Poly-Silicon / Oxide / Silicon, VASE data
nm
250.000000	70.000000	32.9122	101.92	0.0330932	0.0738862
255.000000	70.000000	32.951	103.87	0.0253854	0.0569369
260.000000	70.000000	33.0379	106.659	0.0231351	0.0524465
265.000000	70.000000	32.9721	109.069	0.0194434	0.0445768
270.000000	70.000000	32.7353	111.893	0.0183024	0.0428339
275.000000	70.000000	32.4796	114.675	0.017183	0.0411518
280.000000	70.000000	31.8664	117.577	0.0163536	0.0404933
285.000000	70.000000	31.1794	120.433	0.025361	0.0659571
290.000000	70.000000	30.3411	123.106	0.0214022	0.05804
295.000000	70.000000	29.3269	125.247	0.018116	0.0512396
300.000000	70.000000	28.3927	126.701	0.0172672	0.0507052
305.000000	70.000000	27.6025	127.907	0.0161631	0.0490272
310.000000	70.000000	26.9106	128.837	0.0157126	0.0490644
315.000000	70.000000	26.2873	129.705	0.0151002	0.0484471
320.000000	70.000000	25.7389	130.459	0.0148951	0.0490208
325.000000	70.000000	25.2868	131.231	0.0145476	0.0490084
330.000000	70.000000	24.9254	132.064	0.0143797	0.0495622
335.000000	70.000000	24.6128	133.006	0.0177142	0.0630468
340.000000	70.000000	24.3804	133.924	0.0167311	0.0607735
345.000000	70.000000	24.2212	135.053	0.0171529	0.0638827
350.000000	70.000000	24.0916	136.445	0.0170515	0.0653497
355.000000	70.000000	23.9688	138.064	0.0166563	0.0660058
360.000000	70.000000	23.7177	140.118	0.0167711	0.0698348
370.000000	70.000000	22.8187	145.252	0.0209951	0.101926
380.000000	70.000000	21.2205	148.823	0.016147	0.0907417
390.000000	70.000000	19.7262	150.821	0.0152597	0.0965204
400.000000	70.000000	18.4993	151.951	0.0145382	0.100509
410.000000	70.000000	17.5142	152.882	0.0139731	0.104322
420.000000	70.000000	16.7167	152.609	0.0134712	0.10367
430.000000	70.000000	15.7307	155.064	0.0130408	0.115434
440.000000	70.000000	15.4059	150.805	0.0125732	0.0978543
450.000000	70.000000	15.4253	159.219	0.0128501	0.137424
460.000000	70.000000	11.9089	152.695	0.0104594	0.108625
470.000000	70.000000	15.8067	145.115	0.0123951	0.0803429
480.000000	70.000000	16.4094	166.484	0.0137535	0.211869
490.000000	70.000000	8.65554	173.255	0.00897232	0.49345
500.000000	70.000000	11.4077	119.591	0.0092308	0.0522328
510.000000	70.000000	18.8899	141.997	0.0141716	0.0734639
520.000000	70.000000	19.3229	171.395	0.0157663	0.330755
530.000000	70.000000	13.2024	154.354	0.0114675	0.115288
540.000000	70.000000	2.20783	65.2733	0.0119706	0.193339
550.000000	70.000000	14.0633	94.5248	0.0100159	0.0410046
560.000000	70.000000	20.0015	128.15	0.0139093	0.0538312
570.000000	70.000000	21.9273	154.266	0.0167626	0.109489
580.000000	70.000000	20.7327	177.367	0.0167661	1.08248
590.000000	70.000000	16.6826	151.025	0.0134843	0.0987393
600.000000	70.000000	10.5498	111.336	0.00989495	0.0566964
610.000000	70.000000	7.76496	20.4694	0.00799247	0.163402
620.000000	70.000000	14.888	68.7621	0.0113815	0.0477018
630.000000	70.000000	18.762	105.598	0.0123618	0.0410912
640.000000	70.000000	21.0399	128.146	0.014712	0.0547246
650.000000	70.000000	22.1734	147.49	0.0166118	0.0869018
660.000000	70.000000	22.0619	165.861	0.0175102	0.202466
