VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Jul 16 15:08:37 2009]
Original[160709 cal wafer.dat]
Angstroms
3000.000000	65.000000	38.229752	105.48513	0.182209	0.464752
3100.000000	65.000000	37.067764	106.39666	0.16795	0.431613
3200.000000	65.000000	36.286076	107.54869	0.169851	0.440956
3300.000000	65.000000	35.681793	108.97361	0.143557	0.382478
3400.000000	65.000000	35.222218	110.48734	0.139623	0.375542
3500.000000	65.000000	35.009434	112.31191	0.135778	0.369325
3600.000000	65.000000	35.179485	115.33303	0.129837	0.362613
3700.000000	65.000000	34.486835	120.64304	0.124013	0.357103
3800.000000	65.000000	32.707619	124.03962	0.105732	0.32679
3900.000000	65.000000	31.00873	125.63015	0.0935482	0.304759
4000.000000	65.000000	29.708166	126.62638	0.0910958	0.310733
4100.000000	65.000000	28.650751	127.51128	0.0988153	0.337382
4200.000000	65.000000	27.762396	128.24269	0.0900126	0.317943
4300.000000	65.000000	27.00112	128.95323	0.0801478	0.291699
4400.000000	65.000000	26.32452	129.60146	0.0763317	0.287476
4500.000000	65.000000	25.714506	130.27682	0.0712161	0.276697
4600.000000	65.000000	25.153557	130.95068	0.0787085	0.301368
4700.000000	65.000000	24.645851	131.59558	0.0730123	0.287114
4800.000000	65.000000	24.175314	132.23013	0.0654803	0.264933
4900.000000	65.000000	23.749376	132.7849	0.0625876	0.260089
5000.000000	65.000000	23.364218	133.39278	0.0580456	0.24751
5100.000000	65.000000	22.990845	133.96098	0.0645657	0.269394
5200.000000	65.000000	22.632977	134.56729	0.053233	0.227457
5300.000000	65.000000	22.329664	135.14685	0.0553321	0.241824
5400.000000	65.000000	22.020157	135.71422	0.0581438	0.260865
5500.000000	65.000000	21.743	136.24496	0.0497268	0.228335
5600.000000	65.000000	21.484499	136.72575	0.0448456	0.210687
5700.000000	65.000000	21.233778	137.26534	0.0503947	0.229363
5800.000000	65.000000	20.980988	137.77026	0.0461373	0.214854
5900.000000	65.000000	20.763887	138.30228	0.0423894	0.201626
6000.000000	65.000000	20.564386	138.77927	0.0448356	0.217576
6100.000000	65.000000	20.360611	139.22571	0.0367749	0.182127
6200.000000	65.000000	20.174294	139.68817	0.0425915	0.203799
6300.000000	65.000000	19.9855	140.13321	0.0383705	0.18731
6400.000000	65.000000	19.812756	140.62396	0.0351986	0.175251
6500.000000	65.000000	19.655533	141.10864	0.0361044	0.183112
6600.000000	65.000000	19.506369	141.52963	0.0330652	0.170694
6700.000000	65.000000	19.353916	141.92439	0.0315506	0.165793
6800.000000	65.000000	19.205097	142.44412	0.0332638	0.168639
6900.000000	65.000000	19.074877	142.75606	0.0249513	0.128332
7000.000000	65.000000	18.943886	143.21785	0.0318154	0.166971
7100.000000	65.000000	18.831209	143.55066	0.0288753	0.15377
7200.000000	65.000000	18.706026	143.92787	0.0322621	0.174582
7300.000000	65.000000	18.596262	144.31567	0.0223854	0.123097
7400.000000	65.000000	18.47995	144.70279	0.0237904	0.125793
7500.000000	65.000000	18.374678	145.08536	0.0253874	0.136242
