VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol<0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jan 13 16:10:06 2010]
Original[130110 500z30 align out.dat]
nm
300.000000	65.000000	9.0453358	52.15593	4.93467	81.8646
310.000000	65.000000	8.450201	180.36127	12.9176	114.298
320.000000	65.000000	11.931011	242.19659	9.7015	138.198
330.000000	65.000000	12.263007	-54.30917	27.4503	200.886
340.000000	65.000000	7.2351465	81.988792	5.52154	52.629
350.000000	65.000000	0.001	70.430573	23146.7	90.4941
360.000000	65.000000	6.1787019	12.525595	4.16075	46.2211
370.000000	65.000000	1.719648	-65.820496	12.6532	278.052
380.000000	65.000000	9.276783	0.61253244	7.63954	108.952
390.000000	65.000000	34.943901	266.27686	153.144	193.361
400.000000	65.000000	44.472794	-31.876419	37.8727	158.032
410.000000	65.000000	72.041893	-25.163551	11.559	326.59
420.000000	65.000000	23.485666	98.32547	55.1211	129.33
430.000000	65.000000	41.249508	-21.177929	29.6477	105.801
440.000000	65.000000	25.45278	101.76596	18.2841	54.0283
450.000000	65.000000	22.080894	-86.661179	13.7282	138.965
460.000000	65.000000	12.33369	188.23187	10.892	73.4953
470.000000	65.000000	23.4869	33.529736	61.3829	122.526
480.000000	65.000000	49.075611	168.24495	57.6921	217.964
490.000000	65.000000	83.628296	58.948582	6.2112	107.65
500.000000	65.000000	79.771362	130.8997	6.60994	115.177
510.000000	65.000000	81.083244	232.23495	7.01668	35.4738
520.000000	65.000000	72.004173	5.5748668	9.78537	79.059
530.000000	65.000000	54.880188	180.79622	56.4177	338.055
540.000000	65.000000	14.2588	236.21935	13.6205	67.7335
550.000000	65.000000	35.884758	88.993271	36.4339	132.393
560.000000	65.000000	57.786789	262.88757	17.7157	41.0609
570.000000	65.000000	89.999001	134.26138	80913.9	154.97
580.000000	65.000000	84.989899	53.653126	9.49711	163.839
590.000000	65.000000	65.873177	150.71689	25.9435	95.6781
600.000000	65.000000	40.528442	117.06757	79.143	192.255
610.000000	65.000000	8.9294376	84.327225	12.9592	79.5394
620.000000	65.000000	12.318493	87.228745	17.7188	89.601
630.000000	65.000000	20.810301	27.372921	13.2382	375.237
640.000000	65.000000	8.9265556	104.11089	6.98211	36.2554
650.000000	65.000000	5.4207768	45.374599	8.55336	162.086
660.000000	65.000000	4.1087112	269.97495	8.97296	285.31
670.000000	65.000000	78.727882	-76.974434	10.462	45.1507
680.000000	65.000000	83.498428	-2.1260784	4.79985	108.099
690.000000	65.000000	81.099365	-59.371468	18.7034	77.1741
700.000000	65.000000	65.609978	26.198681	27.728	97.5954
710.000000	65.000000	64.242088	27.451405	30.9623	149.383
720.000000	65.000000	72.232666	16.700872	19.7431	139.886
730.000000	65.000000	74.169769	84.984177	14.1813	62.6123
740.000000	65.000000	74.81945	220.48395	20.8947	92.503
750.000000	65.000000	79.856682	212.63828	6.72907	190.287
760.000000	65.000000	70.698517	124.24117	36.2217	423.633
770.000000	65.000000	61.411247	105.8683	18.043	113.194
780.000000	65.000000	35.338554	241.23592	24.1368	222.166
790.000000	65.000000	59.343193	-49.036892	25.6989	113.595
800.000000	65.000000	56.251976	82.781303	29.9081	67.6543
810.000000	65.000000	83.924644	265.40073	13.4998	172.882
820.000000	65.000000	75.647041	-19.518852	20.085	145.603
830.000000	65.000000	53.85548	81.088547	60.8925	153.433
840.000000	65.000000	56.63583	-72.165604	15.4698	47.5991
850.000000	65.000000	0.001	-76.929222	4.74948e+007	1e+010
860.000000	65.000000	1.5887887	150.35355	16.8046	48.9781
870.000000	65.000000	12.386947	89.389664	10.1939	73.4721
880.000000	65.000000	5.3053179	140.39787	8.49062	83.6439
890.000000	65.000000	10.494229	84.30925	10.6263	69.9737
900.000000	65.000000	0.001	-49.326435	22399.1	152.223
910.000000	65.000000	39.134064	-49.239246	24.9217	62.0166
920.000000	65.000000	74.402176	114.55701	25.9686	101.724
930.000000	65.000000	31.888412	-85.612312	21.7133	50.2882
940.000000	65.000000	77.280128	145.81181	9.25363	230.637
950.000000	65.000000	84.571564	19.050587	8.10625	72.1055
960.000000	65.000000	82.063766	-1.5461043	6.95348	6207.65
970.000000	65.000000	21.902723	197.36275	44.7836	170.804
980.000000	65.000000	30.064856	-37.771336	37.9907	117.762
990.000000	65.000000	42.850277	-80.40239	15.9804	44.4773
1000.000000	65.000000	74.868935	221.77118	19.8382	188.662
1010.000000	65.000000	89.999001	-9.7199793	12427.6	40.7887
1020.000000	65.000000	7.1979527	189.83987	7.52412	159.917
1030.000000	65.000000	13.423948	80.809341	104.261	249.091
1040.000000	65.000000	18.35388	149.84077	17.2744	95.0487
1050.000000	65.000000	4.3814507	266.52115	8.62802	44.7031
