Five layer hi-lo stack on silicon
nm
500.000000	60.000000	5.32208	53.3785	0.046289	0.607557
505.000000	60.000000	8.97359	108.568	0.016512	0.137776
510.000000	60.000000	13.7197	133.39	0.017877	0.129667
515.000000	60.000000	17.3517	148.543	0.019888	0.192019
520.000000	60.000000	20.1102	160.467	0.022176	0.273043
525.000000	60.000000	22.2209	170.287	0.023205	0.556177
530.000000	60.000000	23.866	174.514	0.025507	1.00569
535.000000	60.000000	25.0775	168.122	0.025611	0.445061
540.000000	60.000000	26.0332	159.899	0.026803	0.282723
545.000000	60.000000	26.797	151.842	0.026243	0.187011
550.000000	60.000000	27.5197	143.869	0.027168	0.164323
555.000000	60.000000	28.3117	136.192	0.026443	0.129549
560.000000	60.000000	29.3467	128.954	0.027824	0.121364
565.000000	60.000000	30.9111	122.224	0.028533	0.110238
570.000000	60.000000	33.4875	116.09	0.03044	0.110198
575.000000	60.000000	37.9557	110.717	0.032396	0.109625
580.000000	60.000000	45.9982	106.311	0.03139	0.10559
585.000000	60.000000	59.8735	103.326	0.033988	0.111525
590.000000	60.000000	78.3106	102.563	0.054327	0.2586
595.000000	60.000000	69.2276	90.9722	0.049276	0.155529
600.000000	60.000000	52.5476	91.1199	0.039519	0.11771
605.000000	60.000000	41.9213	94.5723	0.035073	0.112245
610.000000	60.000000	35.8588	98.9746	0.032782	0.112709
615.000000	60.000000	32.1885	104.154	0.030756	0.111028
620.000000	60.000000	29.8405	109.871	0.028626	0.114276
625.000000	60.000000	28.2803	115.873	0.027842	0.11139
630.000000	60.000000	27.1747	122.197	0.027089	0.117935
635.000000	60.000000	26.3437	128.469	0.025761	0.115505
640.000000	60.000000	25.6547	134.746	0.026029	0.133974
645.000000	60.000000	25.0515	141.092	0.026952	0.140961
650.000000	60.000000	24.4913	147.353	0.026092	0.181273
655.000000	60.000000	23.9018	153.741	0.025404	0.200221
660.000000	60.000000	23.3357	160.157	0.025707	0.277981
665.000000	60.000000	22.7584	166.375	0.025907	0.390418
670.000000	60.000000	22.1683	172.5	0.024995	0.732681
675.000000	60.000000	21.5663	174.762	0.026191	1.01327
680.000000	60.000000	21.0455	169.246	0.02411	0.530965
685.000000	60.000000	20.6294	161.977	0.024707	0.30809
690.000000	60.000000	20.4036	153.633	0.025199	0.223684
695.000000	60.000000	20.5507	144.694	0.02623	0.178145
700.000000	60.000000	21.2096	134.509	0.028048	0.158093
705.000000	60.000000	22.84	122.919	0.027253	0.133382
710.000000	60.000000	25.9759	109.803	0.034885	0.124554
715.000000	60.000000	31.5918	94.4275	0.048002	0.134317
720.000000	60.000000	41.044	73.7274	0.093233	0.223307
725.000000	60.000000	51.6799	42.5373	0.226675	0.609963
730.000000	60.000000	52.2037	31.8094	0.157831	0.766106
735.000000	60.000000	44.6356	52.6835	0.103992	0.29068
740.000000	60.000000	38.2313	65.4259	0.065221	0.181245
745.000000	60.000000	34.0274	73.9927	0.041277	0.159569
750.000000	60.000000	31.4185	80.0344	0.038576	0.141566
755.000000	60.000000	29.9471	84.7795	0.03636	0.129437
760.000000	60.000000	29.1424	88.7422	0.032177	0.120501
765.000000	60.000000	28.7861	92.2076	0.030355	0.121742
770.000000	60.000000	28.6868	95.6574	0.031329	0.122761
775.000000	60.000000	28.7737	98.9097	0.031519	0.120533
780.000000	60.000000	28.9714	101.956	0.031879	0.111902
785.000000	60.000000	29.2286	104.877	0.030051	0.109543
790.000000	60.000000	29.4913	107.632	0.030281	0.10732
795.000000	60.000000	29.7774	110.338	0.028969	0.110213
