VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jul 08 17:35:49 2009]
Original[080709 2nd si wafer.dat]
Angstroms
4000.000000	65.000000	25.803213	172.6666	0.076284	0.36041
4100.000000	65.000000	24.76445	173.18895	0.0880482	0.401484
4200.000000	65.000000	23.926418	173.55295	0.069456	0.332318
4300.000000	65.000000	23.234842	173.88277	0.0675913	0.336906
4400.000000	65.000000	22.632418	174.08626	0.0649496	0.338063
4500.000000	65.000000	22.091293	174.28938	0.0589916	0.319057
4600.000000	65.000000	21.633795	174.49394	0.0611182	0.311699
4700.000000	65.000000	21.214994	174.65082	0.0581316	0.306629
4800.000000	65.000000	20.838076	174.81027	0.0555254	0.302373
4900.000000	65.000000	20.493713	174.93752	0.0554927	0.312606
5000.000000	65.000000	20.186539	175.04417	0.0464247	0.269519
5100.000000	65.000000	19.898598	175.18001	0.0526579	0.28711
5200.000000	65.000000	19.63413	175.29607	0.0448358	0.251156
5300.000000	65.000000	19.396561	175.38458	0.0432842	0.249624
5400.000000	65.000000	19.177874	175.49913	0.0418563	0.247627
5500.000000	65.000000	18.973701	175.58821	0.0406712	0.246605
5600.000000	65.000000	18.783176	175.61993	0.0360176	0.22377
5700.000000	65.000000	18.602867	175.75484	0.0399349	0.232713
5800.000000	65.000000	18.431658	175.79718	0.0378296	0.225859
5900.000000	65.000000	18.278004	175.89958	0.0351925	0.214873
6000.000000	65.000000	18.133389	175.96143	0.0349648	0.218036
6100.000000	65.000000	17.99865	176.03726	0.0325356	0.20712
6200.000000	65.000000	17.870163	176.08531	0.0356301	0.213167
6300.000000	65.000000	17.738596	176.1606	0.031774	0.193864
6400.000000	65.000000	17.624344	176.21014	0.0310253	0.192826
6500.000000	65.000000	17.515749	176.29192	0.0305699	0.193575
6600.000000	65.000000	17.414751	176.34572	0.0291542	0.188443
6700.000000	65.000000	17.319555	176.38889	0.0249515	0.164192
6800.000000	65.000000	17.227953	176.46028	0.0275342	0.170392
6900.000000	65.000000	17.13752	176.51959	0.0278181	0.175134
7000.000000	65.000000	17.052145	176.55467	0.0264677	0.16939
7100.000000	65.000000	16.976944	176.59552	0.0214327	0.139406
7200.000000	65.000000	16.90197	176.63737	0.0255464	0.168792
7300.000000	65.000000	16.827095	176.70537	0.0213956	0.143629
7400.000000	65.000000	16.757488	176.73509	0.0208078	0.131608
7500.000000	65.000000	16.694065	176.80318	0.0206635	0.132599
7600.000000	65.000000	16.633427	176.86061	0.0216249	0.140784
7700.000000	65.000000	16.576128	176.8969	0.0199215	0.131536
7800.000000	65.000000	16.514923	176.92982	0.0190069	0.127251
7900.000000	65.000000	16.464024	176.98135	0.0186541	0.126858
8000.000000	65.000000	16.4123	176.99568	0.0179916	0.12404
8100.000000	65.000000	16.348026	177.09842	0.0209192	0.136129
8200.000000	65.000000	16.303167	177.14461	0.0196083	0.129355
8300.000000	65.000000	16.253485	177.18153	0.0187776	0.12557
8400.000000	65.000000	16.209414	177.19919	0.0218236	0.147771