7600.000000	65.000000	18.282507	145.47528	0.02349	0.128023
7700.000000	65.000000	18.178659	145.82419	0.0232113	0.128301
7800.000000	65.000000	18.08864	146.10744	0.0240985	0.13489
7900.000000	65.000000	17.986477	146.51625	0.0218143	0.124156
8000.000000	65.000000	17.91053	146.85332	0.0200359	0.1159
8100.000000	65.000000	17.823774	147.16672	0.0268294	0.148726
8200.000000	65.000000	17.721516	147.4868	0.025255	0.142327
8300.000000	65.000000	17.64399	147.84019	0.0239123	0.136737
8400.000000	65.000000	17.567448	148.20076	0.0254133	0.147115
8500.000000	65.000000	17.499102	148.54926	0.027822	0.16131
8600.000000	65.000000	17.427061	148.83025	0.0180237	0.106326
8700.000000	65.000000	17.364376	149.09096	0.0243392	0.138315
8800.000000	65.000000	17.286469	149.4164	0.0195992	0.113291
8900.000000	65.000000	17.232969	149.63036	0.0203933	0.11923
9000.000000	65.000000	17.171005	149.88011	0.016803	0.0994075
9100.000000	65.000000	17.108395	150.13806	0.0173827	0.104064
9200.000000	65.000000	17.055349	150.42079	0.0141356	0.0856569
9300.000000	65.000000	16.995712	150.78008	0.0152946	0.0938286
9400.000000	65.000000	16.943203	151.04738	0.0199182	0.117059
9500.000000	65.000000	16.885954	151.30255	0.0182887	0.108712
9600.000000	65.000000	16.843348	151.55804	0.0144243	0.0866502
9700.000000	65.000000	16.789663	151.81752	0.0176916	0.107449
9800.000000	65.000000	16.731709	152.06274	0.0174015	0.106899
9900.000000	65.000000	16.687326	152.34117	0.0201761	0.125552
10000.000000	65.000000	16.649839	152.49373	0.0192435	0.120993
3000.000000	70.000000	37.912624	88.620171	0.329518	0.805948
3100.000000	70.000000	36.800514	89.461967	0.184681	0.45415
3200.000000	70.000000	35.949005	90.225235	0.11976	0.291404
3300.000000	70.000000	35.287586	91.548332	0.189057	0.486016
3400.000000	70.000000	34.772526	93.34758	0.126208	0.322917
3500.000000	70.000000	34.398533	95.211868	0.123718	0.316451
3600.000000	70.000000	34.337803	98.475655	0.13723	0.353808
3700.000000	70.000000	33.45668	103.79775	0.10362	0.281551
3800.000000	70.000000	31.185379	107.56766	0.10661	0.303542
3900.000000	70.000000	29.208941	108.83059	0.0987087	0.294329
4000.000000	70.000000	27.701176	109.46119	0.0937298	0.290633
4100.000000	70.000000	26.464415	109.99734	0.099605	0.323023
4200.000000	70.000000	25.429398	110.41337	0.086049	0.287167
4300.000000	70.000000	24.524801	110.81835	0.0914524	0.313612
4400.000000	70.000000	23.724939	111.17727	0.0698763	0.245434
4500.000000	70.000000	22.995596	111.59042	0.0761314	0.275357
4600.000000	70.000000	22.325911	111.98564	0.0731904	0.272263
4700.000000	70.000000	21.719133	112.39622	0.0708209	0.270097
4800.000000	70.000000	21.142763	112.78674	0.0724368	0.282364
4900.000000	70.000000	20.625872	113.13132	0.0641242	0.256077
5000.000000	70.000000	20.137028	113.53494	0.0610233	0.249104
5100.000000	70.000000	19.676617	113.93235	0.0612813	0.255887
5200.000000	70.000000	19.236729	114.3381	0.0586201	0.249777
