VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jul 22 13:22:21 2009]
Original[210709 calibration wafer.dat]
Angstroms
3000.000000	65.000000	38.10902	105.94548	0.166455	0.425859
3100.000000	65.000000	36.928928	106.91006	0.154285	0.397924
3200.000000	65.000000	36.157948	107.97952	0.156839	0.409757
3300.000000	65.000000	35.588066	109.38064	0.154192	0.41237
3400.000000	65.000000	35.133747	110.93452	0.135494	0.365804
3500.000000	65.000000	34.920807	112.84212	0.11803	0.322733
3600.000000	65.000000	35.050739	115.81327	0.114031	0.318163
3700.000000	65.000000	34.411797	121.11343	0.105535	0.303761
3800.000000	65.000000	32.554565	124.7019	0.103185	0.320473
3900.000000	65.000000	30.861553	126.30484	0.0775654	0.25429
4000.000000	65.000000	29.581144	127.33042	0.0718628	0.246991
4100.000000	65.000000	28.524239	128.19188	0.0802765	0.275796
4200.000000	65.000000	27.637865	128.97765	0.0770838	0.274173
4300.000000	65.000000	26.87619	129.62691	0.0606765	0.222702
4400.000000	65.000000	26.20261	130.32698	0.062087	0.235913
4500.000000	65.000000	25.591566	130.96864	0.0619454	0.24281
4600.000000	65.000000	25.04011	131.63026	0.0627435	0.24207
4700.000000	65.000000	24.523611	132.25972	0.0520957	0.206676
4800.000000	65.000000	24.063747	132.88641	0.0530941	0.216651
4900.000000	65.000000	23.638279	133.46413	0.0457261	0.19172
5000.000000	65.000000	23.252474	134.03645	0.0415004	0.178539
5100.000000	65.000000	22.881693	134.6515	0.046446	0.195364
5200.000000	65.000000	22.534716	135.23224	0.0452943	0.195157
5300.000000	65.000000	22.212801	135.79552	0.0347984	0.15352
5400.000000	65.000000	21.922712	136.29926	0.0384438	0.173882
5500.000000	65.000000	21.638973	136.85864	0.033005	0.152887
5600.000000	65.000000	21.382935	137.33212	0.0353879	0.167685
5700.000000	65.000000	21.126318	137.90198	0.0332133	0.152391
5800.000000	65.000000	20.891771	138.39301	0.0341305	0.160235
5900.000000	65.000000	20.67458	138.85684	0.0303558	0.145516
6000.000000	65.000000	20.466129	139.33638	0.0279691	0.136851
6100.000000	65.000000	20.272148	139.84334	0.0253575	0.126651
6200.000000	65.000000	20.078777	140.34145	0.0287715	0.13881
6300.000000	65.000000	19.904202	140.79703	0.0291231	0.143391
6400.000000	65.000000	19.731428	141.22873	0.0259301	0.130057
6500.000000	65.000000	19.573315	141.66187	0.02465	0.125929
6600.000000	65.000000	19.418791	142.07903	0.0244194	0.127047
6700.000000	65.000000	19.273266	142.51492	0.0212148	0.112411
6800.000000	65.000000	19.136351	142.94714	0.0245362	0.125123
6900.000000	65.000000	18.998177	143.34373	0.0208733	0.108211
7000.000000	65.000000	18.865955	143.74057	0.0229169	0.121012
7100.000000	65.000000	18.741722	144.14087	0.0228339	0.122597
7200.000000	65.000000	18.626215	144.52783	0.0208755	0.113908
7300.000000	65.000000	18.510286	144.9212	0.0203088	0.112718
7400.000000	65.000000	18.402174	145.32782	0.0225821	0.120427
7500.000000	65.000000	18.308744	145.65727	0.0238426	0.128914