800.000000	60.000000	30.081	113.024	0.02872	0.105957
805.000000	60.000000	30.3786	115.706	0.028223	0.114374
810.000000	60.000000	30.6468	118.216	0.030479	0.112659
815.000000	60.000000	30.9152	120.72	0.028154	0.115479
820.000000	60.000000	31.1705	123.254	0.028112	0.112328
825.000000	60.000000	31.3828	125.531	0.028257	0.115157
830.000000	60.000000	31.593	127.874	0.028793	0.121203
835.000000	60.000000	31.7609	130.089	0.029561	0.123985
840.000000	60.000000	31.914	132.175	0.030792	0.130992
845.000000	60.000000	32.0364	134.319	0.029134	0.132002
850.000000	60.000000	32.1657	136.458	0.030678	0.141422
855.000000	60.000000	32.2611	138.512	0.028955	0.139942
860.000000	60.000000	32.303	140.485	0.030676	0.150231
865.000000	60.000000	32.367	142.317	0.028279	0.150234
870.000000	60.000000	32.4074	144.163	0.029913	0.154655
875.000000	60.000000	32.431	145.983	0.028311	0.159319
880.000000	60.000000	32.41	147.777	0.029254	0.16905
885.000000	60.000000	32.4235	149.442	0.028499	0.170759
890.000000	60.000000	32.4299	151.034	0.029202	0.193295
895.000000	60.000000	32.3707	152.653	0.028513	0.187709
900.000000	60.000000	32.333	154.188	0.029106	0.21807
905.000000	60.000000	32.2843	155.699	0.029012	0.212355
910.000000	60.000000	32.2227	157.161	0.029162	0.244661
915.000000	60.000000	32.1524	158.594	0.028732	0.247257
920.000000	60.000000	32.0773	159.9	0.028983	0.266794
925.000000	60.000000	31.9791	161.072	0.029247	0.287528
930.000000	60.000000	31.8687	162.56	0.028578	0.299558
935.000000	60.000000	31.7444	163.833	0.029119	0.319083
940.000000	60.000000	31.6275	164.936	0.027938	0.32941
945.000000	60.000000	31.5058	166.132	0.029057	0.367815
950.000000	60.000000	31.3844	167.203	0.028936	0.38471
955.000000	60.000000	31.2708	168.212	0.029323	0.430452
960.000000	60.000000	31.1569	169.187	0.029433	0.467492
965.000000	60.000000	31.0275	170.106	0.030579	0.562506
970.000000	60.000000	30.8895	171.154	0.029052	0.565772
975.000000	60.000000	30.747	171.98	0.02908	0.686035
980.000000	60.000000	30.6102	172.806	0.028693	0.683047
985.000000	60.000000	30.4898	173.492	0.02966	0.891104
990.000000	60.000000	30.3643	173.864	0.028608	0.808765
995.000000	60.000000	30.2448	174.986	0.029525	1.10059
1000.000000	60.000000	30.1208	175.12	0.029068	1.0566
500.000000	70.000000	8.24812	71.1394	0.031616	0.248548
505.000000	70.000000	7.51196	112.833	0.018125	0.144139
510.000000	70.000000	8.62515	150.002	0.015817	0.29603
515.000000	70.000000	10.8987	169.423	0.020006	0.692065
520.000000	70.000000	13.6599	155.052	0.019104	0.246404
525.000000	70.000000	16.5178	139.178	0.019009	0.147444
530.000000	70.000000	19.3781	125.115	0.022068	0.120873
535.000000	70.000000	21.9919	113.586	0.024204	0.110836
540.000000	70.000000	24.5156	103.671	0.026858	0.108698
545.000000	70.000000	26.952	95.5894	0.027187	0.116041
550.000000	70.000000	29.6488	88.7328	0.029601	0.121503
555.000000	70.000000	32.9164	83.3242	0.032845	0.128678
560.000000	70.000000	37.2579	79.475	0.03729	0.13459
565.000000	70.000000	43.9707	76.4888	0.036269	0.138455
570.000000	70.000000	54.8918	72.2063	0.044394	0.153517
575.000000	70.000000	70.3899	55.3812	0.081788	0.360918
580.000000	70.000000	72.0227	42.9194	0.102557	0.553457
585.000000	70.000000	57.0968	60.0272	0.050755	0.205343
590.000000	70.000000	46.115	64.3765	0.045557	0.173433
595.000000	70.000000	39.2707	66.9074	0.037584	0.159072
