VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Mar 16 16:52:39 2009]
Original[16.03.09 calibration wafer.dat]
nm
300.000000	65.000000	38.09845	105.949	0.188069	0.47964
310.000000	65.000000	37.015629	106.89287	0.165347	0.427492
320.000000	65.000000	36.137562	108.14583	0.152908	0.400103
330.000000	65.000000	35.533302	109.41181	0.175743	0.469643
340.000000	65.000000	35.132835	111.09649	0.159243	0.430823
350.000000	65.000000	34.90778	112.9624	0.159011	0.434959
360.000000	65.000000	35.017906	115.93977	0.0903261	0.253137
370.000000	65.000000	34.401634	121.26197	0.107397	0.310531
380.000000	65.000000	32.567722	124.68758	0.101588	0.31661
390.000000	65.000000	30.899771	126.43375	0.106961	0.351439
400.000000	65.000000	29.596231	127.37193	0.101209	0.348714
410.000000	65.000000	28.536448	128.24812	0.0973808	0.334648
420.000000	65.000000	27.663704	129.01523	0.0989205	0.351849
430.000000	65.000000	26.878334	129.7715	0.0906885	0.333187
440.000000	65.000000	26.212172	130.44093	0.0860655	0.327467
450.000000	65.000000	25.622385	131.00806	0.094395	0.370089
460.000000	65.000000	25.065323	131.78876	0.0887538	0.343196
470.000000	65.000000	24.540798	132.35582	0.0837101	0.332377
480.000000	65.000000	24.096094	133.06694	0.079755	0.326066
490.000000	65.000000	23.677055	133.54655	0.0700906	0.293694
500.000000	65.000000	23.28022	134.15437	0.0884129	0.380867
510.000000	65.000000	22.899784	134.85661	0.088229	0.371739
520.000000	65.000000	22.53797	135.37596	0.0850699	0.36696
530.000000	65.000000	22.239929	135.93558	0.0869544	0.384247
540.000000	65.000000	21.92783	136.41502	0.0658966	0.29876
550.000000	65.000000	21.656721	136.87419	0.0637541	0.295475
560.000000	65.000000	21.410995	137.43842	0.073109	0.346411
570.000000	65.000000	21.139679	137.99454	0.0689312	0.316695
580.000000	65.000000	20.920025	138.52644	0.0748787	0.351863
590.000000	65.000000	20.701492	138.99446	0.0535942	0.256995
600.000000	65.000000	20.476021	139.47162	0.0611214	0.299367
610.000000	65.000000	20.276478	139.94243	0.06031	0.301764
620.000000	65.000000	20.095675	140.43285	0.0581439	0.280812
630.000000	65.000000	19.919558	140.8111	0.064871	0.319346
640.000000	65.000000	19.744698	141.22554	0.0614787	0.308406
650.000000	65.000000	19.582714	141.72021	0.053374	0.272667
660.000000	65.000000	19.439236	142.15202	0.051794	0.269481
670.000000	65.000000	19.272533	142.6358	0.0562229	0.298588
680.000000	65.000000	19.139181	143.02422	0.0572005	0.292067
690.000000	65.000000	18.996662	143.40877	0.0516205	0.267732
700.000000	65.000000	18.873924	143.75545	0.0532329	0.281034
710.000000	65.000000	18.750824	144.25177	0.0450774	0.24221
720.000000	65.000000	18.647295	144.61519	0.0456643	0.249034
730.000000	65.000000	18.539	144.8913	0.0478378	0.264961
740.000000	65.000000	18.426685	145.36812	0.0588397	0.313229
750.000000	65.000000	18.301865	145.6756	0.0499692	0.270163
760.000000	65.000000	18.220905	146.0854	0.0454519	0.24961
770.000000	65.000000	18.110365	146.42317	0.0431043	0.239996
780.000000	65.000000	18.03425	146.7821	0.0441499	0.248835
790.000000	65.000000	17.950464	147.188	0.0442774	0.253558
800.000000	65.000000	17.854523	147.43452	0.0452688	0.262865
300.000000	70.000000	37.790543	89.004631	0.496348	1.20497
