Complex Poly-Si structure: OX NIT OX POLY OX
nm
250.000000	65.000000	45.884544	108.974983	0.104222	0.183441
260.000000	65.000000	51.114838	119.702484	0.064308	0.160218
270.000000	65.000000	57.434525	141.810165	0.057084	0.261471
280.000000	65.000000	62.145283	169.383606	0.061512	1.072140
290.000000	65.000000	61.633743	143.763107	0.052058	0.254957
300.000000	65.000000	58.379578	120.914551	0.044633	0.129917
310.000000	65.000000	54.442814	109.294655	0.040291	0.110841
320.000000	65.000000	50.346142	103.309242	0.044241	0.100087
330.000000	65.000000	47.307529	100.507149	0.035260	0.118601
340.000000	65.000000	44.655022	99.113457	0.031210	0.097928
350.000000	65.000000	42.757011	99.140106	0.041075	0.062568
360.000000	65.000000	40.817089	100.209908	0.032428	0.093794
370.000000	65.000000	38.928047	101.318512	0.050018	0.061954
380.000000	65.000000	36.855942	102.313576	0.039328	0.091242
390.000000	65.000000	35.060661	102.827423	0.032965	0.090750
400.000000	65.000000	33.794342	103.348343	0.032535	0.100666
410.000000	65.000000	32.081169	104.029488	0.036490	0.110226
420.000000	65.000000	31.789480	103.277840	0.040742	0.079552
430.000000	65.000000	30.991796	106.662292	0.034654	0.085658
440.000000	65.000000	28.480364	107.313812	0.038377	0.105234
450.000000	65.000000	28.205582	102.672363	0.039611	0.091689
460.000000	65.000000	29.801050	105.147873	0.041696	0.091333
470.000000	65.000000	29.176939	110.497292	0.033805	0.102550
480.000000	65.000000	27.031851	114.315178	0.030059	0.111465
490.000000	65.000000	24.090578	113.705635	0.038053	0.106475
500.000000	65.000000	23.043501	107.154480	0.031204	0.116947
510.000000	65.000000	25.066790	102.864220	0.029375	0.102770
520.000000	65.000000	26.885296	105.894775	0.032470	0.098040
530.000000	65.000000	27.377510	110.846909	0.035823	0.113758
540.000000	65.000000	26.942469	115.929756	0.041837	0.120208
550.000000	65.000000	25.705677	120.201538	0.035463	0.133806
560.000000	65.000000	23.865799	123.446625	0.040364	0.144913
570.000000	65.000000	21.739088	124.585991	0.037193	0.149659
580.000000	65.000000	19.846085	121.856850	0.036793	0.144390
590.000000	65.000000	18.809731	116.565643	0.032218	0.159718
600.000000	65.000000	19.216305	110.900337	0.033971	0.103631
610.000000	65.000000	20.381477	107.838577	0.032757	0.116603
620.000000	65.000000	22.105663	108.586922	0.034122	0.095773
630.000000	65.000000	23.417887	111.316650	0.033661	0.141344
640.000000	65.000000	23.860912	113.451584	0.034874	0.113152
650.000000	65.000000	23.746128	116.797073	0.036378	0.106713
660.000000	65.000000	23.839853	120.321495	0.034896	0.142396
670.000000	65.000000	23.622648	122.931206	0.036091	0.144471
680.000000	65.000000	23.330782	125.544724	0.039859	0.154485
690.000000	65.000000	22.718189	129.274689	0.038813	0.167376
700.000000	65.000000	22.021164	131.127945	0.039037	0.172199
710.000000	65.000000	21.256641	132.759048	0.047425	0.208523
720.000000	65.000000	20.019890	135.910568	0.038186	0.224605
730.000000	65.000000	19.561100	134.612350	0.048631	0.219333
740.000000	65.000000	18.341026	135.161545	0.035149	0.199758
750.000000	65.000000	17.466991	134.599564	0.035239	0.194312
760.000000	65.000000	16.743515	133.148819	0.034010	0.199184
770.000000	65.000000	16.255707	131.319580	0.033863	0.182563
780.000000	65.000000	15.920009	128.999207	0.035173	0.186022
790.000000	65.000000	15.841523	126.284958	0.030583	0.153531
800.000000	65.000000	15.982224	124.230957	0.032511	0.166113
810.000000	65.000000	16.365946	122.719849	0.033924	0.146415
820.000000	65.000000	16.787457	121.504295	0.031977	0.146990
830.000000	65.000000	17.272249	121.145996	0.030563	0.156757
840.000000	65.000000	17.723843	121.309937	0.032176	0.132259