1060.000000	65.000000	4.0994229	75.076302	4.10861	112.362
1070.000000	65.000000	20.151897	210.18063	10.494	111.7
1080.000000	65.000000	6.2839642	-26.173149	6.88877	102.313
1090.000000	65.000000	75.810966	42.352676	22.3545	147.707
1100.000000	65.000000	70.764954	-76.276634	25.1121	87.0615
1110.000000	65.000000	78.36631	210.26611	18.0218	107.862
1120.000000	65.000000	85.043587	89.551003	9.25584	196.596
1130.000000	65.000000	85.892654	241.4539	8.89509	244.648
1140.000000	65.000000	82.366158	8.8431969	5.72654	131.878
1150.000000	65.000000	67.778076	229.79095	48.7879	205.873
1160.000000	65.000000	83.4095	-85.425087	5.18233	45.2646
1170.000000	65.000000	81.633568	204.74792	6.9664	50.274
1180.000000	65.000000	47.304302	-1.2886006	249.226	610.55
1190.000000	65.000000	81.208038	127.56651	8.35463	50.2074
1200.000000	65.000000	80.398964	94.221069	14.6408	431.262
1210.000000	65.000000	76.946358	20.728825	8.65551	51.7757
1220.000000	65.000000	74.449135	187.76341	14.0266	87.8445
1230.000000	65.000000	71.815277	257.11938	9.62074	442.488
1240.000000	65.000000	87.649864	-25.637871	17.7022	81.6277
1250.000000	65.000000	80.448959	130.41751	6.15227	102.089
1260.000000	65.000000	59.388729	125.92097	40.301	246.888
1270.000000	65.000000	50.328922	49.051102	15.7141	58.3495
1280.000000	65.000000	3.3733692	-54.842163	13.0373	57.7136
1290.000000	65.000000	7.6837201	243.31088	6.48972	36.0405
1300.000000	65.000000	21.979912	84.034409	28.3685	99.0526
1310.000000	65.000000	24.100954	236.87067	46.655	119.677
1320.000000	65.000000	15.188109	64.487312	104.328	214.382
1330.000000	65.000000	15.129565	169.21254	19.7323	134.119
1340.000000	65.000000	2.6811023	268.59833	12.9297	67.6726
1350.000000	65.000000	85.482361	-72.539032	15.8699	169.486
1360.000000	65.000000	81.024002	-69.178246	7.14888	198.479
1370.000000	65.000000	79.017166	71.526726	11.3648	652.941
1380.000000	65.000000	89.999001	-66.377945	81446	114.404
1390.000000	65.000000	80.419739	45.24382	5.43748	57.1467
1400.000000	65.000000	79.211922	122.0856	8.70408	53.901
1410.000000	65.000000	9.623333	219.10826	5.41016	39.7012
1420.000000	65.000000	11.138165	108.04186	12.5178	77.6756
1430.000000	65.000000	5.3641348	230.18321	8.10193	89.8398
1440.000000	65.000000	5.1417809	-83.973747	6.97783	162.523
1450.000000	65.000000	12.355129	232.9545	10.2436	44.0581
1460.000000	65.000000	21.704733	125.30784	18.4055	60.7864
1470.000000	65.000000	17.652422	61.07177	16.0408	91.6345
1480.000000	65.000000	3.3976238	256.07211	2.78566	124.544
1490.000000	65.000000	7.3799305	166.157	3.89603	147.03
1500.000000	65.000000	82.432442	225.24417	13.1043	73.0056
300.000000	70.000000	59.895954	-65.846191	23.4819	97.4112
310.000000	70.000000	54.879391	-86.821434	37.3348	83.2704
320.000000	70.000000	82.589798	-71.370262	3.6767	109.22
330.000000	70.000000	70.600571	202.94853	26.4516	110.08
340.000000	70.000000	80.421608	251.62511	10.9361	70.5786
350.000000	70.000000	2.7941618	88.239326	7.94358	155.046
360.000000	70.000000	35.203808	-0.080765091	123.045	366.424
370.000000	70.000000	86.825195	93.443275	13.0353	50.0646
380.000000	70.000000	71.386078	84.510284	19.5944	163.062
390.000000	70.000000	77.038338	213.22942	12.4293	236.836
400.000000	70.000000	83.509071	-55.003452	6.01933	41.4846
410.000000	70.000000	89.999001	153.88782	10292.3	52.9277
420.000000	70.000000	85.571152	87.193443	13.8571	117.062
430.000000	70.000000	85.661507	257.40213	7.26244	54.8773
440.000000	70.000000	78.728279	45.405636	33.0433	139.068
450.000000	70.000000	70.844238	201.33998	16.7022	116.694
460.000000	70.000000	60.654213	-86.907845	95.0001	133.555
470.000000	70.000000	83.952721	127.08159	6.17288	68.1029
480.000000	70.000000	80.256203	60.655937	5.90914	27.9384
490.000000	70.000000	79.829002	178.15669	16.9157	156.285
500.000000	70.000000	82.336029	-72.404366	8.01619	74.317
510.000000	70.000000	83.14193	-47.501637	9.42769	88.4874
520.000000	70.000000	25.573284	125.03271	19.0833	47.1132
530.000000	70.000000	15.735405	-19.472528	31.7436	213.083
540.000000	70.000000	73.5177	259.8486	22.5618	85.1197
550.000000	70.000000	76.54599	47.170097	9.53673	66.9152
560.000000	70.000000	83.130386	55.580669	330.863	352.839
570.000000	70.000000	81.479019	88.204338	7.90216	72.1175
580.000000	70.000000	18.776602	28.192507	14.6326	137.305
590.000000	70.000000	16.359861	109.79953	18.9355	73.1613
600.000000	70.000000	12.766192	219.26144	12.6773	76.732
610.000000	70.000000	15.090452	252.44035	13.8139	55.4979
620.000000	70.000000	74.152817	19.111586	9.67983	308.884
630.000000	70.000000	59.323761	-44.807808	38.588	120.387
