RTmethod[PolRT=-0.00, RevsRT=100, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Tue Jul 07 14:17:39 2009]
Original[070709 calibration wafer rt.dat]
nm
pT	400.000000	0.000000	3.4884e-005	0.00500035
pT	410.000000	0.000000	9.76428e-007	0.00500001
pT	420.000000	0.000000	1.12204e-005	0.00500011
pT	430.000000	0.000000	1.57654e-005	0.00500016
pT	440.000000	0.000000	9.49462e-006	0.00500009
pT	450.000000	0.000000	5.84546e-007	0.00500001
pT	460.000000	0.000000	4.93181e-006	0.00500005
pT	470.000000	0.000000	6.64179e-007	0.00500001
pT	480.000000	0.000000	2.76487e-006	0.00500003
pT	490.000000	0.000000	1.43862e-006	0.00500001
pT	500.000000	0.000000	5.59931e-006	0.00500006
pT	510.000000	0.000000	3.69075e-006	0.00500004
pT	520.000000	0.000000	2.7959e-006	0.00500003
pT	530.000000	0.000000	3.26343e-006	0.00500003
pT	540.000000	0.000000	3.91409e-006	0.00500004
pT	550.000000	0.000000	1.12013e-006	0.00500001
pT	560.000000	0.000000	8.91078e-007	0.00500001
pT	570.000000	0.000000	1.84627e-006	0.00500002
pT	580.000000	0.000000	5.74649e-006	0.00500006
pT	590.000000	0.000000	6.11903e-006	0.00500006
pT	600.000000	0.000000	1.03786e-006	0.00500001
pT	610.000000	0.000000	5.54821e-006	0.00500006
pT	620.000000	0.000000	6.24689e-006	0.00500006
pT	630.000000	0.000000	5.05094e-006	0.00500005
pT	640.000000	0.000000	5.60557e-006	0.00500006
pT	650.000000	0.000000	2.36965e-006	0.00500002
pT	660.000000	0.000000	3.402e-006	0.00500003
pT	670.000000	0.000000	6.14766e-006	0.00500006
pT	680.000000	0.000000	1.53657e-006	0.00500002
pT	690.000000	0.000000	3.76018e-006	0.00500004
pT	700.000000	0.000000	7.42488e-006	0.00500007
pT	710.000000	0.000000	5.3544e-006	0.00500005
pT	720.000000	0.000000	5.42022e-006	0.00500005
pT	730.000000	0.000000	5.78343e-006	0.00500006
pT	740.000000	0.000000	8.05188e-006	0.00500008
pT	750.000000	0.000000	3.84137e-007	0.005
pT	760.000000	0.000000	7.13857e-006	0.00500007
pT	770.000000	0.000000	5.5287e-006	0.00500006
pT	780.000000	0.000000	1.08254e-005	0.00500011
pT	790.000000	0.000000	4.77834e-006	0.00500005
pT	800.000000	0.000000	3.0008e-006	0.00500003
pT	810.000000	0.000000	1.77579e-005	0.00500018
pT	820.000000	0.000000	3.43512e-006	0.00500003
pT	830.000000	0.000000	3.37727e-006	0.00500003
pT	840.000000	0.000000	2.75491e-006	0.00500003
pT	850.000000	0.000000	1.78205e-005	0.00500018
pT	860.000000	0.000000	9.06222e-006	0.00500009
pT	870.000000	0.000000	1.2649e-005	0.00500013
pT	880.000000	0.000000	7.45274e-006	0.00500007
pT	890.000000	0.000000	3.43898e-006	0.00500003
pT	900.000000	0.000000	2.61441e-006	0.00500003
pT	910.000000	0.000000	2.56314e-006	0.00500003
pT	920.000000	0.000000	2.28952e-006	0.00500002
pT	930.000000	0.000000	2.93631e-006	0.00500003
pT	940.000000	0.000000	4.09497e-007	0.005
pT	950.000000	0.000000	5.37045e-006	0.00500005
pT	960.000000	0.000000	4.72701e-006	0.00500005
pT	970.000000	0.000000	2.03349e-006	0.00500002
pT	980.000000	0.000000	3.86599e-006	0.00500004
pT	990.000000	0.000000	4.70758e-006	0.00500005
pT	1000.000000	0.000000	2.0432e-005	0.0050002