850.000000	65.000000	18.206636	121.716896	0.038367	0.150692
860.000000	65.000000	18.592224	122.663284	0.033676	0.146397
870.000000	65.000000	19.002676	123.597069	0.035566	0.152887
880.000000	65.000000	19.267580	124.717331	0.032427	0.146929
890.000000	65.000000	19.423790	126.326096	0.036889	0.149369
900.000000	65.000000	19.606878	127.046974	0.037686	0.202950
910.000000	65.000000	19.848772	128.519897	0.038057	0.181269
920.000000	65.000000	19.975088	130.134949	0.038448	0.175798
930.000000	65.000000	19.898405	131.232697	0.037454	0.174027
940.000000	65.000000	19.914537	132.728287	0.037271	0.186253
950.000000	65.000000	19.881035	134.081772	0.035796	0.199740
960.000000	65.000000	19.820175	135.459290	0.037882	0.197286
970.000000	65.000000	19.678503	136.710938	0.040948	0.214749
980.000000	65.000000	19.584246	137.883255	0.037241	0.214233
990.000000	65.000000	19.474430	139.164154	0.039586	0.224952
1000.000000	65.000000	19.548693	140.427078	0.041667	0.230309
250.000000	70.000000	47.521103	92.923363	0.072668	0.168725
260.000000	70.000000	53.594902	105.347626	0.049836	0.139079
270.000000	70.000000	62.506794	133.520294	0.056278	0.224986
280.000000	70.000000	68.420212	163.128845	0.051521	0.660278
290.000000	70.000000	64.254959	121.463585	0.042829	0.155865
300.000000	70.000000	58.527306	98.899902	0.036293	0.096961
310.000000	70.000000	53.872509	89.127335	0.033543	0.078392
320.000000	70.000000	49.857647	84.631401	0.040051	0.082303
330.000000	70.000000	46.819401	82.230377	0.039489	0.074572
340.000000	70.000000	44.317513	81.609467	0.038815	0.085310
350.000000	70.000000	42.655453	81.545227	0.039888	0.090822
360.000000	70.000000	40.602016	82.506966	0.037101	0.089777
370.000000	70.000000	38.685825	83.994408	0.037816	0.084446
380.000000	70.000000	36.739956	84.778305	0.030970	0.074592
390.000000	70.000000	34.834759	85.013840	0.035081	0.072896
400.000000	70.000000	33.548103	85.362633	0.033657	0.104028
410.000000	70.000000	31.837069	85.501846	0.031636	0.087067
420.000000	70.000000	31.529581	84.740143	0.026873	0.077598
430.000000	70.000000	30.460443	88.120773	0.033132	0.090930
440.000000	70.000000	27.932039	87.541214	0.035065	0.100583
450.000000	70.000000	28.147219	83.008621	0.030624	0.084449
460.000000	70.000000	29.345497	86.077972	0.034618	0.099798
470.000000	70.000000	28.333887	91.438423	0.031751	0.085289
480.000000	70.000000	25.722492	94.432045	0.025941	0.082290
490.000000	70.000000	22.970398	91.091682	0.027573	0.059813
500.000000	70.000000	22.702843	83.910187	0.026275	0.090402
510.000000	70.000000	24.986832	81.420578	0.036869	0.086009
520.000000	70.000000	26.509466	85.774826	0.032187	0.086322
530.000000	70.000000	26.495758	90.799835	0.031992	0.077265
540.000000	70.000000	25.552883	95.948219	0.031742	0.078810
550.000000	70.000000	23.847366	100.057983	0.031592	0.068017
560.000000	70.000000	21.645203	102.094673	0.034293	0.112583
570.000000	70.000000	19.463133	100.967964	0.025218	0.084165
580.000000	70.000000	17.764183	95.911819	0.023317	0.098434
590.000000	70.000000	17.453247	89.525818	0.028415	0.100693
600.000000	70.000000	18.433170	84.422043	0.028153	0.105639
610.000000	70.000000	19.811533	83.455116	0.027223	0.085129
620.000000	70.000000	21.193655	85.248451	0.022538	0.099412
630.000000	70.000000	22.237095	87.543968	0.036859	0.047523
640.000000	70.000000	22.440744	91.203110	0.031159	0.055474
650.000000	70.000000	22.468254	94.557007	0.033450	0.094021
660.000000	70.000000	21.953695	98.735718	0.027258	0.084773
670.000000	70.000000	21.585674	101.817703	0.036228	0.062024
680.000000	70.000000	20.853516	105.494934	0.028532	0.079942