600.000000	70.000000	34.655	69.7459	0.037528	0.153746
605.000000	70.000000	31.2279	73.395	0.035114	0.145944
610.000000	70.000000	28.4712	77.8757	0.03116	0.139319
615.000000	70.000000	26.055	83.1079	0.028442	0.13151
620.000000	70.000000	23.7488	89.0507	0.028217	0.128962
625.000000	70.000000	21.4904	95.764	0.029626	0.118473
630.000000	70.000000	19.1471	103.548	0.02467	0.118494
635.000000	70.000000	16.8195	112.236	0.025275	0.116363
640.000000	70.000000	14.5006	122.234	0.021818	0.138347
645.000000	70.000000	12.2584	134.223	0.022697	0.163668
650.000000	70.000000	10.2895	148.991	0.026938	0.294178
655.000000	70.000000	8.72379	164.3	0.026304	0.66383
660.000000	70.000000	8.15436	156.227	0.02228	0.528722
665.000000	70.000000	8.73708	133.465	0.024498	0.249521
670.000000	70.000000	10.4784	112.899	0.030192	0.186671
675.000000	70.000000	13.1523	96.7591	0.031643	0.155937
680.000000	70.000000	16.6741	84.5584	0.035399	0.164572
685.000000	70.000000	20.8068	75.4063	0.044167	0.179193
690.000000	70.000000	25.7882	67.2799	0.055881	0.189634
695.000000	70.000000	32.3327	58.9441	0.062756	0.238387
700.000000	70.000000	40.5384	46.9895	0.096712	0.321117
705.000000	70.000000	48.469	30.2614	0.137912	0.573793
710.000000	70.000000	51.0289	20.0295	0.130767	0.906028
715.000000	70.000000	47.675	31.7258	0.10282	0.457672
720.000000	70.000000	42.5649	42.3424	0.076492	0.304808
725.000000	70.000000	38.394	48.2431	0.057638	0.257367
730.000000	70.000000	35.4397	52.1095	0.046732	0.21117
735.000000	70.000000	33.551	54.9646	0.045358	0.211644
740.000000	70.000000	32.3446	57.3416	0.045217	0.188478
745.000000	70.000000	31.5081	59.6701	0.040643	0.180286
750.000000	70.000000	30.9468	62.1182	0.037672	0.17108
755.000000	70.000000	30.5659	64.6096	0.037998	0.165275
760.000000	70.000000	30.2957	67.2544	0.035771	0.158161
765.000000	70.000000	30.0989	69.8621	0.037157	0.156708
770.000000	70.000000	29.9335	72.7349	0.042318	0.15653
775.000000	70.000000	29.8052	75.6023	0.044653	0.151695
780.000000	70.000000	29.6911	78.5239	0.03991	0.147372
785.000000	70.000000	29.6153	81.4529	0.035433	0.134364
790.000000	70.000000	29.534	84.2081	0.033289	0.124003
795.000000	70.000000	29.4087	87.0743	0.035708	0.129506
800.000000	70.000000	29.2796	89.966	0.03771	0.125783
805.000000	70.000000	29.1204	92.9994	0.035448	0.118208
810.000000	70.000000	28.9846	95.8746	0.030163	0.117558
815.000000	70.000000	28.8387	98.7814	0.029858	0.110012
820.000000	70.000000	28.6638	101.845	0.028272	0.10966
825.000000	70.000000	28.4882	104.58	0.027753	0.107656
830.000000	70.000000	28.2825	107.553	0.029291	0.11164
835.000000	70.000000	28.0707	110.33	0.027935	0.109657
840.000000	70.000000	27.8552	113.077	0.027278	0.114516
845.000000	70.000000	27.5979	115.898	0.030645	0.121238
850.000000	70.000000	27.3347	118.748	0.031277	0.124572
855.000000	70.000000	27.0645	121.52	0.031297	0.121062
860.000000	70.000000	26.7941	124.184	0.027029	0.128221
865.000000	70.000000	26.5165	126.934	0.028505	0.12906
870.000000	70.000000	26.2312	129.606	0.027314	0.134969
875.000000	70.000000	25.937	132.285	0.025407	0.122298
880.000000	70.000000	25.6179	134.954	0.024917	0.131441
885.000000	70.000000	25.3396	137.331	0.026006	0.134179
890.000000	70.000000	25.0337	139.798	0.025333	0.138883
895.000000	70.000000	24.7147	142.27	0.024607	0.149369