310.000000	70.000000	36.805111	90.056839	0.320463	0.794667
320.000000	70.000000	35.830078	90.848389	0.235756	0.576426
330.000000	70.000000	35.158348	92.243584	0.126093	0.324802
340.000000	70.000000	34.574921	94.060516	0.127204	0.327155
350.000000	70.000000	34.242252	95.932724	0.144103	0.369618
360.000000	70.000000	34.195583	99.152054	0.140598	0.361798
370.000000	70.000000	33.341164	104.57462	0.122879	0.334613
380.000000	70.000000	31.001974	108.38013	0.109124	0.313713
390.000000	70.000000	29.025244	109.72208	0.127634	0.38455
400.000000	70.000000	27.512817	110.38055	0.108559	0.341391
410.000000	70.000000	26.276554	110.84768	0.105834	0.347738
420.000000	70.000000	25.22352	111.23531	0.094949	0.32043
430.000000	70.000000	24.327467	111.63963	0.093116	0.323154
440.000000	70.000000	23.520357	112.07787	0.0908127	0.323583
450.000000	70.000000	22.80662	112.448	0.0854379	0.313448
460.000000	70.000000	22.136093	112.90382	0.0957187	0.36127
470.000000	70.000000	21.512266	113.24351	0.0808135	0.312696
480.000000	70.000000	20.94335	113.73106	0.0766181	0.303476
490.000000	70.000000	20.439669	114.00857	0.0875825	0.355399
500.000000	70.000000	19.96365	114.40011	0.0906454	0.375822
510.000000	70.000000	19.505314	114.74281	0.0794541	0.335825
520.000000	70.000000	19.065989	115.24504	0.0866217	0.375314
530.000000	70.000000	18.674938	115.54779	0.0813154	0.359047
540.000000	70.000000	18.275843	115.99933	0.0712593	0.321581
550.000000	70.000000	17.943071	116.29225	0.0776746	0.358099
560.000000	70.000000	17.591925	116.7229	0.0771794	0.364159
570.000000	70.000000	17.264841	117.08895	0.0720537	0.343658
580.000000	70.000000	16.966349	117.41862	0.0769792	0.374113
590.000000	70.000000	16.653353	117.79924	0.0610249	0.302986
600.000000	70.000000	16.384224	118.13657	0.0578838	0.292571
610.000000	70.000000	16.125128	118.62589	0.056396	0.290507
620.000000	70.000000	15.881083	118.86362	0.0639307	0.331728
630.000000	70.000000	15.632087	119.31495	0.0627879	0.332094
640.000000	70.000000	15.407382	119.70882	0.0591064	0.31797
650.000000	70.000000	15.190475	120.0558	0.0572737	0.313134
660.000000	70.000000	14.989043	120.39232	0.0586459	0.326067
670.000000	70.000000	14.763553	120.71314	0.0572097	0.324616
680.000000	70.000000	14.580364	121.15952	0.0625095	0.355851
690.000000	70.000000	14.391524	121.47319	0.0536469	0.309484
700.000000	70.000000	14.211887	121.79398	0.0515747	0.302371
710.000000	70.000000	14.042848	122.1595	0.0534711	0.318333
720.000000	70.000000	13.863601	122.46683	0.0564179	0.341058
730.000000	70.000000	13.710648	122.9155	0.0605793	0.374136
740.000000	70.000000	13.561912	123.15085	0.0510405	0.313009
750.000000	70.000000	13.406555	123.65	0.0518015	0.322553
760.000000	70.000000	13.271221	123.89993	0.0477729	0.3014
770.000000	70.000000	13.125529	124.21043	0.0492394	0.315039
780.000000	70.000000	12.996898	124.56553	0.0458528	0.296364
790.000000	70.000000	12.857699	124.96541	0.0412578	0.271599
800.000000	70.000000	12.745842	125.19441	0.06233	0.415559
300.000000	75.000000	38.472385	70.127937	0.348084	0.892356
310.000000	75.000000	37.073318	70.124382	0.181348	0.480026
320.000000	75.000000	36.34536	71.120911	0.220903	0.580651
330.000000	75.000000	35.618599	72.302353	0.190057	0.507921
340.000000	75.000000	35.020744	73.69603	0.152587	0.403644
