VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=200, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 05 13:29:16 2009]
Original[2009.02.05.silane1e.dat]
eV
2.738890	75.000000	35.672489	-1.1383407	0.821035	3.41246
2.688890	75.000000	35.026775	0.31148377	0.658969	2.56408
2.638890	75.000000	35.376114	-1.5933425	0.540897	2.15477
2.588890	75.000000	35.165611	-0.56160337	0.544548	2.10311
2.538890	75.000000	35.270138	0.21857405	0.420306	1.67517
2.488890	75.000000	35.097095	-1.0469356	0.37034	1.50298
2.438890	75.000000	35.248966	-1.6682432	0.28495	1.16366
2.388890	75.000000	35.194214	-2.5198936	0.268136	1.01017
2.338890	75.000000	35.136806	-2.159508	0.276307	1.08167
2.288890	75.000000	35.277702	-2.3101964	0.218269	0.856061
2.238890	75.000000	35.314583	-1.7524471	0.262258	1.06583
2.188890	75.000000	35.621891	-1.9344149	0.193277	0.720599
2.138890	75.000000	35.552277	-1.3708105	0.175355	0.675605
2.088890	75.000000	35.39661	-0.96476477	0.168307	0.66322
2.038890	75.000000	35.365818	-0.87257552	0.221391	0.886271
1.988890	75.000000	35.485332	-1.3370266	0.148107	0.558203
1.938890	75.000000	35.495155	-1.1037617	0.18232	0.700972
1.888890	75.000000	35.567726	-0.55406034	0.21369	0.841351
1.838890	75.000000	35.515457	-0.48610085	0.134707	0.496417
1.788890	75.000000	35.230019	-0.43728429	0.192888	0.736213
1.738890	75.000000	35.344734	-0.043567307	0.173428	0.67759
1.688890	75.000000	35.34938	-0.19009392	0.155674	0.621708
1.638890	75.000000	35.420528	-1.171917	0.191026	0.735909
1.588890	75.000000	35.391678	-0.58896261	0.223256	0.876839
1.538890	75.000000	35.218807	0.19787861	0.260497	0.977809
1.488890	75.000000	35.460243	-1.1242234	0.136731	0.528596
1.438890	75.000000	35.642857	-0.35029796	0.222864	0.879366
1.388890	75.000000	35.707386	-1.0713978	0.0771106	0.293443
1.338890	75.000000	35.797195	-0.83945507	0.0894173	0.358314
1.288890	75.000000	35.962254	-1.1444333	0.0860788	0.328274
1.238890	75.000000	36.189098	-0.86281115	0.0728499	0.283883
1.188890	75.000000	36.156597	0.016956128	0.06667	0.253298
1.138890	75.000000	35.945396	1.6715865	0.129866	0.486559
1.088890	75.000000	35.905956	1.6160699	0.378539	1.4667
1.038890	75.000000	35.185547	1.589398	0.215199	0.838844
0.988890	75.000000	35.44268	0.61263722	0.32354	1.24585
0.938890	75.000000	34.550236	2.5733645	0.316877	1.21819
0.888890	75.000000	35.000248	2.577909	0.39244	1.55127
0.838890	75.000000	34.487152	2.439157	0.124993	0.501162
0.788890	75.000000	34.297306	2.6431062	0.482403	1.93569
0.738890	75.000000	33.605995	1.5531973	0.44779	1.76898
3.188890	80.000000	39.185059	3.1959078	0.98428	3.76958
3.138890	80.000000	39.225513	-1.2920076	0.827958	3.30805
3.088890	80.000000	38.911098	-1.5305626	0.573473	2.26234
3.038890	80.000000	38.680504	-0.78016865	0.441012	1.76467
2.988890	80.000000	38.898682	0.043078553	0.319532	1.16908
2.938890	80.000000	39.056278	-0.32004079	0.35771	1.31085
2.888890	80.000000	39.32383	0.53917164	0.30485	1.13549
2.838890	80.000000	38.96204	-0.70727968	0.246882	0.931949
