VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Jan 29 15:47:01 2010]
Original[290110 no sample align out.dat]
Angstroms
3000.000000	90.000000	44.861931	0.48073438	0.196584	0.710545
3100.000000	90.000000	45.070896	-0.04298193	0.071151	0.266733
3200.000000	90.000000	44.976841	-0.029875634	0.163156	0.630206
3300.000000	90.000000	44.995308	-0.080294088	0.120915	0.425725
3400.000000	90.000000	44.97731	-0.064398922	0.0936783	0.339666
3500.000000	90.000000	45.001678	-0.044555768	0.0809918	0.301215
3600.000000	90.000000	44.981949	-0.046305701	0.070629	0.270425
3700.000000	90.000000	45.005402	-0.046928912	0.0842018	0.296084
3800.000000	90.000000	44.993084	-0.062208168	0.069282	0.24959
3900.000000	90.000000	44.993458	-0.01881779	0.0633695	0.233869
4000.000000	90.000000	44.999233	-0.044698574	0.0674095	0.254546
4100.000000	90.000000	45.00412	-0.035729494	0.0721132	0.25121
4200.000000	90.000000	44.99638	-0.017804939	0.0599716	0.213232
4300.000000	90.000000	45.002911	-0.01422906	0.0587497	0.213436
4400.000000	90.000000	45.000462	-0.018906601	0.05214	0.193246
4500.000000	90.000000	45.00386	-0.010792617	0.0538086	0.203497
4600.000000	90.000000	45.01017	-0.057809133	0.0635006	0.222195
4700.000000	90.000000	45.008072	-0.021355042	0.0588341	0.209696
4800.000000	90.000000	45.007111	-0.019019907	0.0573283	0.208108
4900.000000	90.000000	45.010258	-0.013278531	0.0508058	0.187812
5000.000000	90.000000	45.010406	-0.01043486	0.0489648	0.184291
5100.000000	90.000000	45.006481	-0.0044860784	0.0651235	0.227548
5200.000000	90.000000	45.011253	-0.010541117	0.0586984	0.20844
5300.000000	90.000000	45.010811	-0.0089175301	0.0568375	0.205218
5400.000000	90.000000	45.015717	0.018627802	0.0579022	0.212494
5500.000000	90.000000	45.012768	-0.0039015571	0.0517376	0.192981
5600.000000	90.000000	45.01683	0.0073860185	0.0524782	0.198937
5700.000000	90.000000	45.01123	-0.0069287629	0.0653432	0.230445
5800.000000	90.000000	45.004803	0.011489551	0.0634487	0.227154
5900.000000	90.000000	45.011089	0.0030120281	0.0589242	0.214117
6000.000000	90.000000	45.007797	0.0013903232	0.0616105	0.227242
6100.000000	90.000000	45.00666	0.006871948	0.0575467	0.215281
6200.000000	90.000000	45.003773	0.015445987	0.0619832	0.216491
6300.000000	90.000000	44.999073	0.021824723	0.0685378	0.242702
6400.000000	90.000000	45.000801	0.0050015179	0.0604929	0.21717
6500.000000	90.000000	45.004829	-0.0029623113	0.0598127	0.217746
6600.000000	90.000000	44.99255	0.024537042	0.0684368	0.252471
6700.000000	90.000000	44.986332	-0.013333044	0.0598219	0.223589
6800.000000	90.000000	44.992142	0.0070154495	0.0690622	0.2416
6900.000000	90.000000	44.998825	0.018334683	0.0704287	0.249436
7000.000000	90.000000	44.988323	-0.0019154371	0.0670066	0.240325
7100.000000	90.000000	44.984062	-0.015727615	0.0725669	0.263568
7200.000000	90.000000	44.989868	-0.014412888	0.0678612	0.249503
7300.000000	90.000000	44.988392	0.019084776	0.0626741	0.233159
7400.000000	90.000000	44.986908	0.037336722	0.0740083	0.258327
7500.000000	90.000000	44.981289	-0.0093265148	0.0777492	0.274701
7600.000000	90.000000	44.985279	-0.043350838	0.0733957	0.262341
7700.000000	90.000000	44.987637	-0.0078218905	0.0683611	0.247061
7800.000000	90.000000	44.99353	-0.00070783158	0.0643225	0.235044
7900.000000	90.000000	44.991875	-0.019945899	0.0675472	0.249526
8000.000000	90.000000	44.994923	0.016966043	0.0698421	0.260868