350.000000	75.000000	34.572361	75.364571	0.154761	0.408468
360.000000	75.000000	34.334972	78.488518	0.125005	0.324518
370.000000	75.000000	33.092045	83.760452	0.134991	0.360389
380.000000	75.000000	30.452906	86.733948	0.104262	0.287423
390.000000	75.000000	28.333849	87.111496	0.106931	0.305252
400.000000	75.000000	26.71781	86.969757	0.0944094	0.278825
410.000000	75.000000	25.418221	86.649536	0.0937933	0.297243
420.000000	75.000000	24.327957	86.283775	0.0815626	0.264474
430.000000	75.000000	23.395168	86.004379	0.0820458	0.271323
440.000000	75.000000	22.54406	85.625694	0.0703784	0.237411
450.000000	75.000000	21.802916	85.366554	0.079735	0.274754
460.000000	75.000000	21.084881	85.043282	0.0776624	0.283853
470.000000	75.000000	20.455812	84.71125	0.0637594	0.237336
480.000000	75.000000	19.854517	84.517128	0.0734429	0.277905
490.000000	75.000000	19.320721	84.230873	0.0708331	0.272823
500.000000	75.000000	18.790209	83.958824	0.0636252	0.249442
510.000000	75.000000	18.307079	83.700409	0.0591015	0.244206
520.000000	75.000000	17.848894	83.382111	0.0582483	0.244314
530.000000	75.000000	17.426678	83.105751	0.0593909	0.252445
540.000000	75.000000	17.017544	82.869209	0.0593148	0.256846
550.000000	75.000000	16.640327	82.600128	0.0561446	0.246261
560.000000	75.000000	16.282034	82.3367	0.0495045	0.219878
570.000000	75.000000	15.924584	82.083878	0.0534684	0.249793
580.000000	75.000000	15.607505	81.898979	0.0493678	0.233451
590.000000	75.000000	15.306424	81.636292	0.0446834	0.213538
600.000000	75.000000	14.998244	81.34993	0.0473896	0.229381
610.000000	75.000000	14.723741	81.151817	0.050069	0.245749
620.000000	75.000000	14.443007	80.902451	0.0490394	0.252077
630.000000	75.000000	14.191648	80.677704	0.0486312	0.252801
640.000000	75.000000	13.925346	80.471046	0.0458169	0.240504
650.000000	75.000000	13.691091	80.26313	0.0465002	0.247603
660.000000	75.000000	13.472196	80.051933	0.0459277	0.247297
670.000000	75.000000	13.240194	79.801613	0.046927	0.255699
680.000000	75.000000	13.022192	79.586731	0.0484903	0.274251
690.000000	75.000000	12.811879	79.415787	0.0416563	0.237771
700.000000	75.000000	12.617852	79.163292	0.0398429	0.230888
710.000000	75.000000	12.423641	78.93766	0.036142	0.211588
720.000000	75.000000	12.235144	78.649696	0.0360595	0.213664
730.000000	75.000000	12.046747	78.532257	0.0324823	0.194326
740.000000	75.000000	11.874424	78.305595	0.0402635	0.249191
750.000000	75.000000	11.712488	78.066803	0.0395055	0.24651
760.000000	75.000000	11.554005	77.861244	0.0414666	0.262116
770.000000	75.000000	11.387798	77.738823	0.0401766	0.256544
780.000000	75.000000	11.230376	77.586586	0.0346684	0.223155
790.000000	75.000000	11.079785	77.28479	0.0358151	0.233228
800.000000	75.000000	10.935509	77.06752	0.041322	0.271339
dpolE	300.000000	65.000000	0.245893	2.31405
dpolE	310.000000	65.000000	1.02816	2.0536
dpolE	320.000000	65.000000	0.477564	1.93416
dpolE	330.000000	65.000000	0.339832	2.02817
dpolE	340.000000	65.000000	0.671625	1.8647
dpolE	350.000000	65.000000	0.251765	1.89282
dpolE	360.000000	65.000000	0.606437	1.08756
dpolE	370.000000	65.000000	0.716372	1.16991
dpolE	380.000000	65.000000	0.553698	1.05707
dpolE	390.000000	65.000000	0.229031	1.08707