690.000000	70.000000	19.639748	107.373184	0.033566	0.099296
700.000000	70.000000	18.833000	109.945389	0.032042	0.099428
710.000000	70.000000	17.772699	112.076508	0.028936	0.126318
720.000000	70.000000	16.590162	111.227814	0.027123	0.104244
730.000000	70.000000	15.466926	110.892105	0.024366	0.100305
740.000000	70.000000	14.529805	109.476242	0.025535	0.105169
750.000000	70.000000	13.748540	107.049294	0.024121	0.096632
760.000000	70.000000	13.251670	103.764328	0.025113	0.091743
770.000000	70.000000	13.032474	100.607697	0.026264	0.085210
780.000000	70.000000	13.053882	97.284676	0.028269	0.119522
790.000000	70.000000	13.447674	94.286003	0.028482	0.143274
800.000000	70.000000	13.834887	92.588242	0.026337	0.090290
810.000000	70.000000	14.332765	91.725288	0.027409	0.097956
820.000000	70.000000	14.933579	91.297768	0.025539	0.078895
830.000000	70.000000	15.450523	91.081276	0.026609	0.085588
840.000000	70.000000	15.810467	92.711937	0.025324	0.083274
850.000000	70.000000	16.210766	94.245995	0.027988	0.109970
860.000000	70.000000	16.512524	95.660393	0.032808	0.082618
870.000000	70.000000	16.668243	97.175209	0.024863	0.106472
880.000000	70.000000	16.853773	99.115395	0.024377	0.081623
890.000000	70.000000	16.788021	100.118965	0.025368	0.115103
900.000000	70.000000	17.003672	102.373375	0.023387	0.098881
910.000000	70.000000	16.876617	103.834236	0.027899	0.102264
920.000000	70.000000	17.038206	106.479820	0.038185	0.124129
930.000000	70.000000	16.690540	107.555305	0.025548	0.089443
940.000000	70.000000	16.511005	109.341156	0.028743	0.090063
950.000000	70.000000	16.282763	110.954330	0.026624	0.114226
960.000000	70.000000	16.080486	112.332474	0.026466	0.114596
970.000000	70.000000	15.858859	113.903870	0.034654	0.127136
980.000000	70.000000	15.504950	115.262688	0.028524	0.115544
990.000000	70.000000	15.254248	116.540253	0.028246	0.120332
1000.000000	70.000000	15.124290	116.841270	0.035752	0.142595
250.000000	75.000000	48.124508	73.332634	0.079443	0.176113
260.000000	75.000000	55.901058	86.129059	0.043478	0.141859
270.000000	75.000000	68.633087	116.811615	0.054261	0.209260
280.000000	75.000000	75.518684	139.282150	0.053563	0.396675
290.000000	75.000000	64.686646	91.549850	0.036170	0.104036
300.000000	75.000000	57.090599	74.225456	0.034448	0.100646
310.000000	75.000000	52.203896	67.068016	0.054675	0.133746
320.000000	75.000000	48.753605	64.355179	0.060317	0.115148
330.000000	75.000000	46.243637	63.138000	0.043460	0.152654
340.000000	75.000000	44.242840	62.556221	0.045862	0.163851
350.000000	75.000000	42.549706	62.519932	0.042378	0.125543
360.000000	75.000000	41.025303	63.486412	0.044399	0.137009
370.000000	75.000000	39.204552	64.451202	0.035691	0.165419
380.000000	75.000000	37.306507	65.170532	0.039922	0.124159
390.000000	75.000000	35.668102	65.035439	0.039308	0.133592
400.000000	75.000000	34.483944	65.067490	0.037501	0.153560
410.000000	75.000000	32.864704	64.849670	0.035740	0.138245
420.000000	75.000000	32.682980	64.150032	0.040051	0.140564
430.000000	75.000000	31.470606	66.776665	0.040262	0.130774
440.000000	75.000000	29.229881	65.045372	0.033967	0.132028
450.000000	75.000000	29.744417	61.285011	0.042923	0.146533
460.000000	75.000000	30.663725	64.689285	0.038869	0.122123
470.000000	75.000000	29.290777	69.096054	0.037462	0.118285
480.000000	75.000000	26.531008	70.218628	0.033384	0.108190
490.000000	75.000000	24.364578	65.415100	0.031098	0.117540
500.000000	75.000000	24.945312	59.148705	0.039276	0.145513
510.000000	75.000000	27.054348	58.879471	0.038523	0.145563
520.000000	75.000000	28.022142	63.258896	0.040320	0.134133
530.000000	75.000000	27.552010	67.810410	0.039526	0.098295