8100.000000	90.000000	44.990303	-0.011773767	0.0782412	0.274954
8200.000000	90.000000	44.9986	0.025446109	0.0763243	0.270839
8300.000000	90.000000	45.006798	0.066309825	0.072073	0.258372
8400.000000	90.000000	45.003895	0.048180327	0.0656851	0.23799
8500.000000	90.000000	44.979717	-0.020065846	0.0661869	0.242251
8600.000000	90.000000	44.991917	-0.019898834	0.075152	0.278092
8700.000000	90.000000	44.991966	-0.021858813	0.0753616	0.262855
8800.000000	90.000000	45.011307	0.022369193	0.0770275	0.271148
8900.000000	90.000000	45.005245	0.036540166	0.0701381	0.249446
9000.000000	90.000000	45.016781	-0.0023656364	0.0767638	0.275734
9100.000000	90.000000	44.999863	0.025282843	0.0674854	0.244593
9200.000000	90.000000	45.008892	-0.00040607888	0.0686033	0.251056
9300.000000	90.000000	45.027298	0.025810752	0.0734067	0.271018
9400.000000	90.000000	45.017967	0.028357029	0.0777701	0.271257
9500.000000	90.000000	45.014904	0.023456551	0.0736353	0.259168
9600.000000	90.000000	45.003937	0.0092255436	0.0750442	0.266667
9700.000000	90.000000	45.008221	0.025953338	0.0685375	0.245635
9800.000000	90.000000	45.008743	0.044506285	0.0720916	0.260594
9900.000000	90.000000	45.002174	0.050584964	0.0737843	0.269135
10000.000000	90.000000	44.997173	0.01895584	0.068054	0.250434
10100.000000	90.000000	44.99757	0.025365977	0.0814104	0.283573
10200.000000	90.000000	44.992004	0.033400707	0.0795702	0.279545
10300.000000	90.000000	44.984306	0.036768138	0.0771933	0.273457
10400.000000	90.000000	44.97131	0.015828919	0.0737763	0.263673
10500.000000	90.000000	44.966507	0.0098093906	0.0781385	0.281578
10600.000000	90.000000	44.943207	0.034776647	0.0730633	0.265476
10700.000000	90.000000	44.961369	0.029550875	0.0650909	0.238352
10800.000000	90.000000	44.976593	-0.0046174997	0.0762206	0.281392
10900.000000	90.000000	44.979523	0.043727688	0.0812542	0.28435
11000.000000	90.000000	44.979179	0.01860166	0.0786467	0.277469
11100.000000	90.000000	44.994617	0.045287557	0.0751864	0.267134
11200.000000	90.000000	45.00045	0.014535326	0.0732922	0.262548
11300.000000	90.000000	44.991776	0.028019477	0.0779009	0.281317
11400.000000	90.000000	44.991379	0.020662937	0.0763147	0.277481
11500.000000	90.000000	44.995506	0.014612247	0.0746308	0.273509
11600.000000	90.000000	44.992203	0.036220323	0.08424	0.293094
11700.000000	90.000000	45.005424	0.041273944	0.0831264	0.291311
11800.000000	90.000000	45.005302	0.058618084	0.0775473	0.273762
11900.000000	90.000000	45.007721	0.029864432	0.0762957	0.271308
12000.000000	90.000000	45.002178	0.064615339	0.0782328	0.280214
12100.000000	90.000000	44.99625	0.047177862	0.07356	0.265343
12200.000000	90.000000	44.997047	0.033833705	0.0753398	0.273739
12300.000000	90.000000	44.995872	0.0057467194	0.0788274	0.288556
12400.000000	90.000000	44.997883	0.020470599	0.083023	0.288926
12500.000000	90.000000	44.995636	0.028850527	0.0822618	0.28827
12600.000000	90.000000	44.997868	0.040981866	0.0845197	0.29818
12700.000000	90.000000	45.013371	0.042828936	0.0791777	0.281173
12800.000000	90.000000	44.995445	0.052714542	0.0824307	0.294831
12900.000000	90.000000	44.997147	0.018158784	0.0810236	0.291774
13000.000000	90.000000	45.000309	0.052683137	0.0782311	0.283594
13100.000000	90.000000	45.002975	0.063426405	0.0732948	0.267462
13200.000000	90.000000	45.001633	0.096874312	0.0922431	0.320708
13300.000000	90.000000	45.005882	0.025745604	0.0861217	0.301437
13400.000000	90.000000	44.998814	0.046237875	0.0834994	0.294115