7600.000000	65.000000	18.202263	146.00998	0.0245006	0.134357
7700.000000	65.000000	18.106274	146.3593	0.0202298	0.112662
7800.000000	65.000000	18.02397	146.72444	0.0180315	0.101636
7900.000000	65.000000	17.924023	147.08005	0.0175392	0.10051
8000.000000	65.000000	17.833286	147.42419	0.0160261	0.0933696
8100.000000	65.000000	17.728064	147.78265	0.0200416	0.111908
8200.000000	65.000000	17.658506	148.11978	0.0222446	0.126259
8300.000000	65.000000	17.581306	148.43056	0.0221727	0.127699
8400.000000	65.000000	17.505795	148.75749	0.0199121	0.116065
8500.000000	65.000000	17.428984	149.0146	0.0185464	0.108142
8600.000000	65.000000	17.357201	149.34851	0.0181747	0.107806
8700.000000	65.000000	17.289742	149.66756	0.0199956	0.114445
8800.000000	65.000000	17.219265	150.004	0.0222987	0.129848
8900.000000	65.000000	17.168198	150.17931	0.0196821	0.115877
9000.000000	65.000000	17.112604	150.42355	0.0199141	0.118637
9100.000000	65.000000	17.051044	150.71788	0.0157691	0.0951232
9200.000000	65.000000	16.99095	150.99268	0.0176675	0.107885
9300.000000	65.000000	16.930433	151.32947	0.016958	0.104821
9400.000000	65.000000	16.876663	151.57841	0.0192663	0.114035
9500.000000	65.000000	16.822857	151.84703	0.0181152	0.10846
9600.000000	65.000000	16.779114	152.0809	0.0186461	0.112776
9700.000000	65.000000	16.725679	152.34428	0.0186684	0.114182
9800.000000	65.000000	16.675549	152.59984	0.0186273	0.115193
9900.000000	65.000000	16.633263	152.85837	0.018375	0.115143
10000.000000	65.000000	16.598396	153.00311	0.0174756	0.110638
3000.000000	70.000000	37.903336	89.462944	0.2065	0.511908
3100.000000	70.000000	36.618877	89.89193	0.147086	0.362413
3200.000000	70.000000	35.807384	90.83062	0.131991	0.323704
3300.000000	70.000000	35.16431	92.223763	0.15463	0.400049
3400.000000	70.000000	34.551571	93.891258	0.120691	0.309526
3500.000000	70.000000	34.251049	95.83625	0.120525	0.30883
3600.000000	70.000000	34.231903	99.118401	0.132738	0.33923
3700.000000	70.000000	33.309055	104.73302	0.107105	0.291898
3800.000000	70.000000	31.006859	108.39449	0.127082	0.362652
3900.000000	70.000000	28.996832	109.62572	0.104314	0.312664
4000.000000	70.000000	27.490015	110.27607	0.0784402	0.245646
4100.000000	70.000000	26.256681	110.74163	0.0960696	0.314157
4200.000000	70.000000	25.222525	111.17423	0.0743331	0.250279
4300.000000	70.000000	24.318069	111.59555	0.0817893	0.282271
4400.000000	70.000000	23.499413	111.92228	0.0645977	0.22952
4500.000000	70.000000	22.786654	112.35606	0.0629661	0.230799
4600.000000	70.000000	22.102978	112.7375	0.0605419	0.228135
4700.000000	70.000000	21.502853	113.11906	0.0608465	0.234677
4800.000000	70.000000	20.937029	113.53138	0.0515156	0.203554
4900.000000	70.000000	20.43634	113.8214	0.0643597	0.260352
5000.000000	70.000000	19.95524	114.18735	0.0449316	0.185878
5100.000000	70.000000	19.472757	114.55539	0.0547066	0.230458
