6500Å SiO2 on Si, ECR etching
nm
500.000000	70.199997	18.282539	122.655945	0.240426	1.160977	0.190400
600.000000	70.199997	51.069641	81.103455	0.183011	0.605849	0.243500
800.000000	70.199997	24.302416	89.381668	0.194219	0.671723	0.334117
500.000000	70.199997	18.291504	122.676659	0.241429	1.160040	0.648100
600.000000	70.199997	51.132801	81.200638	0.182120	0.604055	0.700283
800.000000	70.199997	24.336679	89.359360	0.197483	0.664947	0.792750
500.000000	70.199997	18.433270	122.312874	0.243133	1.149216	1.095750
600.000000	70.199997	51.162167	81.084229	0.183268	0.600829	1.149750
800.000000	70.199997	24.294397	89.434708	0.195622	0.680093	1.241300
500.000000	70.199997	18.353628	122.602859	0.239134	1.159448	1.551617
600.000000	70.199997	51.111481	81.173912	0.180538	0.604087	1.605633
800.000000	70.199997	24.371965	89.289299	0.193316	0.645914	1.696267
500.000000	70.199997	18.351282	122.627075	0.239478	1.144068	2.006583
600.000000	70.199997	51.166485	81.175781	0.186008	0.595848	2.060600
800.000000	70.199997	24.352896	89.493370	0.198706	0.672788	2.152133
500.000000	70.199997	18.340328	122.587151	0.237349	1.169959	2.464300
600.000000	70.199997	51.169983	81.242722	0.183712	0.591900	2.518300
800.000000	70.199997	24.333315	89.350441	0.191871	0.675589	2.609850
500.000000	70.199997	18.305017	122.613876	0.245846	1.175034	2.921083
600.000000	70.199997	51.170879	81.219254	0.182096	0.592280	2.975100
800.000000	70.199997	24.175865	89.355431	0.202536	0.663502	3.065717
500.000000	70.199997	18.321264	122.649017	0.244524	1.161355	3.378800
600.000000	70.199997	51.204987	81.172493	0.181897	0.598752	3.431883
800.000000	70.199997	24.325809	89.375175	0.195445	0.665349	3.525267
500.000000	70.199997	18.352348	122.722336	0.247034	1.181162	3.832833
600.000000	70.199997	51.105972	81.067810	0.187004	0.600790	3.886850
800.000000	70.199997	24.397038	89.288322	0.210573	0.748929	3.978400
500.000000	70.199997	18.397614	122.442711	0.250460	1.175453	4.289633
600.000000	70.199997	51.100510	81.032921	0.191358	0.600207	4.343650
800.000000	70.199997	24.392702	89.314751	0.185485	0.715825	4.435184
500.000000	70.199997	18.343552	122.527824	0.245110	1.167799	4.747350
600.000000	70.199997	51.056469	80.996574	0.189030	0.586270	4.800433
800.000000	70.199997	24.384617	89.180397	0.185012	0.683003	4.892900
500.000000	70.199997	18.352566	122.404144	0.246985	1.172639	5.205050
600.000000	70.199997	51.086189	81.029396	0.189803	0.584315	5.259067
800.000000	70.199997	24.374531	89.222092	0.187917	0.712350	5.348767
500.000000	70.199997	18.331841	122.380524	0.247963	1.169545	5.660933
600.000000	70.199997	51.093616	80.934837	0.183705	0.603257	5.714933
800.000000	70.199997	24.394148	89.240822	0.188210	0.663080	5.805567
500.000000	70.199997	18.354393	122.372810	0.243944	1.167968	6.118633
600.000000	70.199997	51.063057	81.159065	0.185986	0.588488	6.171733
800.000000	70.199997	24.342161	89.139000	0.185377	0.684059	6.263267
500.000000	70.199997	18.321999	122.392578	0.252057	1.177608	6.570850
600.000000	70.199997	50.931141	80.874062	0.204226	0.622040	6.623950
800.000000	70.199997	24.495726	89.153496	0.198186	0.726318	6.715483
500.000000	70.199997	18.465948	121.701759	0.246947	1.143006	7.024900
600.000000	70.199997	50.712112	81.069260	0.184755	0.602625	7.078917
800.000000	70.199997	24.468414	88.881416	0.191376	0.686139	7.170450
500.000000	70.199997	18.689257	120.631012	0.242890	1.111848	7.481700
600.000000	70.199997	49.902218	80.817612	0.208911	0.626993	7.535700
800.000000	70.199997	24.679277	88.377960	0.190829	0.710894	7.627250
