VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Mar 20 12:52:21 2009]
Original[200309 calibration.dat]
nm
300.000000	65.000000	37.832623	107.44125	0.346894	0.749617
310.000000	65.000000	37.012939	106.24937	0.354392	0.767596
320.000000	65.000000	36.408531	108.2618	0.354361	0.780213
330.000000	65.000000	35.498158	110.48534	0.394257	0.889799
340.000000	65.000000	35.229389	109.45363	0.430926	0.969056
350.000000	65.000000	34.707474	112.65421	0.453593	1.04987
360.000000	65.000000	35.468773	114.87025	0.464156	1.08248
370.000000	65.000000	34.042278	121.90384	0.461368	1.1707
380.000000	65.000000	32.389095	125.00015	0.121924	0.328596
390.000000	65.000000	30.979715	125.99662	0.0896466	0.250817
400.000000	65.000000	29.545334	127.47459	0.0676572	0.198504
410.000000	65.000000	28.499798	128.52176	0.0547028	0.166631
420.000000	65.000000	27.674088	128.87872	0.0510086	0.159234
430.000000	65.000000	26.909964	129.56807	0.0440118	0.141266
440.000000	65.000000	26.170881	130.41005	0.0383355	0.127143
450.000000	65.000000	25.747746	130.97693	0.0317251	0.107306
460.000000	65.000000	24.994385	132.02618	0.0291199	0.102321
470.000000	65.000000	24.535061	132.32008	0.0241621	0.0864269
480.000000	65.000000	24.161587	133.12219	0.0281167	0.103131
490.000000	65.000000	23.697189	133.51541	0.0266411	0.0997737
500.000000	65.000000	23.332775	134.28128	0.0258097	0.0990372
510.000000	65.000000	22.95937	135.02333	0.0256685	0.101089
520.000000	65.000000	22.562248	135.36763	0.0247919	0.0995491
530.000000	65.000000	22.128733	135.5708	0.0242581	0.0992141
540.000000	65.000000	21.968805	136.33252	0.0248497	0.103722
550.000000	65.000000	21.68445	136.84262	0.0245736	0.104611
560.000000	65.000000	21.429188	137.28864	0.0244921	0.106128
570.000000	65.000000	21.162088	137.92865	0.024517	0.108612
580.000000	65.000000	20.955164	138.18001	0.024738	0.110982
590.000000	65.000000	20.70068	138.93044	0.0257988	0.118739
600.000000	65.000000	20.487354	139.56783	0.0274541	0.129082
610.000000	65.000000	20.258278	139.70659	0.0268785	0.127898
620.000000	65.000000	20.089788	140.32703	0.027038	0.131215
630.000000	65.000000	19.861359	140.67993	0.0278596	0.137484
640.000000	65.000000	19.773659	141.33867	0.0306695	0.154188
650.000000	65.000000	19.672394	141.59518	0.031655	0.160726
660.000000	65.000000	19.265381	142.51921	0.0331871	0.175047
670.000000	65.000000	19.288908	142.28564	0.0331476	0.173739
680.000000	65.000000	19.063673	142.49889	0.0332381	0.176774
690.000000	65.000000	18.991964	143.34854	0.0329833	0.179458
700.000000	65.000000	18.807739	144.11867	0.0368158	0.205675
710.000000	65.000000	18.730345	143.84785	0.039752	0.221547
720.000000	65.000000	18.643919	144.24936	0.0404942	0.228773
730.000000	65.000000	18.572039	144.39351	0.0423867	0.241097
740.000000	65.000000	18.431059	145.16653	0.044599	0.260257
750.000000	65.000000	18.191067	146.01108	0.0476105	0.287056
760.000000	65.000000	18.190691	145.94479	0.0528515	0.318114
770.000000	65.000000	18.079489	145.85513	0.0567508	0.342576
780.000000	65.000000	17.865234	145.99344	0.0735645	0.450193
790.000000	65.000000	17.972448	147.94475	0.0683776	0.43874
800.000000	65.000000	17.892422	147.71941	0.0747785	0.478631
810.000000	65.000000	17.722172	147.52493	0.0891944	0.572818