5200.000000	70.000000	19.053894	114.92149	0.0388523	0.167589
5300.000000	70.000000	18.641989	115.34776	0.0400524	0.175797
5400.000000	70.000000	18.263523	115.67416	0.0622504	0.279914
5500.000000	70.000000	17.915253	116.1076	0.037646	0.173411
5600.000000	70.000000	17.574591	116.52498	0.0347747	0.163444
5700.000000	70.000000	17.24794	116.93594	0.0316395	0.15044
5800.000000	70.000000	16.938194	117.29825	0.0299683	0.145537
5900.000000	70.000000	16.652355	117.70201	0.035685	0.176604
6000.000000	70.000000	16.385422	118.04228	0.0315616	0.158954
6100.000000	70.000000	16.119122	118.41952	0.0278471	0.142959
6200.000000	70.000000	15.863753	118.80502	0.0296479	0.153772
6300.000000	70.000000	15.621533	119.16552	0.0259494	0.136857
6400.000000	70.000000	15.389254	119.54364	0.0255336	0.137061
6500.000000	70.000000	15.170002	119.88322	0.024031	0.13114
6600.000000	70.000000	14.961427	120.24483	0.0242325	0.134485
6700.000000	70.000000	14.755564	120.60649	0.0227254	0.128877
6800.000000	70.000000	14.562546	120.97817	0.0244448	0.138759
6900.000000	70.000000	14.373663	121.31525	0.0235466	0.135799
7000.000000	70.000000	14.192423	121.68677	0.021058	0.12329
7100.000000	70.000000	14.026758	122.02526	0.0206108	0.122448
7200.000000	70.000000	13.856075	122.36118	0.0221248	0.133622
7300.000000	70.000000	13.698408	122.76338	0.0144142	0.0887609
7400.000000	70.000000	13.537396	123.09801	0.018418	0.113068
7500.000000	70.000000	13.38919	123.41801	0.0233805	0.145429
7600.000000	70.000000	13.248744	123.72671	0.0202107	0.127372
7700.000000	70.000000	13.112924	124.09981	0.0190239	0.121698
7800.000000	70.000000	12.971421	124.44144	0.0164534	0.106506
7900.000000	70.000000	12.836859	124.80359	0.0161481	0.106343
8000.000000	70.000000	12.705934	125.14919	0.0200336	0.1342
8100.000000	70.000000	12.589014	125.59467	0.0198702	0.124331
8200.000000	70.000000	12.432518	125.90251	0.0229765	0.154954
8300.000000	70.000000	12.350916	126.08104	0.0217659	0.149233
8400.000000	70.000000	12.22436	126.42654	0.0186611	0.128727
8500.000000	70.000000	12.130359	126.84084	0.0219266	0.15118
8600.000000	70.000000	12.022347	127.10125	0.0284621	0.199462
8700.000000	70.000000	11.915901	127.34579	0.0174448	0.122084
8800.000000	70.000000	11.810009	127.75085	0.0220239	0.158806
8900.000000	70.000000	11.735302	127.94405	0.0196563	0.143069
9000.000000	70.000000	11.637378	128.24457	0.0187176	0.138167
9100.000000	70.000000	11.543844	128.52702	0.0164777	0.123055
9200.000000	70.000000	11.45839	128.82668	0.0194096	0.147702
9300.000000	70.000000	11.363843	129.18309	0.0171862	0.132546
9400.000000	70.000000	11.279422	129.50191	0.020416	0.155373
9500.000000	70.000000	11.196786	129.79231	0.0199435	0.153585
9600.000000	70.000000	11.125966	130.06213	0.0166783	0.129688
9700.000000	70.000000	11.046848	130.35381	0.0190768	0.150258
9800.000000	70.000000	10.966178	130.68652	0.018064	0.144414
9900.000000	70.000000	10.893674	130.95984	0.0179399	0.145032