8500.000000	65.000000	16.174059	177.08368	0.0338195	0.230982
8600.000000	65.000000	16.127581	177.34824	0.0201821	0.139707
8700.000000	65.000000	16.078783	177.29671	0.0276917	0.181472
8800.000000	65.000000	16.046896	177.34215	0.0223697	0.148455
8900.000000	65.000000	16.016104	177.38123	0.0200589	0.134766
9000.000000	65.000000	15.981284	177.40074	0.0180749	0.122837
9100.000000	65.000000	15.933868	177.39525	0.0171749	0.118162
9200.000000	65.000000	15.906078	177.47437	0.017531	0.121881
9300.000000	65.000000	15.873706	177.52768	0.0160653	0.112902
9400.000000	65.000000	15.838793	177.52916	0.0190873	0.126988
9500.000000	65.000000	15.80435	177.54739	0.0196213	0.131985
9600.000000	65.000000	15.777124	177.63383	0.0181076	0.123055
9700.000000	65.000000	15.749682	177.62242	0.0166585	0.114372
9800.000000	65.000000	15.718168	177.65549	0.0181711	0.126101
9900.000000	65.000000	15.692513	177.66422	0.0191906	0.134553
10000.000000	65.000000	15.670657	177.68217	0.0149675	0.10603
4000.000000	70.000000	20.179846	169.06548	0.0998176	0.56297
4100.000000	70.000000	18.95878	169.67657	0.088842	0.49866
4200.000000	70.000000	17.939888	170.0925	0.0810549	0.487594
4300.000000	70.000000	17.104656	170.3651	0.0678064	0.434499
4400.000000	70.000000	16.374855	170.65921	0.0637341	0.431946
4500.000000	70.000000	15.742887	170.85109	0.0637093	0.458644
4600.000000	70.000000	15.178991	171.07208	0.0628655	0.432247
4700.000000	70.000000	14.680811	171.24329	0.0612889	0.443881
4800.000000	70.000000	14.227516	171.35442	0.0536538	0.406378
4900.000000	70.000000	13.82915	171.52008	0.0504555	0.398483
5000.000000	70.000000	13.464796	171.62863	0.049931	0.413521
5100.000000	70.000000	13.130174	171.77548	0.050303	0.396032
5200.000000	70.000000	12.818378	171.90746	0.0474366	0.387479
5300.000000	70.000000	12.530059	172.02449	0.045182	0.384627
5400.000000	70.000000	12.266661	172.09561	0.0430547	0.379723
5500.000000	70.000000	12.031781	172.2063	0.0381232	0.347593
5600.000000	70.000000	11.802759	172.29893	0.0392902	0.369968
5700.000000	70.000000	11.592967	172.38359	0.0399697	0.358138
5800.000000	70.000000	11.395163	172.48729	0.0391078	0.361224
5900.000000	70.000000	11.216733	172.56491	0.035344	0.335995
6000.000000	70.000000	11.049712	172.60077	0.0339488	0.331773
6100.000000	70.000000	10.889616	172.69933	0.0321339	0.322653
6200.000000	70.000000	10.73533	172.8116	0.0317348	0.301537
6300.000000	70.000000	10.598957	172.82489	0.0322502	0.316063
6400.000000	70.000000	10.465642	172.99786	0.0334614	0.336285
6500.000000	70.000000	10.340774	173.03596	0.0304212	0.31334
6600.000000	70.000000	10.223302	173.11432	0.0279987	0.2952
6700.000000	70.000000	10.11079	173.18744	0.026708	0.288117
6800.000000	70.000000	10.007002	173.2807	0.0287646	0.293354
6900.000000	70.000000	9.9086714	173.32275	0.0268669	0.279743
7000.000000	70.000000	9.807579	173.37352	0.0245284	0.260826
7100.000000	70.000000	9.7151957	173.47717	0.0248978	0.270122