5300.000000	70.000000	18.832642	114.71937	0.0513643	0.223115
5400.000000	70.000000	18.456638	115.09965	0.0532805	0.236884
5500.000000	70.000000	18.095778	115.47558	0.0445583	0.202175
5600.000000	70.000000	17.763512	115.83062	0.0445096	0.205843
5700.000000	70.000000	17.433525	116.25447	0.0501163	0.235524
5800.000000	70.000000	17.125473	116.61344	0.043873	0.209959
5900.000000	70.000000	16.835829	116.93717	0.0422836	0.205781
6000.000000	70.000000	16.544937	117.36054	0.040778	0.202345
6100.000000	70.000000	16.297945	117.70557	0.0366561	0.185522
6200.000000	70.000000	16.037457	118.0854	0.0412868	0.210961
6300.000000	70.000000	15.789974	118.47462	0.0340154	0.17678
6400.000000	70.000000	15.561687	118.8342	0.0356733	0.188443
6500.000000	70.000000	15.340438	119.17239	0.0321543	0.172551
6600.000000	70.000000	15.127825	119.53838	0.0326821	0.179047
6700.000000	70.000000	14.921923	119.90243	0.0307911	0.171668
6800.000000	70.000000	14.712955	120.24162	0.0326016	0.182294
6900.000000	70.000000	14.52873	120.60975	0.0381759	0.216468
7000.000000	70.000000	14.349576	120.89973	0.0255195	0.146917
7100.000000	70.000000	14.171086	121.26641	0.0274926	0.160654
7200.000000	70.000000	14.003795	121.59367	0.0315502	0.188112
7300.000000	70.000000	13.838354	121.97501	0.0242118	0.146868
7400.000000	70.000000	13.675225	122.40538	0.0282688	0.171109
7500.000000	70.000000	13.530666	122.67126	0.0202553	0.124234
7600.000000	70.000000	13.390811	123.08354	0.0232197	0.144345
7700.000000	70.000000	13.250536	123.37469	0.0184684	0.116303
7800.000000	70.000000	13.103764	123.72193	0.0218527	0.139315
7900.000000	70.000000	12.974583	124.08637	0.0194773	0.126703
8000.000000	70.000000	12.862776	124.3568	0.0259658	0.170922
8100.000000	70.000000	12.710647	124.78408	0.0257003	0.158903
8200.000000	70.000000	12.573369	125.22436	0.0223454	0.149526
8300.000000	70.000000	12.49202	125.37899	0.0222701	0.150374
8400.000000	70.000000	12.368748	125.73801	0.0219794	0.149176
8500.000000	70.000000	12.252554	126.09153	0.0200778	0.136578
8600.000000	70.000000	12.156104	126.36596	0.0182822	0.126314
8700.000000	70.000000	12.049168	126.69776	0.021308	0.147424
8800.000000	70.000000	11.940487	127.05775	0.0215688	0.153229
8900.000000	70.000000	11.856283	127.18099	0.0177998	0.127514
9000.000000	70.000000	11.766444	127.53786	0.0199326	0.144684
9100.000000	70.000000	11.668992	127.8526	0.0187567	0.137925
9200.000000	70.000000	11.577773	128.13693	0.0190933	0.142997
9300.000000	70.000000	11.487485	128.47432	0.0166013	0.125915
9400.000000	70.000000	11.398677	128.81595	0.0180794	0.13552
9500.000000	70.000000	11.312821	129.08731	0.0173315	0.131457
9600.000000	70.000000	11.235128	129.319	0.0152123	0.116501
9700.000000	70.000000	11.155216	129.65535	0.0162104	0.125768
9800.000000	70.000000	11.077073	129.89622	0.0149887	0.117831
9900.000000	70.000000	11.002089	130.26431	0.0171444	0.136577
