VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Jul 07 12:35:23 2009]
Original[070709 calibration wafer.dat]
nm
400.000000	65.000000	29.710028	126.56664	0.101082	0.344518
410.000000	65.000000	28.644142	127.44389	0.0978532	0.33339
420.000000	65.000000	27.750441	128.18698	0.0938928	0.330987
430.000000	65.000000	26.986332	128.86572	0.0812501	0.29525
440.000000	65.000000	26.313957	129.54407	0.0851405	0.32033
450.000000	65.000000	25.695311	130.18384	0.0727222	0.282268
460.000000	65.000000	25.144073	130.87303	0.0748977	0.286769
470.000000	65.000000	24.629217	131.48625	0.0721138	0.283497
480.000000	65.000000	24.158724	132.11046	0.0719375	0.29093
490.000000	65.000000	23.723017	132.71057	0.0643346	0.267244
500.000000	65.000000	23.331476	133.26743	0.0614308	0.261895
510.000000	65.000000	22.963722	133.87772	0.0583606	0.243596
520.000000	65.000000	22.617661	134.46889	0.0579372	0.247616
530.000000	65.000000	22.298105	135.01799	0.0518166	0.226597
540.000000	65.000000	22.012077	135.54218	0.051127	0.22909
550.000000	65.000000	21.720087	136.06628	0.0479302	0.219951
560.000000	65.000000	21.458229	136.57756	0.0461558	0.216721
570.000000	65.000000	21.196754	137.12857	0.0483105	0.219987
580.000000	65.000000	20.953503	137.65572	0.0495081	0.230656
590.000000	65.000000	20.732738	138.1174	0.045905	0.218363
600.000000	65.000000	20.522621	138.60173	0.0414508	0.201256
610.000000	65.000000	20.326384	139.07317	0.0408297	0.202291
620.000000	65.000000	20.132076	139.56064	0.0397261	0.190337
630.000000	65.000000	19.946674	140.04337	0.0422156	0.206449
640.000000	65.000000	19.775846	140.49368	0.0381056	0.189836
650.000000	65.000000	19.61297	140.91035	0.0372403	0.188929
660.000000	65.000000	19.451498	141.31543	0.0334849	0.172975
670.000000	65.000000	19.303699	141.76439	0.0348479	0.183418
680.000000	65.000000	19.163347	142.19246	0.0334722	0.169762
690.000000	65.000000	19.028131	142.60736	0.0341431	0.175942
700.000000	65.000000	18.894161	142.99741	0.0336808	0.176739
710.000000	65.000000	18.775436	143.40848	0.0349817	0.186624
720.000000	65.000000	18.656336	143.7943	0.0299302	0.162342
730.000000	65.000000	18.537386	144.19475	0.0287332	0.158445
740.000000	65.000000	18.427267	144.56953	0.0299808	0.158923
750.000000	65.000000	18.328995	144.92522	0.0287638	0.154652
760.000000	65.000000	18.226042	145.29633	0.0280136	0.15285
770.000000	65.000000	18.123341	145.63689	0.0276384	0.153019
780.000000	65.000000	18.032495	146.02617	0.0285252	0.160089
790.000000	65.000000	17.938005	146.33128	0.0264945	0.150873
800.000000	65.000000	17.851658	146.71274	0.0259164	0.150102
810.000000	65.000000	17.751085	147.09558	0.0355984	0.197686
820.000000	65.000000	17.668177	147.43672	0.0289332	0.163473
830.000000	65.000000	17.584694	147.73412	0.0312938	0.17947
840.000000	65.000000	17.516031	148.07413	0.0305019	0.176853
850.000000	65.000000	17.454403	148.34383	0.0279736	0.161996
860.000000	65.000000	17.370888	148.68324	0.0253626	0.149667
870.000000	65.000000	17.300325	148.97684	0.0329978	0.187948
880.000000	65.000000	17.221653	149.27104	0.0295601	0.171372
890.000000	65.000000	17.168154	149.48018	0.0310471	0.182035
900.000000	65.000000	17.107742	149.75293	0.031355	0.186107
910.000000	65.000000	17.040524	150.03645	0.0284916	0.171211
