VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Jul 17 13:35:04 2009]
Original[170709 cal wafer.dat]
Angstroms
3000.000000	65.000000	38.59383	104.81626	0.183227	0.464415
3100.000000	65.000000	37.418072	105.64664	0.164605	0.420696
3200.000000	65.000000	36.591377	106.66417	0.166914	0.429875
3300.000000	65.000000	35.984665	108.0694	0.172825	0.456731
3400.000000	65.000000	35.511566	109.44796	0.134255	0.357852
3500.000000	65.000000	35.297768	111.34016	0.125593	0.339208
3600.000000	65.000000	35.367188	114.3586	0.134418	0.369936
3700.000000	65.000000	34.672665	119.44384	0.113735	0.323619
3800.000000	65.000000	32.878632	122.81858	0.110524	0.337285
3900.000000	65.000000	31.19171	124.40734	0.0953422	0.306628
4000.000000	65.000000	29.907795	125.41103	0.0957049	0.321594
4100.000000	65.000000	28.847013	126.26962	0.101085	0.341033
4200.000000	65.000000	27.965014	127.02903	0.092677	0.322924
4300.000000	65.000000	27.199738	127.68358	0.0837028	0.300266
4400.000000	65.000000	26.523003	128.35521	0.0824964	0.306069
4500.000000	65.000000	25.911539	129.04514	0.0736012	0.281488
4600.000000	65.000000	25.349405	129.72575	0.0801553	0.302904
4700.000000	65.000000	24.842712	130.37077	0.0724129	0.280864
4800.000000	65.000000	24.371912	130.97888	0.070568	0.281447
4900.000000	65.000000	23.943602	131.60652	0.0651867	0.266821
5000.000000	65.000000	23.548643	132.15115	0.0584301	0.24525
5100.000000	65.000000	23.16975	132.8101	0.0648899	0.267354
5200.000000	65.000000	22.824146	133.40115	0.0635725	0.268032
5300.000000	65.000000	22.499687	133.98546	0.0596074	0.257191
5400.000000	65.000000	22.195663	134.52199	0.0545093	0.241036
5500.000000	65.000000	21.915497	135.06789	0.0512898	0.232126
5600.000000	65.000000	21.642164	135.57452	0.0479764	0.222143
5700.000000	65.000000	21.384411	136.15874	0.0511069	0.229791
5800.000000	65.000000	21.145685	136.65231	0.051161	0.235263
5900.000000	65.000000	20.915258	137.16711	0.0473725	0.222456
6000.000000	65.000000	20.696428	137.64226	0.0420214	0.201417
6100.000000	65.000000	20.500225	138.10167	0.0393347	0.192263
6200.000000	65.000000	20.300798	138.61638	0.0380081	0.179945
6300.000000	65.000000	20.117367	139.09258	0.0432163	0.208763
6400.000000	65.000000	19.945015	139.58975	0.0431052	0.212151
6500.000000	65.000000	19.777111	140.03212	0.0358227	0.179541
6600.000000	65.000000	19.621937	140.44514	0.0332719	0.169738
6700.000000	65.000000	19.473448	140.88652	0.0346446	0.180032
6800.000000	65.000000	19.326706	141.31975	0.0345442	0.17309
6900.000000	65.000000	19.187756	141.75119	0.0316817	0.161336
7000.000000	65.000000	19.055986	142.16647	0.0302745	0.157026
7100.000000	65.000000	18.927801	142.54929	0.0288777	0.152291
7200.000000	65.000000	18.804796	142.94479	0.0240419	0.128956
7300.000000	65.000000	18.689814	143.36507	0.0257165	0.140136
7400.000000	65.000000	18.575918	143.73476	0.0276777	0.145124
7500.000000	65.000000	18.468634	144.12506	0.0241011	0.128259