10000.000000	70.000000	10.833306	131.09789	0.0174566	0.142429
3000.000000	75.000000	38.307289	69.697884	0.188132	0.483575
3100.000000	75.000000	37.139511	70.252907	0.134239	0.351668
3200.000000	75.000000	36.307636	71.120392	0.163633	0.426782
3300.000000	75.000000	35.630161	72.271812	0.123943	0.328613
3400.000000	75.000000	35.011589	73.613182	0.135536	0.357841
3500.000000	75.000000	34.57436	75.278542	0.127489	0.335856
3600.000000	75.000000	34.388927	78.546158	0.125207	0.323562
3700.000000	75.000000	33.104465	83.736671	0.107164	0.286429
3800.000000	75.000000	30.461138	86.690178	0.0920529	0.253058
3900.000000	75.000000	28.306696	87.046288	0.085542	0.244235
4000.000000	75.000000	26.729198	86.865791	0.0759451	0.223669
4100.000000	75.000000	25.401745	86.526985	0.0671058	0.212397
4200.000000	75.000000	24.32198	86.198639	0.065189	0.211077
4300.000000	75.000000	23.386757	85.892494	0.0645457	0.213468
4400.000000	75.000000	22.552805	85.574829	0.0545998	0.183752
4500.000000	75.000000	21.784986	85.254944	0.0517212	0.178269
4600.000000	75.000000	21.080887	84.962616	0.0486741	0.177411
4700.000000	75.000000	20.444487	84.665581	0.0468364	0.174222
4800.000000	75.000000	19.847754	84.360176	0.042119	0.159025
4900.000000	75.000000	19.304312	84.124893	0.0422849	0.162618
5000.000000	75.000000	18.793968	83.846153	0.0378675	0.148081
5100.000000	75.000000	18.312517	83.593384	0.0364848	0.150409
5200.000000	75.000000	17.84749	83.310028	0.0365618	0.153007
5300.000000	75.000000	17.423222	83.031403	0.0344989	0.14631
5400.000000	75.000000	17.01865	82.809311	0.0354874	0.153172
5500.000000	75.000000	16.639061	82.557152	0.0328344	0.143689
5600.000000	75.000000	16.281063	82.307037	0.0275235	0.122087
5700.000000	75.000000	15.936924	82.068665	0.0315243	0.146818
5800.000000	75.000000	15.602325	81.828262	0.0302472	0.142667
5900.000000	75.000000	15.296107	81.606056	0.0296363	0.141324
6000.000000	75.000000	14.997261	81.354523	0.0266879	0.128765
6100.000000	75.000000	14.720437	81.148041	0.0282359	0.1385
6200.000000	75.000000	14.439399	80.918625	0.0266537	0.136555
6300.000000	75.000000	14.173969	80.686646	0.0255697	0.132486
6400.000000	75.000000	13.925379	80.438606	0.022673	0.118696
6500.000000	75.000000	13.68236	80.271194	0.0226905	0.120595
6600.000000	75.000000	13.456589	80.044807	0.020774	0.111588
6700.000000	75.000000	13.229371	79.805283	0.0214255	0.116439
6800.000000	75.000000	13.010839	79.586655	0.0219586	0.124006
6900.000000	75.000000	12.79871	79.384438	0.023596	0.134706
7000.000000	75.000000	12.606572	79.197052	0.0205847	0.118982
7100.000000	75.000000	12.416154	78.976921	0.0192687	0.112465
7200.000000	75.000000	12.229851	78.793274	0.0160848	0.094936
7300.000000	75.000000	12.044127	78.56562	0.0205703	0.122851
7400.000000	75.000000	11.869187	78.362366	0.0180761	0.11156
7500.000000	75.000000	11.697825	78.129005	0.0179791	0.112076