670.000000	70.000000	20.7861	175.8	0.0169059	0.683377
680.000000	70.000000	18.497	156.6	0.0149883	0.122831
690.000000	70.000000	15.424	135.455	0.0120215	0.0649101
700.000000	70.000000	12.0061	107.927	0.00999728	0.0496713
710.000000	70.000000	9.59857	64.3095	0.00763255	0.0482963
720.000000	70.000000	11.0544	5.60978	0.0104007	0.543358
730.000000	70.000000	14.8956	52.6708	0.0112789	0.0552788
740.000000	70.000000	16.9448	85.3769	0.0128151	0.0450559
750.000000	70.000000	18.3598	105.663	0.0127378	0.0432051
760.000000	70.000000	19.5651	120.839	0.0139759	0.0505089
770.000000	70.000000	20.4398	133.791	0.0150919	0.0626568
780.000000	70.000000	20.9282	145.98	0.0165471	0.087126
790.000000	70.000000	20.9876	157.377	0.0175804	0.134493
800.000000	70.000000	20.6458	168.572	0.0179231	0.269887
810.000000	70.000000	19.9435	180	0.0180034	90
820.000000	70.000000	18.9002	169.366	0.0160604	0.278667
830.000000	70.000000	17.6044	158.393	0.0142094	0.130788
840.000000	70.000000	16.0045	146.603	0.0138205	0.0925784
250.000000	75.000000	32.9404	81.1087	0.0309892	0.0684598
255.000000	75.000000	32.7879	83.27	0.0240583	0.0528653
260.000000	75.000000	32.8474	85.7792	0.0215843	0.0471111
265.000000	75.000000	32.5139	88.2474	0.018817	0.0410915
270.000000	75.000000	32.086	91.3261	0.0172819	0.0379285
275.000000	75.000000	31.3697	94.2599	0.0159318	0.0354145
280.000000	75.000000	30.6376	97.1706	0.014948	0.0337793
285.000000	75.000000	29.6905	100.07	0.0242597	0.0568937
290.000000	75.000000	28.5336	102.712	0.0202836	0.049086
295.000000	75.000000	27.2078	104.527	0.0165337	0.0414064
300.000000	75.000000	26.0109	105.688	0.0156175	0.0405041
305.000000	75.000000	25.0043	106.479	0.0142726	0.0381135
310.000000	75.000000	24.0999	107.136	0.0138362	0.0380551
315.000000	75.000000	23.3391	107.74	0.0128938	0.0363435
320.000000	75.000000	22.6787	108.284	0.0126967	0.0366746
325.000000	75.000000	22.109	108.802	0.0122039	0.0359978
330.000000	75.000000	21.5889	109.533	0.0118873	0.035844
335.000000	75.000000	21.1489	110.309	0.0117528	0.0361817
340.000000	75.000000	20.8011	111.286	0.0114554	0.0359201
345.000000	75.000000	20.4691	112.517	0.0114949	0.036844
350.000000	75.000000	20.1603	114.131	0.0114246	0.0375103
355.000000	75.000000	19.8031	116.195	0.0112942	0.0382433
360.000000	75.000000	19.3442	118.784	0.0112599	0.0397907
370.000000	75.000000	17.6318	124.455	0.0127927	0.0523995
380.000000	75.000000	15.4894	127.679	0.0116973	0.055714
390.000000	75.000000	13.6044	128.4	0.0104244	0.0560277
400.000000	75.000000	12.123	127.907	0.00948944	0.0559838
410.000000	75.000000	10.964	127.245	0.00885533	0.0565651
420.000000	75.000000	10.1792	124.93	0.00851641	0.0564732
430.000000	75.000000	8.83698	125.809	0.00806994	0.0621198
440.000000	75.000000	9.16462	118.196	0.00776816	0.052835
450.000000	75.000000	7.91812	132.291	0.00742271	0.0691375
460.000000	75.000000	6.02154	101.142	0.00692137	0.0581995
470.000000	75.000000	10.3387	111.894	0.00780374	0.0445903
480.000000	75.000000	8.03172	150.582	0.00815052	0.11449