2.788890	80.000000	39.22007	-0.012802789	0.152697	0.587839
2.738890	80.000000	39.276451	-0.21218725	0.167738	0.653314
2.688890	80.000000	39.160095	-0.23533016	0.154442	0.558199
2.638890	80.000000	39.230656	0.11683507	0.142331	0.519896
2.588890	80.000000	39.190819	0.00070205634	0.141076	0.527884
2.538890	80.000000	39.146381	0.51892298	0.117453	0.443395
2.488890	80.000000	39.106319	0.34164885	0.102406	0.396073
2.438890	80.000000	39.060783	0.077368334	0.0816341	0.322325
2.388890	80.000000	39.025909	-0.012273649	0.0933753	0.341467
2.338890	80.000000	39.020832	0.19133659	0.124489	0.46325
2.288890	80.000000	39.074837	0.57001364	0.101304	0.385879
2.238890	80.000000	39.098534	0.40311986	0.103644	0.401544
2.188890	80.000000	39.159756	0.26807198	0.104005	0.376959
2.138890	80.000000	39.198784	0.22619149	0.114556	0.42175
2.088890	80.000000	39.196907	0.58879566	0.0940575	0.35477
2.038890	80.000000	39.15435	0.84547848	0.0788992	0.304304
1.988890	80.000000	39.264278	0.83665526	0.101735	0.368864
1.938890	80.000000	39.170223	0.9023754	0.0935407	0.346272
1.888890	80.000000	39.188316	0.92527825	0.115625	0.437404
1.838890	80.000000	39.127678	1.3689058	0.0983559	0.352282
1.788890	80.000000	39.026608	1.2394831	0.106494	0.391339
1.738890	80.000000	38.948154	1.1865367	0.121334	0.456814
1.688890	80.000000	38.945251	1.3885312	0.0916903	0.354272
1.638890	80.000000	38.964298	1.1067646	0.0958472	0.352223
1.588890	80.000000	38.933945	1.4176774	0.126636	0.478196
1.538890	80.000000	38.769505	1.0734184	0.120936	0.438296
1.488890	80.000000	39.065746	0.80315834	0.104261	0.389568
1.438890	80.000000	39.188087	0.60589999	0.0672935	0.257674
1.388890	80.000000	39.16243	0.81891763	0.0698011	0.257787
1.338890	80.000000	39.238613	0.63681412	0.0837376	0.319572
1.288890	80.000000	39.352833	1.0223649	0.0753837	0.277529
1.238890	80.000000	39.460854	1.0724593	0.0649364	0.247487
1.188890	80.000000	39.457645	1.2996393	0.0770761	0.284564
1.138890	80.000000	38.854721	3.242408	0.108054	0.399462
1.088890	80.000000	38.657639	3.255964	0.24358	0.930671
1.038890	80.000000	38.643559	3.5588419	0.175741	0.66246
0.988890	80.000000	38.409935	4.6295557	0.180128	0.67114
0.938890	80.000000	37.998592	3.9234402	0.215759	0.800621
0.888890	80.000000	37.859722	4.2355309	0.230818	0.911181
0.838890	80.000000	37.726986	4.2117324	0.11319	0.441602
0.788890	80.000000	37.445679	3.3276794	0.293767	1.17017
0.738890	80.000000	37.250088	3.8615949	0.291723	1.133
3.588890	85.000000	43.54314	3.4087117	1.29983	4.90387
3.538890	85.000000	43.162468	3.1909366	0.796616	2.9697
3.488890	85.000000	43.118504	1.2843	0.834029	3.25864
3.438890	85.000000	43.49736	4.6846809	0.473745	1.81378
3.388890	85.000000	42.875824	4.8168373	0.570526	2.02111
3.338890	85.000000	42.316635	2.6810722	0.510207	1.85607
3.288890	85.000000	42.797283	3.9217114	0.264074	0.945908
3.238890	85.000000	42.815285	2.017961	0.258666	0.954584
3.188890	85.000000	42.524544	2.4507616	0.269669	1.00728
3.138890	85.000000	42.798485	3.1095603	0.176362	0.672789