540.000000	75.000000	26.151470	71.972305	0.027052	0.109238
550.000000	75.000000	24.216213	74.332832	0.033661	0.102235
560.000000	75.000000	21.814653	73.999741	0.037996	0.096606
570.000000	75.000000	19.907803	70.479782	0.032026	0.138982
580.000000	75.000000	19.194794	64.311699	0.033164	0.127367
590.000000	75.000000	19.796740	58.543842	0.038369	0.169666
600.000000	75.000000	21.204409	55.724461	0.036080	0.155292
610.000000	75.000000	22.546564	56.352150	0.033021	0.156831
620.000000	75.000000	23.561789	58.942974	0.035039	0.146634
630.000000	75.000000	23.931925	62.866703	0.033802	0.174565
640.000000	75.000000	23.822474	66.031746	0.037153	0.117768
650.000000	75.000000	23.493261	68.750458	0.031538	0.126179
660.000000	75.000000	22.538937	71.952049	0.037389	0.094635
670.000000	75.000000	21.730043	74.474396	0.026174	0.116726
680.000000	75.000000	20.384348	76.804832	0.034289	0.129061
690.000000	75.000000	19.448477	77.134964	0.032909	0.118724
700.000000	75.000000	18.169022	77.431404	0.033955	0.103136
710.000000	75.000000	17.122295	75.492752	0.031512	0.112153
720.000000	75.000000	16.045929	75.261757	0.026446	0.099433
730.000000	75.000000	15.156716	72.568565	0.024506	0.100601
740.000000	75.000000	14.590742	69.190338	0.026249	0.107435
750.000000	75.000000	14.328666	65.453392	0.028126	0.134468
760.000000	75.000000	14.427805	61.768913	0.027906	0.145060
770.000000	75.000000	14.732317	58.970188	0.028252	0.143329
780.000000	75.000000	15.172144	57.089687	0.034968	0.194161
790.000000	75.000000	15.818846	55.814236	0.032182	0.161297
800.000000	75.000000	16.340401	55.357727	0.029943	0.170109
810.000000	75.000000	16.884212	55.603996	0.032349	0.173311
820.000000	75.000000	17.358511	56.575542	0.031252	0.151722
830.000000	75.000000	17.662752	57.846046	0.035129	0.152913
840.000000	75.000000	18.045929	59.308014	0.031500	0.152432
850.000000	75.000000	18.077562	60.858437	0.031528	0.142243
860.000000	75.000000	18.153210	62.265778	0.038523	0.156644
870.000000	75.000000	18.048347	64.056374	0.032695	0.149450
880.000000	75.000000	18.005796	65.211510	0.033179	0.136132
890.000000	75.000000	17.856115	66.435051	0.032020	0.112590
900.000000	75.000000	17.526253	68.433495	0.028910	0.107910
910.000000	75.000000	17.233057	69.481331	0.029574	0.111044
920.000000	75.000000	16.987432	71.381058	0.029316	0.134693
930.000000	75.000000	16.663378	72.613449	0.026741	0.098953
940.000000	75.000000	16.251616	73.701904	0.025455	0.105092
950.000000	75.000000	15.844364	74.723000	0.027459	0.093333
960.000000	75.000000	15.451334	75.629868	0.026381	0.110852
970.000000	75.000000	15.009460	76.298187	0.027999	0.114621
980.000000	75.000000	14.530544	76.894257	0.026505	0.090433
990.000000	75.000000	14.109158	77.302711	0.023664	0.102848
1000.000000	75.000000	13.703456	77.695427	0.023142	0.089877
250.000000	80.000000	48.425884	50.505901	0.062046	0.275546
260.000000	80.000000	55.894272	60.493984	0.058071	0.199102
270.000000	80.000000	72.679054	78.902634	0.050240	0.181238
280.000000	80.000000	77.658028	74.518105	0.036307	0.214323
290.000000	80.000000	61.333618	58.597099	0.042073	0.154108
300.000000	80.000000	53.637367	48.889542	0.054857	0.199126
310.000000	80.000000	50.264622	45.073658	0.054998	0.231644
320.000000	80.000000	47.612976	43.133476	0.055825	0.229899
330.000000	80.000000	45.789669	42.341541	0.054684	0.228257
340.000000	80.000000	44.201256	42.051365	0.054023	0.225362
350.000000	80.000000	43.071125	42.321442	0.055424	0.235956
360.000000	80.000000	41.821270	42.922054	0.058373	0.232016
370.000000	80.000000	40.430576	43.727238	0.055899	0.228468
380.000000	80.000000	38.999390	44.092007	0.050125	0.237763
390.000000	80.000000	37.771481	43.891132	0.054415	0.232279