490.000000	75.000000	1.67183	44.8868	0.0182897	0.661365
500.000000	75.000000	10.9933	70.0159	0.00855615	0.0460613
510.000000	75.000000	13.7295	116.149	0.00979818	0.0454082
520.000000	75.000000	10.9734	165.139	0.0100359	0.200631
530.000000	75.000000	6.35711	107.795	0.00744499	0.0630463
540.000000	75.000000	10.7699	8.05038	0.0108023	0.40513
550.000000	75.000000	16.2117	59.9179	0.0115283	0.0482073
560.000000	75.000000	16.8018	101.07	0.0109182	0.0389172
570.000000	75.000000	15.4029	139.107	0.0119779	0.0693504
580.000000	75.000000	12.4815	174.406	0.0112731	0.529385
590.000000	75.000000	10.1062	118.165	0.00854361	0.0531042
600.000000	75.000000	11.5568	54.8464	0.0102112	0.0612199
610.000000	75.000000	16.5873	5.57123	0.0146427	0.539334
620.000000	75.000000	19.4761	43.9162	0.014431	0.0647979
630.000000	75.000000	18.729	76.1082	0.0121568	0.0401132
640.000000	75.000000	17.7865	102.585	0.0117504	0.0402534
650.000000	75.000000	16.4344	129.229	0.0123393	0.0571208
660.000000	75.000000	14.572	157.963	0.0126749	0.134945
670.000000	75.000000	12.6308	168.81	0.0116253	0.271787
680.000000	75.000000	11.3492	132.106	0.0098744	0.0661515
690.000000	75.000000	11.4137	93.7197	0.00864425	0.0423885
700.000000	75.000000	13.0225	58.6236	0.0105622	0.0543584
710.000000	75.000000	16.0015	28.2017	0.0138312	0.107899
720.000000	75.000000	19.5717	3.52555	0.0167856	0.849579
730.000000	75.000000	20.7072	33.6566	0.0166996	0.0895804
740.000000	75.000000	19.535	57.0195	0.0142389	0.0527706
750.000000	75.000000	18.3656	75.3561	0.0124912	0.0421182
760.000000	75.000000	17.3828	92.0078	0.0119591	0.0408703
770.000000	75.000000	16.3859	108.288	0.0116595	0.0440933
780.000000	75.000000	15.2595	125.11	0.0126791	0.0595196
790.000000	75.000000	14.0326	142.65	0.0138443	0.0948876
800.000000	75.000000	12.7934	161.469	0.0144744	0.206594
810.000000	75.000000	11.6389	180	0.015171	90
820.000000	75.000000	10.7354	156.214	0.0114064	0.149653
830.000000	75.000000	10.2564	133.858	0.00835056	0.0623012
840.000000	75.000000	10.2325	110.588	0.00769235	0.0439205
250.000000	80.000000	34.7595	56.8007	0.0298509	0.0757759
255.000000	80.000000	34.5143	57.9135	0.0244012	0.061222
260.000000	80.000000	34.3125	59.9372	0.0224613	0.0552546
265.000000	80.000000	33.8149	62.1451	0.0193242	0.0467269
270.000000	80.000000	33.3389	64.3155	0.0179511	0.042814
275.000000	80.000000	32.4818	66.9509	0.0165651	0.0391425
280.000000	80.000000	31.4752	69.0913	0.0258896	0.0618625
285.000000	80.000000	30.2486	71.4548	0.0235551	0.0566867
290.000000	80.000000	28.8848	73.0879	0.0197733	0.0483736
295.000000	80.000000	27.4112	73.9327	0.01635	0.0410249
300.000000	80.000000	26.1237	74.0268	0.0152689	0.039505
305.000000	80.000000	25.0801	73.8343	0.0140424	0.0373319
310.000000	80.000000	24.1647	73.5827	0.0135687	0.0370745
315.000000	80.000000	23.3611	73.3153	0.0127369	0.0356532
320.000000	80.000000	22.6628	73.0073	0.0124729	0.035765
325.000000	80.000000	22.0559	72.8123	0.0120137	0.0351536
330.000000	80.000000	21.4961	72.7498	0.0116983	0.0349018
335.000000	80.000000	20.9841	72.8696	0.011422	0.0346812