dpolE	400.000000	65.000000	0.426023	1.0103
dpolE	410.000000	65.000000	0.0993462	0.894522
dpolE	420.000000	65.000000	0.185457	0.898029
dpolE	430.000000	65.000000	0.185824	0.813262
dpolE	440.000000	65.000000	0.231008	0.765877
dpolE	450.000000	65.000000	0.203957	0.833681
dpolE	460.000000	65.000000	0.277394	0.730689
dpolE	470.000000	65.000000	0.200066	0.683521
dpolE	480.000000	65.000000	0.261029	0.646645
dpolE	490.000000	65.000000	0.115559	0.565589
dpolE	500.000000	65.000000	0.207525	0.707857
dpolE	510.000000	65.000000	0.127563	0.666512
dpolE	520.000000	65.000000	0.0826214	0.638222
dpolE	530.000000	65.000000	0.219137	0.647665
dpolE	540.000000	65.000000	0.240008	0.488222
dpolE	550.000000	65.000000	0.158639	0.470518
dpolE	560.000000	65.000000	0.0660714	0.537392
dpolE	570.000000	65.000000	0.122522	0.480982
dpolE	580.000000	65.000000	0.133163	0.520213
dpolE	590.000000	65.000000	0.0951054	0.370624
dpolE	600.000000	65.000000	0.0869056	0.420339
dpolE	610.000000	65.000000	0.141108	0.412435
dpolE	620.000000	65.000000	0.122392	0.381642
dpolE	630.000000	65.000000	0.067278	0.424568
dpolE	640.000000	65.000000	0.0948168	0.400285
dpolE	650.000000	65.000000	0.047118	0.345948
dpolE	660.000000	65.000000	0.0834039	0.334231
dpolE	670.000000	65.000000	0.162927	0.360354
dpolE	680.000000	65.000000	0.119413	0.354754
dpolE	690.000000	65.000000	0.0534268	0.318762
dpolE	700.000000	65.000000	0.040623	0.327968
dpolE	710.000000	65.000000	0.080394	0.276194
dpolE	720.000000	65.000000	0.0175183	0.279107
dpolE	730.000000	65.000000	0.0192288	0.291549
dpolE	740.000000	65.000000	0.00960945	0.348738
dpolE	750.000000	65.000000	0.0339198	0.294641
dpolE	760.000000	65.000000	0.160783	0.266651
dpolE	770.000000	65.000000	0.0771938	0.252054
dpolE	780.000000	65.000000	0.0632235	0.257871
dpolE	790.000000	65.000000	0.114453	0.257183
dpolE	800.000000	65.000000	-0.0270391	0.263163
dpolE	300.000000	70.000000	-2.59372	6.28715
dpolE	310.000000	70.000000	2.17848	4.03335
dpolE	320.000000	70.000000	-0.696008	3.07076
dpolE	330.000000	70.000000	0.919407	1.4764
dpolE	340.000000	70.000000	0.607421	1.51813
dpolE	350.000000	70.000000	0.559424	1.75269
dpolE	360.000000	70.000000	0.627048	1.74212
dpolE	370.000000	70.000000	0.386253	1.37033
dpolE	380.000000	70.000000	0.657779	1.17893
dpolE	390.000000	70.000000	0.402516	1.34818
dpolE	400.000000	70.000000	0.630728	1.1259
dpolE	410.000000	70.000000	0.666177	0.985786
dpolE	420.000000	70.000000	0.329188	0.876396
dpolE	430.000000	70.000000	0.283372	0.851514
dpolE	440.000000	70.000000	0.315421	0.821307
dpolE	450.000000	70.000000	0.235724	0.768968
dpolE	460.000000	70.000000	0.37207	0.781671
dpolE	470.000000	70.000000	0.27006	0.65621
dpolE	480.000000	70.000000	0.296373	0.616824
dpolE	490.000000	70.000000	0.296505	0.702207
dpolE	500.000000	70.000000	0.190405	0.723173
dpolE	510.000000	70.000000	0.261024	0.580622
dpolE	520.000000	70.000000	0.234996	0.630009
dpolE	530.000000	70.000000	0.198995	0.588539
dpolE	540.000000	70.000000	0.216252	0.51183
dpolE	550.000000	70.000000	0.145048	0.557568
dpolE	560.000000	70.000000	0.201166	0.550296
dpolE	570.000000	70.000000	0.225555	0.474052
dpolE	580.000000	70.000000	0.122781	0.505735
dpolE	590.000000	70.000000	0.200876	0.397945
dpolE	600.000000	70.000000	0.1862	0.375955