500.000000	70.199997	19.041994	119.030396	0.248858	1.081411	7.937567
600.000000	70.199997	48.797688	80.323723	0.201450	0.600285	7.991583
800.000000	70.199997	24.936743	88.103531	0.193086	0.667221	8.083117
500.000000	70.199997	19.560759	117.239624	0.251124	1.006927	8.393450
600.000000	70.199997	47.970798	80.190506	0.173577	0.574632	8.447450
800.000000	70.199997	25.319002	87.595680	0.175114	0.598304	8.539917
500.000000	70.199997	20.035074	115.811516	0.236812	0.946980	8.851150
600.000000	70.199997	46.889320	80.384872	0.173034	0.553022	8.904250
800.000000	70.199997	25.723202	87.070938	0.196611	0.624358	8.995784
500.000000	70.199997	20.498110	113.432373	0.216133	0.960826	9.306117
600.000000	70.199997	45.842438	79.914009	0.172400	0.559415	9.360133
800.000000	70.199997	26.059410	86.574852	0.204009	0.597391	9.451667
500.000000	70.199997	20.944986	111.597580	0.216238	0.921728	9.762000
600.000000	70.199997	44.816376	79.483620	0.159959	0.552610	9.816000
800.000000	70.199997	26.318321	86.149345	0.210396	0.664443	9.907550
500.000000	70.199997	21.537004	109.661385	0.233024	0.924407	10.219700
600.000000	70.199997	43.977249	79.353767	0.171240	0.556977	10.273717
800.000000	70.199997	26.709660	85.947159	0.212688	0.639609	10.364333
500.000000	70.199997	22.026674	107.976059	0.226611	0.869196	10.676500
600.000000	70.199997	43.114731	79.098366	0.168088	0.506869	10.730500
800.000000	70.199997	27.050774	85.346169	0.201837	0.639345	10.821134
500.000000	70.199997	22.553911	106.806961	0.223640	0.831979	11.130550
600.000000	70.199997	42.325787	79.154961	0.186696	0.558529	11.183634
800.000000	70.199997	27.517122	84.523407	0.243371	0.709746	11.277017
500.000000	70.199997	22.935976	105.134628	0.260378	0.712108	11.589167
600.000000	70.199997	41.478607	78.687988	0.194038	0.582340	11.643184
800.000000	70.199997	27.626322	84.266830	0.327493	0.760239	11.734716
500.000000	70.199997	23.575340	102.923927	0.211489	0.810408	12.045050
600.000000	70.199997	40.484650	78.961670	0.173173	0.570884	12.099050
800.000000	70.199997	27.770336	84.237022	0.361625	0.816631	12.190600
500.000000	70.199997	24.225475	101.467331	0.198958	0.759130	12.501833
600.000000	70.199997	40.110420	79.278961	0.190263	0.638691	12.555850
800.000000	70.199997	28.626280	83.401733	0.232557	0.695508	12.647384
500.000000	70.199997	24.796864	100.541573	0.202487	0.719718	12.957717
600.000000	70.199997	39.128281	78.825226	0.198973	0.600417	13.011717
800.000000	70.199997	29.086454	83.870934	0.319047	0.817927	13.103267
500.000000	70.199997	25.322680	99.006760	0.211455	0.764024	13.413600
600.000000	70.199997	38.288273	79.353958	0.184002	0.567458	13.467600
800.000000	70.199997	29.722017	83.454124	0.236936	0.663089	13.559150
500.000000	70.199997	25.995764	97.492928	0.221414	0.737011	13.869467
600.000000	70.199997	37.578907	79.340828	0.178766	0.590649	13.923483
800.000000	70.199997	29.626835	82.585129	0.225481	0.700835	14.015017
500.000000	70.199997	26.538025	95.928802	0.199421	0.699371	14.326266
600.000000	70.199997	36.865078	79.042374	0.189416	0.604754	14.380267
800.000000	70.199997	30.255959	82.214043	0.251366	0.695744	14.471817
500.000000	70.199997	27.106567	94.843445	0.221889	0.680598	14.781217
600.000000	70.199997	36.242245	79.388626	0.175832	0.576893	14.835234
800.000000	70.199997	30.563538	81.891380	0.204179	0.609141	14.926784
500.000000	70.199997	27.662685	93.725258	0.192874	0.729601	15.237100
600.000000	70.199997	35.603600	79.590683	0.179657	0.553102	15.291117
800.000000	70.199997	31.405352	81.213776	0.265154	0.749095	15.383567