13500.000000	90.000000	44.999905	0.071404845	0.0856539	0.303625
13600.000000	90.000000	44.999378	0.065641947	0.0847732	0.302425
13700.000000	90.000000	45.00975	0.018552952	0.0861556	0.30935
13800.000000	90.000000	45.005024	0.049058832	0.080011	0.289127
13900.000000	90.000000	44.999676	0.061855253	0.0840679	0.305631
14000.000000	90.000000	45.001209	0.04442817	0.0817018	0.298893
14100.000000	90.000000	44.998829	0.033867374	0.0913058	0.318656
14200.000000	90.000000	45.021259	0.043553684	0.0921934	0.32374
14300.000000	90.000000	45.019279	0.02703801	0.0888758	0.314015
14400.000000	90.000000	45.010372	0.036663268	0.0898168	0.31929
14500.000000	90.000000	45.007637	0.056646511	0.0888167	0.317527
14600.000000	90.000000	45.00478	0.021435989	0.0870282	0.313102
14700.000000	90.000000	45.003235	0.044809327	0.0838235	0.303315
14800.000000	90.000000	45.017616	0.056255437	0.0806488	0.293601
14900.000000	90.000000	45.010544	0.037943877	0.0960446	0.333801
15000.000000	90.000000	45.003853	0.030449625	0.0910329	0.318423
dpolE	3000.000000	90.000000	-1.45949	1.65845
dpolE	3100.000000	90.000000	-0.0742659	0.588731
dpolE	3200.000000	90.000000	-0.115896	1.33453
dpolE	3300.000000	90.000000	-0.517599	1.02959
dpolE	3400.000000	90.000000	-0.211825	0.786237
dpolE	3500.000000	90.000000	-0.693232	0.673369
dpolE	3600.000000	90.000000	-0.236013	0.579702
dpolE	3700.000000	90.000000	-0.379481	0.716973
dpolE	3800.000000	90.000000	-0.396385	0.583324
dpolE	3900.000000	90.000000	-0.338397	0.527879
dpolE	4000.000000	90.000000	-0.326294	0.556297
dpolE	4100.000000	90.000000	-0.3426	0.616671
dpolE	4200.000000	90.000000	-0.443998	0.507943
dpolE	4300.000000	90.000000	-0.261881	0.492514
dpolE	4400.000000	90.000000	-0.326693	0.433467
dpolE	4500.000000	90.000000	-0.286206	0.443658
dpolE	4600.000000	90.000000	-0.343115	0.541725
dpolE	4700.000000	90.000000	-0.374552	0.497565
dpolE	4800.000000	90.000000	-0.374256	0.480835
dpolE	4900.000000	90.000000	-0.356667	0.422804
dpolE	5000.000000	90.000000	-0.326482	0.404476
dpolE	5100.000000	90.000000	-0.368647	0.555904
dpolE	5200.000000	90.000000	-0.473234	0.497329
dpolE	5300.000000	90.000000	-0.440894	0.477877
dpolE	5400.000000	90.000000	-0.440194	0.48339
dpolE	5500.000000	90.000000	-0.406335	0.428977
dpolE	5600.000000	90.000000	-0.345665	0.43225
dpolE	5700.000000	90.000000	-0.468073	0.555346
dpolE	5800.000000	90.000000	-0.448027	0.535446
dpolE	5900.000000	90.000000	-0.430305	0.49395
dpolE	6000.000000	90.000000	-0.371806	0.513097
dpolE	6100.000000	90.000000	-0.431503	0.476557
dpolE	6200.000000	90.000000	-0.495969	0.529232
dpolE	6300.000000	90.000000	-0.472965	0.581307
dpolE	6400.000000	90.000000	-0.435279	0.509789
dpolE	6500.000000	90.000000	-0.321584	0.500788
dpolE	6600.000000	90.000000	-0.316621	0.569747
dpolE	6700.000000	90.000000	-0.330726	0.495381
dpolE	6800.000000	90.000000	-0.405825	0.589016
dpolE	6900.000000	90.000000	-0.429641	0.597174
dpolE	7000.000000	90.000000	-0.373927	0.564774
dpolE	7100.000000	90.000000	-0.297145	0.608086
dpolE	7200.000000	90.000000	-0.279118	0.565647
dpolE	7300.000000	90.000000	-0.326847	0.519935
dpolE	7400.000000	90.000000	-0.41844	0.631849
dpolE	7500.000000	90.000000	-0.270243	0.659655
dpolE	7600.000000	90.000000	-0.217466	0.619277
dpolE	7700.000000	90.000000	-0.253221	0.573983
dpolE	7800.000000	90.000000	-0.273302	0.537508
dpolE	7900.000000	90.000000	-0.309835	0.561921