820.000000	65.000000	17.646784	148.12816	0.0526664	0.345214
830.000000	65.000000	17.593708	148.68057	0.0246011	0.16423
840.000000	65.000000	17.650358	148.44598	0.0594956	0.393424
850.000000	65.000000	17.531597	146.78551	0.204885	1.30193
860.000000	65.000000	17.468166	149.18262	0.173473	1.18235
870.000000	65.000000	17.405762	150.17241	0.0995849	0.701269
880.000000	65.000000	17.254637	149.79092	0.0245511	0.172205
890.000000	65.000000	17.200626	149.63416	0.026796	0.187584
900.000000	65.000000	17.13929	149.94412	0.0226583	0.160596
910.000000	65.000000	17.164499	150.1657	0.0239968	0.17101
920.000000	65.000000	17.028393	151.00945	0.0138228	0.101816
930.000000	65.000000	16.90793	151.55621	0.0281683	0.212435
940.000000	65.000000	16.921442	151.46736	0.0190963	0.143506
950.000000	65.000000	16.862715	151.58423	0.0189003	0.143
960.000000	65.000000	16.828993	152.0829	0.0299407	0.230647
970.000000	65.000000	16.810112	151.91223	0.02929	0.224592
980.000000	65.000000	16.698383	152.3221	0.0129529	0.101259
990.000000	65.000000	16.62587	152.60986	0.0191514	0.151814
1000.000000	65.000000	16.621939	152.49522	0.0276873	0.21868
300.000000	70.000000	38.245701	91.371368	2.38627	4.62845
310.000000	70.000000	36.226662	91.916428	1.31648	2.75559
320.000000	70.000000	35.915401	91.439713	0.832895	1.75363
330.000000	70.000000	35.066319	94.271309	0.569944	1.21428
340.000000	70.000000	34.98708	94.832329	0.399226	0.85285
350.000000	70.000000	34.788876	96.536613	0.284541	0.611182
360.000000	70.000000	34.440437	98.27607	0.210242	0.455374
370.000000	70.000000	33.512672	104.42198	0.15789	0.353572
380.000000	70.000000	31.063128	108.69357	0.117715	0.280024
390.000000	70.000000	29.09749	110.13833	0.0873358	0.218306
400.000000	70.000000	27.418058	110.57281	0.0663256	0.172934
410.000000	70.000000	26.236969	110.80885	0.0538191	0.145021
420.000000	70.000000	25.274313	111.47454	0.0506814	0.140945
430.000000	70.000000	24.332159	111.77073	0.0435598	0.124535
440.000000	70.000000	23.512402	112.11612	0.0381661	0.112537
450.000000	70.000000	22.827631	112.5629	0.031283	0.0945267
460.000000	70.000000	22.077993	112.84069	0.0290595	0.0904718
470.000000	70.000000	21.510506	113.23542	0.0238327	0.0758873
480.000000	70.000000	20.884485	113.55436	0.0280586	0.0918551
490.000000	70.000000	20.411526	113.94158	0.0265112	0.0886165
500.000000	70.000000	19.909584	114.24429	0.0263172	0.0901119
510.000000	70.000000	19.410147	114.70806	0.0253856	0.0890374
520.000000	70.000000	19.076059	115.34271	0.0253796	0.0908984
530.000000	70.000000	18.69227	115.56177	0.0247733	0.0903912
540.000000	70.000000	18.299736	115.92731	0.0245325	0.0913492
550.000000	70.000000	17.963753	116.13773	0.0250969	0.0952673
560.000000	70.000000	17.51944	116.6283	0.0248878	0.0968942
570.000000	70.000000	17.223402	117.15387	0.0249812	0.0991003
580.000000	70.000000	17.034824	117.45456	0.0264003	0.106203
590.000000	70.000000	16.637815	117.74017	0.0265199	0.109159
600.000000	70.000000	16.313896	118.11952	0.0282478	0.118643
610.000000	70.000000	16.101849	118.61246	0.0277282	0.118296
620.000000	70.000000	15.872621	118.90603	0.0292091	0.126812
630.000000	70.000000	15.616579	119.00352	0.0301916	0.133089