640.000000	70.000000	46.096935	14.14497	61.1925	171.171
650.000000	70.000000	5.0245566	64.261208	13.3956	149.746
660.000000	70.000000	9.0222921	111.63071	14.2216	72.0787
670.000000	70.000000	16.868959	237.53387	19.7176	106.018
680.000000	70.000000	10.525243	248.37698	6.54947	32.1148
690.000000	70.000000	15.876551	197.49931	25.6928	119.4
700.000000	70.000000	7.2573938	85.602142	14.5802	76.9921
710.000000	70.000000	7.2240911	-63.596355	6.37233	50.6426
720.000000	70.000000	4.2888956	-0.40236485	7.42311	78.2838
730.000000	70.000000	0.001	80.506348	72569.7	88.0932
740.000000	70.000000	78.836357	265.35675	13.4793	92.0154
750.000000	70.000000	15.919137	158.12488	18.292	133.303
760.000000	70.000000	89.999001	-3.5246971	2.85001e+007	1e+010
770.000000	70.000000	69.156387	256.13522	29.5501	89.3862
780.000000	70.000000	36.50243	-26.240482	31.9588	116.886
790.000000	70.000000	13.60114	117.52232	23.7494	123.502
800.000000	70.000000	80.788475	-84.024498	12.7308	65.0617
810.000000	70.000000	76.833878	75.118675	16.0745	78.8941
820.000000	70.000000	67.971161	70.81382	72.6663	163.644
830.000000	70.000000	81.959785	-75.050751	10.8018	51.3459
840.000000	70.000000	81.621239	44.912857	4.25399	50.3522
850.000000	70.000000	79.394012	83.901489	9.20278	47.6179
860.000000	70.000000	86.909035	-77.82917	11.539	85.0797
870.000000	70.000000	80.901154	114.16627	5.3793	40.3398
880.000000	70.000000	85.169456	102.73325	16.7229	105.085
890.000000	70.000000	78.362968	69.813919	15.6058	108.673
900.000000	70.000000	62.808914	167.15358	13.1196	203.146
910.000000	70.000000	76.810829	-83.614479	18.4481	71.4753
920.000000	70.000000	79.992027	-0.72235399	10.8967	93.8108
930.000000	70.000000	78.792099	244.71451	11.5153	57.7384
940.000000	70.000000	77.726181	-24.66293	8.72571	52.8907
950.000000	70.000000	4.8819704	-60.156769	197.919	179.047
960.000000	70.000000	6.590147	122.29256	12.0332	73.295
970.000000	70.000000	8.8223772	252.00641	7.11014	38.4974
980.000000	70.000000	16.423275	108.62331	19.3	123.592
990.000000	70.000000	9.1918106	-36.200562	5.85294	60.842
1000.000000	70.000000	22.015202	-88.207153	13.9159	63.1794
1010.000000	70.000000	8.5376835	111.10465	13.5042	129.532
1020.000000	70.000000	1.6337718	115.1925	24.6163	66.0809
1030.000000	70.000000	8.2462187	-40.817268	7.07225	48.7529
1040.000000	70.000000	19.894657	95.781219	36.4439	128.8
1050.000000	70.000000	16.25481	30.205046	17.9049	230.18
1060.000000	70.000000	55.522228	0.69680184	30.096	270.242
1070.000000	70.000000	9.8116922	-68.237534	9.64757	55.7061
1080.000000	70.000000	17.20669	-48.522877	10.3583	58.5609
1090.000000	70.000000	17.248331	44.768379	53.7954	221.347
1100.000000	70.000000	9.9625912	-48.80986	10.1813	118.38
1110.000000	70.000000	89.999001	-7.8988643	1.58355e+007	1e+010
1120.000000	70.000000	77.973511	-22.169144	38.7148	333.878
1130.000000	70.000000	81.435463	22.207041	6.58075	85.9824
1140.000000	70.000000	83.745964	178.08827	7.54692	175.234
1150.000000	70.000000	84.236122	220.98621	8.6012	87.7901
1160.000000	70.000000	81.918755	173.94748	8.13752	223.055
1170.000000	70.000000	82.016052	58.461102	10.6713	80.1576
1180.000000	70.000000	47.10416	239.75415	61.5405	103.263
1190.000000	70.000000	85.09301	86.282486	8.47477	46.6339
1200.000000	70.000000	75.379707	169.6568	23.4926	214.575
1210.000000	70.000000	76.634247	0.88615072	20.184	126.353
1220.000000	70.000000	83.880318	-53.770092	10.6514	61.2721
1230.000000	70.000000	73.993599	165.46735	24.6747	116.649
1240.000000	70.000000	77.43354	16.585247	17.0249	132.65
1250.000000	70.000000	79.169884	46.765717	11.6903	93.8609
1260.000000	70.000000	72.984291	72.256233	21.8188	72.7579
1270.000000	70.000000	4.6792812	50.344769	724.914	304.286
1280.000000	70.000000	4.7736082	-51.521172	9.83875	57.4871
1290.000000	70.000000	22.185495	-24.593729	15.6512	76.7395
1300.000000	70.000000	13.277585	-8.4578247	10.6964	209
1310.000000	70.000000	38.06078	82.373352	31.2006	56.1143
1320.000000	70.000000	68.37738	196.16039	31.1816	199.516
1330.000000	70.000000	22.584562	223.31795	153.153	355.164
1340.000000	70.000000	21.432396	36.702553	15.3977	60.5681
1350.000000	70.000000	52.234833	27.241859	89.2928	245.869
1360.000000	70.000000	78.414825	129.31445	17.7206	75.3746
1370.000000	70.000000	80.251053	105.47891	5.63287	73.2373
1380.000000	70.000000	78.222481	120.25507	21.9676	101.984
1390.000000	70.000000	72.372993	87.332771	21.8418	74.8516
1400.000000	70.000000	81.202911	-65.030563	29.7585	516.163
1410.000000	70.000000	0.001	81.47377	2.85893e+007	1e+010
