SiO2-sample1
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Jun 30 13:37:47 2011]
Original[300611_nick_si.dat]
nm
300.000000	55.000000	32.798191	124.47561	2.20389	5.84708
310.000000	55.000000	34.358509	126.38223	1.13679	3.02711
320.000000	55.000000	32.698654	125.80379	0.612837	1.65988
330.000000	55.000000	33.233742	125.52552	0.405186	1.08582
340.000000	55.000000	32.874393	128.22578	0.267019	0.745532
350.000000	55.000000	33.015282	128.68456	0.182749	0.512356
360.000000	55.000000	33.711075	129.80992	0.133715	0.37684
370.000000	55.000000	33.655403	130.11797	0.092331	0.261711
380.000000	55.000000	33.984913	131.3226	0.0602949	0.173199
390.000000	55.000000	34.219406	132.00104	0.0396595	0.114745
400.000000	55.000000	34.479362	132.81081	0.0284924	0.0832014
410.000000	55.000000	34.680767	133.70532	0.0234415	0.069271
420.000000	55.000000	34.85218	134.50284	0.0214383	0.0640609
430.000000	55.000000	35.040211	135.33311	0.0197567	0.0597787
440.000000	55.000000	35.185642	136.17303	0.018556	0.0568914
450.000000	55.000000	35.323616	136.74391	0.0177698	0.0549594
460.000000	55.000000	35.491077	137.41945	0.0174917	0.0546751
470.000000	55.000000	35.610218	138.28938	0.0171338	0.0543824
480.000000	55.000000	35.71368	138.8782	0.0173413	0.0556155
490.000000	55.000000	35.811874	139.56097	0.0172548	0.0560412
500.000000	55.000000	35.957951	140.04726	0.0172178	0.0563862
510.000000	55.000000	36.023674	140.78424	0.0171446	0.0570035
520.000000	55.000000	36.146976	141.28287	0.017123	0.0574676
530.000000	55.000000	36.237568	141.80605	0.0171131	0.0580395
540.000000	55.000000	36.352726	142.42226	0.0171173	0.0587861
550.000000	55.000000	36.419296	142.97862	0.017115	0.0594886
560.000000	55.000000	36.474865	143.45674	0.0171166	0.0601252
570.000000	55.000000	36.548443	143.86206	0.0171244	0.060685
580.000000	55.000000	36.669079	144.34224	0.0171437	0.0613807
590.000000	55.000000	36.745033	144.89398	0.0171562	0.0622133
600.000000	55.000000	36.770241	145.41806	0.0171913	0.0631482
610.000000	55.000000	36.858089	145.6256	0.0171951	0.0634372
620.000000	55.000000	36.929405	146.0378	0.0171977	0.0640748
630.000000	55.000000	37.049103	146.66335	0.0172353	0.0651954
640.000000	55.000000	37.039303	146.87813	0.0172379	0.0656015
650.000000	55.000000	37.119617	147.2084	0.0172561	0.0662046
660.000000	55.000000	37.195286	147.49911	0.0173104	0.0668909
670.000000	55.000000	37.289772	147.71231	0.0173086	0.0672152
680.000000	55.000000	37.31496	148.38173	0.0173166	0.0685009
690.000000	55.000000	37.340405	148.7305	0.0172831	0.0690354
700.000000	55.000000	37.393559	148.90617	0.0173873	0.0697686
710.000000	55.000000	37.459541	149.1461	0.0174177	0.0703352
720.000000	55.000000	37.530533	149.48506	0.017424	0.0710176
730.000000	55.000000	37.605618	149.84955	0.0174693	0.0719294
740.000000	55.000000	37.644707	150.19072	0.017523	0.0728723
750.000000	55.000000	37.681366	150.47046	0.0175782	0.073706
760.000000	55.000000	37.693428	150.87219	0.0176673	0.0750014
770.000000	55.000000	37.752285	151.01463	0.0177466	0.0756345
780.000000	55.000000	37.860821	151.08084	0.0182959	0.0780608
