VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Mar 30 12:50:56 2010]
Original[300310 si.dat]
nm
300.000000	75.000000	25.337688	125.41955	4.95488	17.2819
310.000000	75.000000	24.422451	123.8926	1.72734	6.37106
320.000000	75.000000	23.048702	123.83684	1.12104	4.1047
330.000000	75.000000	20.900009	125.81653	0.758568	3.15887
340.000000	75.000000	20.744476	127.01773	0.678308	2.69392
350.000000	75.000000	21.118103	129.77867	0.552511	2.3281
360.000000	75.000000	21.645399	134.90807	0.436153	1.87208
370.000000	75.000000	20.720722	146.99332	0.34628	1.62811
380.000000	75.000000	17.381651	155.85527	0.271308	1.57698
390.000000	75.000000	14.53663	158.43335	0.219716	1.55012
400.000000	75.000000	12.538639	159.79529	0.245933	2.08218
410.000000	75.000000	11.119999	158.81693	0.230866	2.00424
420.000000	75.000000	9.7781792	159.30864	0.117663	1.18585
430.000000	75.000000	8.791996	158.3587	0.162155	1.84353
440.000000	75.000000	7.9927578	157.48363	0.160556	1.97659
450.000000	75.000000	7.2548428	156.78368	0.145881	1.95379
460.000000	75.000000	6.6028266	156.38049	0.118185	1.56542
470.000000	75.000000	6.0614052	155.74211	0.070089	0.993761
480.000000	75.000000	5.5641613	155.08101	0.109287	1.62595
490.000000	75.000000	5.1295629	153.29036	0.0935657	1.44486
500.000000	75.000000	4.7611871	153.12144	0.088778	1.4541
510.000000	75.000000	4.337338	151.97893	0.0665736	1.04318
520.000000	75.000000	3.985518	150.24547	0.100803	1.6037
530.000000	75.000000	3.7096336	149.41798	0.0753322	1.24505
540.000000	75.000000	3.4506984	147.86865	0.0763188	1.28863
550.000000	75.000000	3.2147005	145.91333	0.0661568	1.15058
560.000000	75.000000	2.9732571	143.7478	0.0544952	0.942278
570.000000	75.000000	2.7425504	142.93575	0.067065	1.11901
580.000000	75.000000	2.5766089	140.67686	0.0635725	1.06533
590.000000	75.000000	2.4082749	138.34174	0.0985345	1.64511
600.000000	75.000000	2.2016957	137.77802	0.0557946	0.962803
610.000000	75.000000	2.0301759	134.12286	0.116349	1.93358
620.000000	75.000000	1.9169972	131.82669	0.0852622	1.35038
630.000000	75.000000	1.8920339	128.61115	0.0572137	0.959419
640.000000	75.000000	1.7353424	125.53296	0.0892658	1.44935
650.000000	75.000000	1.5366204	124.30289	0.0641896	0.981285
660.000000	75.000000	1.4178146	120.54238	0.119489	1.79357
670.000000	75.000000	1.4171588	116.20049	0.0682063	1.07082
680.000000	75.000000	1.3894644	114.95425	0.131845	2.04396
690.000000	75.000000	1.2795554	110.05708	0.113965	1.66239
700.000000	75.000000	1.3241687	105.06474	0.0976312	1.51946
710.000000	75.000000	1.4151425	100.19564	0.102759	1.61959
720.000000	75.000000	1.1502243	96.055801	0.206897	2.80209
730.000000	75.000000	1.2548469	92.581375	0.160368	2.45934
740.000000	75.000000	1.0674889	88.226845	0.215012	2.69973
750.000000	75.000000	0.98902929	84.558708	0.262431	3.08075
760.000000	75.000000	1.1789426	82.744278	0.209078	3.07189
770.000000	75.000000	0.93341947	71.686272	0.220341	2.97394
780.000000	75.000000	0.83849311	70.943771	0.558468	6.15637
790.000000	75.000000	1.2640795	68.884224	0.100156	2.17356
800.000000	75.000000	0.91175687	61.035454	0.300849	3.90872
810.000000	75.000000	0.93320274	58.789536	0.437863	5.6702
820.000000	75.000000	1.1129346	56.485706	0.173209	2.6938
830.000000	75.000000	1.1429816	55.947102	0.0817285	1.29732
840.000000	75.000000	0.93027562	52.646255	0.169691	2.2155
850.000000	75.000000	1.21389	48.462555	0.355627	5.87224
860.000000	75.000000	1.4937001	45.651699	0.173156	3.67621
870.000000	75.000000	1.0507039	45.733814	0.164567	2.49785
880.000000	75.000000	1.2597013	44.263588	0.0456863	0.803508
890.000000	75.000000	1.2582977	42.753479	0.0158223	0.35733
900.000000	75.000000	1.3051893	39.967968	0.0616674	1.13636
910.000000	75.000000	1.2732272	38.808544	0.0271622	0.482892
920.000000	75.000000	1.3332286	37.681782	0.0140997	0.258795