7600.000000	65.000000	18.36573	144.4834	0.0226379	0.122178
7700.000000	65.000000	18.266155	144.86299	0.0220241	0.120649
7800.000000	65.000000	18.17201	145.24551	0.0217663	0.120831
7900.000000	65.000000	18.082121	145.58112	0.0216697	0.122364
8000.000000	65.000000	17.991898	145.89861	0.026168	0.149882
8100.000000	65.000000	17.912312	146.37819	0.0257784	0.141627
8200.000000	65.000000	17.828175	146.70041	0.0265505	0.148269
8300.000000	65.000000	17.747911	147.05222	0.0235763	0.133674
8400.000000	65.000000	17.660633	147.38103	0.0215207	0.123539
8500.000000	65.000000	17.583094	147.73706	0.0297649	0.171041
8600.000000	65.000000	17.524031	147.99123	0.0207727	0.121279
8700.000000	65.000000	17.452831	148.27036	0.0206534	0.116397
8800.000000	65.000000	17.383858	148.64946	0.0218922	0.125537
8900.000000	65.000000	17.331388	148.82161	0.019204	0.111325
9000.000000	65.000000	17.265802	149.10747	0.0171174	0.10046
9100.000000	65.000000	17.201033	149.42395	0.0212451	0.126257
9200.000000	65.000000	17.140144	149.68716	0.0188407	0.113291
9300.000000	65.000000	17.080267	150.01735	0.0173339	0.10549
9400.000000	65.000000	17.018885	150.31447	0.0178712	0.104336
9500.000000	65.000000	16.972038	150.55177	0.0166645	0.0983214
9600.000000	65.000000	16.92244	150.80161	0.015605	0.0930501
9700.000000	65.000000	16.871578	151.08098	0.0180112	0.108598
9800.000000	65.000000	16.813202	151.36687	0.0180109	0.110098
9900.000000	65.000000	16.772182	151.60623	0.016879	0.1043
10000.000000	65.000000	16.730366	151.77815	0.0152593	0.0952757
3000.000000	70.000000	38.05439	87.955704	0.237506	0.588135
3100.000000	70.000000	37.300434	88.653633	0.214912	0.522782
3200.000000	70.000000	36.330364	89.582306	0.150607	0.369997
3300.000000	70.000000	35.60532	90.763725	0.136791	0.34905
3400.000000	70.000000	35.076221	92.297256	0.132199	0.336955
3500.000000	70.000000	34.699181	94.208626	0.130845	0.332326
3600.000000	70.000000	34.629734	97.339371	0.118246	0.300213
3700.000000	70.000000	33.698013	102.64788	0.103965	0.279619
3800.000000	70.000000	31.436121	106.2382	0.101034	0.284073
3900.000000	70.000000	29.500572	107.40831	0.0978511	0.287606
4000.000000	70.000000	28.000692	108.03434	0.0873122	0.266198
4100.000000	70.000000	26.772335	108.53629	0.0912363	0.291622
4200.000000	70.000000	25.742752	108.96813	0.0913473	0.299721
4300.000000	70.000000	24.85602	109.38034	0.0835466	0.281216
4400.000000	70.000000	24.055891	109.74979	0.0771134	0.265466
4500.000000	70.000000	23.323738	110.11034	0.0749859	0.265319
4600.000000	70.000000	22.648315	110.56165	0.0712411	0.260095
4700.000000	70.000000	22.030386	110.94593	0.072045	0.269311
4800.000000	70.000000	21.464191	111.31721	0.0654309	0.249455
4900.000000	70.000000	20.941492	111.7086	0.061449	0.239784
5000.000000	70.000000	20.452839	112.08941	0.058806	0.234349
5100.000000	70.000000	19.989325	112.50218	0.0586448	0.239847