3.088890	85.000000	42.82967	2.7719312	0.138506	0.533189
3.038890	85.000000	42.927917	2.7035763	0.132536	0.514993
2.988890	85.000000	43.187138	3.5790157	0.132219	0.469245
2.938890	85.000000	43.328213	3.6221538	0.0695774	0.249254
2.888890	85.000000	43.337807	4.3042831	0.119488	0.436041
2.838890	85.000000	43.259216	4.77005	0.103592	0.383575
2.788890	85.000000	43.224941	5.0733256	0.0717504	0.270386
2.738890	85.000000	43.014709	5.3320212	0.0931605	0.357156
2.688890	85.000000	42.965759	5.6228762	0.0764635	0.269838
2.638890	85.000000	42.770985	5.7546191	0.0718985	0.259578
2.588890	85.000000	42.58305	5.7961578	0.0673518	0.246952
2.538890	85.000000	42.442837	5.810482	0.0593258	0.223794
2.488890	85.000000	42.380035	5.6248479	0.0691018	0.262566
2.438890	85.000000	42.308361	5.3602028	0.0600854	0.233011
2.388890	85.000000	42.294815	5.2451339	0.0762287	0.274531
2.338890	85.000000	42.334251	5.1412487	0.0620163	0.227799
2.288890	85.000000	42.359188	5.3473248	0.0951513	0.356548
2.238890	85.000000	42.383369	5.3958492	0.0807902	0.308578
2.188890	85.000000	42.529839	5.2537351	0.0887926	0.316635
2.138890	85.000000	42.615772	5.7850342	0.122187	0.444515
2.088890	85.000000	42.606125	6.031364	0.0746081	0.276668
2.038890	85.000000	42.613052	6.0568357	0.10556	0.400237
1.988890	85.000000	42.408489	6.7569852	0.125822	0.4486
1.938890	85.000000	42.320881	6.7005043	0.100829	0.368336
1.888890	85.000000	42.189098	6.991632	0.0891805	0.332941
1.838890	85.000000	42.090946	7.0092034	0.0958215	0.343197
1.788890	85.000000	41.963375	7.2563462	0.0876691	0.317339
1.738890	85.000000	41.766659	7.0410032	0.0902366	0.336788
1.688890	85.000000	41.647026	6.9131603	0.0865494	0.330542
1.638890	85.000000	41.56802	6.8078218	0.0999857	0.36518
1.588890	85.000000	41.49073	6.8928185	0.104157	0.390665
1.538890	85.000000	41.37355	6.7462239	0.123683	0.444675
1.488890	85.000000	41.686386	5.674664	0.0986274	0.360953
1.438890	85.000000	41.690838	5.7817049	0.0574323	0.218926
1.388890	85.000000	41.714466	5.865664	0.0757518	0.278421
1.338890	85.000000	41.818584	5.9147768	0.0671993	0.25474
1.288890	85.000000	41.905075	6.0188084	0.0822151	0.301411
1.238890	85.000000	41.980724	6.1736751	0.0736397	0.2794
1.188890	85.000000	41.968723	5.9959784	0.0917706	0.337902
1.138890	85.000000	40.493164	17.067055	0.0876043	0.313767
1.088890	85.000000	40.3969	17.562048	0.152885	0.56734
1.038890	85.000000	40.189381	17.483746	0.0685515	0.251975
0.988890	85.000000	39.852547	17.913986	0.134476	0.487537
0.938890	85.000000	39.626919	17.851795	0.127637	0.460066
0.888890	85.000000	39.462597	18.277081	0.182196	0.693665
0.838890	85.000000	39.346584	17.995317	0.0833152	0.317966
0.788890	85.000000	39.282715	18.122173	0.193026	0.739942
0.738890	85.000000	38.988598	18.503786	0.149967	0.557281
dpolE	2.738890	75.000000	7.14461	6.16057
dpolE	2.688890	75.000000	8.50251	5.04175
dpolE	2.638890	75.000000	9.49501	4.0889
dpolE	2.588890	75.000000	1.21039	4.27717
dpolE	2.538890	75.000000	4.45006	3.22493