10000.000000	70.000000	10.942048	130.44136	0.0172337	0.138466
3000.000000	75.000000	38.492371	69.053101	0.315282	0.822839
3100.000000	75.000000	37.236614	69.708679	0.187986	0.491034
3200.000000	75.000000	36.557087	70.723412	0.22578	0.593362
3300.000000	75.000000	35.841343	71.55069	0.157428	0.416681
3400.000000	75.000000	35.220833	73.051102	0.136658	0.361149
3500.000000	75.000000	34.764206	74.833389	0.131975	0.347578
3600.000000	75.000000	34.560871	77.911789	0.141734	0.367235
3700.000000	75.000000	33.294357	82.933182	0.113668	0.303738
3800.000000	75.000000	30.693012	85.973373	0.10045	0.275278
3900.000000	75.000000	28.574123	86.344734	0.0883712	0.250915
4000.000000	75.000000	26.994831	86.173874	0.0854896	0.250566
4100.000000	75.000000	25.684616	85.84127	0.0818368	0.257037
4200.000000	75.000000	24.614626	85.563065	0.0770145	0.247562
4300.000000	75.000000	23.671003	85.282837	0.0744834	0.244469
4400.000000	75.000000	22.839071	84.956375	0.0632619	0.211279
4500.000000	75.000000	22.071089	84.675339	0.0650199	0.222163
4600.000000	75.000000	21.370617	84.418419	0.0605821	0.21875
4700.000000	75.000000	20.721254	84.115662	0.0519632	0.191339
4800.000000	75.000000	20.126963	83.847359	0.0571928	0.213878
4900.000000	75.000000	19.582752	83.582169	0.0548911	0.208971
5000.000000	75.000000	19.07526	83.337959	0.0512239	0.197917
5100.000000	75.000000	18.585785	83.119843	0.0470727	0.191992
5200.000000	75.000000	18.11659	82.859909	0.0425008	0.175835
5300.000000	75.000000	17.691299	82.618797	0.0401965	0.168434
5400.000000	75.000000	17.288401	82.370277	0.0425881	0.181643
5500.000000	75.000000	16.905516	82.16008	0.0392223	0.169415
5600.000000	75.000000	16.547108	81.926453	0.0354064	0.155109
5700.000000	75.000000	16.190651	81.683647	0.0329255	0.151299
5800.000000	75.000000	15.854612	81.428307	0.0310546	0.144614
5900.000000	75.000000	15.5523	81.260368	0.0322847	0.151969
6000.000000	75.000000	15.246185	81.01561	0.0308043	0.146817
6100.000000	75.000000	14.966329	80.812126	0.0332405	0.161127
6200.000000	75.000000	14.683317	80.579323	0.0315257	0.159145
6300.000000	75.000000	14.415299	80.353874	0.0322864	0.164715
6400.000000	75.000000	14.162385	80.134407	0.0269355	0.138948
6500.000000	75.000000	13.919227	79.956734	0.0271152	0.141964
6600.000000	75.000000	13.691499	79.737823	0.0270584	0.143145
6700.000000	75.000000	13.459573	79.546783	0.0276204	0.147896
6800.000000	75.000000	13.238924	79.302307	0.023088	0.128318
6900.000000	75.000000	13.023133	79.117653	0.0249831	0.140109
7000.000000	75.000000	12.824288	78.926491	0.0210393	0.119655
7100.000000	75.000000	12.630849	78.766731	0.0231189	0.132876
7200.000000	75.000000	12.445381	78.551682	0.0240214	0.13958
7300.000000	75.000000	12.246224	78.3433	0.017591	0.1035
7400.000000	75.000000	12.084159	78.139755	0.0186766	0.113443
7500.000000	75.000000	11.904346	77.952446	0.0179115	0.109703
7600.000000	75.000000	11.745273	77.773582	0.0183738	0.114086