400.000000	80.000000	36.862877	43.613819	0.050842	0.224229
410.000000	80.000000	35.625359	43.147003	0.049758	0.227456
420.000000	80.000000	35.500904	42.531528	0.055931	0.240672
430.000000	80.000000	34.415543	44.252716	0.050255	0.229803
440.000000	80.000000	32.779816	42.225578	0.051796	0.242185
450.000000	80.000000	33.484398	39.820557	0.052528	0.255820
460.000000	80.000000	33.423134	42.967381	0.058365	0.215719
470.000000	80.000000	32.075306	44.592072	0.056892	0.229345
480.000000	80.000000	31.076281	43.964149	0.060161	0.267736
490.000000	80.000000	28.964325	40.605724	0.048323	0.248449
500.000000	80.000000	29.909922	36.642883	0.049898	0.289710
510.000000	80.000000	31.578066	37.307411	0.051039	0.286816
520.000000	80.000000	31.961985	40.632015	0.050709	0.249274
530.000000	80.000000	31.223034	43.985283	0.048969	0.223979
540.000000	80.000000	29.836948	46.222836	0.049087	0.202571
550.000000	80.000000	27.897203	46.823982	0.045789	0.206632
560.000000	80.000000	26.089817	45.097469	0.047229	0.221664
570.000000	80.000000	25.022856	41.102943	0.042874	0.255838
580.000000	80.000000	25.034298	36.451603	0.045238	0.287801
590.000000	80.000000	25.971607	33.304901	0.047896	0.318137
600.000000	80.000000	27.325014	32.933502	0.049149	0.317578
610.000000	80.000000	28.239725	33.881901	0.050197	0.312515
620.000000	80.000000	28.827265	35.953297	0.050531	0.303656
630.000000	80.000000	28.834555	38.471985	0.050781	0.288833
640.000000	80.000000	28.421951	40.905682	0.047587	0.250512
650.000000	80.000000	27.908779	43.251465	0.046093	0.261359
660.000000	80.000000	27.070635	43.971035	0.045962	0.233617
670.000000	80.000000	25.996367	45.309147	0.043104	0.212403
680.000000	80.000000	24.964399	45.120285	0.044469	0.214455
690.000000	80.000000	23.902132	45.588856	0.042808	0.208553
700.000000	80.000000	22.855461	44.604595	0.041698	0.212942
710.000000	80.000000	21.894764	42.775269	0.041535	0.231459
720.000000	80.000000	21.529156	41.311504	0.041578	0.227821
730.000000	80.000000	21.209642	36.351791	0.047460	0.305909
740.000000	80.000000	21.087219	34.913986	0.044931	0.372368
750.000000	80.000000	21.125710	31.905788	0.046259	0.346351
760.000000	80.000000	21.815319	32.110832	0.048568	0.329086
770.000000	80.000000	21.935369	30.444960	0.052672	0.362267
780.000000	80.000000	22.549473	32.411514	0.057804	0.399474
790.000000	80.000000	23.660528	30.479153	0.051494	0.335852
800.000000	80.000000	23.540525	29.977356	0.052783	0.415927
810.000000	80.000000	23.789892	31.118988	0.053415	0.344545
820.000000	80.000000	24.427656	30.298111	0.048281	0.348141
830.000000	80.000000	24.464634	31.775223	0.047458	0.315745
840.000000	80.000000	24.397341	31.893610	0.047811	0.294411
850.000000	80.000000	24.309998	32.730476	0.057668	0.390043
860.000000	80.000000	24.375244	34.994068	0.047137	0.295964
870.000000	80.000000	24.602829	35.536018	0.052813	0.272822
880.000000	80.000000	24.010473	36.630859	0.051453	0.302223
890.000000	80.000000	23.684338	37.746910	0.043162	0.274242
900.000000	80.000000	23.389221	38.321320	0.046460	0.253163
910.000000	80.000000	23.047117	38.810909	0.045549	0.257876
920.000000	80.000000	22.636473	39.178303	0.043237	0.259732
930.000000	80.000000	22.387999	40.091488	0.045227	0.304412
940.000000	80.000000	21.908791	39.992802	0.049207	0.243038
950.000000	80.000000	21.464745	39.281620	0.044455	0.273552
960.000000	80.000000	21.052805	39.941624	0.054663	0.287419
970.000000	80.000000	20.536160	39.704777	0.040822	0.251393
980.000000	80.000000	20.470268	40.145412	0.040046	0.245255
990.000000	80.000000	19.814863	40.178905	0.041503	0.257825
1000.000000	80.000000	19.226330	39.136189	0.040370	0.298957