640.000000	70.000000	15.296479	119.46255	0.0319053	0.143834
650.000000	70.000000	15.126873	119.84875	0.0331064	0.151262
660.000000	70.000000	14.983418	120.3122	0.0353038	0.163382
670.000000	70.000000	14.747875	120.44263	0.0370405	0.17449
680.000000	70.000000	14.51644	120.8138	0.0371207	0.178035
690.000000	70.000000	14.424338	121.45683	0.0369715	0.179536
700.000000	70.000000	14.188544	121.81809	0.0415035	0.205282
710.000000	70.000000	14.030908	122.0467	0.0431078	0.21584
720.000000	70.000000	13.892106	122.56139	0.0439905	0.223432
730.000000	70.000000	13.714857	122.83214	0.048782	0.252016
740.000000	70.000000	13.55266	122.79467	0.0514666	0.268663
750.000000	70.000000	13.464818	123.38715	0.0556007	0.293929
760.000000	70.000000	13.220644	123.57529	0.0609823	0.328424
770.000000	70.000000	13.104208	124.24695	0.0658351	0.360191
780.000000	70.000000	12.92081	123.83149	0.08641	0.476327
790.000000	70.000000	12.922812	124.83305	0.0797872	0.445061
800.000000	70.000000	12.693616	125.04355	0.0870975	0.494772
810.000000	70.000000	12.716724	127.99628	0.323836	1.86734
820.000000	70.000000	12.368945	125.02634	0.101483	0.592073
830.000000	70.000000	12.295691	126.07673	0.0738579	0.43897
840.000000	70.000000	12.506002	125.49854	0.137706	0.799943
850.000000	70.000000	12.152958	127.54151	0.262656	1.60829
860.000000	70.000000	12.332942	128.18347	0.22921	1.3969
870.000000	70.000000	11.959177	127.68213	0.127071	0.790973
880.000000	70.000000	11.850806	127.28991	0.0297371	0.185643
890.000000	70.000000	11.724416	128.06912	0.0328113	0.208996
900.000000	70.000000	11.647614	128.24506	0.0272519	0.175025
910.000000	70.000000	11.59122	128.2486	0.031389	0.20304
920.000000	70.000000	11.476048	128.83995	0.0151229	0.0995597
930.000000	70.000000	11.318684	129.24554	0.0372418	0.249785
940.000000	70.000000	11.271938	129.54042	0.0237988	0.160915
950.000000	70.000000	11.219491	129.70987	0.0235667	0.160428
960.000000	70.000000	11.066045	129.68419	0.040067	0.276133
970.000000	70.000000	10.998028	130.62659	0.0392782	0.276041
980.000000	70.000000	10.951096	130.49699	0.0136107	0.0958426
990.000000	70.000000	10.8336	130.78432	0.0226351	0.16166
1000.000000	70.000000	10.784783	130.92349	0.0350263	0.251716
300.000000	75.000000	38.709957	61.858543	2.60764	5.39463
310.000000	75.000000	37.110138	69.446404	1.1505	2.55002
320.000000	75.000000	36.201027	70.957832	0.764129	1.69531
330.000000	75.000000	36.085796	73.067947	0.507318	1.11343
340.000000	75.000000	34.855686	73.722458	0.36394	0.807679
350.000000	75.000000	34.407501	75.952759	0.264764	0.585346
360.000000	75.000000	34.217049	78.417542	0.195604	0.429287
370.000000	75.000000	32.816723	84.341827	0.146358	0.321968
380.000000	75.000000	30.404612	86.66143	0.110707	0.252933
390.000000	75.000000	28.350475	87.494614	0.0818363	0.195325
400.000000	75.000000	26.708239	87.402939	0.0625294	0.15552
410.000000	75.000000	25.408632	86.728317	0.0506822	0.130768
420.000000	75.000000	24.252468	86.432953	0.0474466	0.126759
430.000000	75.000000	23.367455	86.402466	0.0419194	0.115259
440.000000	75.000000	22.518972	85.913918	0.0351959	0.0993948
450.000000	75.000000	21.783003	85.536049	0.0301639	0.0877413
460.000000	75.000000	21.018061	85.075111	0.0269445	0.0805461