790.000000	55.000000	37.88575	151.51497	0.017974	0.0777381
800.000000	55.000000	37.915867	151.81024	0.0181868	0.0793921
300.000000	60.000000	27.383663	108.76785	1.84237	4.69695
310.000000	60.000000	32.317204	109.37043	1.22439	2.82238
320.000000	60.000000	32.058605	110.49076	0.606869	1.44007
330.000000	60.000000	32.00869	114.35149	0.396249	0.967595
340.000000	60.000000	31.95064	114.215	0.260231	0.635384
350.000000	60.000000	32.105297	115.80436	0.180083	0.444278
360.000000	60.000000	31.934288	117.44304	0.129275	0.324458
370.000000	60.000000	32.48093	117.54774	0.0922696	0.229709
380.000000	60.000000	32.648514	118.46957	0.0603297	0.151067
390.000000	60.000000	32.859795	119.56488	0.0396942	0.100107
400.000000	60.000000	33.012054	120.70355	0.0283357	0.0721115
410.000000	60.000000	33.206825	121.60646	0.02326	0.0595728
420.000000	60.000000	33.383007	122.50401	0.0212593	0.0548296
430.000000	60.000000	33.561451	123.54365	0.0195354	0.0508755
440.000000	60.000000	33.724728	124.54408	0.0182949	0.0480934
450.000000	60.000000	33.82032	125.30747	0.0174806	0.0463169
460.000000	60.000000	33.948933	126.18388	0.0171907	0.0459657
470.000000	60.000000	34.092083	126.95122	0.0168262	0.0453452
480.000000	60.000000	34.23204	127.82349	0.0170585	0.0464146
490.000000	60.000000	34.326298	128.71704	0.0169685	0.0466777
500.000000	60.000000	34.383434	129.4761	0.0169104	0.0469832
510.000000	60.000000	34.507652	130.19208	0.0168814	0.0473099
520.000000	60.000000	34.618317	130.74342	0.0168246	0.0474939
530.000000	60.000000	34.674927	131.61032	0.0168105	0.0480501
540.000000	60.000000	34.749195	132.2038	0.0168081	0.0484441
550.000000	60.000000	34.860607	132.80394	0.0168169	0.0488651
560.000000	60.000000	34.91626	133.54506	0.0168201	0.049435
570.000000	60.000000	34.989418	134.05725	0.0168297	0.0498412
580.000000	60.000000	35.097057	134.64265	0.0168495	0.0503301
590.000000	60.000000	35.126968	135.25726	0.016854	0.0508659
600.000000	60.000000	35.189911	135.69521	0.0169009	0.0513638
610.000000	60.000000	35.305187	136.18231	0.0169136	0.051779
620.000000	60.000000	35.357906	136.87416	0.0169133	0.052407
630.000000	60.000000	35.389877	137.23878	0.0169354	0.052814
640.000000	60.000000	35.483711	137.74948	0.0169883	0.0534331
650.000000	60.000000	35.556271	138.28992	0.017011	0.0540193
660.000000	60.000000	35.595478	138.60414	0.0170374	0.0544315
670.000000	60.000000	35.680027	139.27869	0.0170372	0.0551161
680.000000	60.000000	35.715431	139.53654	0.0170496	0.0554234
690.000000	60.000000	35.754475	139.84016	0.0170169	0.0556379
700.000000	60.000000	35.853172	140.41518	0.0171414	0.0566566
710.000000	60.000000	35.886642	140.81198	0.0171694	0.0572076
720.000000	60.000000	35.962818	140.90956	0.0171797	0.0573108
730.000000	60.000000	36.036671	141.51672	0.0172285	0.0581867
740.000000	60.000000	36.062859	142.0182	0.0172872	0.0590192
750.000000	60.000000	36.096661	142.23456	0.0173519	0.0595053
760.000000	60.000000	36.187241	142.46153	0.0174727	0.0601658
770.000000	60.000000	36.224567	142.96452	0.0175606	0.0611438
780.000000	60.000000	36.249573	143.12756	0.0181528	0.063427
790.000000	60.000000	36.340805	143.62758	0.0178034	0.0628764
