Tue Dec 22 10:28:01 2009
***** About Box:
WVASE32 Version 3.698
Hardware Version 6.256
TCP/IP link: Listening on Port 2000
Path: C:\WVASE32\
Current OS: Win95 v 4.10, Build 67766446
*********************************************
***** Hardware Version Info:
WVASE32: hardware=[6.256-6.256], interface=[1.000-1.020], motor=[1.000-1.000]
DLL: hardware=[6.256-6.256], interface=[1.000-1.000], motor=[1.000-1.000]
*********************************************
***** Enhanced Hardware Window Display:
Hardware Initialized & Calibrated
Angle of Incidence = 90.00,180.00° [0,-45.00,120.00] {-50.00,120.00}{30.00,200.00}
Monochromator = 1500 nm Grating #3 Slit Width = 200 µm
Filter = 3.25, shuttered=1,
Polarizer = 0.00°
Auto Retarder Present: X=-0.002, Y=0.001 (-6, 10)
Mono: DetSwitchVUV = 2800.0, DetSwitch = 10500.0, DetSwitchExIR = 16500.0
Mono: HaveList=3, ActiveList=3, CalList=3, CurMux=1, CurDetGroup=0, CurDetElement=1, CurCard=0
Det:Main, Active=1, HaveList=3, DAS=0
VIS: mux=0, Offset(0.00) PhDC(-102.403)
IR: mux=1, Offset(0.00) PhDC(-105.430)
[Hardware] current=0(0), zone=1
zone#1, 70.000, -20.000, 100.000
DL_Update=1,Calib=0,Acquire=0,Align=0,Mono=0,Meas=0
DL_Fit=0,File=0,Gen=0,Exp=0,Model=0
*********************************************
***** C:\WVASE32\hardware.cnf:
[Hardware]
Type=Spectroscopic
Base=Vert
AutoRetarder=yes
IRDet=yes
CalWvls=5000 11770
;CalConfig=30 40 60 4 50 180
;AlignPolarizer=0
NoOverloadMsg=1
;next line was commented out - Tony
;diagnose=1
;Computer Configuration
Dash16BASE=768
Dash16Clk=1
DMA_Channel=3
DMA_AllocSize=16
IntrNum=5
PIO24=784 136
PIO24#2=800 139
;Monochromator Configuration
Monochromator=dk242
DK242=1800 3700 2900 8400 7800 18000 1 2000 2000
DKComPort=1 9600
FilterWvls=4200 6000 10400
solarblind=0 0
HomeFilter=70
IRDetSwitchWvl=10500
[Motors]
Filter=100 .024 1 2
Polarizer=200 .002 5 1500 80
Sample=400 .005 5 1800
Detector=400 .005 5 1800
comp1=200 .005 4 1200 80
comp2=200 .005 4 1200 80
;comp1=200 .02 1 800 80
;comp2=200 .02 1 800 80
;ComputerSpeed=3120761.000000
;ComputerSpeed=3071999.000000
;ComputerSpeed=3120761.000000
;Computerspeed4=4153690.000000
;Computerspeed4=7513681.000000
;Computerspeed5=37154267.000000
Computerspeed5=37154267.000000
[Retarder]
;Calibration=2070.20069 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0
Calibration=2082.69800 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 6.47379 32.28361 0.00000 0.00000 -0.41653 0.43077 0.61764 0.00000
motports=32 33 -1
motports=34 35 -1
limits1=40 42 1
limits2=43 45 1
range1=-13.378 14.000
range2=-13.656 14.000
OldCalibration=2100.944002 0.0 0.0 0.0 0.0 0.719739 0.014047 -2013.982171 -1072.769975
[Mono]
Calibration11=0.0000 5000.0000 17.7177 5000.0000 17.7177
Calibration12=0.0000 5000.0000 17.7177 5000.0000 17.7177
Calibration21=0.0000 5000.0000 17.7303 5000.0000 17.7303
Calibration22=0.0000 5000.0000 17.7303 5000.0000 17.7303
Calibration31=0.0000 5000.0000 8.7545 5000.0000 8.7545
Calibration32=0.0000 5000.0000 8.7545 5000.0000 8.7545
*********************************************
***** VaseCM32 Log:
01/30/2009 16:29:21:000 Only one copy of WVASE32 can initialize the hardware!
01/30/2009 16:29:21:050 Could Not Load vasecm32.dll. Error#1114=
01/30/2009 16:29:26:100 WVASE32 lost communication with remote hardware, ending data collection.
01/30/2009 16:29:31:650 Error #0 in UTRegister()
01/30/2009 16:29:31:650 HardComInit failure. Hardware NOT intialized.
01/30/2009 16:29:35:610 Error #0 in UTRegister()
01/30/2009 16:29:35:610 HardComInit failure. Hardware NOT intialized.
02/25/2009 14:31:36:200 Only one copy of WVASE32 can initialize the hardware!
02/25/2009 14:31:36:260 Could Not Load vasecm32.dll. Error#1114=
03/23/2009 14:43:51:440 Only one copy of WVASE32 can initialize the hardware!