920.000000	65.000000	16.97657	150.31615	0.0294218	0.179068
930.000000	65.000000	16.917068	150.63229	0.0300917	0.185286
940.000000	65.000000	16.867777	150.93436	0.0313429	0.18497
950.000000	65.000000	16.817404	151.16455	0.0281522	0.167908
960.000000	65.000000	16.768124	151.42992	0.0314783	0.189805
970.000000	65.000000	16.723185	151.68954	0.0290737	0.177225
980.000000	65.000000	16.670752	151.96129	0.0282032	0.173805
990.000000	65.000000	16.627396	152.23692	0.0281697	0.175923
1000.000000	65.000000	16.590744	152.37944	0.0259883	0.163937
400.000000	70.000000	27.643831	109.43009	0.107429	0.334019
410.000000	70.000000	26.458494	109.88097	0.101923	0.330362
420.000000	70.000000	25.419456	110.30035	0.097517	0.325271
430.000000	70.000000	24.517355	110.67574	0.0925832	0.317081
440.000000	70.000000	23.719027	111.04421	0.0825358	0.289536
450.000000	70.000000	22.977652	111.42778	0.0787656	0.284693
460.000000	70.000000	22.321873	111.82468	0.0758978	0.282121
470.000000	70.000000	21.703493	112.21596	0.0749635	0.285504
480.000000	70.000000	21.133745	112.58781	0.0699782	0.272469
490.000000	70.000000	20.611076	112.97362	0.0687669	0.274331
500.000000	70.000000	20.12813	113.33418	0.0622483	0.253663
510.000000	70.000000	19.665955	113.72027	0.0669008	0.279165
520.000000	70.000000	19.22566	114.12444	0.0637049	0.271239
530.000000	70.000000	18.829628	114.50071	0.0598954	0.259749
540.000000	70.000000	18.450722	114.87602	0.0566275	0.251263
550.000000	70.000000	18.090536	115.21911	0.0555963	0.251595
560.000000	70.000000	17.749857	115.57036	0.0494819	0.228437
570.000000	70.000000	17.421976	116.00803	0.0507497	0.238147
580.000000	70.000000	17.112703	116.3582	0.0462084	0.220828
590.000000	70.000000	16.819994	116.71696	0.0482429	0.234612
600.000000	70.000000	16.543375	117.08286	0.0431207	0.213442
610.000000	70.000000	16.281336	117.48194	0.0444939	0.225277
620.000000	70.000000	16.030064	117.83128	0.0468566	0.239271
630.000000	70.000000	15.777917	118.22135	0.0409307	0.212405
640.000000	70.000000	15.544927	118.54144	0.0413114	0.217809
650.000000	70.000000	15.328048	118.91993	0.0373649	0.200252
660.000000	70.000000	15.115516	119.26698	0.0375475	0.205363
670.000000	70.000000	14.90626	119.65181	0.0369594	0.205917
680.000000	70.000000	14.707661	119.99805	0.033574	0.187491
690.000000	70.000000	14.520824	120.33587	0.0322191	0.182616
700.000000	70.000000	14.340837	120.68574	0.0342912	0.197216
710.000000	70.000000	14.166076	121.03339	0.0341397	0.199332
720.000000	70.000000	13.995346	121.40742	0.0333959	0.19885
730.000000	70.000000	13.831863	121.77046	0.0322766	0.195412
740.000000	70.000000	13.671755	122.10252	0.0347134	0.209651
750.000000	70.000000	13.519996	122.4368	0.031739	0.194272
760.000000	70.000000	13.373077	122.80209	0.0300166	0.186363
770.000000	70.000000	13.229775	123.10191	0.0308687	0.194072
780.000000	70.000000	13.088387	123.46104	0.0313345	0.199319
790.000000	70.000000	12.936156	123.8638	0.0312738	0.203409
800.000000	70.000000	12.828622	124.13606	0.0325772	0.214118
810.000000	70.000000	12.674684	124.47157	0.0423451	0.261366
820.000000	70.000000	12.550094	125.00824	0.0387866	0.257411
830.000000	70.000000	12.463296	125.11417	0.0357414	0.241219
840.000000	70.000000	12.34485	125.48404	0.0344643	0.233527
850.000000	70.000000	12.232711	125.77597	0.0331513	0.224723