1420.000000	70.000000	4.2426262	56.192776	9.58998	77.6561
1430.000000	70.000000	46.354553	-19.115223	158.909	381.971
1440.000000	70.000000	11.379126	238.87245	10.905	73.519
1450.000000	70.000000	9.3737202	48.275833	8.53014	138.373
1460.000000	70.000000	8.4886818	239.36392	8.56176	71.1214
1470.000000	70.000000	9.0397491	234.11591	7.06144	387.349
1480.000000	70.000000	7.3660846	235.55766	4.20243	45.7063
1490.000000	70.000000	7.4752307	-67.777405	4.45371	25.2174
1500.000000	70.000000	7.7471724	167.60771	10.987	155.808
300.000000	75.000000	82.226067	-13.995921	13.3768	244.865
310.000000	75.000000	59.865723	211.91492	82.0568	192.78
320.000000	75.000000	20.195103	93.630417	22.7396	58.6672
330.000000	75.000000	21.633018	-47.748775	24.1731	67.4018
340.000000	75.000000	40.549427	147.76761	18.4492	173.152
350.000000	75.000000	79.726402	-21.104233	7.62167	195.378
360.000000	75.000000	71.675232	64.316658	21.4909	118.656
370.000000	75.000000	82.652039	235.35548	14.2163	55.0231
380.000000	75.000000	77.049706	-52.678696	15.7931	69.7433
390.000000	75.000000	77.382828	0.034528706	13.9276	145.082
400.000000	75.000000	80.824432	-66.869698	5.18991	37.2937
410.000000	75.000000	53.516163	166.91866	200.386	300.762
420.000000	75.000000	9.1872587	65.597176	11.1961	129.022
430.000000	75.000000	9.7187872	258.45453	8.74203	47.8962
440.000000	75.000000	0.001	122.88017	19705.6	134.673
450.000000	75.000000	0.001	115.47212	41738.8	107.473
460.000000	75.000000	10.807367	257.57343	6.28037	28.2784
470.000000	75.000000	6.520267	-11.062022	13.0434	154.131
480.000000	75.000000	6.9348845	-15.385406	6.54767	138.655
490.000000	75.000000	81.858971	174.99246	5.0599	95.0688
500.000000	75.000000	78.256462	1.6768339	13.6361	133.509
510.000000	75.000000	66.301422	82.808868	14.9359	76.7838
520.000000	75.000000	71.695404	111.1496	10.3896	44.7251
530.000000	75.000000	74.953888	82.325104	18.23	71.9678
540.000000	75.000000	89.999001	-45.061726	17183.5	37.8616
550.000000	75.000000	76.017479	15.550179	9.90275	78.5832
560.000000	75.000000	79.032234	14.077301	20.4941	216.308
570.000000	75.000000	0.001	71.662338	14506.6	232.142
580.000000	75.000000	0.001	179.86162	30802	137.018
590.000000	75.000000	0.001	114.3483	180974	138.013
600.000000	75.000000	6.6858935	-28.640606	6.68068	202.653
610.000000	75.000000	4.5689321	164.30595	31.7554	166.487
620.000000	75.000000	55.775642	-82.743561	42.3481	110.742
630.000000	75.000000	5.5861688	256.00079	7.97208	199.33
640.000000	75.000000	13.510449	64.322456	18.9547	110.745
650.000000	75.000000	9.1163235	69.371269	9.33937	74.9271
660.000000	75.000000	9.550971	99.501892	7.48256	49.9325
670.000000	75.000000	5.2825365	149.14847	8.25477	128.837
680.000000	75.000000	11.62079	53.427315	8.48105	37.7734
690.000000	75.000000	44.99152	73.324509	114.999	235.086
700.000000	75.000000	41.80798	40.857643	19.6525	96.9265
710.000000	75.000000	64.378159	-18.078836	25.6347	102.952
720.000000	75.000000	0.001	65.59446	16615.8	90.7022
730.000000	75.000000	9.9710836	106.54862	14.3307	70.354
740.000000	75.000000	67.659607	-70.049095	21.6853	120.127
750.000000	75.000000	9.6417818	85.158371	6.87624	36.0406
760.000000	75.000000	79.225166	207.12335	10.0159	118.442
770.000000	75.000000	82.814682	-58.247894	7.3994	46.672
780.000000	75.000000	86.285591	68.917305	14.823	90.8894
790.000000	75.000000	78.904907	-22.990107	7.293	71.5357
800.000000	75.000000	78.923172	80.269745	6.85903	42.3592
810.000000	75.000000	23.914158	246.21413	50.854	153.329
820.000000	75.000000	13.717583	-45.205643	17.625	122.377
830.000000	75.000000	9.4001589	-84.81823	5.47812	69.1104
840.000000	75.000000	12.341311	10.196923	7.0322	330.696
850.000000	75.000000	13.678628	77.314171	16.5321	94.4463
860.000000	75.000000	77.389481	96.345192	10.9807	55.564
870.000000	75.000000	83.640442	242.5455	9.74236	59.4835
880.000000	75.000000	31.117336	177.44455	15.1096	79.782
890.000000	75.000000	57.942211	136.05496	28.2515	174.723
900.000000	75.000000	82.038712	135.00043	1846.81	812.104
910.000000	75.000000	77.501457	160.34528	22.465	187.168
920.000000	75.000000	32.28178	207.19466	26.3391	382.466
930.000000	75.000000	7.045814	258.87433	6.65061	47.1796
940.000000	75.000000	6.9119878	231.37122	10.2911	62.2407
950.000000	75.000000	15.284217	-89.499397	10.8514	73.3656
960.000000	75.000000	40.798367	73.431511	27.8048	193.177
970.000000	75.000000	78.876236	8.4370565	12.5067	91.1314
980.000000	75.000000	85.998833	130.29904	10.9138	53.084
990.000000	75.000000	89.999001	169.74524	19652	187.778
1000.000000	75.000000	0.001	156.1765	3.74981e+007	3800.92