03/23/2009 14:43:51:440 Could Not Load vasecm32.dll. Error#1114=
*********************************************
***** Current Log:
Fri Jul 17 12:17:40 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Fri Jul 17 12:28:47 2009 Calib: Wvl1=5000.0 Ps=0.3189±0.0028 Attn=1.0114±0.0003 As=20.445±0.008 Psi=19.635±0.019 Del=81.972±0.018 =11.441, MSE=2.04 (1.19) Synch=113.612±0.014 [113.584,113.644] M1=0.0069±0.0022 [0.0043,0.011]
Fri Jul 17 12:28:47 2009 Calib: Wvl2=11770.0 Ps=0.3189±0.0028 IrAttn=0.9696±0.0004 IrAs=18.126±0.010 IrPsi=7.882±0.003 IrDel=70.104±0.022 =10.060 MSE=2.04 (1.19) Synch=110.652±0.043 [110.570,110.714] M1=0.0083±0.0023 [0.0025,0.012]
Fri Jul 17 12:28:47 2009 Calib: MSE=2.036 (1.189) AzOffset=0.005±0.003548 ElOffset=0.002±0.003052 DP=0.204±0.110
Fri Jul 17 13:35:04 2009 VASE File c:\wvase32\dat\170709 cal wafer.dat
Fri Jul 17 14:03:00 2009
Fri Jul 17 14:03:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Fri Jul 17 14:14:05 2009 Warning: Possible loss of data-stream synchronization detected.
first(last),id=0(59), det#0(#0) Was=113.612(113.612). Is=92.173(92.166). Wvl=5000.0(5000.0), Ang=75.00(75.00), DC=12.5062(12.3490), P=-29.68(30.32), X=0.00(0.00), Y=0.00(0.00)
Fri Jul 17 14:14:07 2009 Calib: Wvl1=5000.0 Ps=0.3175±0.0028 Attn=1.0125±0.0003 As=20.429±0.009 Psi=19.522±0.020 Del=82.429±0.018 =11.906, MSE=2.08 (1.21) Synch=92.168±0.012 [92.140,92.204] M1=0.0076±0.0019 [0.0045,0.011]
Fri Jul 17 14:14:07 2009 Calib: Wvl2=11770.0 Ps=0.3175±0.0028 IrAttn=0.9700±0.0004 IrAs=18.122±0.010 IrPsi=7.810±0.003 IrDel=70.139±0.023 =10.290 MSE=2.08 (1.21) Synch=89.143±0.042 [89.069,89.206] M1=0.011±0.0026 [0.0059,0.015]
Fri Jul 17 14:14:07 2009 Calib: MSE=2.082 (1.205) AzOffset=0.003±0.003627 ElOffset=0.009±0.003148 DP=0.152±0.112
Fri Jul 17 15:41:47 2009 VASE File c:\wvase32\dat\170709 au (10709) 2.34 a 20 mins.dat
Fri Jul 17 16:22:58 2009 RT File c:\wvase32\dat\170709 au (10709) 2.34 a 20 mins rt.dat
Mon Jul 20 12:27:27 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Jul 20 12:34:05 2009
Mon Jul 20 12:34:05 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Jul 20 12:45:13 2009 Calib: Wvl1=5000.0 Ps=0.3662±0.0062 Attn=1.0092±0.0007 As=158.758±0.019 Psi=19.792±0.042 Del=81.929±0.040 =9.873, MSE=4.52 (2.54) Synch=41.637±0.025 [41.584,41.693] M1=0.0058±0.0018 [0.0014,0.0086]
Mon Jul 20 12:45:13 2009 Calib: Wvl2=11770.0 Ps=0.3662±0.0062 IrAttn=0.9690±0.0009 IrAs=156.331±0.023 IrPsi=8.051±0.008 IrDel=70.280±0.049 =9.018 MSE=4.52 (2.54) Synch=38.904±0.036 [38.818,38.961] M1=0.0047±0.0018 [0.00073,0.0086]
Mon Jul 20 12:45:13 2009 Calib: MSE=4.521 (2.541) AzOffset=-0.009±0.007814 ElOffset=-0.011±0.006719 DP=0.299±0.246
Mon Jul 20 15:54:03 2009 VASE File c:\wvase32\dat\200709 au 170709 2.67 a 15 mins.dat
Mon Jul 20 16:34:38 2009 RT File c:\wvase32\dat\200709 au 170709 2.67 a 15 mins rt.dat
Wed Jul 22 11:50:53 2009 Init User: alex (v3.698, 6.256 DLL)
Wed Jul 22 12:01:11 2009
Wed Jul 22 12:01:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Wed Jul 22 12:12:18 2009 Calib: Wvl1=5000.0 Ps=0.4080±0.0061 Attn=1.0091±0.0007 As=78.996±0.019 Psi=18.789±0.043 Del=83.769±0.038 =9.586, MSE=4.53 (2.53) Synch=113.705±0.026 [113.647,113.766] M1=0.0062±0.0015 [0.0024,0.0094]
Wed Jul 22 12:12:19 2009 Calib: Wvl2=11770.0 Ps=0.4080±0.0061 IrAttn=0.9692±0.0009 IrAs=76.585±0.023 IrPsi=7.469±0.007 IrDel=69.906±0.051 =9.083 MSE=4.53 (2.53) Synch=110.718±0.208 [110.508,111.239] M1=0.004±0.0015 [0.0012,0.007]
Wed Jul 22 12:12:19 2009 Calib: MSE=4.534 (2.531) AzOffset=-0.003±0.008015 ElOffset=-0.005±0.007132 DP=0.134±0.237
Wed Jul 22 13:22:21 2009 VASE File c:\wvase32\dat\210709 calibration wafer.dat
Mon Jul 27 14:49:41 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Jul 27 14:55:27 2009
Mon Jul 27 14:55:27 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Jul 27 15:06:35 2009 Calib: Wvl1=5000.0 Ps=0.4504±0.0058 Attn=1.0092±0.0006 As=130.056±0.018 Psi=18.649±0.041 Del=84.026±0.036 =10.457, MSE=4.31 (2.45) Synch=-174.277±0.027 [-174.337,-174.217] M1=0.006±0.0021 [0.00077,0.0097]
