800.000000	65.000000	-0.0973698	0.139507
dpolE	6900.000000	65.000000	-0.103051	0.128605
dpolE	7000.000000	65.000000	-0.0680163	0.114742
dpolE	7100.000000	65.000000	-0.0528006	0.104922
dpolE	7200.000000	65.000000	-0.0717376	0.103087
dpolE	7300.000000	65.000000	-0.0814731	0.106051
dpolE	7400.000000	65.000000	-0.0980341	0.111782
dpolE	7500.000000	65.000000	-0.064674	0.114922
dpolE	7600.000000	65.000000	-0.0485464	0.0994358
dpolE	7700.000000	65.000000	-0.0370685	0.0925991
dpolE	7800.000000	65.000000	-0.0625751	0.0950666
dpolE	7900.000000	65.000000	-0.0370623	0.0817678
dpolE	8000.000000	65.000000	-0.0402171	0.0755214
dpolE	8100.000000	65.000000	-0.0337743	0.113071
dpolE	8200.000000	65.000000	-0.0535524	0.0968568
dpolE	8300.000000	65.000000	-0.0495608	0.0968241
dpolE	8400.000000	65.000000	-0.063846	0.0954711
dpolE	8500.000000	65.000000	0.00751475	0.147012
dpolE	8600.000000	65.000000	-0.0386011	0.0876764
dpolE	8700.000000	65.000000	-0.0509249	0.101639
dpolE	8800.000000	65.000000	-0.0650652	0.105993
dpolE	8900.000000	65.000000	-0.0454341	0.0987212
dpolE	9000.000000	65.000000	-0.00951252	0.100467
dpolE	9100.000000	65.000000	-0.0209467	0.0906667
dpolE	9200.000000	65.000000	-0.0197809	0.0853509
dpolE	9300.000000	65.000000	-0.0394692	0.0934102
dpolE	9400.000000	65.000000	-0.0265224	0.101682
dpolE	9500.000000	65.000000	-0.027546	0.0969061
dpolE	9600.000000	65.000000	0.00346143	0.0978765
dpolE	9700.000000	65.000000	-0.0302763	0.0931851
dpolE	9800.000000	65.000000	-0.0364642	0.0857057
dpolE	9900.000000	65.000000	-0.0339561	0.0966299
dpolE	10000.000000	65.000000	-0.00288182	0.0918804
dpolE	3000.000000	70.000000	2.32364	2.13037
dpolE	3100.000000	70.000000	0.54883	2.29331
dpolE	3200.000000	70.000000	1.53002	1.70443
dpolE	3300.000000	70.000000	0.548849	1.82197
dpolE	3400.000000	70.000000	0.123265	1.39367
dpolE	3500.000000	70.000000	0.11759	1.27276
dpolE	3600.000000	70.000000	-0.0348624	1.14738
dpolE	3700.000000	70.000000	-0.115513	1.03357
dpolE	3800.000000	70.000000	0.0295253	0.685428
dpolE	3900.000000	70.000000	0.0148252	0.555092
dpolE	4000.000000	70.000000	0.0204761	0.509121
dpolE	4100.000000	70.000000	-0.0607438	0.490128
dpolE	4200.000000	70.000000	-0.0255778	0.418244
dpolE	4300.000000	70.000000	-0.0280554	0.374156
dpolE	4400.000000	70.000000	-0.0224426	0.312545
dpolE	4500.000000	70.000000	-0.0265869	0.286853
dpolE	4600.000000	70.000000	-0.041039	0.296342
dpolE	4700.000000	70.000000	-0.0407253	0.265623
dpolE	4800.000000	70.000000	-0.0404963	0.235163
dpolE	4900.000000	70.000000	-0.0206061	0.20203
dpolE	5000.000000	70.000000	-0.0390053	0.193671
dpolE	5100.000000	70.000000	-0.0399354	0.204313
dpolE	5200.000000	70.000000	-0.037978	0.176182
dpolE	5300.000000	70.000000	-0.0468076	0.166353
dpolE	5400.000000	70.000000	-0.0374394	0.148552
dpolE	5500.000000	70.000000	-0.0351736	0.138169