5200.000000	70.000000	19.546886	112.92253	0.0549837	0.229153
5300.000000	70.000000	19.145466	113.31458	0.0523819	0.222286
5400.000000	70.000000	18.75629	113.66371	0.0529654	0.229823
5500.000000	70.000000	18.400896	114.09119	0.0472456	0.209105
5600.000000	70.000000	18.052052	114.4542	0.0441353	0.199161
5700.000000	70.000000	17.722483	114.84671	0.0475481	0.218295
5800.000000	70.000000	17.405903	115.22073	0.04249	0.198533
5900.000000	70.000000	17.115105	115.5957	0.0411002	0.195377
6000.000000	70.000000	16.835855	115.98276	0.0383963	0.185687
6100.000000	70.000000	16.566931	116.36562	0.03853	0.190326
6200.000000	70.000000	16.308865	116.73428	0.0326159	0.162879
6300.000000	70.000000	16.051344	117.12234	0.0348636	0.176957
6400.000000	70.000000	15.820391	117.48488	0.0311612	0.16065
6500.000000	70.000000	15.59526	117.84181	0.0357619	0.187821
6600.000000	70.000000	15.378958	118.19847	0.0296515	0.158414
6700.000000	70.000000	15.172906	118.58093	0.0284495	0.154557
6800.000000	70.000000	14.962476	118.93131	0.0284893	0.15545
6900.000000	70.000000	14.776373	119.34226	0.0286569	0.158772
7000.000000	70.000000	14.591568	119.70746	0.0296738	0.167319
7100.000000	70.000000	14.416915	120.04185	0.0269729	0.154426
7200.000000	70.000000	14.238911	120.39495	0.026817	0.155975
7300.000000	70.000000	14.071085	120.77385	0.0218036	0.128892
7400.000000	70.000000	13.908963	121.10714	0.0247544	0.146127
7500.000000	70.000000	13.758819	121.44421	0.0147535	0.0882415
7600.000000	70.000000	13.608225	121.80501	0.0228048	0.138643
7700.000000	70.000000	13.456373	122.10883	0.0177827	0.109629
7800.000000	70.000000	13.321056	122.50703	0.0214816	0.133955
7900.000000	70.000000	13.190188	122.7936	0.0184288	0.116832
8000.000000	70.000000	13.047751	123.17896	0.0172346	0.110915
8100.000000	70.000000	12.898565	123.64297	0.0230452	0.139377
8200.000000	70.000000	12.755855	124.11124	0.0250287	0.163979
8300.000000	70.000000	12.678777	124.20348	0.0230087	0.151965
8400.000000	70.000000	12.559628	124.59058	0.0268355	0.178129
8500.000000	70.000000	12.452019	124.92403	0.0266076	0.176555
8600.000000	70.000000	12.326067	125.21927	0.0217674	0.14743
8700.000000	70.000000	12.228407	125.44205	0.0203165	0.137472
8800.000000	70.000000	12.113501	125.92832	0.0193411	0.134546
8900.000000	70.000000	12.032963	126.12432	0.0174521	0.122534
9000.000000	70.000000	11.934955	126.37207	0.0159314	0.113251
9100.000000	70.000000	11.841686	126.70992	0.013621	0.0980044
9200.000000	70.000000	11.743728	126.99297	0.0160238	0.117448
9300.000000	70.000000	11.64901	127.35324	0.0165788	0.12303
9400.000000	70.000000	11.558251	127.66142	0.0169664	0.124596
9500.000000	70.000000	11.474538	127.94635	0.0168512	0.125219
9600.000000	70.000000	11.392602	128.22409	0.0159457	0.119715
9700.000000	70.000000	11.311904	128.54996	0.0147242	0.111981
9800.000000	70.000000	11.231153	128.86427	0.0160433	0.123647
9900.000000	70.000000	11.153594	129.15271	0.0155497	0.12129