7600.000000	75.000000	11.539281	77.953842	0.0204427	0.12904
7700.000000	75.000000	11.382193	77.742966	0.0189848	0.120954
7800.000000	75.000000	11.23	77.527985	0.0203247	0.130638
7900.000000	75.000000	11.077474	77.33181	0.0166321	0.108036
8000.000000	75.000000	10.929536	77.071449	0.0162974	0.106907
8100.000000	75.000000	10.791587	76.87664	0.0278224	0.18708
8200.000000	75.000000	10.621634	76.695213	0.0199873	0.13677
8300.000000	75.000000	10.518118	76.535522	0.0173024	0.119119
8400.000000	75.000000	10.383435	76.367821	0.022715	0.15807
8500.000000	75.000000	10.257289	76.048332	0.0199082	0.139575
8600.000000	75.000000	10.133519	75.950272	0.0158148	0.11179
8700.000000	75.000000	10.022974	75.774506	0.0166762	0.121608
8800.000000	75.000000	9.8922539	75.516357	0.0208019	0.154287
8900.000000	75.000000	9.794796	75.375008	0.0194642	0.145169
9000.000000	75.000000	9.6856012	75.167526	0.0168187	0.126478
9100.000000	75.000000	9.5782938	74.974724	0.0167005	0.126553
9200.000000	75.000000	9.4743137	74.764038	0.0171318	0.131112
9300.000000	75.000000	9.3636675	74.537361	0.0181505	0.140023
9400.000000	75.000000	9.2615757	74.320541	0.0189736	0.150048
9500.000000	75.000000	9.1633673	74.131935	0.0187228	0.149128
9600.000000	75.000000	9.0740891	73.931343	0.0154147	0.123461
9700.000000	75.000000	8.9787388	73.729568	0.0159713	0.128954
9800.000000	75.000000	8.8834658	73.527748	0.0160166	0.130497
9900.000000	75.000000	8.7959042	73.331055	0.0154519	0.126801
10000.000000	75.000000	8.7220497	73.206993	0.0153422	0.126413
dpolE	3000.000000	65.000000	0.989679	2.04051
dpolE	3100.000000	65.000000	0.71498	1.92287
dpolE	3200.000000	65.000000	0.623475	1.98699
dpolE	3300.000000	65.000000	0.843477	1.77831
dpolE	3400.000000	65.000000	0.641239	1.58869
dpolE	3500.000000	65.000000	0.633093	1.40534
dpolE	3600.000000	65.000000	0.391423	1.3775
dpolE	3700.000000	65.000000	0.452489	1.15358
dpolE	3800.000000	65.000000	0.452826	1.07705
dpolE	3900.000000	65.000000	0.259555	0.78958
dpolE	4000.000000	65.000000	0.211749	0.719026
dpolE	4100.000000	65.000000	0.186142	0.737499
dpolE	4200.000000	65.000000	0.206239	0.699762
dpolE	4300.000000	65.000000	0.238994	0.544641
dpolE	4400.000000	65.000000	0.182522	0.553176
dpolE	4500.000000	65.000000	0.149887	0.547158
dpolE	4600.000000	65.000000	0.0756703	0.517668
dpolE	4700.000000	65.000000	0.138177	0.425737
dpolE	4800.000000	65.000000	0.10708	0.431272
dpolE	4900.000000	65.000000	0.140173	0.36874
dpolE	5000.000000	65.000000	0.089283	0.33269
dpolE	5100.000000	65.000000	0.0434862	0.351458
dpolE	5200.000000	65.000000	0.0638291	0.340234
dpolE	5300.000000	65.000000	0.0742414	0.259616
dpolE	5400.000000	65.000000	0.0852136	0.285533
dpolE	5500.000000	65.000000	0.0698683	0.24373
dpolE	5600.000000	65.000000	0.056002	0.260147
dpolE	5700.000000	65.000000	0.0194873	0.232078
dpolE	5800.000000	65.000000	0.0414693	0.237358
dpolE	5900.000000	65.000000	0.0639799	0.210011