dpolE	5600.000000	70.000000	-0.032436	0.124632
dpolE	5700.000000	70.000000	-0.0548881	0.143785
dpolE	5800.000000	70.000000	-0.0454105	0.124773
dpolE	5900.000000	70.000000	-0.0299876	0.113879
dpolE	6000.000000	70.000000	-0.0366339	0.115442
dpolE	6100.000000	70.000000	-0.0265257	0.0986731
dpolE	6200.000000	70.000000	-0.0315436	0.101088
dpolE	6300.000000	70.000000	-0.0442973	0.101806
dpolE	6400.000000	70.000000	-0.0318727	0.0938098
dpolE	6500.000000	70.000000	-0.0396605	0.0875887
dpolE	6600.000000	70.000000	-0.0345161	0.0825145
dpolE	6700.000000	70.000000	-0.0133488	0.0684823
dpolE	6800.000000	70.000000	-0.0381228	0.0789107
dpolE	6900.000000	70.000000	-0.0339003	0.0686615
dpolE	7000.000000	70.000000	-0.0336674	0.069944
dpolE	7100.000000	70.000000	-0.0194318	0.061609
dpolE	7200.000000	70.000000	-0.0135679	0.0669986
dpolE	7300.000000	70.000000	-0.0160257	0.0622072
dpolE	7400.000000	70.000000	-0.0217903	0.065676
dpolE	7500.000000	70.000000	-0.0130299	0.0494094
dpolE	7600.000000	70.000000	-0.0159697	0.0509867
dpolE	7700.000000	70.000000	-0.0164874	0.0493542
dpolE	7800.000000	70.000000	-0.00868635	0.0445864
dpolE	7900.000000	70.000000	-0.0300269	0.0521371
dpolE	8000.000000	70.000000	-0.00762102	0.0381133
dpolE	8100.000000	70.000000	0.0712021	0.120597
dpolE	8200.000000	70.000000	-0.0102445	0.0606221
dpolE	8300.000000	70.000000	0.000205611	0.0535945
dpolE	8400.000000	70.000000	0.0133239	0.0658281
dpolE	8500.000000	70.000000	-0.00146202	0.0588987
dpolE	8600.000000	70.000000	0.00895235	0.0748966
dpolE	8700.000000	70.000000	-0.0781936	0.0507798
dpolE	8800.000000	70.000000	-0.0146913	0.0483391
dpolE	8900.000000	70.000000	0.00663248	0.0440898
dpolE	9000.000000	70.000000	0.000799526	0.0432933
dpolE	9100.000000	70.000000	-0.00564926	0.0431546
dpolE	9200.000000	70.000000	0.00224057	0.0366537
dpolE	9300.000000	70.000000	-0.00836668	0.0344126
dpolE	9400.000000	70.000000	0.00259806	0.0394062
dpolE	9500.000000	70.000000	-0.00250238	0.0415509
dpolE	9600.000000	70.000000	0.00437098	0.033497
dpolE	9700.000000	70.000000	0.00433266	0.0412656
dpolE	9800.000000	70.000000	0.00412843	0.0368081
dpolE	9900.000000	70.000000	-0.000661686	0.0369764
dpolE	10000.000000	70.000000	0.0117122	0.0311813
dpolE	3000.000000	75.000000	1.49228	2.15326
dpolE	3100.000000	75.000000	-0.48439	1.93341
dpolE	3200.000000	75.000000	0.736169	1.95112
dpolE	3300.000000	75.000000	-0.47052	1.54347
dpolE	3400.000000	75.000000	0.380483	1.58543
dpolE	3500.000000	75.000000	0.229118	1.24205
dpolE	3600.000000	75.000000	0.209886	1.2149
dpolE	3700.000000	75.000000	0.168585	0.994504
dpolE	3800.000000	75.000000	0.151285	0.578195
dpolE	3900.000000	75.000000	0.110638	0.446375
dpolE	4000.000000	75.000000	0.0690092	0.371266
dpolE	4100.000000	75.000000	0.0075355	0.321422
dpolE	4200.000000	75.000000	-0.00775012	0.253409