800.000000	60.000000	36.325462	143.91301	0.0180397	0.0641564
300.000000	65.000000	27.897659	94.783379	2.07372	4.99799
310.000000	65.000000	31.248695	95.458649	1.14763	2.57569
320.000000	65.000000	30.378189	97.12294	0.59061	1.36346
330.000000	65.000000	30.839884	97.161613	0.38619	0.884164
340.000000	65.000000	31.192028	99.010086	0.259778	0.593668
350.000000	65.000000	31.270197	99.634499	0.179195	0.409662
360.000000	65.000000	31.192602	100.48555	0.129323	0.296847
370.000000	65.000000	31.584414	102.16212	0.0928657	0.212895
380.000000	65.000000	31.56702	103.10912	0.060415	0.13906
390.000000	65.000000	31.835007	104.18925	0.0397703	0.0915151
400.000000	65.000000	31.900137	105.61153	0.0283952	0.0656957
410.000000	65.000000	32.064819	106.66499	0.023208	0.0538204
420.000000	65.000000	32.224979	107.66935	0.021127	0.0491187
430.000000	65.000000	32.326279	108.77403	0.0194853	0.0455075
440.000000	65.000000	32.417549	109.80616	0.0180638	0.0424239
450.000000	65.000000	32.509224	110.85254	0.0172152	0.0406438
460.000000	65.000000	32.616863	111.80674	0.016906	0.040103
470.000000	65.000000	32.728951	112.88618	0.0165118	0.0393996
480.000000	65.000000	32.804817	113.89511	0.0167447	0.0402106
490.000000	65.000000	32.863976	114.84773	0.0166407	0.040224
500.000000	65.000000	32.91766	115.71425	0.0165791	0.0403268
510.000000	65.000000	33.000381	116.5009	0.0165397	0.0404481
520.000000	65.000000	33.089931	117.38139	0.016515	0.0406449
530.000000	65.000000	33.15625	118.24761	0.0165049	0.0409015
540.000000	65.000000	33.189018	119.00732	0.0164933	0.0411478
550.000000	65.000000	33.268948	119.71526	0.0164986	0.0413946
560.000000	65.000000	33.346687	120.48705	0.0165113	0.0416993
570.000000	65.000000	33.407593	121.30621	0.0164898	0.0419882
580.000000	65.000000	33.419895	121.94576	0.0164872	0.0422633
590.000000	65.000000	33.474354	122.57173	0.0164966	0.0425451
600.000000	65.000000	33.566994	123.27689	0.016557	0.0429828
610.000000	65.000000	33.597233	123.9136	0.0165482	0.0432587
620.000000	65.000000	33.647816	124.55554	0.0165473	0.0435545
630.000000	65.000000	33.697678	125.13747	0.0165783	0.0439132
640.000000	65.000000	33.764324	125.72324	0.0166305	0.0443292
650.000000	65.000000	33.820377	126.34393	0.0166526	0.044702
660.000000	65.000000	33.882263	126.8914	0.0167205	0.0451629
670.000000	65.000000	33.952831	127.48042	0.0167202	0.0454684
680.000000	65.000000	34.013287	127.97099	0.0167419	0.0457895
690.000000	65.000000	34.067024	128.336	0.0167102	0.0458959
700.000000	65.000000	34.119003	128.86438	0.0168477	0.04658
710.000000	65.000000	34.147335	129.30966	0.0168814	0.0469495
720.000000	65.000000	34.161884	129.82024	0.0168778	0.0472766
730.000000	65.000000	34.25185	130.2538	0.0169472	0.0477113
740.000000	65.000000	34.259659	130.85167	0.0170166	0.0483312
750.000000	65.000000	34.375618	131.10147	0.0171165	0.0487179
760.000000	65.000000	34.43243	131.71609	0.0172061	0.0494216
770.000000	65.000000	34.462063	132.02966	0.0173041	0.0499274
780.000000	65.000000	34.524151	132.46104	0.0180051	0.0522625
790.000000	65.000000	34.555027	132.83264	0.0175905	0.0513437