10000.000000	70.000000	11.089598	129.31142	0.0133048	0.104611
3000.000000	75.000000	38.838036	68.442055	0.420891	1.09535
3100.000000	75.000000	37.77655	69.017258	0.198722	0.518903
3200.000000	75.000000	36.845707	69.80024	0.156841	0.4114
3300.000000	75.000000	36.199036	70.72448	0.157128	0.415699
3400.000000	75.000000	35.529411	72.08194	0.149466	0.396294
3500.000000	75.000000	35.098885	73.762108	0.167907	0.442712
3600.000000	75.000000	34.881813	76.765091	0.12464	0.32366
3700.000000	75.000000	33.616978	81.704323	0.104927	0.279321
3800.000000	75.000000	31.094215	84.55526	0.0919473	0.25109
3900.000000	75.000000	29.037924	84.943451	0.0877691	0.2474
4000.000000	75.000000	27.47934	84.726524	0.0816109	0.236828
4100.000000	75.000000	26.199207	84.478264	0.079892	0.248049
4200.000000	75.000000	25.128763	84.208595	0.0683893	0.217011
4300.000000	75.000000	24.207788	83.922379	0.0712465	0.230601
4400.000000	75.000000	23.373346	83.652336	0.0653006	0.214985
4500.000000	75.000000	22.614412	83.415573	0.0660036	0.221936
4600.000000	75.000000	21.905315	83.171043	0.0555669	0.1973
4700.000000	75.000000	21.26837	82.919113	0.0527842	0.190902
4800.000000	75.000000	20.670168	82.688408	0.0537918	0.197705
4900.000000	75.000000	20.119022	82.474495	0.0491202	0.183604
5000.000000	75.000000	19.602261	82.257416	0.0445596	0.169015
5100.000000	75.000000	19.10619	82.034424	0.0405016	0.161741
5200.000000	75.000000	18.643562	81.835701	0.0378464	0.153195
5300.000000	75.000000	18.212492	81.622375	0.0349456	0.143269
5400.000000	75.000000	17.796623	81.406616	0.0359209	0.149842
5500.000000	75.000000	17.417713	81.185165	0.0330993	0.139834
5600.000000	75.000000	17.036896	81.000244	0.0291278	0.124797
5700.000000	75.000000	16.68844	80.796059	0.0332943	0.149419
5800.000000	75.000000	16.347364	80.597244	0.0277069	0.125854
5900.000000	75.000000	16.032211	80.433083	0.0288306	0.132471
6000.000000	75.000000	15.72661	80.226677	0.0255337	0.119002
6100.000000	75.000000	15.431907	80.068192	0.0241993	0.114187
6200.000000	75.000000	15.146017	79.870956	0.0215236	0.1058
6300.000000	75.000000	14.874742	79.689819	0.0260594	0.129493
6400.000000	75.000000	14.618031	79.499199	0.0243039	0.122578
6500.000000	75.000000	14.366498	79.305145	0.023371	0.119118
6600.000000	75.000000	14.133286	79.10479	0.0208244	0.10736
6700.000000	75.000000	13.897146	78.926468	0.0166573	0.0867814
6800.000000	75.000000	13.666899	78.775871	0.021524	0.116286
6900.000000	75.000000	13.454371	78.56749	0.0201939	0.110731
7000.000000	75.000000	13.243559	78.410477	0.0170449	0.0943933
7100.000000	75.000000	13.04803	78.246246	0.0186625	0.10432
7200.000000	75.000000	12.848892	78.075768	0.0155133	0.0877086
7300.000000	75.000000	12.656706	77.864067	0.0167616	0.095731
7400.000000	75.000000	12.479704	77.702942	0.0189831	0.112406
7500.000000	75.000000	12.304377	77.536224	0.0152799	0.0913777