Mon Jul 27 15:06:35 2009 Calib: Wvl2=11770.0 Ps=0.4504±0.0058 IrAttn=0.9685±0.0008 IrAs=127.641±0.021 IrPsi=7.416±0.007 IrDel=69.861±0.049 =9.493 MSE=4.31 (2.45) Synch=-177.247±0.195 [-177.486,-176.536] M1=0.0046±0.0014 [0.0018,0.0078]
Mon Jul 27 15:06:35 2009 Calib: MSE=4.313 (2.450) AzOffset=-0.007±0.007654 ElOffset=-0.004±0.006842 DP=0.201±0.224
Mon Jul 27 15:18:20 2009
Mon Jul 27 15:18:20 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Jul 27 15:29:27 2009 Calib: Wvl1=5000.0 Ps=0.4533±0.0069 Attn=1.0104±0.0005 As=129.994±0.013 Psi=18.679±0.025 Del=83.983±0.026 =1.102, MSE=2.42 (2.72) Synch=-174.156±0.070 [-174.253,-174.058] M1=0.0018±0.00075 [0.00059,0.0047]
Mon Jul 27 15:29:27 2009 Calib: Wvl2=11770.0 Ps=0.4533±0.0069 IrAttn=0.9679±0.0008 IrAs=127.596±0.016 IrPsi=7.429±0.011 IrDel=69.759±0.055 =1.338 MSE=2.42 (2.72) Synch=-177.078±0.143 [-177.277,-176.667] M1=0.0095±0.0031 [0.0023,0.014]
Mon Jul 27 15:29:28 2009 Calib: MSE=2.422 (2.715) AzOffset=0.003±0.004669 ElOffset=-0.012±0.004169 DP=0.139±0.144
Mon Jul 27 17:26:54 2009 VASE File c:\wvase32\dat\270709 au on si of 240709 align in.dat
Mon Aug 10 11:28:02 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Aug 10 11:45:23 2009
Mon Aug 10 11:45:23 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Mon Aug 10 11:49:52 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Aug 10 11:49:55 2009 Coarse Calib: Wvl1=5000.0 Ps=0.5071±0.0056 Attn=1.0102±0.0002 As=42.627±0.006 Psi=18.761±0.018 Del=83.875±0.017 =18.218, MSE=1.49 (1.08)
Mon Aug 10 11:49:56 2009 Coarse Calib: MSE=1.485 (1.080) AzOffset=-0.010±0.003449 ElOffset=-0.013±0.003075
Mon Aug 10 12:36:55 2009
Mon Aug 10 12:36:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Aug 10 12:48:03 2009 Calib: Wvl1=5000.0 Ps=0.5019±0.0029 Attn=1.0117±0.0003 As=42.451±0.009 Psi=18.736±0.021 Del=83.933±0.018 =10.550, MSE=2.2 (1.3) Synch=-174.260±0.027 [-174.305,-174.213] M1=0.0074±0.002 [0.0046,0.012]
Mon Aug 10 12:48:03 2009 Calib: Wvl2=11770.0 Ps=0.5019±0.0029 IrAttn=0.9686±0.0004 IrAs=40.102±0.011 IrPsi=7.453±0.004 IrDel=69.862±0.025 =9.724 MSE=2.2 (1.3) Synch=-177.278±0.052 [-177.371,-177.170] M1=0.01±0.0029 [0.0037,0.015]
Mon Aug 10 12:48:03 2009 Calib: MSE=2.201 (1.298) AzOffset=-0.005±0.003902 ElOffset=0.007±0.003483 DP=0.164±0.115
Mon Aug 10 14:08:14 2009 VASE File c:\wvase32\dat\100809 new glass slide.dat
Mon Aug 10 15:31:03 2009 RT File c:\wvase32\dat\100809 new glass slide rt.dat
Tue Aug 11 11:42:18 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Aug 11 11:55:11 2009
Tue Aug 11 11:55:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Aug 11 12:06:17 2009 Calib: Wvl1=5000.0 Ps=0.5407±0.0031 Attn=1.0097±0.0003 As=87.168±0.009 Psi=18.729±0.022 Del=83.934±0.019 =9.821, MSE=2.3 (1.37) Synch=-30.590±0.060 [-30.688,-30.471] M1=0.006±0.0022 [0.003,0.01]
Tue Aug 11 12:06:17 2009 Calib: Wvl2=11770.0 Ps=0.5407±0.0031 IrAttn=0.9685±0.0004 IrAs=84.761±0.011 IrPsi=7.446±0.004 IrDel=69.936±0.026 =9.194 MSE=2.3 (1.37) Synch=-33.333±0.048 [-33.421,-33.254] M1=0.0057±0.0018 [0.0022,0.0097]
Tue Aug 11 12:06:17 2009 Calib: MSE=2.302 (1.368) AzOffset=0.000±0.004077 ElOffset=0.007±0.003639 DP=0.223±0.120
Tue Aug 11 13:27:54 2009 VASE File c:\wvase32\dat\110809 310709 au on si.dat
Mon Aug 17 12:51:10 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Aug 17 13:27:51 2009
Mon Aug 17 13:27:51 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Aug 17 13:38:59 2009 Calib: Wvl1=5000.0 Ps=0.5847±0.0038 Attn=1.0102±0.0004 As=11.546±0.012 Psi=18.720±0.027 Del=83.912±0.023 =9.776, MSE=2.82 (1.63) Synch=41.635±0.056 [41.565,41.898] M1=0.0072±0.0025 [0.0038,0.012]
Mon Aug 17 13:38:59 2009 Calib: Wvl2=11770.0 Ps=0.5847±0.0038 IrAttn=0.9688±0.0005 IrAs=9.177±0.014 IrPsi=7.447±0.005 IrDel=69.740±0.032 =9.222 MSE=2.82 (1.63) Synch=38.697±0.037 [38.621,38.789] M1=0.0089±0.002 [0.0041,0.013]