860.000000	70.000000	12.131503	126.13827	0.0361251	0.249243
870.000000	70.000000	12.022122	126.45911	0.0341537	0.235966
880.000000	70.000000	11.914762	126.79577	0.0337984	0.240251
890.000000	70.000000	11.831824	127.00551	0.0333361	0.23933
900.000000	70.000000	11.740044	127.29023	0.0324742	0.236021
910.000000	70.000000	11.648012	127.60423	0.0309222	0.22755
920.000000	70.000000	11.555785	127.92006	0.0312888	0.23458
930.000000	70.000000	11.468113	128.27773	0.031734	0.240747
940.000000	70.000000	11.377715	128.58308	0.0315584	0.236706
950.000000	70.000000	11.296619	128.87697	0.0317888	0.241311
960.000000	70.000000	11.221901	129.11298	0.0314223	0.240735
970.000000	70.000000	11.136989	129.44336	0.0281026	0.218194
980.000000	70.000000	11.058808	129.75587	0.0290797	0.229016
990.000000	70.000000	10.983301	130.02469	0.0269103	0.21439
1000.000000	70.000000	10.92295	130.21648	0.0267032	0.214702
400.000000	75.000000	26.99707	86.009689	0.097752	0.28714
410.000000	75.000000	25.752823	85.69384	0.0960819	0.301496
420.000000	75.000000	24.672857	85.393753	0.0919547	0.295171
430.000000	75.000000	23.735151	85.037704	0.0843591	0.276293
440.000000	75.000000	22.90029	84.713303	0.0763908	0.254581
450.000000	75.000000	22.131609	84.450432	0.0748011	0.255274
460.000000	75.000000	21.442251	84.162354	0.0721489	0.259995
470.000000	75.000000	20.802141	83.898499	0.0704175	0.258622
480.000000	75.000000	20.209208	83.606071	0.0662109	0.246957
490.000000	75.000000	19.655212	83.387642	0.0690373	0.262176
500.000000	75.000000	19.153238	83.124641	0.063805	0.246106
510.000000	75.000000	18.672533	82.863998	0.0652762	0.265481
520.000000	75.000000	18.209539	82.627785	0.06644	0.273639
530.000000	75.000000	17.746662	82.450417	0.0449981	0.189058
540.000000	75.000000	17.382797	82.11026	0.0611104	0.259123
550.000000	75.000000	16.990925	81.898918	0.0498	0.214291
560.000000	75.000000	16.623774	81.664848	0.0497217	0.217333
570.000000	75.000000	16.2679	81.429665	0.0515815	0.235816
580.000000	75.000000	15.948858	81.236115	0.0497856	0.231054
590.000000	75.000000	15.63453	80.934349	0.0412544	0.19343
600.000000	75.000000	15.345486	80.768089	0.0540483	0.25634
610.000000	75.000000	15.04517	80.624649	0.0414518	0.199928
620.000000	75.000000	14.78452	80.295982	0.0421762	0.211956
630.000000	75.000000	14.508432	80.083252	0.0398004	0.201868
640.000000	75.000000	14.238979	79.831825	0.0427573	0.21969
650.000000	75.000000	13.999746	79.710258	0.0398163	0.207536
660.000000	75.000000	13.774987	79.552742	0.0327485	0.172605
670.000000	75.000000	13.534363	79.316811	0.0251657	0.134338
680.000000	75.000000	13.341987	79.118599	0.0417955	0.231635
690.000000	75.000000	13.103366	78.895004	0.0402148	0.225394
700.000000	75.000000	12.914801	78.704582	0.0414718	0.234999
710.000000	75.000000	12.719603	78.423576	0.0398964	0.227892
720.000000	75.000000	12.526173	78.339981	0.0409309	0.235898
730.000000	75.000000	12.346782	78.10257	0.0301885	0.176382
740.000000	75.000000	12.1654	77.860939	0.03	0.181373
750.000000	75.000000	11.998054	77.653336	0.0315107	0.192132
760.000000	75.000000	11.824566	77.522781	0.0314237	0.194158
770.000000	75.000000	11.663383	77.357544	0.0259761	0.162048
780.000000	75.000000	11.505897	77.105995	0.0320709	0.201985