340.000000	80.000000	20.507	73.217	0.0110904	0.034189
345.000000	80.000000	20.0015	73.7818	0.011008	0.0345277
350.000000	80.000000	19.4626	74.7312	0.0107565	0.0343062
355.000000	80.000000	18.8061	76.0359	0.0103471	0.0336851
360.000000	80.000000	17.9403	77.4642	0.0100686	0.0338665
370.000000	80.000000	15.4851	78.8559	0.0109114	0.0418418
380.000000	80.000000	13.1353	75.3088	0.00964885	0.0432132
390.000000	80.000000	11.7553	68.6047	0.0087663	0.0448264
400.000000	80.000000	11.0539	61.6418	0.00853137	0.0487388
410.000000	80.000000	10.6735	55.5077	0.00853118	0.0537761
420.000000	80.000000	10.7899	50.7036	0.00884663	0.0589925
430.000000	80.000000	10.3197	43.6717	0.00907837	0.0709738
440.000000	80.000000	11.482	43.8952	0.00943154	0.0665458
450.000000	80.000000	9.30026	38.3385	0.00825169	0.0790313
460.000000	80.000000	12.6437	27.0521	0.0107496	0.106606
470.000000	80.000000	12.7664	47.0687	0.00982802	0.0596595
480.000000	80.000000	6.82601	34.0869	0.00755386	0.108034
490.000000	80.000000	13.5709	5.00394	0.0118805	0.578483
500.000000	80.000000	18.3186	31.5362	0.0142214	0.0890789
510.000000	80.000000	13.7648	61.5771	0.00987616	0.0466281
520.000000	80.000000	3.23345	53.6455	0.00962308	0.159736
530.000000	80.000000	12.4049	27.7533	0.0107609	0.106137
540.000000	80.000000	21.4878	2.71947	0.0172581	1.04865
550.000000	80.000000	23.0104	32.8306	0.016887	0.0850933
560.000000	80.000000	18.4779	59.2163	0.0125809	0.0474676
570.000000	80.000000	10.2188	86.182	0.00784297	0.0422149
580.000000	80.000000	1.738	88.0784	0.01747	0.194
590.000000	80.000000	12.2567	46.3639	0.00996376	0.0636495
600.000000	80.000000	20.306	23.2973	0.0160662	0.122473
610.000000	80.000000	25.9638	1.96812	0.0199099	1.45192
620.000000	80.000000	26.5674	25.75	0.0192565	0.109208
630.000000	80.000000	23.3369	44.8422	0.0162112	0.0621079
640.000000	80.000000	19.0159	62.047	0.0129343	0.0463963
650.000000	80.000000	13.0553	80.7494	0.00961249	0.0424488
660.000000	80.000000	5.55572	104.478	0.00847202	0.0765232
670.000000	80.000000	3.09529	87.7488	0.011606	0.120846
680.000000	80.000000	10.3755	57.7093	0.00901259	0.0572708
690.000000	80.000000	16.3708	41.0262	0.0126249	0.0692067
700.000000	80.000000	21.1144	26.9555	0.0163932	0.105678
710.000000	80.000000	25.1311	13.3926	0.0193212	0.21379
720.000000	80.000000	28.1369	2.87492	0.0210781	0.997261
730.000000	80.000000	28.0099	20.1878	0.0205782	0.14192
740.000000	80.000000	25.7559	33.3497	0.0185972	0.085173
750.000000	80.000000	23.1476	43.8402	0.0164085	0.0644271
760.000000	80.000000	20.3	53.6943	0.0144013	0.053808
770.000000	80.000000	16.9961	63.3511	0.0121537	0.04734
780.000000	80.000000	13.0771	73.0639	0.011176	0.0513832
790.000000	80.000000	8.67362	81.9852	0.00711893	0.0449967
800.000000	80.000000	3.95237	87.6945	0.00885147	0.0870846
810.000000	80.000000	1.1977	48.264	0.0268061	1.18318
820.000000	80.000000	5.63577	58.9752	0.00661397	0.0686382
830.000000	80.000000	9.66057	52.6002	0.00772106	0.055072
840.000000	80.000000	13.3461	44.8743	0.0117187	0.0717535