7600.000000	75.000000	12.132442	77.33667	0.0187339	0.113003
7700.000000	75.000000	11.96738	77.162247	0.0145635	0.0886957
7800.000000	75.000000	11.800897	77.019356	0.0141829	0.0871157
7900.000000	75.000000	11.642787	76.815369	0.0130541	0.0809752
8000.000000	75.000000	11.493078	76.664589	0.0120955	0.0760432
8100.000000	75.000000	11.326191	76.45723	0.0175471	0.112961
8200.000000	75.000000	11.16056	76.219452	0.0147944	0.0972931
8300.000000	75.000000	11.060984	76.143822	0.014916	0.0983857
8400.000000	75.000000	10.912731	75.968437	0.0144762	0.096127
8500.000000	75.000000	10.77387	75.77948	0.0186246	0.124112
8600.000000	75.000000	10.660096	75.531662	0.0202373	0.136953
8700.000000	75.000000	10.530028	75.475731	0.0187646	0.130887
8800.000000	75.000000	10.397212	75.243889	0.0144875	0.102672
8900.000000	75.000000	10.297494	75.108772	0.0144196	0.10277
9000.000000	75.000000	10.184095	74.950447	0.0153325	0.110128
9100.000000	75.000000	10.068949	74.765297	0.0135673	0.098328
9200.000000	75.000000	9.9610043	74.582405	0.0128321	0.0938387
9300.000000	75.000000	9.8451319	74.366646	0.0133742	0.0986784
9400.000000	75.000000	9.7346544	74.191742	0.0158566	0.119899
9500.000000	75.000000	9.6325102	73.996613	0.0155369	0.118262
9600.000000	75.000000	9.5410604	73.8489	0.0139647	0.107008
9700.000000	75.000000	9.4388571	73.659615	0.0134913	0.104248
9800.000000	75.000000	9.3398046	73.47641	0.0136645	0.106491
9900.000000	75.000000	9.2423477	73.278404	0.0123189	0.0967789
10000.000000	75.000000	9.1675587	73.165115	0.0128433	0.101288
dpolE	3000.000000	65.000000	0.826502	2.26212
dpolE	3100.000000	65.000000	1.01513	2.06115
dpolE	3200.000000	65.000000	0.452122	2.13284
dpolE	3300.000000	65.000000	0.512588	2.01129
dpolE	3400.000000	65.000000	0.519395	1.58891
dpolE	3500.000000	65.000000	0.659812	1.50719
dpolE	3600.000000	65.000000	0.448836	1.63778
dpolE	3700.000000	65.000000	0.598494	1.25315
dpolE	3800.000000	65.000000	0.262624	1.17013
dpolE	3900.000000	65.000000	0.291443	0.986032
dpolE	4000.000000	65.000000	0.109481	0.975801
dpolE	4100.000000	65.000000	0.2644	0.943777
dpolE	4200.000000	65.000000	0.21948	0.856878
dpolE	4300.000000	65.000000	0.134322	0.766939
dpolE	4400.000000	65.000000	0.144718	0.751015
dpolE	4500.000000	65.000000	0.143077	0.664778
dpolE	4600.000000	65.000000	0.0954908	0.674315
dpolE	4700.000000	65.000000	0.1007	0.604562
dpolE	4800.000000	65.000000	0.131998	0.585763
dpolE	4900.000000	65.000000	0.0936994	0.537896
dpolE	5000.000000	65.000000	0.0662896	0.479636
dpolE	5100.000000	65.000000	0.0680304	0.501077
dpolE	5200.000000	65.000000	0.0742636	0.487869
dpolE	5300.000000	65.000000	0.090569	0.454643
dpolE	5400.000000	65.000000	0.0648481	0.414133
dpolE	5500.000000	65.000000	0.0732082	0.38778
dpolE	5600.000000	65.000000	0.0506478	0.361099
dpolE	5700.000000	65.000000	0.0414228	0.364553
dpolE	5800.000000	65.000000	0.0557258	0.363495
dpolE	5900.000000	65.000000	0.0655338	0.334853