dpolE	2.488890	75.000000	4.21434	2.81932
dpolE	2.438890	75.000000	1.77872	2.18637
dpolE	2.388890	75.000000	1.17096	2.13237
dpolE	2.338890	75.000000	4.54882	2.13607
dpolE	2.288890	75.000000	1.58839	1.70428
dpolE	2.238890	75.000000	4.22076	1.99937
dpolE	2.188890	75.000000	1.92626	1.5453
dpolE	2.138890	75.000000	4.00152	1.3711
dpolE	2.088890	75.000000	4.03132	1.30082
dpolE	2.038890	75.000000	3.10975	1.70403
dpolE	1.988890	75.000000	3.11277	1.17233
dpolE	1.938890	75.000000	3.02338	1.43002
dpolE	1.888890	75.000000	3.22272	1.65778
dpolE	1.838890	75.000000	1.68379	1.08262
dpolE	1.788890	75.000000	3.09205	1.51452
dpolE	1.738890	75.000000	3.24004	1.34764
dpolE	1.688890	75.000000	2.28078	1.20219
dpolE	1.638890	75.000000	4.49886	1.48907
dpolE	1.588890	75.000000	3.5553	1.7295
dpolE	1.538890	75.000000	2.87009	2.0629
dpolE	1.488890	75.000000	3.45028	1.06792
dpolE	1.438890	75.000000	2.34303	1.73277
dpolE	1.388890	75.000000	3.03205	0.608282
dpolE	1.338890	75.000000	2.30158	0.692837
dpolE	1.288890	75.000000	2.56297	0.68099
dpolE	1.238890	75.000000	2.4662	0.571226
dpolE	1.188890	75.000000	2.94845	0.527681
dpolE	1.138890	75.000000	4.29766	1.02951
dpolE	1.088890	75.000000	3.68042	2.96116
dpolE	1.038890	75.000000	6.12195	1.65673
dpolE	0.988890	75.000000	7.47298	2.4993
dpolE	0.938890	75.000000	6.76261	2.44226
dpolE	0.888890	75.000000	3.71248	3.02382
dpolE	0.838890	75.000000	5.91964	0.94648
dpolE	0.788890	75.000000	4.90366	3.66027
dpolE	0.738890	75.000000	8.63675	3.3593
dpolE	3.188890	80.000000	4.99256	7.85387
dpolE	3.138890	80.000000	6.69987	6.45532
dpolE	3.088890	80.000000	4.87078	4.51414
dpolE	3.038890	80.000000	2.46597	3.47494
dpolE	2.988890	80.000000	4.28832	2.60428
dpolE	2.938890	80.000000	1.61086	2.9369
dpolE	2.888890	80.000000	2.14038	2.48306
dpolE	2.838890	80.000000	1.10126	2.0023
dpolE	2.788890	80.000000	2.08155	1.22587
dpolE	2.738890	80.000000	1.49119	1.34322
dpolE	2.688890	80.000000	2.10546	1.27497
dpolE	2.638890	80.000000	1.37667	1.17162
dpolE	2.588890	80.000000	2.50323	1.14463
dpolE	2.538890	80.000000	1.16391	0.952988
dpolE	2.488890	80.000000	2.17382	0.819833
dpolE	2.438890	80.000000	2.40885	0.647579
dpolE	2.388890	80.000000	2.1373	0.765867
dpolE	2.338890	80.000000	1.89343	1.01351
dpolE	2.288890	80.000000	2.71983	0.814575
dpolE	2.238890	80.000000	2.45461	0.8283
dpolE	2.188890	80.000000	2.67022	0.855805
dpolE	2.138890	80.000000	2.00705	0.937469
dpolE	2.088890	80.000000	2.41142	0.760561
dpolE	2.038890	80.000000	2.67077	0.631441
dpolE	1.988890	80.000000	2.88522	0.836821
dpolE	1.938890	80.000000	2.54112	0.762309
dpolE	1.888890	80.000000	2.12311	0.934556
dpolE	1.838890	80.000000	2.35058	0.814756
dpolE	1.788890	80.000000	2.55487	0.870351
dpolE	1.738890	80.000000	2.45862	0.980694
dpolE	1.688890	80.000000	2.52016	0.732989
dpolE	1.638890	80.000000	2.41888	0.783338
dpolE	1.588890	80.000000	2.45664	1.02224
dpolE	1.538890	80.000000	2.8951	0.992787
dpolE	1.488890	80.000000	2.64147	0.847301
dpolE	1.438890	80.000000	2.84713	0.539671