dpolE	6000.000000	65.000000	0.0492002	0.192574
dpolE	6100.000000	65.000000	0.0360417	0.173751
dpolE	6200.000000	65.000000	0.0309054	0.189049
dpolE	6300.000000	65.000000	0.0420822	0.19058
dpolE	6400.000000	65.000000	0.0389985	0.168862
dpolE	6500.000000	65.000000	0.044961	0.15979
dpolE	6600.000000	65.000000	0.0452295	0.157605
dpolE	6700.000000	65.000000	0.0433533	0.136324
dpolE	6800.000000	65.000000	0.0408337	0.152384
dpolE	6900.000000	65.000000	0.0404609	0.128976
dpolE	7000.000000	65.000000	0.0304998	0.141165
dpolE	7100.000000	65.000000	0.0310776	0.14004
dpolE	7200.000000	65.000000	0.0114772	0.127542
dpolE	7300.000000	65.000000	0.0480653	0.123509
dpolE	7400.000000	65.000000	0.0574895	0.133605
dpolE	7500.000000	65.000000	0.043984	0.140583
dpolE	7600.000000	65.000000	0.00344484	0.143928
dpolE	7700.000000	65.000000	0.0704774	0.118266
dpolE	7800.000000	65.000000	0.0135547	0.105301
dpolE	7900.000000	65.000000	0.0610848	0.101791
dpolE	8000.000000	65.000000	0.0653195	0.0928445
dpolE	8100.000000	65.000000	0.0501373	0.113668
dpolE	8200.000000	65.000000	0.0808927	0.125197
dpolE	8300.000000	65.000000	0.0545366	0.124121
dpolE	8400.000000	65.000000	0.0774682	0.111254
dpolE	8500.000000	65.000000	0.0824077	0.105049
dpolE	8600.000000	65.000000	0.0904518	0.102106
dpolE	8700.000000	65.000000	0.0994566	0.109461
dpolE	8800.000000	65.000000	0.0784933	0.120803
dpolE	8900.000000	65.000000	0.0793139	0.106368
dpolE	9000.000000	65.000000	0.0808979	0.107255
dpolE	9100.000000	65.000000	0.0999806	0.084584
dpolE	9200.000000	65.000000	0.0925812	0.0944034
dpolE	9300.000000	65.000000	0.0939845	0.0902727
dpolE	9400.000000	65.000000	0.075558	0.10136
dpolE	9500.000000	65.000000	0.0965339	0.0948963
dpolE	9600.000000	65.000000	0.0916325	0.0974134
dpolE	9700.000000	65.000000	0.0879988	0.0971491
dpolE	9800.000000	65.000000	0.0654769	0.0965705
dpolE	9900.000000	65.000000	0.0774302	0.0950419
dpolE	10000.000000	65.000000	0.105469	0.0901944
dpolE	3000.000000	70.000000	1.5117	2.56115
dpolE	3100.000000	70.000000	0.221777	1.8683
dpolE	3200.000000	70.000000	-0.109916	1.713
dpolE	3300.000000	70.000000	1.35561	1.80718
dpolE	3400.000000	70.000000	0.349613	1.44291
dpolE	3500.000000	70.000000	0.434977	1.46915
dpolE	3600.000000	70.000000	-0.277824	1.65858
dpolE	3700.000000	70.000000	0.419115	1.19626
dpolE	3800.000000	70.000000	-0.258856	1.38287
dpolE	3900.000000	70.000000	-0.126835	1.10662
dpolE	4000.000000	70.000000	0.238122	0.816633
dpolE	4100.000000	70.000000	0.167516	0.898659
dpolE	4200.000000	70.000000	0.133034	0.687505
dpolE	4300.000000	70.000000	-0.299472	0.751901
dpolE	4400.000000	70.000000	0.111444	0.585405
dpolE	4500.000000	70.000000	0.190609	0.566938
dpolE	4600.000000	70.000000	0.232368	0.494903
dpolE	4700.000000	70.000000	0.0265722	0.495479
dpolE	4800.000000	70.000000	0.200845	0.415491
dpolE	4900.000000	70.000000	0.163311	0.517233
dpolE	5000.000000	70.000000	0.146299	0.358935