Mon Aug 17 13:38:59 2009 Calib: MSE=2.817 (1.631) AzOffset=0.005±0.004993 ElOffset=0.008±0.004455 DP=0.192±0.147
Mon Aug 17 15:36:01 2009 VASE File c:\wvase32\dat\170809 old type of glass slide.dat
Mon Aug 17 16:58:04 2009 VASE File c:\wvase32\dat\170809 old type of glass slide roughened.dat
Tue Aug 18 09:52:57 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Aug 18 12:29:24 2009
Tue Aug 18 12:29:24 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Aug 18 12:40:31 2009 Calib: Wvl1=5000.0 Ps=0.6207±0.0066 Attn=1.0108±0.0005 As=167.028±0.013 Psi=19.177±0.024 Del=83.159±0.026 =1.011, MSE=2.27 (3) Synch=-102.315±0.043 [-102.491,-102.203] M1=0.0025±0.0013 [0.00028,0.0067]
Tue Aug 18 12:40:31 2009 Calib: Wvl2=11770.0 Ps=0.6207±0.0066 IrAttn=0.9686±0.0008 IrAs=164.652±0.016 IrPsi=7.792±0.010 IrDel=69.856±0.051 =1.296 MSE=2.27 (3) Synch=-105.305±0.088 [-105.550,-105.088] M1=0.0097±0.0044 [0.0013,0.02]
Tue Aug 18 12:40:31 2009 Calib: MSE=2.274 (2.997) AzOffset=-0.011±0.004404 ElOffset=0.000±0.003869 DP=0.270±0.141
Tue Aug 18 13:59:09 2009 VASE File c:\wvase32\dat\170809 170709 au on glass 2.67 a 15 mins back roughened align in.dat
Tue Aug 18 16:54:50 2009
Tue Aug 18 16:54:50 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Aug 18 17:05:57 2009 Calib: Wvl1=5000.0 Ps=0.6236±0.0078 Attn=1.0114±0.0006 As=166.965±0.015 Psi=18.994±0.029 Del=83.373±0.030 =1.087, MSE=2.76 (3.73) Synch=-102.318±0.023 [-102.371,-102.273] M1=0.0019±0.00076 [0.00017,0.0035]
Tue Aug 18 17:05:58 2009 Calib: Wvl2=11770.0 Ps=0.6236±0.0078 IrAttn=0.9685±0.0009 IrAs=164.601±0.018 IrPsi=7.675±0.012 IrDel=69.776±0.061 =1.363 MSE=2.76 (3.73) Synch=-105.398±0.047 [-105.561,-105.284] M1=0.0065±0.0026 [0.0012,0.017]
Tue Aug 18 17:05:58 2009 Calib: MSE=2.762 (3.728) AzOffset=-0.003±0.005311 ElOffset=0.007±0.004686 DP=0.259±0.167
Tue Aug 18 18:11:49 2009 VASE File c:\wvase32\dat\170809 170709 au on glass 2.634a 20 mins back roughened align in.dat
Thu Sep 03 10:51:41 2009 Initializing Error: User Canceled Initialization.
Thu Sep 03 10:51:49 2009 Initializing Error: MonoInitWait() DK
Thu Sep 03 10:51:51 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Thu Sep 03 10:52:53 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Thu Sep 03 10:52:53 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
Thu Sep 03 10:52:53 2009 MonoCheck Error: Monochromator Communication Failed. DK
Thu Sep 03 10:52:53 2009 Could Not Adjust Slit Width. DK
Thu Sep 03 10:55:05 2009 Could not initialize ComPort for DK Monochromator.
Thu Sep 03 10:55:06 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Thu Sep 03 10:55:44 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Thu Sep 03 10:55:44 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
Thu Sep 03 10:55:44 2009 MonoCheck Error: Monochromator Communication Failed. DK
Thu Sep 03 10:55:44 2009 Could Not Adjust Slit Width. DK
Thu Sep 03 11:02:58 2009 Init User: alex (v3.698, 6.256 DLL)
Thu Sep 03 11:30:00 2009
Thu Sep 03 11:30:00 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Thu Sep 03 11:34:30 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Sep 03 11:34:33 2009 Coarse Calib: Wvl1=5000.0 Ps=0.6743±0.0091 Attn=1.0094±0.0003 As=179.971±0.009 Psi=19.147±0.029 Del=83.115±0.027 =13.539, MSE=2.37 (1.77)
Thu Sep 03 11:34:33 2009 Coarse Calib: MSE=2.367 (1.773) AzOffset=-0.012±0.005463 ElOffset=0.002±0.004800
Thu Sep 03 11:47:55 2009
Thu Sep 03 11:47:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Thu Sep 03 11:57:14 2009 Calib: Wvl1=5000.0 Ps=0.6698±0.0044 Attn=1.0102±0.0005 As=0.001±0.013 Psi=19.141±0.030 Del=83.142±0.027 =7.802, MSE=3.2 (1.91) Synch=97.264±0.015 [97.225,97.288] M1=0.0015±0.00084 [0.00014,0.0031]
Thu Sep 03 11:57:14 2009 Calib: Wvl2=11770.0 Ps=0.6698±0.0044 IrAttn=0.9679±0.0006 IrAs=177.556±0.016 IrPsi=7.697±0.005 IrDel=69.967±0.036 =8.595 MSE=3.2 (1.91) Synch=94.894±0.178 [94.654,95.390] M1=0.028±0.0076 [0.011,0.037]
Thu Sep 03 11:57:15 2009 Calib: MSE=3.204 (1.907) AzOffset=0.008±0.005623 ElOffset=0.011±0.004946 DP=0.186±0.170