1010.000000	75.000000	6.4361777	46.750435	7.5559	137.492
1020.000000	75.000000	29.465466	247.51663	34.6393	89.183
1030.000000	75.000000	33.305351	68.539139	33.4333	88.969
1040.000000	75.000000	85.581017	234.97353	7.30722	110.714
1050.000000	75.000000	73.345444	-11.77068	20.5794	121.664
1060.000000	75.000000	72.791039	-14.285441	12.5368	154.554
1070.000000	75.000000	76.255341	224.47127	12.1677	78.4983
1080.000000	75.000000	27.895288	28.607231	35.7939	157.966
1090.000000	75.000000	62.217941	218.395	25.2682	71.325
1100.000000	75.000000	75.051941	-82.786705	12.1879	152.605
1110.000000	75.000000	24.943769	135.08514	98.3858	260.792
1120.000000	75.000000	65.289124	-30.736353	31.584	195.383
1130.000000	75.000000	68.735901	105.17561	12.8535	51.1244
1140.000000	75.000000	9.8366508	98.204605	7.93478	42.9209
1150.000000	75.000000	39.802032	83.498199	16.0219	36.7899
1160.000000	75.000000	36.768589	200.97133	67.5385	222.851
1170.000000	75.000000	89.999001	-26.122961	20926.7	266.022
1180.000000	75.000000	77.766563	260.50974	15.4563	88.798
1190.000000	75.000000	78.869385	-38.95607	8.21167	84.0846
1200.000000	75.000000	79.97094	50.009621	15.3672	82.1541
1210.000000	75.000000	86.207413	220.60368	9.99801	85.0723
1220.000000	75.000000	79.280869	198.75783	9.02856	381.103
1230.000000	75.000000	28.329876	115.60786	1471.79	854.9
1240.000000	75.000000	23.165625	95.302773	38.4786	126.415
1250.000000	75.000000	31.991564	14.423111	31.2599	118.893
1260.000000	75.000000	12.012575	-17.224472	8.24545	49.581
1270.000000	75.000000	60.388374	113.43172	27.2067	74.6832
1280.000000	75.000000	76.56292	69.962944	8.33353	54.4474
1290.000000	75.000000	84.718399	146.22354	8.5597	121.153
1300.000000	75.000000	76.62619	48.678276	20.0202	92.963
1310.000000	75.000000	74.56208	198.30313	14.2009	93.4125
1320.000000	75.000000	79.692261	46.577904	8.35027	161.59
1330.000000	75.000000	5.6044579	77.705353	6.32494	47.3175
1340.000000	75.000000	15.695145	197.87624	15.7024	95.7242
1350.000000	75.000000	16.163902	208.11105	14.5887	92.0553
1360.000000	75.000000	89.999001	-73.078674	1.95913e+007	1e+010
1370.000000	75.000000	79.315407	-66.701103	7.2016	117.774
1380.000000	75.000000	76.072365	140.85684	11.366	50.0119
1390.000000	75.000000	81.455482	92.045403	14.6035	61.2972
1400.000000	75.000000	89.999001	210.88939	19756.8	131.522
1410.000000	75.000000	73.032677	142.77766	9.96817	55.3832
1420.000000	75.000000	61.671619	-66.754807	55.1285	119.839
1430.000000	75.000000	52.303036	122.28408	33.3358	180.674
1440.000000	75.000000	6.1848259	-32.418026	101.597	339.086
1450.000000	75.000000	80.321106	127.9771	6.80714	33.2036
1460.000000	75.000000	77.57618	240.27098	10.463	58.2555
1470.000000	75.000000	81.924026	265.73798	4.33009	60.1532
1480.000000	75.000000	60.128132	-77.063255	11.1994	31.0608
1490.000000	75.000000	67.297325	112.48715	12.8647	42.6677
1500.000000	75.000000	62.165939	5.0573893	27.1462	113.96
dpolE	300.000000	65.000000	6.30751	12.0505
dpolE	310.000000	65.000000	-10	51.8061
dpolE	320.000000	65.000000	11.798	35.4176
dpolE	330.000000	65.000000	1.27895	114.283
dpolE	340.000000	65.000000	-2.24942	27.6061
dpolE	350.000000	65.000000	-3.15601	27.0658
dpolE	360.000000	65.000000	-1.54183	8.80009
dpolE	370.000000	65.000000	0.182	4.54777
dpolE	380.000000	65.000000	2.64553	18.9175
dpolE	390.000000	65.000000	-10	1342.15
dpolE	400.000000	65.000000	48.142	204.236
dpolE	410.000000	65.000000	32.9395	39.8674
dpolE	420.000000	65.000000	-10	433.419
dpolE	430.000000	65.000000	-10	254.795
dpolE	440.000000	65.000000	-10	214.1
dpolE	450.000000	65.000000	39.2982	85.292
dpolE	460.000000	65.000000	-10	56.3436
dpolE	470.000000	65.000000	-10	435.884
dpolE	480.000000	65.000000	-10	483.377
dpolE	490.000000	65.000000	2.68493	11.9646
dpolE	500.000000	65.000000	6.34884	20.3536
dpolE	510.000000	65.000000	-10	50.8544
dpolE	520.000000	65.000000	19.3975	28.6795
dpolE	530.000000	65.000000	-10	432.026
dpolE	540.000000	65.000000	7.4391	79.9094
dpolE	550.000000	65.000000	68.9761	179.223
dpolE	560.000000	65.000000	-10	265.541
dpolE	570.000000	65.000000	-10	54.7621
dpolE	580.000000	65.000000	0.871596	13.6418
dpolE	590.000000	65.000000	-10	206.035
dpolE	600.000000	65.000000	-10	945.377
dpolE	610.000000	65.000000	-10	71.7572
dpolE	620.000000	65.000000	-10	123.561
dpolE	630.000000	65.000000	40.8771	46.5034
dpolE	640.000000	65.000000	-10	47.6154
dpolE	650.000000	65.000000	1.79429	13.9588
dpolE	660.000000	65.000000	1.09398	14.6326
dpolE	670.000000	65.000000	-10	116.482
dpolE	680.000000	65.000000	1.71916	7.98371