800.000000	65.000000	34.585384	133.2789	0.017881	0.0525514
300.000000	70.000000	31.95001	74.977249	1.83355	4.2113
310.000000	70.000000	30.935226	81.297646	0.97342	2.23159
320.000000	70.000000	30.324726	78.477158	0.599557	1.40362
330.000000	70.000000	31.245617	78.096481	0.395062	0.910363
340.000000	70.000000	31.193918	78.912689	0.261348	0.601074
350.000000	70.000000	30.989164	81.000237	0.183397	0.420685
360.000000	70.000000	31.236345	81.710838	0.133219	0.303603
370.000000	70.000000	31.362635	82.901619	0.0952408	0.215934
380.000000	70.000000	31.397537	84.347923	0.0618094	0.139651
390.000000	70.000000	31.415264	85.311584	0.0406493	0.091672
400.000000	70.000000	31.522902	86.503983	0.0289229	0.0649989
410.000000	70.000000	31.528593	87.780457	0.0234984	0.0527438
420.000000	70.000000	31.604103	88.990662	0.0213411	0.0478055
430.000000	70.000000	31.647106	90.156532	0.0195678	0.0437915
440.000000	70.000000	31.717937	91.292236	0.0181548	0.0405857
450.000000	70.000000	31.756714	92.383774	0.0171882	0.0384204
460.000000	70.000000	31.771669	93.403252	0.0168098	0.037598
470.000000	70.000000	31.795685	94.511833	0.0163411	0.0365821
480.000000	70.000000	31.766068	95.512764	0.0165741	0.0371812
490.000000	70.000000	31.794323	96.532295	0.0164483	0.0369488
500.000000	70.000000	31.8451	97.541733	0.0163801	0.036841
510.000000	70.000000	31.866449	98.555679	0.0163163	0.0367748
520.000000	70.000000	31.911812	99.441216	0.0162734	0.0367371
530.000000	70.000000	31.919966	100.27959	0.0162417	0.0367534
540.000000	70.000000	31.910311	101.11481	0.0162159	0.0368029
550.000000	70.000000	31.91263	101.98801	0.0161967	0.0368726
560.000000	70.000000	31.944714	102.88005	0.016197	0.0369781
570.000000	70.000000	31.95553	103.68288	0.0161568	0.0370293
580.000000	70.000000	32.01292	104.49059	0.0161682	0.0371502
590.000000	70.000000	32.046482	105.18873	0.016175	0.0372645
600.000000	70.000000	32.027615	105.8809	0.0162128	0.0374894
610.000000	70.000000	32.074165	106.62405	0.0162086	0.0375917
620.000000	70.000000	32.068024	107.35641	0.0161919	0.0377037
630.000000	70.000000	32.095074	108.1284	0.0162205	0.037916
640.000000	70.000000	32.142937	108.79023	0.0162795	0.0381697
650.000000	70.000000	32.186161	109.45202	0.0163002	0.0383431
660.000000	70.000000	32.226269	110.0664	0.0163777	0.0386476
670.000000	70.000000	32.258759	110.64388	0.0163646	0.0387399
680.000000	70.000000	32.274326	111.25461	0.0163777	0.0389192
690.000000	70.000000	32.317116	111.8521	0.0163342	0.0389477
700.000000	70.000000	32.30859	112.43233	0.0164855	0.0394765
710.000000	70.000000	32.330193	112.98019	0.0165272	0.0397204
720.000000	70.000000	32.311012	113.57104	0.0165163	0.0398835
730.000000	70.000000	32.36018	114.09245	0.0165862	0.0401801
740.000000	70.000000	32.386353	114.74419	0.0166771	0.0405915
750.000000	70.000000	32.480709	115.25856	0.0167933	0.0409801
760.000000	70.000000	32.515152	115.70327	0.0169633	0.041524
770.000000	70.000000	32.536274	116.18458	0.0170891	0.0419882
780.000000	70.000000	32.544086	116.6992	0.0179845	0.0443804
790.000000	70.000000	32.563972	117.22332	0.0174432	0.0432309
800.000000	70.000000	32.553772	117.66622	0.0177936	0.0442844