930.000000	75.000000	1.3622433	36.586693	0.0782413	1.44344
940.000000	75.000000	1.4031602	34.508755	0.0304496	0.55295
950.000000	75.000000	1.4122372	32.582474	0.0489488	0.893593
960.000000	75.000000	1.4502473	32.855473	0.0540367	1.00513
970.000000	75.000000	1.4127243	30.964994	0.0281425	0.514622
980.000000	75.000000	1.4770958	29.591425	0.0234497	0.445045
990.000000	75.000000	1.4927868	29.098557	0.0332271	0.631085
1000.000000	75.000000	1.5144422	28.220951	0.0533147	1.03672
dpolE	300.000000	75.000000	-4.78905	45.5714
dpolE	310.000000	75.000000	3.06875	16.1573
dpolE	320.000000	75.000000	-6.4203	10.6263
dpolE	330.000000	75.000000	-0.0440727	5.75024
dpolE	340.000000	75.000000	-4.69557	5.72638
dpolE	350.000000	75.000000	-2.11188	4.48495
dpolE	360.000000	75.000000	-3.73371	3.61906
dpolE	370.000000	75.000000	-1.05855	2.36827
dpolE	380.000000	75.000000	-0.0300459	1.45868
dpolE	390.000000	75.000000	-0.0255225	0.991889
dpolE	400.000000	75.000000	0.314239	0.951903
dpolE	410.000000	75.000000	-0.106431	0.81925
dpolE	420.000000	75.000000	0.0811381	0.365541
dpolE	430.000000	75.000000	0.0373512	0.458049
dpolE	440.000000	75.000000	-0.102375	0.414606
dpolE	450.000000	75.000000	-0.0761092	0.340818
dpolE	460.000000	75.000000	-0.0504198	0.24725
dpolE	470.000000	75.000000	0.0263577	0.132126
dpolE	480.000000	75.000000	-0.033448	0.186945
dpolE	490.000000	75.000000	-0.0407337	0.147466
dpolE	500.000000	75.000000	0.0369354	0.126719
dpolE	510.000000	75.000000	-0.00225908	0.0846593
dpolE	520.000000	75.000000	-0.0560667	0.117028
dpolE	530.000000	75.000000	-0.0148762	0.0799535
dpolE	540.000000	75.000000	-0.0133732	0.0745507
dpolE	550.000000	75.000000	0.0219202	0.0593855
dpolE	560.000000	75.000000	-0.0195594	0.0451131
dpolE	570.000000	75.000000	0.00193685	0.0494796
dpolE	580.000000	75.000000	4.32244e-005	0.0437192
dpolE	590.000000	75.000000	-0.00694733	0.0629274
dpolE	600.000000	75.000000	0.0111807	0.0317034
dpolE	610.000000	75.000000	-0.0177631	0.0607738
dpolE	620.000000	75.000000	-0.0154881	0.0410602
dpolE	630.000000	75.000000	0.0437807	0.0266913
dpolE	640.000000	75.000000	0.0240524	0.0376554
dpolE	650.000000	75.000000	-0.0158165	0.0236006
dpolE	660.000000	75.000000	-0.013045	0.0395244
dpolE	670.000000	75.000000	0.0233946	0.0219273
dpolE	680.000000	75.000000	0.0224255	0.0408023
dpolE	690.000000	75.000000	0.00704018	0.0318272
dpolE	700.000000	75.000000	0.0427188	0.0273132
dpolE	710.000000	75.000000	0.0626484	0.0313884
dpolE	720.000000	75.000000	0.00286696	0.0492827
dpolE	730.000000	75.000000	0.0483215	0.0400556
dpolE	740.000000	75.000000	-0.0260816	0.0479126
dpolE	750.000000	75.000000	-0.0431434	0.0539738
dpolE	760.000000	75.000000	0.0225133	0.049265
dpolE	770.000000	75.000000	-0.0140146	0.0367105
dpolE	780.000000	75.000000	-0.0607232	0.0935613
dpolE	790.000000	75.000000	0.0719935	0.0229174
dpolE	800.000000	75.000000	-0.0430496	0.054301
dpolE	810.000000	75.000000	-0.0491211	0.082674
dpolE	820.000000	75.000000	-0.0038857	0.0389379
dpolE	830.000000	75.000000	-0.000656507	0.0190968
dpolE	840.000000	75.000000	-0.0622495	0.0327797
dpolE	850.000000	75.000000	-0.0079021	0.0924094
dpolE	860.000000	75.000000	0.0934758	0.0543896
dpolE	870.000000	75.000000	-0.0314054	0.0354951
dpolE	880.000000	75.000000	0.011845	0.012121
dpolE	890.000000	75.000000	0.003832	0.0042377
dpolE	900.000000	75.000000	0.0169338	0.0171355
dpolE	910.000000	75.000000	-0.00317946	0.00745627
dpolE	920.000000	75.000000	0.00496977	0.00409933
dpolE	930.000000	75.000000	0.00178885	0.0235228
dpolE	940.000000	75.000000	0.00939782	0.00943798
dpolE	950.000000	75.000000	0.00383398	0.0153558
dpolE	960.000000	75.000000	0.0112047	0.017493
dpolE	970.000000	75.000000	-0.00550985	0.00888795
dpolE	980.000000	75.000000	0.00684122	0.00778682
dpolE	990.000000	75.000000	0.00256051	0.0112182
dpolE	1000.000000	75.000000	0.00939309	0.0182577