dpolE	690.000000	65.000000	-10	144.632
dpolE	700.000000	65.000000	-10	250.075
dpolE	710.000000	65.000000	-10	344.629
dpolE	720.000000	65.000000	18.2738	61.317
dpolE	730.000000	65.000000	-10	111.89
dpolE	740.000000	65.000000	-10	135.429
dpolE	750.000000	65.000000	11.0023	15.8694
dpolE	760.000000	65.000000	34.3911	115.086
dpolE	770.000000	65.000000	-10	260.038
dpolE	780.000000	65.000000	79.7211	95.5694
dpolE	790.000000	65.000000	50.974	246.003
dpolE	800.000000	65.000000	-10	365.854
dpolE	810.000000	65.000000	1.5132	36.6875
dpolE	820.000000	65.000000	6.05347	75.9453
dpolE	830.000000	65.000000	-0.76133	632.551
dpolE	840.000000	65.000000	14.0142	240.172
dpolE	850.000000	65.000000	10.0737	1e+010
dpolE	860.000000	65.000000	-10	18.8274
dpolE	870.000000	65.000000	6.12246	42.8261
dpolE	880.000000	65.000000	-1.53004	20.4253
dpolE	890.000000	65.000000	-10	69.7272
dpolE	900.000000	65.000000	-3.78183	11.768
dpolE	910.000000	65.000000	-10	411.278
dpolE	920.000000	65.000000	-10	194.524
dpolE	930.000000	65.000000	-10	305.315
dpolE	940.000000	65.000000	16.9677	25.3633
dpolE	950.000000	65.000000	-8.85222	21.3917
dpolE	960.000000	65.000000	7.47835	304.463
dpolE	970.000000	65.000000	-10	380.973
dpolE	980.000000	65.000000	4.56205	269.331
dpolE	990.000000	65.000000	12.4951	167.335
dpolE	1000.000000	65.000000	10.8545	85.9884
dpolE	1010.000000	65.000000	-10	10.2365
dpolE	1020.000000	65.000000	3.90293	13.3273
dpolE	1030.000000	65.000000	-10	507.231
dpolE	1040.000000	65.000000	9.37807	127.608
dpolE	1050.000000	65.000000	-9.9865	26.8376
dpolE	1060.000000	65.000000	1.5997	5.1631
dpolE	1070.000000	65.000000	30.9837	52.718
dpolE	1080.000000	65.000000	-1.1104	15.959
dpolE	1090.000000	65.000000	-10	129.479
dpolE	1100.000000	65.000000	-10	251.646
dpolE	1110.000000	65.000000	-10	86.0987
dpolE	1120.000000	65.000000	2.20587	12.9735
dpolE	1130.000000	65.000000	1.54669	9.00296
dpolE	1140.000000	65.000000	4.97329	10.7721
dpolE	1150.000000	65.000000	-10	342.457
dpolE	1160.000000	65.000000	-3.62753	16.8438
dpolE	1170.000000	65.000000	-10	31.7798
dpolE	1180.000000	65.000000	46.0356	1145.65
dpolE	1190.000000	65.000000	-10	52.7941
dpolE	1200.000000	65.000000	10.0323	31.854
dpolE	1210.000000	65.000000	-10	66.954
dpolE	1220.000000	65.000000	-4.13095	71.4169
dpolE	1230.000000	65.000000	34.4759	32.4247
dpolE	1240.000000	65.000000	-5.60882	26.1258
dpolE	1250.000000	65.000000	7.68816	15.5899
dpolE	1260.000000	65.000000	39.4283	274.426
dpolE	1270.000000	65.000000	39.9393	178.266
dpolE	1280.000000	65.000000	-10	33.3236
dpolE	1290.000000	65.000000	-10	69.2824
dpolE	1300.000000	65.000000	-5.45312	329.028
dpolE	1310.000000	65.000000	-10	461.431
dpolE	1320.000000	65.000000	-10	440.374
dpolE	1330.000000	65.000000	7.13338	72.2896
dpolE	1340.000000	65.000000	-3.25398	13.0626
dpolE	1350.000000	65.000000	0.656033	18.9589
dpolE	1360.000000	65.000000	8.47446	15.1507
dpolE	1370.000000	65.000000	13.8209	22.7817
dpolE	1380.000000	65.000000	-9.99819	51.2767
dpolE	1390.000000	65.000000	0.729591	16.4044
dpolE	1400.000000	65.000000	-10	46.9391
dpolE	1410.000000	65.000000	-6.99137	30.9446
dpolE	1420.000000	65.000000	-5.25351	63.7521
dpolE	1430.000000	65.000000	-0.686173	16.2207
dpolE	1440.000000	65.000000	2.3768	9.48071
dpolE	1450.000000	65.000000	-10	93.6529
dpolE	1460.000000	65.000000	-10	170.541
dpolE	1470.000000	65.000000	-10	126.663
dpolE	1480.000000	65.000000	1.2774	1.75279
dpolE	1490.000000	65.000000	5.12932	6.52608
dpolE	1500.000000	65.000000	-10	78.2684
dpolE	300.000000	70.000000	-10	245.866
dpolE	310.000000	70.000000	-10	559.407
dpolE	320.000000	70.000000	5.79287	6.79531
dpolE	330.000000	70.000000	-10	301.137
dpolE	340.000000	70.000000	-2.46502	57.3066
dpolE	350.000000	70.000000	0.481201	6.38938
dpolE	360.000000	70.000000	-10	1006.79
dpolE	370.000000	70.000000	-10	44.4612
dpolE	380.000000	70.000000	27.5819	88.2457
dpolE	390.000000	70.000000	9.43432	59.8889
dpolE	400.000000	70.000000	-8.93173	24.6462
dpolE	410.000000	70.000000	-3.94932	5.50109
dpolE	420.000000	70.000000	-3.01245	31.519
dpolE	430.000000	70.000000	-3.428	15.3129
dpolE	440.000000	70.000000	-10	149.718
dpolE	450.000000	70.000000	15.4032	52.2022
dpolE	460.000000	70.000000	-10	1024.23
dpolE	470.000000	70.000000	0.35619	14.1858
dpolE	480.000000	70.000000	-10	58.1971
dpolE	490.000000	70.000000	-10	79.0454
dpolE	500.000000	70.000000	-10	108.376
dpolE	510.000000	70.000000	-10	45.584
dpolE	520.000000	70.000000	-10	317.405
dpolE	530.000000	70.000000	6.94758	118.036
dpolE	540.000000	70.000000	-7.44667	154.105