500.000000	70.199997	28.322987	92.568474	0.185922	0.652583	15.694817
600.000000	70.199997	35.064907	79.978378	0.170459	0.597187	15.748816
800.000000	70.199997	31.264996	81.040703	0.218238	0.554090	15.840366
500.000000	70.199997	28.861261	91.784966	0.186092	0.640072	16.150682
600.000000	70.199997	34.388897	80.080872	0.170923	0.548387	16.204700
800.000000	70.199997	31.724932	80.693367	0.209097	0.687234	16.296234
500.000000	70.199997	29.534769	90.642548	0.186860	0.645699	16.608400
600.000000	70.199997	33.575665	80.419601	0.169036	0.550485	16.661484
800.000000	70.199997	32.273979	80.836380	0.233419	0.736384	16.752117
500.000000	70.199997	30.326431	89.848175	0.171086	0.605517	17.063366
600.000000	70.199997	33.166588	80.786491	0.168807	0.602496	17.117367
800.000000	70.199997	32.869972	80.351112	0.227870	0.636410	17.208918
500.000000	70.199997	30.862984	89.184525	0.177327	0.614375	17.515566
600.000000	70.199997	32.507870	81.470810	0.178960	0.580649	17.569584
800.000000	70.199997	33.496403	80.334702	0.234722	0.695877	17.661133
500.000000	70.199997	31.517717	88.432266	0.174433	0.659038	17.975117
600.000000	70.199997	32.048779	81.642471	0.152527	0.558455	18.029118
800.000000	70.199997	33.980083	79.763657	0.193986	0.594255	18.120667
500.000000	70.199997	32.218941	87.620239	0.187342	0.581315	18.426416
600.000000	70.199997	31.491695	82.219070	0.168306	0.600490	18.480417
800.000000	70.199997	34.381107	79.461418	0.186950	0.583910	18.571051
500.000000	70.199997	32.685715	86.783661	0.170143	0.606421	18.881384
600.000000	70.199997	30.841846	82.883598	0.159840	0.594154	18.934467
800.000000	70.199997	34.742210	79.276291	0.211340	0.699513	19.026934
500.000000	70.199997	33.410263	86.391388	0.169942	0.616878	19.338167
600.000000	70.199997	30.355099	83.537376	0.165741	0.619693	19.392183
800.000000	70.199997	35.360939	79.278404	0.227180	0.652072	19.483717
500.000000	70.199997	34.151924	86.135124	0.172686	0.564723	19.793133
600.000000	70.199997	29.791485	84.337120	0.187693	0.650307	19.845316
800.000000	70.199997	35.815090	79.391251	0.166325	0.598610	19.936850
500.000000	70.199997	34.900227	85.657387	0.174205	0.600390	20.249916
600.000000	70.199997	29.325256	84.754524	0.175693	0.621328	20.303017
800.000000	70.199997	36.790798	79.067253	0.214295	0.600190	20.395483
500.000000	70.199997	35.596573	85.272148	0.159852	0.588949	20.706717
600.000000	70.199997	28.780849	85.328804	0.180259	0.613952	20.760733
800.000000	70.199997	37.262283	79.473442	0.186839	0.537472	20.852266
500.000000	70.199997	36.431496	85.154678	0.164527	0.557547	21.164433
600.000000	70.199997	28.170368	86.151955	0.187921	0.612098	21.218433
800.000000	70.199997	37.759155	79.107323	0.181551	0.611330	21.309067
500.000000	70.199997	37.207272	84.745720	0.165935	0.557696	21.619383
600.000000	70.199997	27.627497	86.970947	0.198114	0.644014	21.673401
800.000000	70.199997	38.384769	78.706894	0.204168	0.623798	21.764933
500.000000	70.199997	38.072567	84.651772	0.153003	0.560179	22.076183
600.000000	70.199997	27.323185	87.929939	0.182189	0.629034	22.127451
800.000000	70.199997	39.225277	78.679436	0.173857	0.549552	22.218067
500.000000	70.199997	39.103428	85.707954	5.520249	4.300807	22.522900
600.000000	70.199997	26.710173	88.723228	0.188480	0.657669	22.576916
800.000000	70.199997	39.638107	78.285858	0.157513	0.507776	22.668449
500.000000	70.199997	39.091900	84.565643	0.157453	0.572137	22.979700
600.000000	70.199997	26.618959	88.833755	0.181685	0.642237	23.033701
800.000000	70.199997	39.707172	78.550163	0.136902	0.483014	23.124332