7200.000000	70.000000	9.6285839	173.52051	0.022327	0.247079
7300.000000	70.000000	9.5482759	173.59572	0.0231813	0.261459
7400.000000	70.000000	9.4679823	173.70525	0.0237044	0.252765
7500.000000	70.000000	9.3917933	173.79465	0.0219895	0.238749
7600.000000	70.000000	9.3222904	173.83737	0.0197033	0.217636
7700.000000	70.000000	9.2517529	173.91287	0.0187652	0.210966
7800.000000	70.000000	9.1840343	173.92046	0.0206607	0.235882
7900.000000	70.000000	9.1208782	174.03281	0.0234383	0.272129
8000.000000	70.000000	9.0595055	174.07768	0.0212651	0.250882
8100.000000	70.000000	9.0053825	174.09492	0.0268884	0.300997
8200.000000	70.000000	8.9393988	174.21643	0.0198676	0.227461
8300.000000	70.000000	8.9053631	174.28482	0.0188982	0.220002
8400.000000	70.000000	8.8429136	174.24825	0.024031	0.283436
8500.000000	70.000000	8.7968788	174.33809	0.0213585	0.255142
8600.000000	70.000000	8.7510452	174.47626	0.0182528	0.22146
8700.000000	70.000000	8.7086039	174.42415	0.0183643	0.21123
8800.000000	70.000000	8.6573133	174.59724	0.0194597	0.228255
8900.000000	70.000000	8.6179619	174.61591	0.0175244	0.208424
9000.000000	70.000000	8.5768871	174.68237	0.0201013	0.24241
9100.000000	70.000000	8.5357428	174.73337	0.0178984	0.218607
9200.000000	70.000000	8.4964409	174.77895	0.0161259	0.199673
9300.000000	70.000000	8.456111	174.80971	0.0171696	0.215219
9400.000000	70.000000	8.4188223	174.88107	0.0197121	0.234455
9500.000000	70.000000	8.38239	174.90092	0.0158797	0.191409
9600.000000	70.000000	8.3509293	174.96104	0.0149453	0.182095
9700.000000	70.000000	8.315815	175.05321	0.0145265	0.179163
9800.000000	70.000000	8.282649	175.07838	0.0157561	0.196727
9900.000000	70.000000	8.2479019	175.11938	0.0150733	0.190463
10000.000000	70.000000	8.2281952	175.16183	0.0173446	0.22152
4000.000000	75.000000	12.420615	159.49965	0.109408	0.931529
4100.000000	75.000000	10.96883	159.67207	0.0923509	0.821632
4200.000000	75.000000	9.7853861	159.28214	0.0875935	0.886332
4300.000000	75.000000	8.7882833	158.97301	0.0721738	0.810685
4400.000000	75.000000	7.9670353	158.39195	0.0619933	0.759408
4500.000000	75.000000	7.2369218	157.77374	0.0542811	0.717784
4600.000000	75.000000	6.6007185	157.12085	0.0576726	0.746471
4700.000000	75.000000	6.0398278	156.28416	0.0492462	0.674551
4800.000000	75.000000	5.5466733	155.38449	0.044035	0.665881
4900.000000	75.000000	5.1029439	154.44456	0.040539	0.642813
5000.000000	75.000000	4.7088389	153.40402	0.0342548	0.566162
5100.000000	75.000000	4.3438592	152.39909	0.0353624	0.560891
5200.000000	75.000000	4.0059385	151.07933	0.0346628	0.567156
5300.000000	75.000000	3.7023821	149.70967	0.0250941	0.420925
5400.000000	75.000000	3.4348783	148.37927	0.0290772	0.500529
5500.000000	75.000000	3.1814349	146.82292	0.0239295	0.418783
5600.000000	75.000000	2.9544744	145.22423	0.0190844	0.339667
5700.000000	75.000000	2.7437379	143.49692	0.0281233	0.47511