Thu Sep 03 13:46:45 2009 VASE File c:\wvase32\dat\030909 si-sergey ss.dat
Thu Sep 03 15:42:01 2009 VASE File c:\wvase32\dat\030909 si+multilayers-sergey ss.dat
Tue Sep 22 08:52:23 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Sep 22 09:13:07 2009
Tue Sep 22 09:13:07 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Tue Sep 22 09:17:36 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Sep 22 09:17:39 2009 Coarse Calib: Wvl1=5000.0 Ps=0.7109±0.0073 Attn=1.0096±0.0003 As=25.562±0.007 Psi=20.147±0.023 Del=81.368±0.023 =14.646, MSE=1.89 (1.38)
Tue Sep 22 09:17:40 2009 Coarse Calib: MSE=1.891 (1.378) AzOffset=0.015±0.004258 ElOffset=0.010±0.003622
Tue Sep 22 10:08:10 2009
Tue Sep 22 10:08:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Sep 22 10:17:45 2009 Calib: Wvl1=5000.0 Ps=0.7124±0.0037 Attn=1.0108±0.0004 As=25.496±0.011 Psi=20.073±0.024 Del=81.525±0.024 =8.761, MSE=2.64 (1.57) Synch=-29.770±0.024 [-29.852,-29.736] M1=0.0016±0.00047 [0.00064,0.0026]
Tue Sep 22 10:17:46 2009 Calib: Wvl2=11770.0 Ps=0.7124±0.0037 IrAttn=0.9681±0.0005 IrAs=23.119±0.014 IrPsi=8.062±0.004 IrDel=70.417±0.029 =9.163 MSE=2.64 (1.57) Synch=-32.853±0.032 [-32.915,-32.803] M1=0.019±0.0052 [0.0072,0.026]
Tue Sep 22 10:17:46 2009 Calib: MSE=2.644 (1.571) AzOffset=-0.004±0.004545 ElOffset=-0.001±0.003878 DP=0.164±0.146
Tue Sep 22 12:29:47 2009 VASE File c:\wvase32\dat\220909 500z30 ss.dat
Tue Sep 22 17:25:47 2009 RT File c:\wvase32\dat\220909 500z30 rt.dat
Tue Oct 27 09:53:48 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Oct 27 10:40:40 2009
Tue Oct 27 10:40:40 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Tue Oct 27 10:45:10 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Oct 27 10:45:12 2009 Coarse Calib: Wvl1=5000.0 Ps=0.7441±0.0105 Attn=1.0113±0.0004 As=128.222±0.010 Psi=19.411±0.032 Del=82.643±0.031 =10.559, MSE=2.63 (1.98)
Tue Oct 27 10:45:13 2009 Coarse Calib: MSE=2.627 (1.977) AzOffset=-0.020±0.006065 ElOffset=-0.024±0.005286
Tue Oct 27 10:55:16 2009
Tue Oct 27 10:55:16 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Oct 27 11:04:37 2009 Calib: Wvl1=5000.0 Ps=0.7498±0.0060 Attn=1.0119±0.0007 As=128.194±0.018 Psi=19.346±0.040 Del=82.563±0.037 =6.208, MSE=4.22 (2.44) Synch=-47.005±0.019 [-47.070,-46.972] M1=0.0014±0.00068 [0.00022,0.0032]
Tue Oct 27 11:04:38 2009 Calib: Wvl2=11770.0 Ps=0.7498±0.0060 IrAttn=0.9685±0.0008 IrAs=125.864±0.022 IrPsi=7.818±0.007 IrDel=70.281±0.048 =7.346 MSE=4.22 (2.44) Synch=-49.708±0.042 [-49.777,-49.648] M1=0.023±0.0056 [0.0073,0.029]
Tue Oct 27 11:04:38 2009 Calib: MSE=4.225 (2.437) AzOffset=0.007±0.007435 ElOffset=-0.020±0.006474 DP=0.838±0.226
Tue Oct 27 13:53:59 2009 VASE File c:\wvase32\dat\271009 500z30 ss.dat
Tue Oct 27 15:09:44 2009 RT File c:\wvase32\dat\271009 500z30 rt.dat
Wed Oct 28 10:31:15 2009 Init User: alex (v3.698, 6.256 DLL)
Wed Oct 28 10:43:46 2009
Wed Oct 28 10:43:46 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Wed Oct 28 10:54:54 2009 Calib: Wvl1=5000.0 Ps=0.7973±0.0040 Attn=1.0105±0.0004 As=111.491±0.012 Psi=19.886±0.026 Del=81.840±0.025 =6.063, MSE=2.77 (1.67) Synch=96.795±0.046 [96.716,96.894] M1=0.0017±0.00048 [0.00082,0.0031]
Wed Oct 28 10:54:54 2009 Calib: Wvl2=11770.0 Ps=0.7973±0.0040 IrAttn=0.9683±0.0005 IrAs=109.054±0.014 IrPsi=7.992±0.005 IrDel=70.246±0.031 =7.266 MSE=2.77 (1.67) Synch=94.164±0.043 [94.098,94.265] M1=0.027±0.0059 [0.014,0.035]
Wed Oct 28 10:54:54 2009 Calib: MSE=2.766 (1.670) AzOffset=0.014±0.004777 ElOffset=0.016±0.004101 DP=0.098±0.152
Wed Oct 28 11:41:01 2009 RT File c:\wvase32\dat\281009luka.dat
Wed Oct 28 11:42:29 2009 RT File c:\wvase32\dat\281009luka1.dat
Wed Oct 28 11:56:27 2009 RT File c:\wvase32\dat\281009luka1.dat
Wed Oct 28 13:48:54 2009 RT File c:\wvase32\dat\281009luka2pol.dat
Wed Oct 28 14:19:28 2009 RT File c:\wvase32\dat\281009luka3.dat
Wed Oct 28 14:24:06 2009 RT File c:\wvase32\dat\281009luka468filter.dat
Wed Oct 28 15:28:03 2009 RT File c:\wvase32\dat\281009luka468filter.dat