7700.000000	75.000000	11.581254	77.570961	0.0186449	0.116924
7800.000000	75.000000	11.423946	77.394501	0.0190089	0.120306
7900.000000	75.000000	11.272544	77.168831	0.016973	0.1085
8000.000000	75.000000	11.127044	77.059334	0.018221	0.117514
8100.000000	75.000000	10.945046	76.825783	0.0174535	0.115726
8200.000000	75.000000	10.80763	76.513626	0.0201085	0.135862
8300.000000	75.000000	10.715649	76.44001	0.0180701	0.122368
8400.000000	75.000000	10.57174	76.233467	0.013512	0.092171
8500.000000	75.000000	10.449697	76.119133	0.0211441	0.145411
8600.000000	75.000000	10.31767	75.878242	0.0181323	0.126098
8700.000000	75.000000	10.196452	75.623482	0.0194985	0.139857
8800.000000	75.000000	10.071177	75.417404	0.0164382	0.119956
8900.000000	75.000000	9.9742365	75.3424	0.0178714	0.130939
9000.000000	75.000000	9.8651028	75.109177	0.0153229	0.113304
9100.000000	75.000000	9.7500362	74.948555	0.0172413	0.128569
9200.000000	75.000000	9.6482525	74.720169	0.0147924	0.111276
9300.000000	75.000000	9.5387049	74.453735	0.0133788	0.101607
9400.000000	75.000000	9.4302139	74.323387	0.0171729	0.133577
9500.000000	75.000000	9.331316	74.151993	0.0177827	0.139268
9600.000000	75.000000	9.2403994	73.940102	0.0152682	0.120355
9700.000000	75.000000	9.1453629	73.697769	0.0175541	0.139494
9800.000000	75.000000	9.050293	73.538872	0.0156508	0.125335
9900.000000	75.000000	8.9577618	73.360435	0.0161595	0.130368
10000.000000	75.000000	8.8850489	73.229538	0.0149702	0.121279
dpolE	3000.000000	65.000000	0.890608	2.23741
dpolE	3100.000000	65.000000	0.601269	2.09694
dpolE	3200.000000	65.000000	0.306812	2.1605
dpolE	3300.000000	65.000000	0.606162	1.66111
dpolE	3400.000000	65.000000	0.348214	1.64153
dpolE	3500.000000	65.000000	0.289227	1.62221
dpolE	3600.000000	65.000000	1.08997	1.56466
dpolE	3700.000000	65.000000	0.814812	1.35403
dpolE	3800.000000	65.000000	0.181829	1.10844
dpolE	3900.000000	65.000000	0.135422	0.957476
dpolE	4000.000000	65.000000	0.11944	0.917345
dpolE	4100.000000	65.000000	0.164572	0.912962
dpolE	4200.000000	65.000000	0.232387	0.822223
dpolE	4300.000000	65.000000	0.115766	0.724991
dpolE	4400.000000	65.000000	0.128749	0.685632
dpolE	4500.000000	65.000000	0.145297	0.634178
dpolE	4600.000000	65.000000	0.0490618	0.654076
dpolE	4700.000000	65.000000	0.0473759	0.601738
dpolE	4800.000000	65.000000	0.0461693	0.536239
dpolE	4900.000000	65.000000	0.0948172	0.509064
dpolE	5000.000000	65.000000	0.0555172	0.469356
dpolE	5100.000000	65.000000	0.0108011	0.492483
dpolE	5200.000000	65.000000	-0.0119357	0.403179
dpolE	5300.000000	65.000000	-0.026028	0.416724
dpolE	5400.000000	65.000000	0.0326045	0.435385
dpolE	5500.000000	65.000000	0.0184017	0.370503
dpolE	5600.000000	65.000000	0.0320286	0.332581
dpolE	5700.000000	65.000000	0.00125869	0.355061
dpolE	5800.000000	65.000000	-0.0301122	0.32356
dpolE	5900.000000	65.000000	0.00301031	0.295643
dpolE	6000.000000	65.000000	-0.0059056	0.311386