5800.000000	75.000000	2.543541	141.6051	0.024969	0.424494
5900.000000	75.000000	2.3797679	139.63077	0.0208585	0.359208
6000.000000	75.000000	2.2134271	137.30042	0.0212542	0.365538
6100.000000	75.000000	2.0700107	135.01653	0.0207274	0.356475
6200.000000	75.000000	1.9198351	132.2888	0.0122217	0.198583
6300.000000	75.000000	1.808605	129.56647	0.0186233	0.302817
6400.000000	75.000000	1.6933564	126.57462	0.0181195	0.291421
6500.000000	75.000000	1.5868874	123.52419	0.0234819	0.371396
6600.000000	75.000000	1.5106335	120.18702	0.0129975	0.203406
6700.000000	75.000000	1.426402	116.6246	0.00963254	0.146845
6800.000000	75.000000	1.3564574	112.88551	0.0175381	0.261549
6900.000000	75.000000	1.2978437	108.98833	0.00757322	0.110657
7000.000000	75.000000	1.2338624	105.0603	0.0248446	0.351866
7100.000000	75.000000	1.168875	100.84482	0.0152273	0.209236
7200.000000	75.000000	1.1560867	96.655792	0.0161086	0.220384
7300.000000	75.000000	1.1202763	92.305054	0.0132163	0.178616
7400.000000	75.000000	1.0982221	88.036766	0.0244604	0.341615
7500.000000	75.000000	1.0877199	83.750618	0.0116747	0.163561
7600.000000	75.000000	1.0756209	79.516747	0.0168416	0.23573
7700.000000	75.000000	1.0814756	75.799591	0.0481196	0.696899
7800.000000	75.000000	1.0517994	71.511063	0.020227	0.289548
7900.000000	75.000000	1.0622488	67.735283	0.0523408	0.774471
8000.000000	75.000000	1.0812352	64.695747	0.0280098	0.423164
8100.000000	75.000000	1.0977303	60.786526	0.0660079	1.02735
8200.000000	75.000000	1.1102817	58.132469	0.0300534	0.473167
8300.000000	75.000000	1.1377859	55.560997	0.0221113	0.358718
8400.000000	75.000000	1.134552	52.878258	0.0517133	0.849343
8500.000000	75.000000	1.2596463	51.19772	0.0528681	0.940275
8600.000000	75.000000	1.205163	47.854053	0.0344195	0.604689
8700.000000	75.000000	1.2064612	45.733292	0.0282729	0.476052
8800.000000	75.000000	1.2460701	43.891415	0.0124214	0.21682
8900.000000	75.000000	1.2656523	42.310329	0.0108114	0.191662
9000.000000	75.000000	1.2871377	40.521797	0.0146471	0.263217
9100.000000	75.000000	1.3182809	38.807842	0.0145306	0.267006
9200.000000	75.000000	1.3329229	37.446941	0.00934298	0.172476
9300.000000	75.000000	1.3551461	35.845058	0.0116547	0.217923
9400.000000	75.000000	1.3815869	34.597034	0.0132479	0.238778
9500.000000	75.000000	1.4090348	33.301109	0.0100188	0.183463
9600.000000	75.000000	1.4344893	32.361931	0.013275	0.246298
9700.000000	75.000000	1.4416785	31.20454	0.0120826	0.224782
9800.000000	75.000000	1.4724602	30.234545	0.00994669	0.18795
9900.000000	75.000000	1.4959561	29.237513	0.0109164	0.208621
10000.000000	75.000000	1.5204939	28.696301	0.011331	0.219026
dpolE	4000.000000	65.000000	-0.0199539	0.497054
dpolE	4100.000000	65.000000	-0.158551	0.577101
dpolE	4200.000000	65.000000	-0.0734349	0.438982
dpolE	4300.000000	65.000000	-0.138869	0.41377
dpolE	4400.000000	65.000000	-0.127399	0.386571
dpolE	4500.000000	65.000000	-0.0936235	0.341502