Wed Oct 28 15:42:05 2009 RT File c:\wvase32\dat\281009luka468filter2.dat
Wed Oct 28 15:46:57 2009 RT File c:\wvase32\dat\281009luka468filter3.dat
Thu Oct 29 09:17:01 2009 Init User: alex (v3.698, 6.256 DLL)
Thu Oct 29 09:26:39 2009
Thu Oct 29 09:26:39 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Thu Oct 29 09:31:09 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Oct 29 09:31:12 2009 Coarse Calib: Wvl1=5000.0 Ps=0.8361±0.0073 Attn=1.0097±0.0003 As=129.198±0.007 Psi=19.889±0.022 Del=81.923±0.022 =11.554, MSE=1.85 (1.38)
Thu Oct 29 09:31:12 2009 Coarse Calib: MSE=1.853 (1.375) AzOffset=0.006±0.004208 ElOffset=0.007±0.003617
Thu Oct 29 11:00:24 2009
Thu Oct 29 11:00:24 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Thu Oct 29 11:04:55 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Oct 29 11:04:57 2009 Coarse Calib: Wvl1=5000.0 Ps=0.8331±0.0067 Attn=1.0116±0.0003 As=128.970±0.007 Psi=19.888±0.021 Del=81.967±0.020 =12.730, MSE=1.71 (1.26)
Thu Oct 29 11:04:57 2009 Coarse Calib: MSE=1.709 (1.261) AzOffset=0.002±0.003878 ElOffset=0.010±0.003337
Thu Oct 29 11:18:08 2009
Thu Oct 29 11:18:08 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Thu Oct 29 11:27:29 2009 Calib: Wvl1=5000.0 Ps=0.8336±0.0034 Attn=1.0118±0.0004 As=128.985±0.010 Psi=19.878±0.023 Del=81.998±0.022 =7.571, MSE=2.49 (1.46) Synch=-29.270±0.021 [-29.312,-29.235] M1=0.0018±0.00081 [0.00037,0.003]
Thu Oct 29 11:27:29 2009 Calib: Wvl2=11770.0 Ps=0.8336±0.0034 IrAttn=0.9689±0.0005 IrAs=126.640±0.013 IrPsi=7.979±0.004 IrDel=70.415±0.027 =8.758 MSE=2.49 (1.46) Synch=-32.356±0.048 [-32.450,-32.294] M1=0.027±0.0075 [0.0083,0.035]
Thu Oct 29 11:27:29 2009 Calib: MSE=2.486 (1.455) AzOffset=-0.002±0.004291 ElOffset=0.001±0.003694 DP=0.191±0.136
Thu Oct 29 12:37:45 2009 RT File c:\wvase32\dat\291009 500z30 repeat.dat
Thu Oct 29 14:22:31 2009 VASE File c:\wvase32\dat\291009 500z30 repeat ss.dat
Fri Oct 30 09:23:01 2009 Init User: alex (v3.698, 6.256 DLL)
Fri Oct 30 09:30:24 2009
Fri Oct 30 09:30:24 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Fri Oct 30 09:41:31 2009 Calib: Wvl1=5000.0 Ps=0.8775±0.0053 Attn=1.0100±0.0006 As=100.866±0.016 Psi=20.053±0.035 Del=81.573±0.034 =7.406, MSE=3.81 (2.17) Synch=-30.129±0.165 [-30.312,-29.684] M1=0.0015±0.00074 [0.00026,0.003]
Fri Oct 30 09:41:31 2009 Calib: Wvl2=11770.0 Ps=0.8775±0.0053 IrAttn=0.9681±0.0007 IrAs=98.439±0.020 IrPsi=8.070±0.006 IrDel=70.412±0.041 =8.748 MSE=3.81 (2.17) Synch=-33.244±0.045 [-33.328,-33.166] M1=0.025±0.0065 [0.011,0.034]
Fri Oct 30 09:41:31 2009 Calib: MSE=3.815 (2.170) AzOffset=0.012±0.006561 ElOffset=0.006±0.005603 DP=0.313±0.210
Fri Oct 30 10:21:56 2009 RT File c:\wvase32\dat\301009 baseline500z30mg15.dat
Fri Oct 30 11:41:56 2009 RT File c:\wvase32\dat\301009 baseline500z30mg15.dat
Fri Oct 30 12:18:53 2009 RT File c:\wvase32\dat\301009 500z30mg15 rt.dat
Fri Oct 30 13:18:44 2009 VASE File c:\wvase32\dat\301009 500z30mg15 ss.dat
Thu Nov 05 14:41:36 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Nov 09 10:47:42 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Nov 09 10:55:38 2009
Mon Nov 09 10:55:38 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Mon Nov 09 11:00:07 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Nov 09 11:00:11 2009 Coarse Calib: Wvl1=5000.0 Ps=0.9149±0.0070 Attn=1.0109±0.0003 As=99.555±0.007 Psi=20.454±0.021 Del=81.066±0.022 =15.427, MSE=1.8 (1.32)
Mon Nov 09 11:00:11 2009 Coarse Calib: MSE=1.801 (1.315) AzOffset=0.012±0.004023 ElOffset=0.004±0.003404
Mon Nov 09 11:03:14 2009
Mon Nov 09 11:03:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Nov 09 11:12:35 2009 Calib: Wvl1=5000.0 Ps=0.9191±0.0038 Attn=1.0113±0.0004 As=99.541±0.011 Psi=20.452±0.025 Del=81.078±0.025 =9.206, MSE=2.76 (1.57) Synch=167.832±0.020 [167.797,167.866] M1=0.0043±0.00078 [0.0025,0.0056]