dpolE	6100.000000	65.000000	-0.018182	0.254255
dpolE	6200.000000	65.000000	-0.0287655	0.282277
dpolE	6300.000000	65.000000	-0.0743327	0.253381
dpolE	6400.000000	65.000000	0.00840869	0.231037
dpolE	6500.000000	65.000000	0.0120229	0.23588
dpolE	6600.000000	65.000000	-0.00421047	0.215219
dpolE	6700.000000	65.000000	-0.038983	0.20459
dpolE	6800.000000	65.000000	0.0250897	0.207878
dpolE	6900.000000	65.000000	-0.060133	0.155481
dpolE	7000.000000	65.000000	0.0411564	0.197321
dpolE	7100.000000	65.000000	-0.0360075	0.178704
dpolE	7200.000000	65.000000	-0.0824303	0.198953
dpolE	7300.000000	65.000000	-0.0884511	0.137557
dpolE	7400.000000	65.000000	-0.0870451	0.142058
dpolE	7500.000000	65.000000	-0.0768016	0.150923
dpolE	7600.000000	65.000000	0.00983292	0.138959
dpolE	7700.000000	65.000000	-0.0317418	0.136832
dpolE	7800.000000	65.000000	-0.0540369	0.141828
dpolE	7900.000000	65.000000	-0.0208337	0.127602
dpolE	8000.000000	65.000000	0.0124268	0.117026
dpolE	8100.000000	65.000000	0.0251962	0.153396
dpolE	8200.000000	65.000000	-0.00555565	0.143311
dpolE	8300.000000	65.000000	-0.0154726	0.134977
dpolE	8400.000000	65.000000	-0.0174338	0.143125
dpolE	8500.000000	65.000000	-0.00523309	0.158572
dpolE	8600.000000	65.000000	0.0259508	0.101892
dpolE	8700.000000	65.000000	-0.0111746	0.134289
dpolE	8800.000000	65.000000	-0.00768946	0.107076
dpolE	8900.000000	65.000000	0.0100604	0.111102
dpolE	9000.000000	65.000000	-0.00405017	0.0912358
dpolE	9100.000000	65.000000	-0.0114973	0.0940716
dpolE	9200.000000	65.000000	-0.00128115	0.0762223
dpolE	9300.000000	65.000000	0.005144	0.0821516
dpolE	9400.000000	65.000000	-0.00982075	0.105636
dpolE	9500.000000	65.000000	0.00258476	0.0965966
dpolE	9600.000000	65.000000	0.0215156	0.0759531
dpolE	9700.000000	65.000000	0.00610054	0.0928223
dpolE	9800.000000	65.000000	-0.00490372	0.0909294
dpolE	9900.000000	65.000000	-0.0263212	0.105234
dpolE	10000.000000	65.000000	-0.000590645	0.100152
dpolE	3000.000000	70.000000	-0.949182	4.15143
dpolE	3100.000000	70.000000	0.267656	2.34908
dpolE	3200.000000	70.000000	-1.16283	1.56262
dpolE	3300.000000	70.000000	0.616331	2.22324
dpolE	3400.000000	70.000000	0.492984	1.51209
dpolE	3500.000000	70.000000	0.645895	1.5096
dpolE	3600.000000	70.000000	1.6317	1.69627
dpolE	3700.000000	70.000000	0.589224	1.15876
dpolE	3800.000000	70.000000	0.268306	1.16082
dpolE	3900.000000	70.000000	0.270768	1.05074
dpolE	4000.000000	70.000000	0.207287	0.982543
dpolE	4100.000000	70.000000	0.185815	0.938185
dpolE	4200.000000	70.000000	0.247125	0.80154
dpolE	4300.000000	70.000000	0.214819	0.844281
dpolE	4400.000000	70.000000	0.172158	0.63917
dpolE	4500.000000	70.000000	0.132522	0.692731
dpolE	4600.000000	70.000000	0.138409	0.605037
dpolE	4700.000000	70.000000	0.145023	0.582117
dpolE	4800.000000	70.000000	0.141508	0.590891
dpolE	4900.000000	70.000000	0.135696	0.520852
dpolE	5000.000000	70.000000	0.0887434	0.492832