dpolE	4300.000000	75.000000	0.0225369	0.218901
dpolE	4400.000000	75.000000	-0.00369488	0.179587
dpolE	4500.000000	75.000000	0.0258163	0.134496
dpolE	4600.000000	75.000000	0.0230039	0.127084
dpolE	4700.000000	75.000000	0.0333238	0.0986828
dpolE	4800.000000	75.000000	0.0301406	0.0766479
dpolE	4900.000000	75.000000	0.0368602	0.0631875
dpolE	5000.000000	75.000000	0.0247169	0.0565407
dpolE	5100.000000	75.000000	0.0254485	0.0471233
dpolE	5200.000000	75.000000	0.0250965	0.0399324
dpolE	5300.000000	75.000000	0.0263069	0.0367155
dpolE	5400.000000	75.000000	0.0289464	0.0303407
dpolE	5500.000000	75.000000	0.0291949	0.0248108
dpolE	5600.000000	75.000000	0.024827	0.0226413
dpolE	5700.000000	75.000000	0.0284848	0.0195017
dpolE	5800.000000	75.000000	0.0258443	0.0168015
dpolE	5900.000000	75.000000	0.0261795	0.0169425
dpolE	6000.000000	75.000000	0.0276578	0.013131
dpolE	6100.000000	75.000000	0.0193533	0.0129367
dpolE	6200.000000	75.000000	0.0247171	0.0131437
dpolE	6300.000000	75.000000	0.0251211	0.00778192
dpolE	6400.000000	75.000000	0.0192984	0.0091935
dpolE	6500.000000	75.000000	0.0203737	0.00642258
dpolE	6600.000000	75.000000	0.0179247	0.00575506
dpolE	6700.000000	75.000000	0.0218159	0.00530211
dpolE	6800.000000	75.000000	0.0193156	0.00467951
dpolE	6900.000000	75.000000	0.0188621	0.0042249
dpolE	7000.000000	75.000000	0.0182414	0.00481413
dpolE	7100.000000	75.000000	0.0175794	0.00526499
dpolE	7200.000000	75.000000	0.0184814	0.0060683
dpolE	7300.000000	75.000000	0.0205231	0.0026368
dpolE	7400.000000	75.000000	0.0111819	0.00788274
dpolE	7500.000000	75.000000	0.0179829	0.0069521
dpolE	7600.000000	75.000000	0.00870685	0.00477011
dpolE	7700.000000	75.000000	0.0166738	0.0046371
dpolE	7800.000000	75.000000	0.00963686	0.00817514
dpolE	7900.000000	75.000000	0.0171265	0.00389238
dpolE	8000.000000	75.000000	0.0130434	0.0065093
dpolE	8100.000000	75.000000	0.00932072	0.00635585
dpolE	8200.000000	75.000000	0.0241406	0.00682857
dpolE	8300.000000	75.000000	0.0202875	0.00777485
dpolE	8400.000000	75.000000	0.00820596	0.0196122
dpolE	8500.000000	75.000000	-0.00196825	0.0190186
dpolE	8600.000000	75.000000	0.0168517	0.0165932
dpolE	8700.000000	75.000000	0.0146828	0.0154073
dpolE	8800.000000	75.000000	0.0112418	0.00462997
dpolE	8900.000000	75.000000	0.0124863	0.00633651
dpolE	9000.000000	75.000000	0.00973709	0.0028999
dpolE	9100.000000	75.000000	0.00501824	0.00569736
dpolE	9200.000000	75.000000	0.0047217	0.00339269
dpolE	9300.000000	75.000000	0.00843464	0.00490995
dpolE	9400.000000	75.000000	0.00835522	0.00392172
dpolE	9500.000000	75.000000	0.00728181	0.00414412
dpolE	9600.000000	75.000000	0.00746066	0.00341283
dpolE	9700.000000	75.000000	0.00683736	0.00558587
dpolE	9800.000000	75.000000	0.00773597	0.00465598
dpolE	9900.000000	75.000000	0.00972068	0.00440999
dpolE	10000.000000	75.000000	0.00946083	0.00496863