dpolE	5100.000000	70.000000	0.00967465	0.400759
dpolE	5200.000000	70.000000	0.0305384	0.283575
dpolE	5300.000000	70.000000	-0.228002	0.291391
dpolE	5400.000000	70.000000	0.101229	0.448287
dpolE	5500.000000	70.000000	0.11136	0.27027
dpolE	5600.000000	70.000000	0.0118146	0.248705
dpolE	5700.000000	70.000000	0.0515977	0.208677
dpolE	5800.000000	70.000000	0.0489773	0.196945
dpolE	5900.000000	70.000000	0.0524348	0.233381
dpolE	6000.000000	70.000000	0.024107	0.205673
dpolE	6100.000000	70.000000	0.0332676	0.180533
dpolE	6200.000000	70.000000	0.0317305	0.179064
dpolE	6300.000000	70.000000	0.0179318	0.156041
dpolE	6400.000000	70.000000	0.0486411	0.152749
dpolE	6500.000000	70.000000	0.0344338	0.143187
dpolE	6600.000000	70.000000	0.0405629	0.14378
dpolE	6700.000000	70.000000	0.0329202	0.134676
dpolE	6800.000000	70.000000	0.0249801	0.135531
dpolE	6900.000000	70.000000	0.0291983	0.129977
dpolE	7000.000000	70.000000	0.0179617	0.115827
dpolE	7100.000000	70.000000	-0.00247985	0.113036
dpolE	7200.000000	70.000000	0.0198168	0.120783
dpolE	7300.000000	70.000000	-0.00608806	0.0787116
dpolE	7400.000000	70.000000	0.0118073	0.0945771
dpolE	7500.000000	70.000000	-0.018386	0.119775
dpolE	7600.000000	70.000000	-0.0223658	0.103296
dpolE	7700.000000	70.000000	0.014426	0.0968566
dpolE	7800.000000	70.000000	0.026399	0.0836635
dpolE	7900.000000	70.000000	0.0218281	0.0816575
dpolE	8000.000000	70.000000	0.0255982	0.101443
dpolE	8100.000000	70.000000	0.133875	0.0939598
dpolE	8200.000000	70.000000	0.0604533	0.109561
dpolE	8300.000000	70.000000	-0.00105889	0.103266
dpolE	8400.000000	70.000000	0.0420756	0.0888646
dpolE	8500.000000	70.000000	0.052581	0.105544
dpolE	8600.000000	70.000000	0.0111971	0.136273
dpolE	8700.000000	70.000000	-0.0252743	0.0786492
dpolE	8800.000000	70.000000	0.016946	0.0974003
dpolE	8900.000000	70.000000	-0.00170207	0.0869168
dpolE	9000.000000	70.000000	0.0148968	0.0823827
dpolE	9100.000000	70.000000	-0.0102487	0.0723573
dpolE	9200.000000	70.000000	-0.00913702	0.0851979
dpolE	9300.000000	70.000000	0.0141349	0.0752263
dpolE	9400.000000	70.000000	0.0068343	0.085196
dpolE	9500.000000	70.000000	-0.000656007	0.0829806
dpolE	9600.000000	70.000000	0.00478112	0.0693417
dpolE	9700.000000	70.000000	0.0136364	0.0790225
dpolE	9800.000000	70.000000	0.0174431	0.0744166
dpolE	9900.000000	70.000000	0.00748599	0.0737636
dpolE	10000.000000	70.000000	0.00580634	0.0717837
dpolE	3000.000000	75.000000	-0.949815	2.32329
dpolE	3100.000000	75.000000	1.19318	1.66287
dpolE	3200.000000	75.000000	0.301695	2.07682
dpolE	3300.000000	75.000000	0.601612	1.43925
dpolE	3400.000000	75.000000	0.36383	1.60454
dpolE	3500.000000	75.000000	0.705006	1.53853
dpolE	3600.000000	75.000000	0.210711	1.55586
dpolE	3700.000000	75.000000	0.674102	1.20301
dpolE	3800.000000	75.000000	0.423643	1.01047
dpolE	3900.000000	75.000000	0.437727	0.917775
dpolE	4000.000000	75.000000	0.301243	0.80287