dpolE	6000.000000	65.000000	0.0648943	0.295668
dpolE	6100.000000	65.000000	0.0280737	0.275787
dpolE	6200.000000	65.000000	0.0387677	0.254728
dpolE	6300.000000	65.000000	0.0275843	0.288604
dpolE	6400.000000	65.000000	0.0436191	0.286483
dpolE	6500.000000	65.000000	0.029611	0.237095
dpolE	6600.000000	65.000000	0.0199789	0.219422
dpolE	6700.000000	65.000000	0.0445245	0.227501
dpolE	6800.000000	65.000000	0.0154289	0.218658
dpolE	6900.000000	65.000000	0.00535571	0.199614
dpolE	7000.000000	65.000000	0.00499674	0.190239
dpolE	7100.000000	65.000000	0.0215347	0.180728
dpolE	7200.000000	65.000000	0.0549735	0.149816
dpolE	7300.000000	65.000000	0.0116675	0.159743
dpolE	7400.000000	65.000000	0.00406972	0.166867
dpolE	7500.000000	65.000000	0.0188837	0.144678
dpolE	7600.000000	65.000000	0.00015972	0.135436
dpolE	7700.000000	65.000000	0.029132	0.131218
dpolE	7800.000000	65.000000	0.0240638	0.129392
dpolE	7900.000000	65.000000	0.0185087	0.12845
dpolE	8000.000000	65.000000	0.0236131	0.15471
dpolE	8100.000000	65.000000	0.013131	0.148897
dpolE	8200.000000	65.000000	0.0176559	0.152258
dpolE	8300.000000	65.000000	0.033913	0.134423
dpolE	8400.000000	65.000000	0.0418253	0.122438
dpolE	8500.000000	65.000000	0.039391	0.171518
dpolE	8600.000000	65.000000	0.05579	0.118933
dpolE	8700.000000	65.000000	0.0251182	0.115071
dpolE	8800.000000	65.000000	0.0326293	0.120736
dpolE	8900.000000	65.000000	0.0383211	0.105689
dpolE	9000.000000	65.000000	0.0396685	0.093845
dpolE	9100.000000	65.000000	0.0550635	0.116014
dpolE	9200.000000	65.000000	0.0277742	0.102561
dpolE	9300.000000	65.000000	0.0300046	0.0940429
dpolE	9400.000000	65.000000	0.0294022	0.0955277
dpolE	9500.000000	65.000000	0.0312202	0.0888037
dpolE	9600.000000	65.000000	0.0401561	0.082908
dpolE	9700.000000	65.000000	0.0420563	0.0953423
dpolE	9800.000000	65.000000	0.0176867	0.0950599
dpolE	9900.000000	65.000000	0.0352007	0.0888301
dpolE	10000.000000	65.000000	0.0482394	0.0801325
dpolE	3000.000000	70.000000	1.70279	2.95521
dpolE	3100.000000	70.000000	-0.612439	2.75798
dpolE	3200.000000	70.000000	1.18303	1.95232
dpolE	3300.000000	70.000000	0.27561	1.6157
dpolE	3400.000000	70.000000	0.496784	1.59094
dpolE	3500.000000	70.000000	0.490847	1.60469
dpolE	3600.000000	70.000000	0.42576	1.47936
dpolE	3700.000000	70.000000	0.458123	1.1696
dpolE	3800.000000	70.000000	0.197705	1.11029
dpolE	3900.000000	70.000000	0.420318	1.05215
dpolE	4000.000000	70.000000	0.297544	0.926039
dpolE	4100.000000	70.000000	0.320708	0.869233
dpolE	4200.000000	70.000000	0.273441	0.862288
dpolE	4300.000000	70.000000	0.268049	0.782506
dpolE	4400.000000	70.000000	0.212597	0.716337
dpolE	4500.000000	70.000000	0.169535	0.693528
dpolE	4600.000000	70.000000	0.18375	0.598124
dpolE	4700.000000	70.000000	0.167138	0.601856
dpolE	4800.000000	70.000000	0.128795	0.54336
dpolE	4900.000000	70.000000	0.11091	0.50836
dpolE	5000.000000	70.000000	0.105684	0.483894