dpolE	4600.000000	65.000000	-0.117589	0.359172
dpolE	4700.000000	65.000000	-0.110538	0.333252
dpolE	4800.000000	65.000000	-0.0962691	0.311024
dpolE	4900.000000	65.000000	-0.093496	0.304551
dpolE	5000.000000	65.000000	-0.0670359	0.249743
dpolE	5100.000000	65.000000	-0.101864	0.288654
dpolE	5200.000000	65.000000	-0.0968818	0.241059
dpolE	5300.000000	65.000000	-0.0836825	0.228832
dpolE	5400.000000	65.000000	-0.0864389	0.217638
dpolE	5500.000000	65.000000	-0.0963816	0.208199
dpolE	5600.000000	65.000000	-0.0647197	0.181594
dpolE	5700.000000	65.000000	-0.103474	0.205657
dpolE	5800.000000	65.000000	-0.132288	0.192197
dpolE	5900.000000	65.000000	-0.0874199	0.176243
dpolE	6000.000000	65.000000	-0.0931202	0.172846
dpolE	6100.000000	65.000000	-0.0897617	0.158851
dpolE	6200.000000	65.000000	-0.0860511	0.177967
dpolE	6300.000000	65.000000	-0.0852061	0.156652
dpolE	6400.000000	65.000000	-0.0976381	0.151184
dpolE	6500.000000	65.000000	-0.0757461	0.14723
dpolE	6600.000000	65.000000	-0.0753517	0.139055
dpolE	6700.000000	65.000000	-0.0696648	0.1178
dpolE	6800.000000	65.000000	-0.0989617	0.133151
dpolE	6900.000000	65.000000	-0.0809584	0.13307
dpolE	7000.000000	65.000000	-0.0822468	0.125351
dpolE	7100.000000	65.000000	-0.0630151	0.100535
dpolE	7200.000000	65.000000	-0.0689073	0.118756
dpolE	7300.000000	65.000000	-0.0564809	0.0985563
dpolE	7400.000000	65.000000	-0.0513137	0.0981568
dpolE	7500.000000	65.000000	-0.0516735	0.0966149
dpolE	7600.000000	65.000000	-0.0394327	0.100235
dpolE	7700.000000	65.000000	-0.0317437	0.0915822
dpolE	7800.000000	65.000000	-0.0269127	0.086675
dpolE	7900.000000	65.000000	-0.0492092	0.0845341
dpolE	8000.000000	65.000000	-0.042573	0.0809386
dpolE	8100.000000	65.000000	-0.0286628	0.0962999
dpolE	8200.000000	65.000000	-0.0316161	0.0895616
dpolE	8300.000000	65.000000	-0.0297374	0.0851015
dpolE	8400.000000	65.000000	-0.00307653	0.0982044
dpolE	8500.000000	65.000000	0.0256316	0.151472
dpolE	8600.000000	65.000000	0.00976077	0.0897221
dpolE	8700.000000	65.000000	-0.0200337	0.126003
dpolE	8800.000000	65.000000	-0.0533379	0.101089
dpolE	8900.000000	65.000000	0.00548141	0.0899898
dpolE	9000.000000	65.000000	0.00443401	0.0805767
dpolE	9100.000000	65.000000	0.0190611	0.0760215
dpolE	9200.000000	65.000000	-0.0127961	0.0771951
dpolE	9300.000000	65.000000	-0.0235231	0.0703481
dpolE	9400.000000	65.000000	-0.0278224	0.0855576
dpolE	9500.000000	65.000000	-0.0183546	0.0873833
dpolE	9600.000000	65.000000	-0.0204342	0.0801822
dpolE	9700.000000	65.000000	-0.0276575	0.0733592
dpolE	9800.000000	65.000000	-0.0239197	0.0795495
dpolE	9900.000000	65.000000	-0.0135787	0.0835549
dpolE	10000.000000	65.000000	0.0136212	0.0648158
dpolE	4000.000000	70.000000	-0.0823599	0.547138
dpolE	4100.000000	70.000000	-0.056024	0.475096
dpolE	4200.000000	70.000000	-0.0726509	0.409624
dpolE	4300.000000	70.000000	-0.0804192	0.325989
dpolE	4400.000000	70.000000	-0.0625167	0.291908