470.000000	75.000000	20.433996	84.874687	0.0230244	0.0706255
480.000000	75.000000	19.8025	84.708588	0.0261415	0.0821925
490.000000	75.000000	19.287519	84.418793	0.025585	0.0824208
500.000000	75.000000	18.807037	84.161964	0.0246439	0.0810506
510.000000	75.000000	18.260469	83.854095	0.0237012	0.0798112
520.000000	75.000000	17.838982	83.422989	0.0240263	0.0829098
530.000000	75.000000	17.393816	83.336601	0.0234648	0.0827034
540.000000	75.000000	17.002623	82.984848	0.023209	0.0833845
550.000000	75.000000	16.626856	82.657082	0.023963	0.0880981
560.000000	75.000000	16.287931	82.379005	0.023844	0.0892686
570.000000	75.000000	15.960867	82.203026	0.0238807	0.0909695
580.000000	75.000000	15.549028	81.890907	0.0249588	0.0975834
590.000000	75.000000	15.28272	81.64534	0.0253694	0.100743
600.000000	75.000000	14.993265	81.43705	0.027097	0.109422
610.000000	75.000000	14.652594	81.205109	0.0264375	0.108882
620.000000	75.000000	14.408806	80.968834	0.0282682	0.118743
630.000000	75.000000	14.125786	80.731819	0.0292541	0.125151
640.000000	75.000000	13.931471	80.653488	0.0311918	0.135094
650.000000	75.000000	13.6083	80.012108	0.0322165	0.142638
660.000000	75.000000	13.430552	80.04805	0.0362868	0.163058
670.000000	75.000000	13.173094	79.766754	0.0358998	0.164309
680.000000	75.000000	12.928904	79.50206	0.0361731	0.168471
690.000000	75.000000	12.800816	79.314117	0.0357706	0.168156
700.000000	75.000000	12.559834	79.120911	0.0403393	0.192887
710.000000	75.000000	12.393524	79.034027	0.0448335	0.21783
720.000000	75.000000	12.160849	79.00235	0.045264	0.223791
730.000000	75.000000	12.038267	78.769394	0.0475708	0.237543
740.000000	75.000000	11.852643	78.301941	0.0502012	0.254592
750.000000	75.000000	11.673183	77.84256	0.0540234	0.278138
760.000000	75.000000	11.55363	77.892494	0.0599815	0.311517
770.000000	75.000000	11.27059	77.33989	0.0694211	0.371089
780.000000	75.000000	11.185266	77.123093	0.0902722	0.48635
790.000000	75.000000	11.115338	76.792496	0.083519	0.453158
800.000000	75.000000	10.803584	77.626678	0.0897857	0.498112
810.000000	75.000000	10.716261	78.268036	0.39789	2.21647
820.000000	75.000000	10.717045	76.998123	0.0984361	0.551
830.000000	75.000000	10.573862	76.374908	0.0723103	0.410558
840.000000	75.000000	10.240362	77.131897	0.141136	0.827085
850.000000	75.000000	10.468226	73.684479	0.283298	1.65206
860.000000	75.000000	10.288066	77.854065	0.240291	1.39818
870.000000	75.000000	9.8781214	75.391594	0.133754	0.815986
880.000000	75.000000	9.9390869	75.610374	0.030523	0.185001
890.000000	75.000000	9.8243256	75.19088	0.0348013	0.213544
900.000000	75.000000	9.6688776	74.923538	0.0285148	0.177671
910.000000	75.000000	9.5634708	74.873489	0.0303213	0.190785
920.000000	75.000000	9.4590597	74.545303	0.0143485	0.0912844
930.000000	75.000000	9.4019194	73.805389	0.0364418	0.233909
940.000000	75.000000	9.2512331	74.132538	0.0229887	0.149337
950.000000	75.000000	9.1042128	73.796303	0.0227741	0.150184
960.000000	75.000000	9.137454	73.640488	0.0396259	0.260739
970.000000	75.000000	8.9386549	73.50486	0.0382928	0.256728
980.000000	75.000000	8.8753357	73.275307	0.0129894	0.0876942
990.000000	75.000000	8.8170862	73.031212	0.0219581	0.149226
1000.000000	75.000000	8.6929321	72.957352	0.0347555	0.238965