dpolE	550.000000	70.000000	4.31488	39.3057
dpolE	560.000000	70.000000	-10	667.134
dpolE	570.000000	70.000000	2.38609	30.2869
dpolE	580.000000	70.000000	26.1525	61.725
dpolE	590.000000	70.000000	-10	170.893
dpolE	600.000000	70.000000	-10	124.769
dpolE	610.000000	70.000000	-10	132.854
dpolE	620.000000	70.000000	26.6799	29.7811
dpolE	630.000000	70.000000	-10	372.013
dpolE	640.000000	70.000000	-10	792.82
dpolE	650.000000	70.000000	-0.214944	33.0117
dpolE	660.000000	70.000000	-10	99.9506
dpolE	670.000000	70.000000	3.55263	103.659
dpolE	680.000000	70.000000	-10	44.9762
dpolE	690.000000	70.000000	-10	162.768
dpolE	700.000000	70.000000	-10	92.9532
dpolE	710.000000	70.000000	-8.75245	48.5697
dpolE	720.000000	70.000000	-4.38436	13.8161
dpolE	730.000000	70.000000	-10	60.5499
dpolE	740.000000	70.000000	-3.08809	65.7661
dpolE	750.000000	70.000000	11.2924	65.4134
dpolE	760.000000	70.000000	18.5946	1e+010
dpolE	770.000000	70.000000	-2.20604	197.06
dpolE	780.000000	70.000000	9.11348	262.617
dpolE	790.000000	70.000000	1.70228	131.18
dpolE	800.000000	70.000000	-10	90.6354
dpolE	810.000000	70.000000	-10	106.534
dpolE	820.000000	70.000000	-10	750.029
dpolE	830.000000	70.000000	-10	70.8309
dpolE	840.000000	70.000000	3.69571	12.2544
dpolE	850.000000	70.000000	-10	55.823
dpolE	860.000000	70.000000	-2.81437	16.5201
dpolE	870.000000	70.000000	-10	34.5107
dpolE	880.000000	70.000000	-10	95.0243
dpolE	890.000000	70.000000	-2.61459	70.775
dpolE	900.000000	70.000000	61.6071	47.6878
dpolE	910.000000	70.000000	-10	185.758
dpolE	920.000000	70.000000	-10	47.9114
dpolE	930.000000	70.000000	-10	87.1947
dpolE	940.000000	70.000000	-10	47.7565
dpolE	950.000000	70.000000	-10	271.036
dpolE	960.000000	70.000000	-10	86.5375
dpolE	970.000000	70.000000	-10	42.2403
dpolE	980.000000	70.000000	15.6619	113.611
dpolE	990.000000	70.000000	-2.77236	28.7806
dpolE	1000.000000	70.000000	18.2148	96.9794
dpolE	1010.000000	70.000000	1.34137	43.2749
dpolE	1020.000000	70.000000	-7.86555	34.1737
dpolE	1030.000000	70.000000	-10	31.2586
dpolE	1040.000000	70.000000	-10	320.556
dpolE	1050.000000	70.000000	24.6202	55.4914
dpolE	1060.000000	70.000000	65.7775	121.903
dpolE	1070.000000	70.000000	-0.918189	49.031
dpolE	1080.000000	70.000000	15.4728	73.1073
dpolE	1090.000000	70.000000	-10	481.199
dpolE	1100.000000	70.000000	6.51877	28.6532
dpolE	1110.000000	70.000000	16.3837	1e+010
dpolE	1120.000000	70.000000	-10	187.826
dpolE	1130.000000	70.000000	1.63552	16.0791
dpolE	1140.000000	70.000000	1.43384	12.4141
dpolE	1150.000000	70.000000	-7.18771	21.683
dpolE	1160.000000	70.000000	5.71481	15.1197
dpolE	1170.000000	70.000000	-10	61.7756
dpolE	1180.000000	70.000000	-10	915.893
dpolE	1190.000000	70.000000	-10	48.3691
dpolE	1200.000000	70.000000	2.70617	149.587
dpolE	1210.000000	70.000000	-10	109.438
dpolE	1220.000000	70.000000	-8.99237	50.3119
dpolE	1230.000000	70.000000	-9.06568	157.335
dpolE	1240.000000	70.000000	1.51539	61.5541
dpolE	1250.000000	70.000000	-10	54.1282
dpolE	1260.000000	70.000000	-10	201.5
dpolE	1270.000000	70.000000	-10	987.818
dpolE	1280.000000	70.000000	-10	34.8213
dpolE	1290.000000	70.000000	-10	108.731
dpolE	1300.000000	70.000000	15.1795	41.9608
dpolE	1310.000000	70.000000	-10	610.448
dpolE	1320.000000	70.000000	28.3634	139.729
dpolE	1330.000000	70.000000	-10	833.12
dpolE	1340.000000	70.000000	-10	165.936
dpolE	1350.000000	70.000000	-10	663.735
dpolE	1360.000000	70.000000	-10	77.7546
dpolE	1370.000000	70.000000	1.42857	22.7032
dpolE	1380.000000	70.000000	-10	159.817
dpolE	1390.000000	70.000000	-10	161.35
dpolE	1400.000000	70.000000	7.94432	64.4227
dpolE	1410.000000	70.000000	27.7605	1e+010
dpolE	1420.000000	70.000000	-10	22.9143
dpolE	1430.000000	70.000000	-10	1264.4
dpolE	1440.000000	70.000000	-3.60936	50.7066
dpolE	1450.000000	70.000000	5.88941	19.7549
dpolE	1460.000000	70.000000	-1.18936	33.5324
dpolE	1470.000000	70.000000	9.2894	13.8846
dpolE	1480.000000	70.000000	3.03564	17.007
dpolE	1490.000000	70.000000	-10	22.8041
dpolE	1500.000000	70.000000	1.59248	27.3728
dpolE	300.000000	75.000000	4.50147	26.42
dpolE	310.000000	75.000000	-10	617.301
dpolE	320.000000	75.000000	-10	177.458
dpolE	330.000000	75.000000	-10	319.903
dpolE	340.000000	75.000000	68.3471	81.371
dpolE	350.000000	75.000000	7.76238	16.7967
dpolE	360.000000	75.000000	-10	201.58
dpolE	370.000000	75.000000	-10	54.4264
dpolE	380.000000	75.000000	-10	117.663
dpolE	390.000000	75.000000	-0.284193	48.653
dpolE	400.000000	75.000000	-3.9897	22.248
dpolE	410.000000	75.000000	-10	1593.84
dpolE	420.000000	75.000000	5.81545	34.5768