Mon Nov 09 11:12:35 2009 Calib: Wvl2=11770.0 Ps=0.9191±0.0038 IrAttn=0.9685±0.0005 IrAs=97.153±0.014 IrPsi=8.274±0.005 IrDel=70.634±0.029 =9.703 MSE=2.76 (1.57) Synch=165.160±0.044 [165.082,165.236] M1=0.026±0.0053 [0.014,0.033]
Mon Nov 09 11:12:35 2009 Calib: MSE=2.763 (1.569) AzOffset=-0.002±0.004701 ElOffset=-0.000±0.003979 DP=0.186±0.155
Mon Nov 09 12:04:08 2009 RT File c:\wvase32\dat\071109 baseline.dat
Mon Nov 09 12:51:56 2009 RT File c:\wvase32\dat\071109 500z30mg16 trans.dat
Mon Nov 09 15:00:01 2009 VASE File c:\wvase32\dat\071109 500z30mg16 ss.dat
Fri Nov 13 10:11:37 2009 Init User: alex (v3.698, 6.256 DLL)
Fri Nov 13 10:21:55 2009
Fri Nov 13 10:21:55 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Fri Nov 13 10:26:24 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Fri Nov 13 10:26:27 2009 Coarse Calib: Wvl1=5000.0 Ps=0.9625±0.0072 Attn=1.0108±0.0003 As=138.278±0.007 Psi=21.400±0.021 Del=79.625±0.023 =13.154, MSE=1.81 (1.33)
Fri Nov 13 10:26:27 2009 Coarse Calib: MSE=1.812 (1.328) AzOffset=-0.013±0.003975 ElOffset=-0.001±0.003274
Fri Nov 13 10:44:30 2009
Fri Nov 13 10:44:30 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Fri Nov 13 10:53:50 2009 Calib: Wvl1=5000.0 Ps=0.9618±0.0037 Attn=1.0121±0.0004 As=138.173±0.011 Psi=21.378±0.023 Del=79.645±0.025 =8.355, MSE=2.59 (1.48) Synch=-30.096±0.023 [-30.137,-30.045] M1=0.0015±0.00043 [0.00064,0.0024]
Fri Nov 13 10:53:50 2009 Calib: Wvl2=11770.0 Ps=0.9618±0.0037 IrAttn=0.9688±0.0005 IrAs=135.814±0.014 IrPsi=8.711±0.004 IrDel=70.889±0.027 =9.822 MSE=2.59 (1.48) Synch=-33.179±0.040 [-33.253,-33.116] M1=0.025±0.0061 [0.013,0.033]
Fri Nov 13 10:53:50 2009 Calib: MSE=2.590 (1.482) AzOffset=0.002±0.004328 ElOffset=-0.009±0.003568 DP=0.149±0.150
Fri Nov 13 16:41:57 2009 VASE File c:\wvase32\dat\131109 500z30 ss slightly anisotropic.dat
Fri Nov 20 12:18:43 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Nov 24 09:46:28 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Nov 24 09:52:02 2009
Tue Nov 24 09:52:02 2009 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
Tue Nov 24 09:56:30 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Nov 24 09:56:34 2009 Coarse Calib: Wvl1=5000.0 Ps=1.0145±0.0157 Attn=1.0116±0.0004 As=0.591±0.013 Psi=25.314±0.019 Del=48.784±0.063 =1.649, MSE=1.68 (1.99)
Tue Nov 24 09:56:34 2009 Coarse Calib: MSE=1.678 (1.991) AzOffset=0.023±0.008030 ElOffset=-0.010±0.003429
Tue Nov 24 11:12:54 2009
Tue Nov 24 11:12:54 2009 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
Tue Nov 24 11:22:28 2009 Calib: Wvl1=5000.0 Ps=1.0087±0.0100 Attn=1.0126±0.0005 As=0.455±0.016 Psi=25.258±0.017 Del=48.663±0.055 =1.178, MSE=2.35 (1.74) Synch=-173.958±0.022 [-174.004,-173.919] M1=0.0019±0.00088 [5.4e-005,0.0036]
Tue Nov 24 11:22:28 2009 Calib: Wvl2=11770.0 Ps=1.0087±0.0100 IrAttn=0.9690±0.0007 IrAs=178.148±0.022 IrPsi=16.699±0.006 IrDel=26.936±0.093 =2.160 MSE=2.35 (1.74) Synch=-177.319±0.050 [-177.430,-177.243] M1=0.019±0.0073 [0.0094,0.031]
Tue Nov 24 11:22:28 2009 Calib: MSE=2.345 (1.745) AzOffset=-0.002±0.006935 ElOffset=0.015±0.002976 DP=0.235±0.142
Tue Nov 24 16:28:55 2009 VASE File c:\wvase32\dat\241109 ss 500z30 high anisotropy.dat
Mon Dec 14 14:43:56 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Dec 14 14:55:46 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Dec 14 15:04:29 2009
Mon Dec 14 15:04:29 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Dec 14 15:15:37 2009 Calib: Wvl1=5000.0 Ps=1.0101±0.0041 Attn=1.0123±0.0005 As=26.962±0.012 Psi=19.195±0.028 Del=83.102±0.026 =7.146, MSE=2.98 (1.72) Synch=-46.293±0.146 [-46.447,-45.826] M1=0.005±0.0012 [0.0031,0.0085]
Mon Dec 14 15:15:38 2009 Calib: Wvl2=11770.0 Ps=1.0101±0.0041 IrAttn=0.9699±0.0006 IrAs=24.653±0.015 IrPsi=7.697±0.005 IrDel=70.293±0.034 =8.109 MSE=2.98 (1.72) Synch=-49.415±0.051 [-49.526,-49.353] M1=0.04±0.009 [0.021,0.052]
Mon Dec 14 15:15:38 2009 Calib: MSE=2.983 (1.724) AzOffset=-0.013±0.005239 ElOffset=0.008±0.004602 DP=0.162±0.159
Mon Dec 21 10:18:59 2009 Initializing Error: Could not establish communication with the DK monochromator.