300.000000	75.000000	32.820557	59.556931	1.93823	4.93385
310.000000	75.000000	33.726936	55.239613	1.07703	2.83463
320.000000	75.000000	32.989594	56.059437	0.601552	1.58734
330.000000	75.000000	32.40728	57.522053	0.392625	1.02774
340.000000	75.000000	32.775818	58.044647	0.268498	0.695229
350.000000	75.000000	32.493073	58.910587	0.186827	0.481509
360.000000	75.000000	32.485836	59.182491	0.135945	0.349415
370.000000	75.000000	32.263416	60.583366	0.0972432	0.247322
380.000000	75.000000	32.36985	61.411545	0.0637874	0.160656
390.000000	75.000000	32.391808	62.524212	0.0418739	0.104342
400.000000	75.000000	32.448574	63.99398	0.0297588	0.0731325
410.000000	75.000000	32.386326	64.811554	0.0241711	0.0590564
420.000000	75.000000	32.277042	65.761589	0.0218724	0.0531288
430.000000	75.000000	32.261372	66.729805	0.0199969	0.0482257
440.000000	75.000000	32.268562	67.678947	0.0184727	0.0442355
450.000000	75.000000	32.19149	68.878357	0.0174054	0.0413859
460.000000	75.000000	32.116322	69.767151	0.0169777	0.0401827
470.000000	75.000000	32.079365	70.750267	0.0164474	0.0387121
480.000000	75.000000	32.002422	71.6549	0.0166979	0.0391406
490.000000	75.000000	32.014259	72.596901	0.0165533	0.0385887
500.000000	75.000000	31.944645	73.58699	0.0164426	0.0381735
510.000000	75.000000	31.865892	74.450401	0.0163467	0.0378363
520.000000	75.000000	31.827528	75.234612	0.0162745	0.0375535
530.000000	75.000000	31.804567	76.097183	0.0162332	0.0373283
540.000000	75.000000	31.768066	76.965691	0.0161996	0.0371383
550.000000	75.000000	31.69993	77.790215	0.0161612	0.0369724
560.000000	75.000000	31.649288	78.57177	0.0161378	0.036844
570.000000	75.000000	31.62439	79.302231	0.0161242	0.0367364
580.000000	75.000000	31.570398	80.055977	0.0161068	0.0366413
590.000000	75.000000	31.55879	80.795868	0.0161018	0.036557
600.000000	75.000000	31.532389	81.478424	0.0161498	0.0366136
610.000000	75.000000	31.485432	82.181206	0.016119	0.0365076
620.000000	75.000000	31.489491	82.908287	0.0161029	0.0364082
630.000000	75.000000	31.4601	83.649742	0.0161222	0.0364137
640.000000	75.000000	31.450644	84.307175	0.0161738	0.0364917
650.000000	75.000000	31.430645	84.987236	0.0161806	0.0364781
660.000000	75.000000	31.398115	85.651947	0.0162522	0.0366244
670.000000	75.000000	31.342409	86.274231	0.0162047	0.0365538
680.000000	75.000000	31.314209	86.918449	0.0162097	0.036559
690.000000	75.000000	31.314007	87.484123	0.0161403	0.036385
700.000000	75.000000	31.315903	88.127968	0.0163342	0.0368051
710.000000	75.000000	31.317244	88.69574	0.0163774	0.0368914
720.000000	75.000000	31.291147	89.311722	0.0163637	0.0368708
730.000000	75.000000	31.249601	89.966217	0.0164246	0.0370329
740.000000	75.000000	31.258934	90.497673	0.0165326	0.0372715
750.000000	75.000000	31.234795	90.976204	0.0166388	0.0375312
760.000000	75.000000	31.235952	91.486641	0.0168358	0.037982
770.000000	75.000000	31.265673	92.097435	0.0170024	0.0383503
780.000000	75.000000	31.234266	92.709808	0.0181032	0.0408745
790.000000	75.000000	31.24472	93.109848	0.0174363	0.0393752
800.000000	75.000000	31.234156	93.559204	0.0178867	0.0404185