dpolE	610.000000	70.000000	0.146181	0.364622
dpolE	620.000000	70.000000	0.0856045	0.386054
dpolE	630.000000	70.000000	0.150192	0.37665
dpolE	640.000000	70.000000	0.156585	0.353013
dpolE	650.000000	70.000000	0.129509	0.340835
dpolE	660.000000	70.000000	0.157725	0.347565
dpolE	670.000000	70.000000	0.0546118	0.338902
dpolE	680.000000	70.000000	0.169544	0.345721
dpolE	690.000000	70.000000	0.0666401	0.296127
dpolE	700.000000	70.000000	0.120493	0.283363
dpolE	710.000000	70.000000	0.116605	0.29272
dpolE	720.000000	70.000000	0.0808953	0.307697
dpolE	730.000000	70.000000	0.132554	0.329894
dpolE	740.000000	70.000000	0.0567356	0.262421
dpolE	750.000000	70.000000	0.055523	0.26517
dpolE	760.000000	70.000000	0.0769828	0.243963
dpolE	770.000000	70.000000	0.0801862	0.250662
dpolE	780.000000	70.000000	0.0637252	0.233558
dpolE	790.000000	70.000000	0.103445	0.208737
dpolE	800.000000	70.000000	0.0395796	0.317002
dpolE	300.000000	75.000000	-0.513312	4.28129
dpolE	310.000000	75.000000	2.50568	2.22202
dpolE	320.000000	75.000000	1.3671	2.78802
dpolE	330.000000	75.000000	1.91817	2.18526
dpolE	340.000000	75.000000	0.380692	1.80584
dpolE	350.000000	75.000000	0.933599	1.86133
dpolE	360.000000	75.000000	0.596208	1.54625
dpolE	370.000000	75.000000	0.216306	1.51919
dpolE	380.000000	75.000000	0.789668	1.14086
dpolE	390.000000	75.000000	0.470934	1.14733
dpolE	400.000000	75.000000	0.645773	0.99486
dpolE	410.000000	75.000000	0.5214	0.881395
dpolE	420.000000	75.000000	0.441182	0.758152
dpolE	430.000000	75.000000	0.233074	0.756987
dpolE	440.000000	75.000000	0.362401	0.641382
dpolE	450.000000	75.000000	0.22033	0.724184
dpolE	460.000000	75.000000	0.335782	0.633861
dpolE	470.000000	75.000000	0.225999	0.518308
dpolE	480.000000	75.000000	0.274955	0.591933
dpolE	490.000000	75.000000	0.221498	0.568966
dpolE	500.000000	75.000000	0.315511	0.506683
dpolE	510.000000	75.000000	0.1779	0.428854
dpolE	520.000000	75.000000	0.235375	0.419507
dpolE	530.000000	75.000000	0.251358	0.424962
dpolE	540.000000	75.000000	0.252758	0.423155
dpolE	550.000000	75.000000	0.184577	0.398946
dpolE	560.000000	75.000000	0.129981	0.350267
dpolE	570.000000	75.000000	0.176644	0.345889
dpolE	580.000000	75.000000	0.195428	0.317899
dpolE	590.000000	75.000000	0.138581	0.286793
dpolE	600.000000	75.000000	0.150857	0.302354
dpolE	610.000000	75.000000	0.0153235	0.320277
dpolE	620.000000	75.000000	0.179913	0.287056
dpolE	630.000000	75.000000	0.218869	0.283344
dpolE	640.000000	75.000000	0.135972	0.26595
dpolE	650.000000	75.000000	0.110585	0.269904
dpolE	660.000000	75.000000	0.126221	0.265781
dpolE	670.000000	75.000000	0.109622	0.270462
dpolE	680.000000	75.000000	0.0974699	0.257926
dpolE	690.000000	75.000000	0.0767985	0.220712
dpolE	700.000000	75.000000	0.0969372	0.211074
dpolE	710.000000	75.000000	0.0747903	0.190949
dpolE	720.000000	75.000000	0.107809	0.189638
dpolE	730.000000	75.000000	0.0742219	0.170332
dpolE	740.000000	75.000000	0.0872034	0.195695
dpolE	750.000000	75.000000	0.0863872	0.191421
dpolE	760.000000	75.000000	0.0548636	0.201456
dpolE	770.000000	75.000000	0.0609242	0.194557
dpolE	780.000000	75.000000	0.0445719	0.167652
dpolE	790.000000	75.000000	0.0677304	0.172404
dpolE	800.000000	75.000000	0.0455981	0.198516