silane VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=20, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 12 15:37:50 2009] Original[2009.02.12silane.dat] Angstroms 8800.000000 65.000000 26.756718 -1.112681 0.537077 2.52528 8900.000000 65.000000 26.213226 -3.8508613 0.438774 2.12248 9000.000000 65.000000 26.477406 -5.5402322 0.417828 1.95789 9100.000000 65.000000 26.610302 -3.1174948 0.449629 2.21046 9200.000000 65.000000 26.538774 -6.4888768 0.233092 1.13274 9300.000000 65.000000 26.44021 -4.3496518 0.344091 1.67712 9400.000000 65.000000 26.653999 -5.3381181 0.393483 1.80972 9500.000000 65.000000 26.674904 -4.1015635 0.285081 1.30442 9600.000000 65.000000 26.708275 -1.9741414 0.455933 2.13196 9700.000000 65.000000 26.55245 -4.7727566 0.433248 1.99171 9800.000000 65.000000 26.808874 -5.1446795 0.137083 0.636685 9900.000000 65.000000 26.827602 -5.5563035 0.130941 0.616277 10000.000000 65.000000 26.819765 -6.5986328 0.296964 1.40499 dpolE 8800.000000 65.000000 9.08178 3.39367 dpolE 8900.000000 65.000000 9.11236 2.74627 dpolE 9000.000000 65.000000 5.48109 2.71133 dpolE 9100.000000 65.000000 10.1817 2.78998 dpolE 9200.000000 65.000000 7.96634 1.47675 dpolE 9300.000000 65.000000 6.52202 2.17948 dpolE 9400.000000 65.000000 6.97662 2.56254 dpolE 9500.000000 65.000000 5.84076 1.86405 dpolE 9600.000000 65.000000 7.55256 2.92477 dpolE 9700.000000 65.000000 3.82149 2.85449 dpolE 9800.000000 65.000000 4.98776 0.897403 dpolE 9900.000000 65.000000 5.71436 0.850528 dpolE 10000.000000 65.000000 5.56126 1.93373