900.000000	70.000000	24.3881	144.633	0.023961	0.148402
905.000000	70.000000	24.0672	146.994	0.024945	0.168906
910.000000	70.000000	23.738	149.24	0.024611	0.171781
915.000000	70.000000	23.3983	151.623	0.024309	0.191267
920.000000	70.000000	23.094	153.681	0.023759	0.197123
925.000000	70.000000	22.7721	155.79	0.024008	0.230377
930.000000	70.000000	22.465	157.933	0.024154	0.243981
935.000000	70.000000	22.1601	159.991	0.027872	0.281236
940.000000	70.000000	21.859	161.818	0.023826	0.28773
945.000000	70.000000	21.5585	163.735	0.022843	0.346985
950.000000	70.000000	21.2712	165.679	0.024722	0.372222
955.000000	70.000000	20.979	167.23	0.022492	0.43208
960.000000	70.000000	20.7032	168.939	0.0252	0.508803
965.000000	70.000000	20.4435	170.257	0.027749	0.61925
970.000000	70.000000	20.1875	171.769	0.023608	0.693786
975.000000	70.000000	19.9483	172.981	0.022363	0.735476
980.000000	70.000000	19.7143	174.919	0.022588	1.08452
985.000000	70.000000	19.5079	175.049	0.021738	1.04309
990.000000	70.000000	19.3128	175.332	0.022203	1.18751
995.000000	70.000000	19.1442	175.652	0.02054	1.11531
1000.000000	70.000000	18.9987	174.884	0.022381	1.13496
500.000000	80.000000	15.186	14.9322	0.027233	0.778064
505.000000	80.000000	11.2536	10.3729	0.026988	1.17626
510.000000	80.000000	10.7029	32.0483	0.025832	0.406433
515.000000	80.000000	14.2543	50.708	0.020851	0.207884
520.000000	80.000000	19.2353	55.8588	0.023511	0.189133
525.000000	80.000000	23.9867	54.8652	0.027175	0.191295
530.000000	80.000000	28.0451	51.7095	0.028998	0.197865
535.000000	80.000000	31.3107	48.3158	0.031489	0.218846
540.000000	80.000000	34.0705	45.2689	0.033681	0.230403
545.000000	80.000000	36.6903	42.8837	0.034202	0.245733
550.000000	80.000000	39.6702	41.2232	0.036693	0.256311
555.000000	80.000000	43.7403	39.8813	0.03677	0.262751
560.000000	80.000000	49.7447	37.0575	0.036762	0.294375
565.000000	80.000000	57.6881	26.4672	0.039412	0.403762
570.000000	80.000000	60.9714	10.9795	0.039108	1.04911
575.000000	80.000000	54.686	26.0892	0.040764	0.422472
580.000000	80.000000	47.5855	32.0972	0.038456	0.333048
585.000000	80.000000	42.8191	33.8176	0.036568	0.327227
590.000000	80.000000	39.562	34.7457	0.03706	0.302883
595.000000	80.000000	37.0628	35.9082	0.036296	0.308012
600.000000	80.000000	34.8188	37.3644	0.034198	0.28168
605.000000	80.000000	32.5521	39.0428	0.035201	0.280381
610.000000	80.000000	30.182	40.7554	0.032497	0.260263
615.000000	80.000000	27.5453	42.1549	0.03078	0.248426
620.000000	80.000000	24.6295	42.7881	0.029201	0.250739
625.000000	80.000000	21.4783	42.0234	0.027381	0.254124
630.000000	80.000000	18.1673	38.5125	0.026751	0.293823
635.000000	80.000000	15.3209	30.6339	0.028748	0.382748
640.000000	80.000000	13.5169	17.5258	0.029149	0.725862
645.000000	80.000000	13.487	6.5112	0.030122	1.86589
650.000000	80.000000	15.1636	15.4631	0.030465	0.788049
655.000000	80.000000	17.9953	23.9433	0.029978	0.478015
660.000000	80.000000	21.2414	28.1728	0.031949	0.389107
665.000000	80.000000	24.6016	30.0779	0.033271	0.377505
670.000000	80.000000	28.2963	30.5175	0.033669	0.35309
675.000000	80.000000	32.2228	29.7135	0.039518	0.383888
680.000000	80.000000	36.6111	27.6394	0.040742	0.386633
685.000000	80.000000	41.2452	23.447	0.04152	0.475112
690.000000	80.000000	45.5836	16.3605	0.047719	0.694347
695.000000	80.000000	48.2954	7.91983	0.048615	1.41101