dpolE	5100.000000	70.000000	0.0985929	0.442677
dpolE	5200.000000	70.000000	0.0903202	0.412542
dpolE	5300.000000	70.000000	0.0914929	0.390918
dpolE	5400.000000	70.000000	0.0763556	0.394309
dpolE	5500.000000	70.000000	0.0952927	0.350105
dpolE	5600.000000	70.000000	0.0851157	0.32557
dpolE	5700.000000	70.000000	0.0502785	0.324191
dpolE	5800.000000	70.000000	0.0524304	0.288329
dpolE	5900.000000	70.000000	0.0634207	0.277697
dpolE	6000.000000	70.000000	0.0615635	0.258336
dpolE	6100.000000	70.000000	0.027504	0.259014
dpolE	6200.000000	70.000000	0.0393055	0.203522
dpolE	6300.000000	70.000000	0.0329546	0.216514
dpolE	6400.000000	70.000000	0.0439464	0.192755
dpolE	6500.000000	70.000000	0.014255	0.220998
dpolE	6600.000000	70.000000	0.0395622	0.18256
dpolE	6700.000000	70.000000	0.0248613	0.17461
dpolE	6800.000000	70.000000	-0.00447615	0.163255
dpolE	6900.000000	70.000000	0.0310334	0.163469
dpolE	7000.000000	70.000000	0.0193176	0.169186
dpolE	7100.000000	70.000000	0.026506	0.153331
dpolE	7200.000000	70.000000	0.0169586	0.151927
dpolE	7300.000000	70.000000	0.0337611	0.123072
dpolE	7400.000000	70.000000	-0.00196607	0.131315
dpolE	7500.000000	70.000000	0.0115	0.0780116
dpolE	7600.000000	70.000000	-0.00315458	0.120611
dpolE	7700.000000	70.000000	-0.0101998	0.0937968
dpolE	7800.000000	70.000000	-0.00442489	0.113292
dpolE	7900.000000	70.000000	0.0191694	0.0967493
dpolE	8000.000000	70.000000	0.0416202	0.0901722
dpolE	8100.000000	70.000000	-0.00239892	0.112941
dpolE	8200.000000	70.000000	0.0693801	0.12256
dpolE	8300.000000	70.000000	-0.00920042	0.112964
dpolE	8400.000000	70.000000	-0.0137171	0.132379
dpolE	8500.000000	70.000000	0.00828678	0.132549
dpolE	8600.000000	70.000000	0.0669751	0.10742
dpolE	8700.000000	70.000000	-0.0058812	0.0945132
dpolE	8800.000000	70.000000	0.00881958	0.0884584
dpolE	8900.000000	70.000000	-0.00162058	0.0798094
dpolE	9000.000000	70.000000	-0.00305506	0.0726263
dpolE	9100.000000	70.000000	-0.00679922	0.0619275
dpolE	9200.000000	70.000000	-0.0165118	0.0728236
dpolE	9300.000000	70.000000	-0.0152953	0.0752064
dpolE	9400.000000	70.000000	-0.0176024	0.0732289
dpolE	9500.000000	70.000000	-0.00919154	0.0725182
dpolE	9600.000000	70.000000	-0.00158585	0.06852
dpolE	9700.000000	70.000000	0.0139808	0.0630356
dpolE	9800.000000	70.000000	-0.000159432	0.0684123
dpolE	9900.000000	70.000000	0.0108108	0.0661236
dpolE	10000.000000	70.000000	-0.0242606	0.0566428
dpolE	3000.000000	75.000000	0.789816	5.14328
dpolE	3100.000000	75.000000	0.528562	2.47576
dpolE	3200.000000	75.000000	0.48593	1.99316
dpolE	3300.000000	75.000000	0.510591	1.82982
dpolE	3400.000000	75.000000	0.714773	1.77095
dpolE	3500.000000	75.000000	0.711263	2.02984
dpolE	3600.000000	75.000000	0.486928	1.54962
dpolE	3700.000000	75.000000	0.409248	1.1872
dpolE	3800.000000	75.000000	0.632926	1.01846
dpolE	3900.000000	75.000000	0.395287	0.956139
dpolE	4000.000000	75.000000	0.276802	0.877813