790.000000	75.000000	11.354085	76.90564	0.0309481	0.197035
800.000000	75.000000	11.204797	76.734932	0.0293782	0.188522
810.000000	75.000000	11.025721	76.502556	0.0401732	0.265339
820.000000	75.000000	10.892469	76.33149	0.0360321	0.241456
830.000000	75.000000	10.792745	76.244568	0.0337431	0.227441
840.000000	75.000000	10.652275	75.993439	0.0373706	0.253502
850.000000	75.000000	10.524871	75.844589	0.0398255	0.270459
860.000000	75.000000	10.404646	75.721222	0.0387176	0.26709
870.000000	75.000000	10.275435	75.503502	0.0331812	0.236637
880.000000	75.000000	10.15111	75.270309	0.0341416	0.247796
890.000000	75.000000	10.056948	75.13887	0.0344294	0.251047
900.000000	75.000000	9.9471254	74.95295	0.0323092	0.237606
910.000000	75.000000	9.8363638	74.758369	0.0323028	0.239561
920.000000	75.000000	9.7277927	74.557083	0.0301076	0.225377
930.000000	75.000000	9.6167784	74.337654	0.0324106	0.244849
940.000000	75.000000	9.5090132	74.128967	0.0309181	0.239453
950.000000	75.000000	9.4131908	73.945541	0.0294232	0.229492
960.000000	75.000000	9.3193035	73.789078	0.0288631	0.226312
970.000000	75.000000	9.2210283	73.585892	0.028308	0.223796
980.000000	75.000000	9.1254635	73.374054	0.0277272	0.22129
990.000000	75.000000	9.0350075	73.171478	0.0273176	0.219667
1000.000000	75.000000	8.9607334	73.043213	0.0271169	0.218987
dpolE	400.000000	65.000000	0.143792	1.0206
dpolE	410.000000	65.000000	0.144701	0.904925
dpolE	420.000000	65.000000	0.0990319	0.859192
dpolE	430.000000	65.000000	0.0335361	0.735908
dpolE	440.000000	65.000000	0.0774655	0.765434
dpolE	450.000000	65.000000	0.088962	0.648114
dpolE	460.000000	65.000000	0.0974109	0.622399
dpolE	470.000000	65.000000	0.0545744	0.594466
dpolE	480.000000	65.000000	0.0562309	0.58932
dpolE	490.000000	65.000000	0.0412261	0.523423
dpolE	500.000000	65.000000	0.0451321	0.496741
dpolE	510.000000	65.000000	0.0209132	0.444984
dpolE	520.000000	65.000000	0.0316653	0.438727
dpolE	530.000000	65.000000	0.0191572	0.390016
dpolE	540.000000	65.000000	0.00599956	0.383351
dpolE	550.000000	65.000000	0.0126357	0.357352
dpolE	560.000000	65.000000	0.000199917	0.342507
dpolE	570.000000	65.000000	0.00401241	0.340208
dpolE	580.000000	65.000000	-0.012526	0.347065
dpolE	590.000000	65.000000	0.0146284	0.32018
dpolE	600.000000	65.000000	0.00935253	0.28776
dpolE	610.000000	65.000000	-0.0012411	0.282213
dpolE	620.000000	65.000000	0.00672267	0.26296
dpolE	630.000000	65.000000	-0.00649629	0.278294
dpolE	640.000000	65.000000	0.00400941	0.250007
dpolE	650.000000	65.000000	0.000963351	0.243284
dpolE	660.000000	65.000000	-0.0151115	0.217857
dpolE	670.000000	65.000000	0.0136075	0.225655
dpolE	680.000000	65.000000	0.0303568	0.209155
dpolE	690.000000	65.000000	0.00147543	0.212398
dpolE	700.000000	65.000000	-0.0254446	0.208982
dpolE	710.000000	65.000000	-0.00967281	0.216161
dpolE	720.000000	65.000000	-0.00159054	0.184192
dpolE	730.000000	65.000000	-0.00657828	0.176114
dpolE	740.000000	65.000000	-0.0144154	0.178615
dpolE	750.000000	65.000000	-0.0152789	0.170724
dpolE	760.000000	65.000000	-0.00202817	0.165586
dpolE	770.000000	65.000000	-0.000345232	0.162728
dpolE	780.000000	65.000000	0.021252	0.167499
dpolE	790.000000	65.000000	-0.0307394	0.154978
dpolE	800.000000	65.000000	0.00594318	0.151276
dpolE	810.000000	65.000000	0.00150004	0.203215