dpolE	5100.000000	70.000000	0.0419626	0.454542
dpolE	5200.000000	70.000000	0.0674164	0.431747
dpolE	5300.000000	70.000000	0.075001	0.375948
dpolE	5400.000000	70.000000	0.0712326	0.388895
dpolE	5500.000000	70.000000	0.0616058	0.323628
dpolE	5600.000000	70.000000	0.016777	0.322034
dpolE	5700.000000	70.000000	0.055537	0.334936
dpolE	5800.000000	70.000000	0.0632004	0.291749
dpolE	5900.000000	70.000000	0.0159375	0.280126
dpolE	6000.000000	70.000000	0.0449653	0.268497
dpolE	6100.000000	70.000000	-0.04674	0.241605
dpolE	6200.000000	70.000000	0.00720344	0.252535
dpolE	6300.000000	70.000000	0.0220869	0.206998
dpolE	6400.000000	70.000000	0.0355653	0.216136
dpolE	6500.000000	70.000000	0.0129011	0.194077
dpolE	6600.000000	70.000000	-0.00146961	0.197143
dpolE	6700.000000	70.000000	-0.0158246	0.185106
dpolE	6800.000000	70.000000	-0.0105545	0.18305
dpolE	6900.000000	70.000000	-0.0598404	0.213727
dpolE	7000.000000	70.000000	-0.0114558	0.142274
dpolE	7100.000000	70.000000	-0.0379198	0.152714
dpolE	7200.000000	70.000000	-0.0263308	0.175188
dpolE	7300.000000	70.000000	0.0057309	0.133891
dpolE	7400.000000	70.000000	-0.0179352	0.146955
dpolE	7500.000000	70.000000	-0.00472039	0.104998
dpolE	7600.000000	70.000000	-0.0141987	0.120043
dpolE	7700.000000	70.000000	-0.0290292	0.0952501
dpolE	7800.000000	70.000000	-0.0205064	0.112492
dpolE	7900.000000	70.000000	-0.0199617	0.100144
dpolE	8000.000000	70.000000	-0.0329547	0.133548
dpolE	8100.000000	70.000000	0.0710811	0.123268
dpolE	8200.000000	70.000000	0.0390226	0.107346
dpolE	8300.000000	70.000000	-0.0139967	0.107201
dpolE	8400.000000	70.000000	-0.0387755	0.106275
dpolE	8500.000000	70.000000	0.00781997	0.0978587
dpolE	8600.000000	70.000000	0.0138726	0.0887336
dpolE	8700.000000	70.000000	-0.000630545	0.0971393
dpolE	8800.000000	70.000000	0.00309729	0.0967523
dpolE	8900.000000	70.000000	-0.0361012	0.0798944
dpolE	9000.000000	70.000000	-0.0316223	0.0891429
dpolE	9100.000000	70.000000	-0.0234139	0.0835813
dpolE	9200.000000	70.000000	-0.0365056	0.0850729
dpolE	9300.000000	70.000000	-0.0211549	0.0738094
dpolE	9400.000000	70.000000	-0.0200713	0.0765449
dpolE	9500.000000	70.000000	-0.0254999	0.0731642
dpolE	9600.000000	70.000000	-0.0246375	0.0641649
dpolE	9700.000000	70.000000	-0.0196563	0.0681137
dpolE	9800.000000	70.000000	-0.0251228	0.0627375
dpolE	9900.000000	70.000000	-0.000225509	0.0714814
dpolE	10000.000000	70.000000	-0.0170553	0.0719064
dpolE	3000.000000	75.000000	0.855688	3.83966
dpolE	3100.000000	75.000000	0.691141	2.33313
dpolE	3200.000000	75.000000	1.30741	2.85724
dpolE	3300.000000	75.000000	0.3608	1.83036
dpolE	3400.000000	75.000000	0.210324	1.62051
dpolE	3500.000000	75.000000	0.532348	1.59217
dpolE	3600.000000	75.000000	0.290788	1.75969
dpolE	3700.000000	75.000000	0.593162	1.2793
dpolE	3800.000000	75.000000	0.395807	1.10653
dpolE	3900.000000	75.000000	0.323769	0.953868
dpolE	4000.000000	75.000000	0.394531	0.908651