dpolE	1.388890	80.000000	3.26158	0.56804
dpolE	1.338890	80.000000	3.31623	0.671606
dpolE	1.288890	80.000000	3.32668	0.61465
dpolE	1.238890	80.000000	3.26612	0.521636
dpolE	1.188890	80.000000	3.08619	0.628306
dpolE	1.138890	80.000000	7.06046	0.87013
dpolE	1.088890	80.000000	5.71787	1.93896
dpolE	1.038890	80.000000	6.57784	1.40291
dpolE	0.988890	80.000000	6.91965	1.44493
dpolE	0.938890	80.000000	7.30544	1.7264
dpolE	0.888890	80.000000	9.64705	1.78137
dpolE	0.838890	80.000000	7.88253	0.883136
dpolE	0.788890	80.000000	10.1624	2.24611
dpolE	0.738890	80.000000	13.0574	2.23617
dpolE	3.588890	85.000000	6.18806	10.5441
dpolE	3.538890	85.000000	0.0247487	6.60218
dpolE	3.488890	85.000000	7.19682	6.62535
dpolE	3.438890	85.000000	1.40643	3.86579
dpolE	3.388890	85.000000	3.17374	4.8123
dpolE	3.338890	85.000000	6.42227	4.19238
dpolE	3.288890	85.000000	0.862993	2.2266
dpolE	3.238890	85.000000	3.44764	2.12922
dpolE	3.188890	85.000000	3.2451	2.20904
dpolE	3.138890	85.000000	4.23266	1.42996
dpolE	3.088890	85.000000	3.40509	1.12171
dpolE	3.038890	85.000000	2.12323	1.07414
dpolE	2.988890	85.000000	2.38952	1.11372
dpolE	2.938890	85.000000	1.39145	0.585111
dpolE	2.888890	85.000000	1.90603	0.996693
dpolE	2.838890	85.000000	2.00392	0.859362
dpolE	2.788890	85.000000	2.21029	0.591188
dpolE	2.738890	85.000000	2.25949	0.762921
dpolE	2.688890	85.000000	2.23127	0.648198
dpolE	2.638890	85.000000	2.19718	0.601256
dpolE	2.588890	85.000000	2.74389	0.560105
dpolE	2.538890	85.000000	2.85101	0.484688
dpolE	2.488890	85.000000	2.83642	0.566288
dpolE	2.438890	85.000000	3.24854	0.487458
dpolE	2.388890	85.000000	3.12055	0.637297
dpolE	2.338890	85.000000	3.21502	0.513709
dpolE	2.288890	85.000000	3.30409	0.782316
dpolE	2.238890	85.000000	3.37974	0.65903
dpolE	2.188890	85.000000	3.42135	0.745109
dpolE	2.138890	85.000000	3.60696	1.0173
dpolE	2.088890	85.000000	3.34155	0.617044
dpolE	2.038890	85.000000	3.62366	0.864833
dpolE	1.988890	85.000000	3.53189	1.05903
dpolE	1.938890	85.000000	3.69264	0.839094
dpolE	1.888890	85.000000	3.49403	0.736718
dpolE	1.838890	85.000000	3.86711	0.800561
dpolE	1.788890	85.000000	3.80618	0.732645
dpolE	1.738890	85.000000	4.64631	0.741805
dpolE	1.688890	85.000000	4.01266	0.706573
dpolE	1.638890	85.000000	4.72852	0.827731
dpolE	1.588890	85.000000	4.82454	0.853158
dpolE	1.538890	85.000000	5.21832	1.02948
dpolE	1.488890	85.000000	4.69517	0.807608
dpolE	1.438890	85.000000	4.99122	0.465999
dpolE	1.388890	85.000000	5.17395	0.62285
dpolE	1.338890	85.000000	5.13879	0.545859
dpolE	1.288890	85.000000	5.21118	0.677086
dpolE	1.238890	85.000000	5.36191	0.597976
dpolE	1.188890	85.000000	5.41204	0.754843
dpolE	1.138890	85.000000	7.95864	0.750283
dpolE	1.088890	85.000000	7.82278	1.30678
dpolE	1.038890	85.000000	8.95523	0.582582
dpolE	0.988890	85.000000	8.94183	1.1481
dpolE	0.938890	85.000000	9.19349	1.08688
dpolE	0.888890	85.000000	10.9615	1.52684
dpolE	0.838890	85.000000	11.2257	0.692907
dpolE	0.788890	85.000000	12.0913	1.60424
dpolE	0.738890	85.000000	13.2806	1.24632