dpolE	430.000000	75.000000	-10	50.5448
dpolE	440.000000	75.000000	-1.87787	10.5142
dpolE	450.000000	75.000000	-10	47.2364
dpolE	460.000000	75.000000	-10	56.8363
dpolE	470.000000	75.000000	-10	38.4501
dpolE	480.000000	75.000000	3.20633	11.247
dpolE	490.000000	75.000000	3.63127	10.0064
dpolE	500.000000	75.000000	3.35989	41.4861
dpolE	510.000000	75.000000	19.62	106.649
dpolE	520.000000	75.000000	-10	133.892
dpolE	530.000000	75.000000	-10	143.269
dpolE	540.000000	75.000000	-10	43.0608
dpolE	550.000000	75.000000	6.51629	39.5035
dpolE	560.000000	75.000000	4.67906	70.1657
dpolE	570.000000	75.000000	-0.228606	5.25395
dpolE	580.000000	75.000000	-10	30.6334
dpolE	590.000000	75.000000	-10	86.5042
dpolE	600.000000	75.000000	4.18618	10.5273
dpolE	610.000000	75.000000	-6.63301	41.9593
dpolE	620.000000	75.000000	24.6211	433.176
dpolE	630.000000	75.000000	3.0022	11.5671
dpolE	640.000000	75.000000	-10	142.11
dpolE	650.000000	75.000000	-2.96217	36.87
dpolE	660.000000	75.000000	-3.97321	38.5722
dpolE	670.000000	75.000000	-6.86595	17.0434
dpolE	680.000000	75.000000	-10	67.7937
dpolE	690.000000	75.000000	-10	1176
dpolE	700.000000	75.000000	47.591	180.788
dpolE	710.000000	75.000000	-10	178.431
dpolE	720.000000	75.000000	-4.42094	15.285
dpolE	730.000000	75.000000	-10	125.931
dpolE	740.000000	75.000000	28.6672	148.474
dpolE	750.000000	75.000000	-10	56.9231
dpolE	760.000000	75.000000	5.34382	50.6551
dpolE	770.000000	75.000000	-10	36.8259
dpolE	780.000000	75.000000	-10	38.0216
dpolE	790.000000	75.000000	3.39618	22.0209
dpolE	800.000000	75.000000	-0.484646	36.2572
dpolE	810.000000	75.000000	16.2989	254.053
dpolE	820.000000	75.000000	-10	111.252
dpolE	830.000000	75.000000	5.17526	15.9358
dpolE	840.000000	75.000000	16.9032	17.5429
dpolE	850.000000	75.000000	-10	120.079
dpolE	860.000000	75.000000	-10	67.1928
dpolE	870.000000	75.000000	-5.81795	49.4477
dpolE	880.000000	75.000000	41.6745	86.7898
dpolE	890.000000	75.000000	27.7088	164.3
dpolE	900.000000	75.000000	-10	4116.57
dpolE	910.000000	75.000000	-10	83.8127
dpolE	920.000000	75.000000	75.4559	104.482
dpolE	930.000000	75.000000	-6.33922	27.7957
dpolE	940.000000	75.000000	-10	48.9831
dpolE	950.000000	75.000000	13.5281	39.8556
dpolE	960.000000	75.000000	89.6099	144.359
dpolE	970.000000	75.000000	-10	73.3685
dpolE	980.000000	75.000000	-10	38.1075
dpolE	990.000000	75.000000	-1.38108	8.77124
dpolE	1000.000000	75.000000	-10	14387
dpolE	1010.000000	75.000000	3.68866	17.6823
dpolE	1020.000000	75.000000	-10	359.174
dpolE	1030.000000	75.000000	-10	371.584
dpolE	1040.000000	75.000000	-0.410798	10.0355
dpolE	1050.000000	75.000000	-10	126.279
dpolE	1060.000000	75.000000	7.07231	61.8037
dpolE	1070.000000	75.000000	-5.71678	99.09
dpolE	1080.000000	75.000000	-10	250.93
dpolE	1090.000000	75.000000	-10	215.212
dpolE	1100.000000	75.000000	21.8221	39.465
dpolE	1110.000000	75.000000	-10	650.986
dpolE	1120.000000	75.000000	39.9048	163.678
dpolE	1130.000000	75.000000	-10	125.382
dpolE	1140.000000	75.000000	-10	45.5506
dpolE	1150.000000	75.000000	-10	229.52
dpolE	1160.000000	75.000000	23.6321	437.869
dpolE	1170.000000	75.000000	-0.475385	8.25808
dpolE	1180.000000	75.000000	-1.48666	80.6426
dpolE	1190.000000	75.000000	6.87686	30.8323
dpolE	1200.000000	75.000000	-10	104.225
dpolE	1210.000000	75.000000	-3.50113	22.0802
dpolE	1220.000000	75.000000	12.6516	20.4874
dpolE	1230.000000	75.000000	-6.93169	9225.85
dpolE	1240.000000	75.000000	-10	448.011
dpolE	1250.000000	75.000000	-10	255.204
dpolE	1260.000000	75.000000	-10	45.3994
dpolE	1270.000000	75.000000	-10	253.489
dpolE	1280.000000	75.000000	6.80433	39.7064
dpolE	1290.000000	75.000000	-0.188612	13.9312
dpolE	1300.000000	75.000000	-10	138.44
dpolE	1310.000000	75.000000	-10	107.503
dpolE	1320.000000	75.000000	9.46746	23.1044
dpolE	1330.000000	75.000000	-4.06151	19.2486
dpolE	1340.000000	75.000000	4.71124	73.6739
dpolE	1350.000000	75.000000	2.05687	59.3931
dpolE	1360.000000	75.000000	14.5259	1e+010
dpolE	1370.000000	75.000000	10.4201	18.437
dpolE	1380.000000	75.000000	-10	95.6982
dpolE	1390.000000	75.000000	-10	56.7967
dpolE	1400.000000	75.000000	-3.16877	10.9477
dpolE	1410.000000	75.000000	-10	53.6386
dpolE	1420.000000	75.000000	-10	450.022
dpolE	1430.000000	75.000000	66.5716	197.112
dpolE	1440.000000	75.000000	-10	189.092
dpolE	1450.000000	75.000000	-10	54.723
dpolE	1460.000000	75.000000	-10	61.2322
dpolE	1470.000000	75.000000	3.10875	14.7867
dpolE	1480.000000	75.000000	-10	177.524
dpolE	1490.000000	75.000000	-10	139.458
dpolE	1500.000000	75.000000	-10	187.796