dpolE	820.000000	65.000000	0.0399476	0.163793
dpolE	830.000000	65.000000	0.0203414	0.17617
dpolE	840.000000	65.000000	0.00562206	0.171588
dpolE	850.000000	65.000000	-0.00431615	0.159928
dpolE	860.000000	65.000000	0.100785	0.143432
dpolE	870.000000	65.000000	0.0540072	0.181728
dpolE	880.000000	65.000000	0.021675	0.161072
dpolE	890.000000	65.000000	0.029255	0.168719
dpolE	900.000000	65.000000	0.0393228	0.169742
dpolE	910.000000	65.000000	0.0397289	0.153651
dpolE	920.000000	65.000000	0.0535105	0.15799
dpolE	930.000000	65.000000	0.0354958	0.161098
dpolE	940.000000	65.000000	0.0385827	0.165566
dpolE	950.000000	65.000000	0.029689	0.148231
dpolE	960.000000	65.000000	0.0517836	0.165175
dpolE	970.000000	65.000000	0.0588316	0.152035
dpolE	980.000000	65.000000	0.0199798	0.146945
dpolE	990.000000	65.000000	0.0286163	0.146447
dpolE	1000.000000	65.000000	0.041246	0.134862
dpolE	400.000000	70.000000	0.278441	1.12677
dpolE	410.000000	70.000000	0.227792	0.960475
dpolE	420.000000	70.000000	0.296146	0.90846
dpolE	430.000000	70.000000	0.192641	0.85537
dpolE	440.000000	70.000000	0.149625	0.755507
dpolE	450.000000	70.000000	0.154174	0.716657
dpolE	460.000000	70.000000	0.153403	0.627644
dpolE	470.000000	70.000000	0.077719	0.616678
dpolE	480.000000	70.000000	0.144714	0.5711
dpolE	490.000000	70.000000	0.106204	0.558821
dpolE	500.000000	70.000000	0.056244	0.50322
dpolE	510.000000	70.000000	0.0625028	0.496311
dpolE	520.000000	70.000000	0.0871759	0.469282
dpolE	530.000000	70.000000	0.0617129	0.438838
dpolE	540.000000	70.000000	0.0358194	0.413848
dpolE	550.000000	70.000000	0.0102825	0.404488
dpolE	560.000000	70.000000	0.0109613	0.358261
dpolE	570.000000	70.000000	0.0311654	0.339474
dpolE	580.000000	70.000000	0.0529227	0.307498
dpolE	590.000000	70.000000	0.0272223	0.319633
dpolE	600.000000	70.000000	0.0253054	0.284401
dpolE	610.000000	70.000000	0.039034	0.292916
dpolE	620.000000	70.000000	0.0492574	0.286622
dpolE	630.000000	70.000000	0.0104562	0.249274
dpolE	640.000000	70.000000	0.00950595	0.250546
dpolE	650.000000	70.000000	0.0227039	0.225631
dpolE	660.000000	70.000000	-0.000604421	0.226683
dpolE	670.000000	70.000000	0.0214454	0.222151
dpolE	680.000000	70.000000	0.00346899	0.188659
dpolE	690.000000	70.000000	-0.0011175	0.18035
dpolE	700.000000	70.000000	0.00746314	0.19127
dpolE	710.000000	70.000000	0.0116775	0.189685
dpolE	720.000000	70.000000	-0.0124064	0.185552
dpolE	730.000000	70.000000	0.0061743	0.178709
dpolE	740.000000	70.000000	-0.00854234	0.180742
dpolE	750.000000	70.000000	-0.0152692	0.164758
dpolE	760.000000	70.000000	0.0116422	0.155245
dpolE	770.000000	70.000000	-0.0229476	0.15932
dpolE	780.000000	70.000000	-0.0030802	0.161507
dpolE	790.000000	70.000000	0.00835275	0.1607
dpolE	800.000000	70.000000	-0.0281552	0.167589
dpolE	810.000000	70.000000	0.0721637	0.203242
dpolE	820.000000	70.000000	0.0454964	0.187616
dpolE	830.000000	70.000000	-0.00751804	0.172003
dpolE	840.000000	70.000000	-0.000951436	0.166747
dpolE	850.000000	70.000000	0.0229925	0.16195
dpolE	860.000000	70.000000	0.0259439	0.175367
dpolE	870.000000	70.000000	0.0141314	0.155825
dpolE	880.000000	70.000000	0.0234509	0.151478
dpolE	890.000000	70.000000	0.0110276	0.149297
dpolE	900.000000	70.000000	-0.00286674	0.145018
dpolE	910.000000	70.000000	0.00171996	0.137676