dpolE	8000.000000	90.000000	-0.293661	0.57836
dpolE	8100.000000	90.000000	-0.23732	0.665437
dpolE	8200.000000	90.000000	-0.388624	0.646404
dpolE	8300.000000	90.000000	-0.428862	0.607612
dpolE	8400.000000	90.000000	-0.359219	0.551027
dpolE	8500.000000	90.000000	-0.337399	0.552761
dpolE	8600.000000	90.000000	-0.193448	0.62449
dpolE	8700.000000	90.000000	-0.273807	0.643307
dpolE	8800.000000	90.000000	-0.384748	0.654793
dpolE	8900.000000	90.000000	-0.256086	0.593144
dpolE	9000.000000	90.000000	-0.186575	0.646109
dpolE	9100.000000	90.000000	-0.291118	0.565905
dpolE	9200.000000	90.000000	-0.250572	0.572811
dpolE	9300.000000	90.000000	-0.363209	0.610839
dpolE	9400.000000	90.000000	-0.363645	0.663984
dpolE	9500.000000	90.000000	-0.351922	0.625911
dpolE	9600.000000	90.000000	-0.221554	0.634788
dpolE	9700.000000	90.000000	-0.290702	0.577585
dpolE	9800.000000	90.000000	-0.343449	0.605296
dpolE	9900.000000	90.000000	-0.288105	0.616967
dpolE	10000.000000	90.000000	-0.265888	0.566878
dpolE	10100.000000	90.000000	-0.266147	0.695307
dpolE	10200.000000	90.000000	-0.226919	0.676689
dpolE	10300.000000	90.000000	-0.225399	0.653879
dpolE	10400.000000	90.000000	-0.108465	0.622176
dpolE	10500.000000	90.000000	-0.10391	0.656492
dpolE	10600.000000	90.000000	-0.0595514	0.611524
dpolE	10700.000000	90.000000	-0.141337	0.543101
dpolE	10800.000000	90.000000	-0.145512	0.633792
dpolE	10900.000000	90.000000	-0.182203	0.692199
dpolE	11000.000000	90.000000	-0.106003	0.667236
dpolE	11100.000000	90.000000	-0.259027	0.636031
dpolE	11200.000000	90.000000	-0.160735	0.61751
dpolE	11300.000000	90.000000	-0.0739224	0.653803
dpolE	11400.000000	90.000000	-0.228721	0.638839
dpolE	11500.000000	90.000000	-0.167832	0.622515
dpolE	11600.000000	90.000000	-0.26022	0.719798
dpolE	11700.000000	90.000000	-0.2863	0.707832
dpolE	11800.000000	90.000000	-0.273352	0.657982
dpolE	11900.000000	90.000000	-0.266988	0.645148
dpolE	12000.000000	90.000000	-0.261121	0.659324
dpolE	12100.000000	90.000000	-0.280753	0.61801
dpolE	12200.000000	90.000000	-0.258218	0.630905
dpolE	12300.000000	90.000000	-0.18813	0.657856
dpolE	12400.000000	90.000000	-0.308209	0.709378
dpolE	12500.000000	90.000000	-0.290701	0.70046
dpolE	12600.000000	90.000000	-0.314253	0.717414
dpolE	12700.000000	90.000000	-0.318837	0.670011
dpolE	12800.000000	90.000000	-0.27641	0.695153
dpolE	12900.000000	90.000000	-0.261529	0.681165
dpolE	13000.000000	90.000000	-0.276374	0.655785
dpolE	13100.000000	90.000000	-0.291094	0.612669
dpolE	13200.000000	90.000000	-0.275353	0.788434
dpolE	13300.000000	90.000000	-0.227112	0.733606
dpolE	13400.000000	90.000000	-0.246205	0.709137
dpolE	13500.000000	90.000000	-0.255782	0.725273
dpolE	13600.000000	90.000000	-0.25318	0.715689
dpolE	13700.000000	90.000000	-0.234078	0.725186
dpolE	13800.000000	90.000000	-0.220757	0.67152
dpolE	13900.000000	90.000000	-0.266158	0.703785
dpolE	14000.000000	90.000000	-0.267764	0.682136
dpolE	14100.000000	90.000000	-0.254344	0.778896
dpolE	14200.000000	90.000000	-0.244887	0.784108
dpolE	14300.000000	90.000000	-0.22376	0.753635
dpolE	14400.000000	90.000000	-0.200641	0.759379
dpolE	14500.000000	90.000000	-0.265926	0.749098
dpolE	14600.000000	90.000000	-0.198348	0.731784
dpolE	14700.000000	90.000000	-0.239009	0.703111
dpolE	14800.000000	90.000000	-0.218492	0.674656
dpolE	14900.000000	90.000000	-0.306623	0.821094
dpolE	15000.000000	90.000000	-0.201172	0.775582