dpolE	4100.000000	75.000000	0.292569	0.767489
dpolE	4200.000000	75.000000	0.309923	0.650812
dpolE	4300.000000	75.000000	0.271148	0.673134
dpolE	4400.000000	75.000000	0.260307	0.61161
dpolE	4500.000000	75.000000	0.159002	0.616192
dpolE	4600.000000	75.000000	0.170665	0.467679
dpolE	4700.000000	75.000000	0.150721	0.442486
dpolE	4800.000000	75.000000	0.249501	0.4475
dpolE	4900.000000	75.000000	0.148108	0.407655
dpolE	5000.000000	75.000000	0.117464	0.367947
dpolE	5100.000000	75.000000	0.0801695	0.304582
dpolE	5200.000000	75.000000	0.0972168	0.282975
dpolE	5300.000000	75.000000	0.10964	0.259827
dpolE	5400.000000	75.000000	0.0722268	0.266656
dpolE	5500.000000	75.000000	0.0365118	0.244872
dpolE	5600.000000	75.000000	0.0607605	0.214305
dpolE	5700.000000	75.000000	0.0541972	0.224571
dpolE	5800.000000	75.000000	0.0350277	0.186091
dpolE	5900.000000	75.000000	0.0384696	0.192856
dpolE	6000.000000	75.000000	-0.0138215	0.17068
dpolE	6100.000000	75.000000	-0.0187004	0.161188
dpolE	6200.000000	75.000000	0.0106867	0.131643
dpolE	6300.000000	75.000000	0.0363437	0.158616
dpolE	6400.000000	75.000000	0.0364772	0.147846
dpolE	6500.000000	75.000000	-0.00966218	0.141803
dpolE	6600.000000	75.000000	0.0216687	0.125888
dpolE	6700.000000	75.000000	-0.0150307	0.100383
dpolE	6800.000000	75.000000	0.000518199	0.119635
dpolE	6900.000000	75.000000	-0.00237482	0.112277
dpolE	7000.000000	75.000000	-0.0208956	0.0945145
dpolE	7100.000000	75.000000	-0.0405233	0.103252
dpolE	7200.000000	75.000000	-0.00616365	0.0854381
dpolE	7300.000000	75.000000	-0.0190286	0.0920096
dpolE	7400.000000	75.000000	-0.0362139	0.0970514
dpolE	7500.000000	75.000000	-0.016951	0.0778627
dpolE	7600.000000	75.000000	-0.0433767	0.0952642
dpolE	7700.000000	75.000000	-0.0263037	0.0738186
dpolE	7800.000000	75.000000	-0.0231853	0.0717349
dpolE	7900.000000	75.000000	-0.0348382	0.065769
dpolE	8000.000000	75.000000	-0.0294563	0.0610636
dpolE	8100.000000	75.000000	0.0140791	0.0828947
dpolE	8200.000000	75.000000	0.038737	0.0687601
dpolE	8300.000000	75.000000	-0.0380954	0.0695364
dpolE	8400.000000	75.000000	-0.0130261	0.0673782
dpolE	8500.000000	75.000000	-0.0433014	0.0868714
dpolE	8600.000000	75.000000	-0.0125382	0.0945659
dpolE	8700.000000	75.000000	-0.0393688	0.0816704
dpolE	8800.000000	75.000000	-0.0476614	0.062456
dpolE	8900.000000	75.000000	-0.0626994	0.0621736
dpolE	9000.000000	75.000000	-0.079934	0.065981
dpolE	9100.000000	75.000000	-0.0682644	0.0581972
dpolE	9200.000000	75.000000	-0.065251	0.0548747
dpolE	9300.000000	75.000000	-0.0549496	0.0570029
dpolE	9400.000000	75.000000	-0.057195	0.063249
dpolE	9500.000000	75.000000	-0.0728675	0.0618259
dpolE	9600.000000	75.000000	-0.0476719	0.0554386
dpolE	9700.000000	75.000000	-0.0390049	0.053338
dpolE	9800.000000	75.000000	-0.0404725	0.0537981
dpolE	9900.000000	75.000000	-0.0329047	0.0483149
dpolE	10000.000000	75.000000	-0.0560879	0.0504004