Mon Dec 21 10:19:23 2009 Initializing Error: MonoInitWait() DK
Mon Dec 21 10:19:44 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Mon Dec 21 10:20:20 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Mon Dec 21 10:20:20 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
Mon Dec 21 10:20:20 2009 MonoCheck Error: Monochromator Communication Failed. DK
Mon Dec 21 10:20:20 2009 Could Not Adjust Slit Width. DK
Mon Dec 21 10:20:54 2009 Could not initialize ComPort for DK Monochromator.
Mon Dec 21 10:20:55 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Mon Dec 21 10:21:31 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Mon Dec 21 10:21:31 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
Mon Dec 21 10:21:31 2009 MonoCheck Error: Monochromator Communication Failed. DK
Mon Dec 21 10:21:31 2009 Could Not Adjust Slit Width. DK
Mon Dec 21 10:21:38 2009 Could not initialize ComPort for DK Monochromator.
Mon Dec 21 10:21:40 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Mon Dec 21 10:22:15 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Mon Dec 21 10:22:15 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
Mon Dec 21 10:22:15 2009 MonoCheck Error: Monochromator Communication Failed. DK
Mon Dec 21 10:22:15 2009 Could Not Adjust Slit Width. DK
Mon Dec 21 10:22:37 2009 Could not initialize ComPort for DK Monochromator.
Mon Dec 21 10:22:39 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
Mon Dec 21 10:23:14 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
Mon Dec 21 10:23:14 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
Mon Dec 21 10:23:14 2009 MonoCheck Error: Monochromator Communication Failed. DK
Mon Dec 21 10:23:14 2009 Could Not Adjust Slit Width. DK
Mon Dec 21 10:28:00 2009 Init User: alex (v3.698, 6.256 DLL)
Mon Dec 21 10:48:45 2009
Mon Dec 21 10:48:45 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Mon Dec 21 10:53:15 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Dec 21 10:53:17 2009 Coarse Calib: Wvl1=5000.0 Ps=1.0766±0.0573 Attn=1.0109±0.0009 As=179.522±0.025 Psi=4.782±0.055 Del=151.070±1.180 =10.715, MSE=7.03 (5.46)
Mon Dec 21 10:53:18 2009 Coarse Calib: MSE=7.025 (5.464) AzOffset=-0.028±0.055685 ElOffset=0.084±0.197437
Mon Dec 21 11:30:10 2009
Mon Dec 21 11:30:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Dec 21 11:39:46 2009 Calib: Wvl1=5000.0 Ps=1.0668±0.0037 Attn=1.0120±0.0002 As=179.380±0.005 Psi=4.772±0.008 Del=151.579±0.188 =5.217, MSE=1.48 (4.06) Synch=41.743±0.056 [41.671,41.958] M1=0.0024±0.00081 [0.00034,0.0061]
Mon Dec 21 11:39:47 2009 Calib: Wvl2=11770.0 Ps=1.0668±0.0037 IrAttn=0.9689±0.0002 IrAs=177.097±0.006 IrPsi=1.863±0.004 IrDel=22.989±0.291 =7.298 MSE=1.48 (4.06) Synch=38.595±0.124 [38.116,39.046] M1=0.028±0.0031 [0.018,0.04]
Mon Dec 21 11:39:47 2009 Calib: MSE=1.479 (4.062) AzOffset=-0.039±0.008908 ElOffset=0.057±0.029388 DP=0.007±0.011
Mon Dec 21 14:12:54 2009 VASE File c:\wvase32\dat\211209 500z30 cu 0.05.dat
Mon Dec 21 15:40:06 2009 RT File c:\wvase32\dat\211209 500z30 cu 005 rt.dat
Tue Dec 22 09:21:19 2009 Init User: alex (v3.698, 6.256 DLL)
Tue Dec 22 09:28:23 2009
Tue Dec 22 09:28:23 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Tue Dec 22 09:32:53 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Dec 22 09:32:56 2009 Coarse Calib: Wvl1=5000.0 Ps=1.1127±0.0104 Attn=1.0105±0.0002 As=119.933±0.005 Psi=4.725±0.010 Del=152.048±0.218 =11.265, MSE=1.29 (1.98)
Tue Dec 22 09:32:56 2009 Coarse Calib: MSE=1.294 (1.976) AzOffset=0.001±0.010521 ElOffset=0.015±0.036642
Tue Dec 22 09:34:45 2009
Tue Dec 22 09:34:45 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Dec 22 09:44:07 2009 Calib: Wvl1=5000.0 Ps=1.1248±0.0031 Attn=1.0105±0.0002 As=119.867±0.004 Psi=4.724±0.007 Del=152.180±0.158 =5.210, MSE=1.23 (3.19) Synch=-102.403±0.065 [-102.522,-102.134] M1=0.0019±0.00097 [0.00073,0.007]
Tue Dec 22 09:44:07 2009 Calib: Wvl2=11770.0 Ps=1.1248±0.0031 IrAttn=0.9685±0.0002 IrAs=117.541±0.005 IrPsi=1.867±0.003 IrDel=22.344±0.256 =7.048 MSE=1.23 (3.19) Synch=-105.430±0.103 [-105.546,-104.917] M1=0.032±0.0047 [0.009,0.036]
Tue Dec 22 09:44:08 2009 Calib: MSE=1.232 (3.191) AzOffset=-0.028±0.007543 ElOffset=0.049±0.025361 DP=0.005±0.009
Tue Dec 22 10:03:06 2009 RT File c:\wvase32\dat\221209 base 2000micron slit.dat
Tue Dec 22 10:20:48 2009 RT File c:\wvase32\dat\221209 base 200micron slit.dat
*********************************************