dpolE	4100.000000	75.000000	0.222917	0.776235
dpolE	4200.000000	75.000000	0.31036	0.722556
dpolE	4300.000000	75.000000	0.247279	0.692837
dpolE	4400.000000	75.000000	0.225474	0.582873
dpolE	4500.000000	75.000000	0.186902	0.596101
dpolE	4600.000000	75.000000	0.115649	0.500725
dpolE	4700.000000	75.000000	0.0954002	0.427251
dpolE	4800.000000	75.000000	0.105324	0.466791
dpolE	4900.000000	75.000000	0.0585645	0.446487
dpolE	5000.000000	75.000000	0.0350547	0.414385
dpolE	5100.000000	75.000000	0.0787129	0.346222
dpolE	5200.000000	75.000000	0.0845664	0.310483
dpolE	5300.000000	75.000000	0.082177	0.291925
dpolE	5400.000000	75.000000	0.0678615	0.308722
dpolE	5500.000000	75.000000	-0.00113296	0.283262
dpolE	5600.000000	75.000000	0.0607117	0.25426
dpolE	5700.000000	75.000000	0.00649611	0.216646
dpolE	5800.000000	75.000000	0.0420891	0.203186
dpolE	5900.000000	75.000000	0.0237611	0.210486
dpolE	6000.000000	75.000000	0.04709	0.199719
dpolE	6100.000000	75.000000	0.0542321	0.215476
dpolE	6200.000000	75.000000	-0.0227977	0.187964
dpolE	6300.000000	75.000000	-0.0440218	0.191717
dpolE	6400.000000	75.000000	-0.0188842	0.159175
dpolE	6500.000000	75.000000	-0.0248294	0.160152
dpolE	6600.000000	75.000000	-0.0560401	0.159458
dpolE	6700.000000	75.000000	-0.0400499	0.162068
dpolE	6800.000000	75.000000	-0.0419614	0.124991
dpolE	6900.000000	75.000000	-0.07294	0.134742
dpolE	7000.000000	75.000000	-0.093221	0.113619
dpolE	7100.000000	75.000000	-0.0820831	0.124449
dpolE	7200.000000	75.000000	-0.0577728	0.128844
dpolE	7300.000000	75.000000	-0.0242834	0.0938402
dpolE	7400.000000	75.000000	-0.0398535	0.0925088
dpolE	7500.000000	75.000000	-0.0684595	0.0884061
dpolE	7600.000000	75.000000	-0.0710198	0.0908845
dpolE	7700.000000	75.000000	-0.0697556	0.091956
dpolE	7800.000000	75.000000	-0.0458344	0.0935211
dpolE	7900.000000	75.000000	-0.0664121	0.0832572
dpolE	8000.000000	75.000000	-0.0588435	0.0891675
dpolE	8100.000000	75.000000	-0.000158291	0.0798369
dpolE	8200.000000	75.000000	0.00175542	0.0907317
dpolE	8300.000000	75.000000	-0.0661865	0.0817993
dpolE	8400.000000	75.000000	-0.0233459	0.0610115
dpolE	8500.000000	75.000000	-0.0486513	0.0963378
dpolE	8600.000000	75.000000	-0.0610274	0.0823522
dpolE	8700.000000	75.000000	-0.0821326	0.0824511
dpolE	8800.000000	75.000000	-0.0429352	0.0687351
dpolE	8900.000000	75.000000	-0.0861499	0.0748307
dpolE	9000.000000	75.000000	-0.0714777	0.0639385
dpolE	9100.000000	75.000000	-0.0727954	0.0717195
dpolE	9200.000000	75.000000	-0.072681	0.0613515
dpolE	9300.000000	75.000000	-0.0459228	0.0552633
dpolE	9400.000000	75.000000	-0.0606697	0.0664139
dpolE	9500.000000	75.000000	-0.0652651	0.0685741
dpolE	9600.000000	75.000000	-0.0523113	0.0587372
dpolE	9700.000000	75.000000	-0.046147	0.0672725
dpolE	9800.000000	75.000000	-0.0567803	0.0597561
dpolE	9900.000000	75.000000	-0.0541621	0.0614875
dpolE	10000.000000	75.000000	-0.0685371	0.0569666