dpolE	920.000000	70.000000	-0.0107188	0.139227
dpolE	930.000000	70.000000	-0.00774818	0.141026
dpolE	940.000000	70.000000	-0.00765551	0.133505
dpolE	950.000000	70.000000	0.000719397	0.134064
dpolE	960.000000	70.000000	-0.00190896	0.132461
dpolE	970.000000	70.000000	0.0089349	0.117983
dpolE	980.000000	70.000000	0.00868353	0.121491
dpolE	990.000000	70.000000	0.0106842	0.112167
dpolE	1000.000000	70.000000	0.00575947	0.111315
dpolE	400.000000	75.000000	0.361893	1.04129
dpolE	410.000000	75.000000	0.298769	0.912794
dpolE	420.000000	75.000000	0.334185	0.864091
dpolE	430.000000	75.000000	0.194713	0.786608
dpolE	440.000000	75.000000	0.169605	0.705589
dpolE	450.000000	75.000000	0.229	0.686857
dpolE	460.000000	75.000000	0.137611	0.597729
dpolE	470.000000	75.000000	0.110973	0.580633
dpolE	480.000000	75.000000	0.123287	0.542014
dpolE	490.000000	75.000000	0.0707377	0.563102
dpolE	500.000000	75.000000	0.121714	0.517256
dpolE	510.000000	75.000000	0.124819	0.481621
dpolE	520.000000	75.000000	0.03822	0.487735
dpolE	530.000000	75.000000	0.421709	0.326015
dpolE	540.000000	75.000000	-0.055079	0.445818
dpolE	550.000000	75.000000	-0.0197634	0.361261
dpolE	560.000000	75.000000	0.108794	0.358148
dpolE	570.000000	75.000000	-0.0805447	0.341254
dpolE	580.000000	75.000000	0.117896	0.326984
dpolE	590.000000	75.000000	0.0132449	0.270197
dpolE	600.000000	75.000000	0.0468332	0.352427
dpolE	610.000000	75.000000	0.0142343	0.270124
dpolE	620.000000	75.000000	0.0297852	0.252715
dpolE	630.000000	75.000000	-0.0718717	0.237796
dpolE	640.000000	75.000000	-0.0128652	0.253772
dpolE	650.000000	75.000000	-0.0226865	0.23633
dpolE	660.000000	75.000000	-0.00771589	0.193818
dpolE	670.000000	75.000000	0.0110076	0.148176
dpolE	680.000000	75.000000	0.110595	0.227101
dpolE	690.000000	75.000000	0.0998591	0.217171
dpolE	700.000000	75.000000	-0.00740325	0.224867
dpolE	710.000000	75.000000	-0.110797	0.216231
dpolE	720.000000	75.000000	-0.156814	0.221419
dpolE	730.000000	75.000000	-0.0343645	0.162292
dpolE	740.000000	75.000000	-0.00802149	0.149353
dpolE	750.000000	75.000000	-0.00265843	0.156361
dpolE	760.000000	75.000000	-0.0399422	0.156253
dpolE	770.000000	75.000000	-0.0348963	0.128821
dpolE	780.000000	75.000000	-0.00671012	0.158636
dpolE	790.000000	75.000000	0.00181136	0.152478
dpolE	800.000000	75.000000	-0.0362807	0.144595
dpolE	810.000000	75.000000	0.0452004	0.184815
dpolE	820.000000	75.000000	0.0347915	0.164156
dpolE	830.000000	75.000000	-0.0385291	0.153731
dpolE	840.000000	75.000000	-0.0152329	0.170061
dpolE	850.000000	75.000000	-0.0574814	0.181969
dpolE	860.000000	75.000000	-0.0324467	0.177131
dpolE	870.000000	75.000000	-0.0376487	0.141276
dpolE	880.000000	75.000000	-0.0159053	0.143737
dpolE	890.000000	75.000000	-0.0488922	0.145118
dpolE	900.000000	75.000000	-0.0509036	0.135824
dpolE	910.000000	75.000000	-0.0514882	0.135443
dpolE	920.000000	75.000000	-0.051696	0.125808
dpolE	930.000000	75.000000	-0.030602	0.134956
dpolE	940.000000	75.000000	-0.0302768	0.120458
dpolE	950.000000	75.000000	-0.0289021	0.114322
dpolE	960.000000	75.000000	-0.0406521	0.112015
dpolE	970.000000	75.000000	-0.0335996	0.109427
dpolE	980.000000	75.000000	-0.0236041	0.106661
dpolE	990.000000	75.000000	-0.0180916	0.104753
dpolE	1000.000000	75.000000	-0.0352456	0.104001