dpolE	4500.000000	70.000000	-0.0271442	0.279963
dpolE	4600.000000	70.000000	-0.0664766	0.274531
dpolE	4700.000000	70.000000	-0.069516	0.257896
dpolE	4800.000000	70.000000	-0.0666888	0.21767
dpolE	4900.000000	70.000000	-0.053593	0.197788
dpolE	5000.000000	70.000000	-0.0519822	0.190123
dpolE	5100.000000	70.000000	-0.053113	0.192208
dpolE	5200.000000	70.000000	-0.0648717	0.175873
dpolE	5300.000000	70.000000	-0.0532045	0.163083
dpolE	5400.000000	70.000000	-0.0429207	0.151279
dpolE	5500.000000	70.000000	-0.0318675	0.130641
dpolE	5600.000000	70.000000	-0.0328965	0.131408
dpolE	5700.000000	70.000000	-0.0426419	0.135243
dpolE	5800.000000	70.000000	-0.0435359	0.129318
dpolE	5900.000000	70.000000	-0.0418854	0.114395
dpolE	6000.000000	70.000000	-0.0365117	0.107672
dpolE	6100.000000	70.000000	-0.0364337	0.0999127
dpolE	6200.000000	70.000000	-0.0391907	0.0999019
dpolE	6300.000000	70.000000	-0.0454765	0.0999937
dpolE	6400.000000	70.000000	-0.0430966	0.101863
dpolE	6500.000000	70.000000	-0.0298131	0.0909933
dpolE	6600.000000	70.000000	-0.0296831	0.0823872
dpolE	6700.000000	70.000000	-0.0301843	0.0773456
dpolE	6800.000000	70.000000	-0.0346864	0.0846532
dpolE	6900.000000	70.000000	-0.0320404	0.0778566
dpolE	7000.000000	70.000000	-0.0344085	0.0699972
dpolE	7100.000000	70.000000	-0.0341295	0.0700189
dpolE	7200.000000	70.000000	-0.0271028	0.0619103
dpolE	7300.000000	70.000000	-0.0255282	0.0634404
dpolE	7400.000000	70.000000	-0.0308162	0.0660052
dpolE	7500.000000	70.000000	-0.0279878	0.0604098
dpolE	7600.000000	70.000000	-0.0149243	0.0534442
dpolE	7700.000000	70.000000	-0.00859418	0.0502538
dpolE	7800.000000	70.000000	-0.0120743	0.0547302
dpolE	7900.000000	70.000000	-0.0205141	0.061366
dpolE	8000.000000	70.000000	-0.0131856	0.0550589
dpolE	8100.000000	70.000000	-0.0738469	0.0716569
dpolE	8200.000000	70.000000	-0.0289042	0.0520332
dpolE	8300.000000	70.000000	-0.00578322	0.0489556
dpolE	8400.000000	70.000000	-0.00792033	0.0616755
dpolE	8500.000000	70.000000	-0.00487232	0.0543604
dpolE	8600.000000	70.000000	0.00162146	0.0459787
dpolE	8700.000000	70.000000	-0.000301237	0.0471478
dpolE	8800.000000	70.000000	-0.0113839	0.0492611
dpolE	8900.000000	70.000000	0.00361194	0.0439415
dpolE	9000.000000	70.000000	0.00502606	0.0499283
dpolE	9100.000000	70.000000	-0.00130253	0.0440773
dpolE	9200.000000	70.000000	-0.00140642	0.039356
dpolE	9300.000000	70.000000	-0.000419724	0.0415622
dpolE	9400.000000	70.000000	-0.00629368	0.0486308
dpolE	9500.000000	70.000000	0.0103394	0.0388081
dpolE	9600.000000	70.000000	0.00514919	0.0362611
dpolE	9700.000000	70.000000	0.004434	0.0349498
dpolE	9800.000000	70.000000	-0.00318663	0.0376048
dpolE	9900.000000	70.000000	-0.000313834	0.0356878
dpolE	10000.000000	70.000000	0.0103139	0.0408086
dpolE	4000.000000	75.000000	-0.0258474	0.422258
dpolE	4100.000000	75.000000	-0.0490634	0.317583
dpolE	4200.000000	75.000000	-0.0548561	0.270831