700.000000	80.000000	48.0941	11.2302	0.048904	1.02408
705.000000	80.000000	45.7104	18.7994	0.048296	0.596322
710.000000	80.000000	43.0851	23.206	0.041659	0.482934
715.000000	80.000000	40.9821	25.4768	0.041316	0.417391
720.000000	80.000000	39.4539	26.8353	0.040508	0.412178
725.000000	80.000000	38.398	27.8519	0.040194	0.376901
730.000000	80.000000	37.6345	28.8147	0.037722	0.372284
735.000000	80.000000	37.0859	29.8785	0.03945	0.357936
740.000000	80.000000	36.6686	30.976	0.037869	0.348565
745.000000	80.000000	36.3013	32.2004	0.037694	0.32965
750.000000	80.000000	35.9693	33.5997	0.038243	0.32014
755.000000	80.000000	35.6551	35.0257	0.036678	0.304768
760.000000	80.000000	35.3526	36.5404	0.037689	0.288438
765.000000	80.000000	35.0355	38.1814	0.036333	0.279761
770.000000	80.000000	34.6799	39.8669	0.038797	0.272978
775.000000	80.000000	34.2828	41.6511	0.039739	0.265318
780.000000	80.000000	33.8911	43.4197	0.040945	0.250581
785.000000	80.000000	33.4567	45.2945	0.036702	0.242077
790.000000	80.000000	33.0169	47.0507	0.037416	0.227005
795.000000	80.000000	32.525	48.9684	0.035209	0.219432
800.000000	80.000000	31.977	50.9218	0.033634	0.202181
805.000000	80.000000	31.4055	52.9136	0.032073	0.205708
810.000000	80.000000	30.7836	54.9027	0.033252	0.193594
815.000000	80.000000	30.1149	56.9397	0.032001	0.186894
820.000000	80.000000	29.3795	59.0597	0.02953	0.172261
825.000000	80.000000	28.6476	61.0325	0.028701	0.172396
830.000000	80.000000	27.81	63.1682	0.028723	0.163211
835.000000	80.000000	26.964	65.2164	0.028994	0.161829
840.000000	80.000000	26.1064	67.19	0.027947	0.155296
845.000000	80.000000	25.1686	69.2042	0.033532	0.159994
850.000000	80.000000	24.1466	71.3181	0.029526	0.147805
855.000000	80.000000	23.1415	73.3234	0.029996	0.160092
860.000000	80.000000	22.097	75.2928	0.030385	0.146781
865.000000	80.000000	20.9893	77.1761	0.027131	0.137001
870.000000	80.000000	19.8851	79.0906	0.024458	0.13381
875.000000	80.000000	18.7201	80.9507	0.022291	0.132186
880.000000	80.000000	17.5356	82.7325	0.019975	0.129698
885.000000	80.000000	16.4316	84.2945	0.019897	0.128028
890.000000	80.000000	15.2885	85.7647	0.020081	0.129666
895.000000	80.000000	14.1504	87.1316	0.016955	0.125692
900.000000	80.000000	13.0004	88.3553	0.017931	0.123152
905.000000	80.000000	11.8993	89.4241	0.015383	0.121735
910.000000	80.000000	10.7787	90.2404	0.01694	0.134764
915.000000	80.000000	9.67805	90.8906	0.013	0.118506
920.000000	80.000000	8.69315	91.1183	0.01305	0.135741
925.000000	80.000000	7.70921	90.9774	0.014632	0.148091
930.000000	80.000000	6.74935	90.3246	0.013649	0.130057
935.000000	80.000000	5.87421	89.2347	0.017111	0.166958
940.000000	80.000000	5.04497	87.1483	0.015445	0.17703
945.000000	80.000000	4.30501	84.0985	0.017372	0.212716
950.000000	80.000000	3.58843	79.3623	0.0202	0.269535
955.000000	80.000000	3.0156	72.7735	0.027815	0.347225
960.000000	80.000000	2.66972	64.6472	0.037191	0.560858
965.000000	80.000000	2.42563	54.606	0.0538	1.02012
970.000000	80.000000	2.2854	42.965	0.041863	1.27896
975.000000	80.000000	2.37103	36.3572	0.038088	1.36363
980.000000	80.000000	2.50103	30.6905	0.024787	1.07383
985.000000	80.000000	2.90582	34.8391	0.031392	1.01466
990.000000	80.000000	3.2377	35.9162	0.025648	0.785127
995.000000	80.000000	3.58211	37.9203	0.018761	0.543412
1000.000000	80.000000	4.03281	41.0728	0.024611	0.560162