dpolE	4100.000000	75.000000	0.305982	0.631409
dpolE	4200.000000	75.000000	0.238119	0.606919
dpolE	4300.000000	75.000000	0.18638	0.595577
dpolE	4400.000000	75.000000	0.133273	0.498847
dpolE	4500.000000	75.000000	0.155603	0.469711
dpolE	4600.000000	75.000000	0.0524765	0.398331
dpolE	4700.000000	75.000000	0.107956	0.381024
dpolE	4800.000000	75.000000	0.0338113	0.340273
dpolE	4900.000000	75.000000	0.0165613	0.340234
dpolE	5000.000000	75.000000	0.102048	0.30242
dpolE	5100.000000	75.000000	0.0029972	0.265387
dpolE	5200.000000	75.000000	0.0524614	0.263931
dpolE	5300.000000	75.000000	0.0696381	0.247414
dpolE	5400.000000	75.000000	0.0294495	0.254036
dpolE	5500.000000	75.000000	0.0212885	0.233886
dpolE	5600.000000	75.000000	0.0304649	0.195035
dpolE	5700.000000	75.000000	0.0230645	0.204588
dpolE	5800.000000	75.000000	0.0163717	0.195294
dpolE	5900.000000	75.000000	-0.022047	0.190622
dpolE	6000.000000	75.000000	-0.0261858	0.170814
dpolE	6100.000000	75.000000	-0.0392958	0.180761
dpolE	6200.000000	75.000000	0.000221039	0.156527
dpolE	6300.000000	75.000000	0.0075414	0.149436
dpolE	6400.000000	75.000000	-0.0027468	0.131967
dpolE	6500.000000	75.000000	-0.00832044	0.131965
dpolE	6600.000000	75.000000	-0.0320828	0.120493
dpolE	6700.000000	75.000000	-0.0367558	0.123799
dpolE	6800.000000	75.000000	-0.00819336	0.116955
dpolE	6900.000000	75.000000	0.0280097	0.124981
dpolE	7000.000000	75.000000	-0.0421782	0.109338
dpolE	7100.000000	75.000000	-0.0673133	0.102112
dpolE	7200.000000	75.000000	-0.0405719	0.084899
dpolE	7300.000000	75.000000	-0.00768042	0.108067
dpolE	7400.000000	75.000000	-0.0376077	0.0880928
dpolE	7500.000000	75.000000	-0.00137398	0.0871852
dpolE	7600.000000	75.000000	-0.0451866	0.0994503
dpolE	7700.000000	75.000000	-0.0514074	0.0921581
dpolE	7800.000000	75.000000	-0.0300956	0.0984656
dpolE	7900.000000	75.000000	-0.0394196	0.0802666
dpolE	8000.000000	75.000000	-0.0330567	0.0783975
dpolE	8100.000000	75.000000	0.0406628	0.125468
dpolE	8200.000000	75.000000	0.00251186	0.0889558
dpolE	8300.000000	75.000000	-0.0581432	0.0769277
dpolE	8400.000000	75.000000	-0.0564271	0.101552
dpolE	8500.000000	75.000000	-0.00366519	0.0889725
dpolE	8600.000000	75.000000	-0.036562	0.0705355
dpolE	8700.000000	75.000000	-0.04779	0.0693158
dpolE	8800.000000	75.000000	-0.031298	0.0854538
dpolE	8900.000000	75.000000	-0.0498459	0.0799389
dpolE	9000.000000	75.000000	-0.057115	0.0688744
dpolE	9100.000000	75.000000	-0.0655402	0.0682245
dpolE	9200.000000	75.000000	-0.0435989	0.0696776
dpolE	9300.000000	75.000000	-0.0460313	0.0735962
dpolE	9400.000000	75.000000	-0.0425261	0.0719815
dpolE	9500.000000	75.000000	-0.0422667	0.0707879
dpolE	9600.000000	75.000000	-0.0445216	0.0581799
dpolE	9700.000000	75.000000	-0.0348055	0.0600273
dpolE	9800.000000	75.000000	-0.0284785	0.0598895
dpolE	9900.000000	75.000000	-0.0227567	0.057589
dpolE	10000.000000	75.000000	-0.0424987	0.0571742