dpolE	4300.000000	75.000000	-0.0299574	0.198792
dpolE	4400.000000	75.000000	-0.016231	0.153307
dpolE	4500.000000	75.000000	-0.0229811	0.120658
dpolE	4600.000000	75.000000	-0.00840674	0.115641
dpolE	4700.000000	75.000000	-0.0119189	0.0890142
dpolE	4800.000000	75.000000	-0.0118994	0.0738619
dpolE	4900.000000	75.000000	-0.010728	0.0618077
dpolE	5000.000000	75.000000	-0.00572769	0.0476687
dpolE	5100.000000	75.000000	-0.00310301	0.0445167
dpolE	5200.000000	75.000000	-0.00369407	0.0397177
dpolE	5300.000000	75.000000	-0.00792361	0.0262764
dpolE	5400.000000	75.000000	0.00247491	0.0279034
dpolE	5500.000000	75.000000	-0.00296453	0.0210645
dpolE	5600.000000	75.000000	0.00124411	0.0154382
dpolE	5700.000000	75.000000	0.0027066	0.0206241
dpolE	5800.000000	75.000000	-0.00186313	0.0167936
dpolE	5900.000000	75.000000	0.00910151	0.0129731
dpolE	6000.000000	75.000000	0.00573435	0.0121709
dpolE	6100.000000	75.000000	0.00702588	0.010978
dpolE	6200.000000	75.000000	-0.000331455	0.00585343
dpolE	6300.000000	75.000000	0.00660206	0.00828912
dpolE	6400.000000	75.000000	0.0066002	0.00744239
dpolE	6500.000000	75.000000	0.00444008	0.00890144
dpolE	6600.000000	75.000000	0.00947242	0.00461539
dpolE	6700.000000	75.000000	0.0073302	0.00317541
dpolE	6800.000000	75.000000	0.00831902	0.00532298
dpolE	6900.000000	75.000000	0.00823331	0.00215812
dpolE	7000.000000	75.000000	0.00399928	0.00660146
dpolE	7100.000000	75.000000	0.000520346	0.00373691
dpolE	7200.000000	75.000000	0.00494536	0.00385062
dpolE	7300.000000	75.000000	0.00474575	0.0029913
dpolE	7400.000000	75.000000	0.00570427	0.00526675
dpolE	7500.000000	75.000000	0.00626539	0.00246375
dpolE	7600.000000	75.000000	0.00370887	0.003509
dpolE	7700.000000	75.000000	0.00970274	0.00991075
dpolE	7800.000000	75.000000	0.000448384	0.00407652
dpolE	7900.000000	75.000000	0.00284651	0.0106606
dpolE	8000.000000	75.000000	0.00211774	0.0059261
dpolE	8100.000000	75.000000	0.00495539	0.014134
dpolE	8200.000000	75.000000	0.00280583	0.00661511
dpolE	8300.000000	75.000000	0.0055996	0.00504779
dpolE	8400.000000	75.000000	0.0024532	0.0118276
dpolE	8500.000000	75.000000	0.0268824	0.0137762
dpolE	8600.000000	75.000000	0.0101391	0.00857251
dpolE	8700.000000	75.000000	0.00112683	0.00712982
dpolE	8800.000000	75.000000	0.00831737	0.00325639
dpolE	8900.000000	75.000000	0.00867446	0.00290109
dpolE	9000.000000	75.000000	0.00796478	0.00403369
dpolE	9100.000000	75.000000	0.0108644	0.00412968
dpolE	9200.000000	75.000000	0.0067677	0.0027096
dpolE	9300.000000	75.000000	0.00619803	0.00346048
dpolE	9400.000000	75.000000	0.00523308	0.00403229
dpolE	9500.000000	75.000000	0.00708993	0.003127
dpolE	9600.000000	75.000000	0.00868388	0.00423979
dpolE	9700.000000	75.000000	0.00389129	0.00389616
dpolE	9800.000000	75.000000	0.00611348	0.00329282
dpolE	9900.000000	75.000000	0.00631714	0.003688
dpolE	10000.000000	75.000000	0.00786649	0.00390692