VASE data from bare silicon wafer
nm
250.000000	70.000000	34.9325	110.932	0.0269043	0.0613638
260.000000	70.000000	35.6808	115.667	0.02716	0.0636253
270.000000	70.000000	35.982	122.68	0.0272417	0.0680813
280.000000	70.000000	35.1234	130.694	0.0269667	0.07561
290.000000	70.000000	32.6998	138.141	0.0260491	0.085882
300.000000	70.000000	29.6424	141.426	0.0246125	0.0916495
310.000000	70.000000	27.7934	141.606	0.0236595	0.0926149
320.000000	70.000000	26.9357	142.729	0.0231167	0.0942828
330.000000	70.000000	26.2925	143.701	0.0227705	0.097055
340.000000	70.000000	25.9896	145.455	0.022561	0.100904
350.000000	70.000000	25.9808	147.028	0.0225837	0.105724
360.000000	70.000000	26.7008	151.257	0.023014	0.119627
370.000000	70.000000	26.2502	159.253	0.0227225	0.161258
380.000000	70.000000	24.0607	165.788	0.0213217	0.231198
390.000000	70.000000	21.6609	168.549	0.0196357	0.27946
400.000000	70.000000	20.0353	169.104	0.0184222	0.292479
410.000000	70.000000	18.8343	168.712	0.0175255	0.303806
420.000000	70.000000	17.8933	169.222	0.0167679	0.31695
430.000000	70.000000	17.1034	170.173	0.0160987	0.330246
440.000000	70.000000	16.3708	170.283	0.0154976	0.342602
450.000000	70.000000	15.7387	170.768	0.0149554	0.353454
460.000000	70.000000	15.1392	170.314	0.0144649	0.362611
470.000000	70.000000	14.645	170.918	0.0140213	0.370115
480.000000	70.000000	14.205	171.576	0.0136193	0.376146
490.000000	70.000000	13.7808	171.369	0.0132549	0.381072
500.000000	70.000000	13.4238	171.902	0.0129243	0.385254
510.000000	70.000000	13.0915	172.127	0.0126232	0.389001
520.000000	70.000000	12.747	170.98	0.0123483	0.392555
530.000000	70.000000	12.4949	171.938	0.0120955	0.39612
540.000000	70.000000	12.2332	171.84	0.0118626	0.399833
550.000000	70.000000	12.0047	172.21	0.0116467	0.403722
560.000000	70.000000	11.7733	171.844	0.0114467	0.40783
570.000000	70.000000	11.5872	172.572	0.0112597	0.41213
580.000000	70.000000	11.3936	172.551	0.0110844	0.416601
590.000000	70.000000	11.199	171.99	0.0109206	0.421252
600.000000	70.000000	11.0515	172.838	0.0107662	0.426027
610.000000	70.000000	10.8866	172.579	0.0106215	0.430963
620.000000	70.000000	10.7386	172.658	0.0104842	0.435992
630.000000	70.000000	10.5918	172.432	0.0103545	0.441139
640.000000	70.000000	10.4517	172.134	0.0102319	0.446391
650.000000	70.000000	10.3287	172.254	0.010116	0.451732
660.000000	70.000000	10.2209	172.792	0.0100056	0.457132
670.000000	70.000000	10.1148	173.113	0.0099014	0.46263
680.000000	70.000000	9.98683	172.17	0.00980152	0.468159
690.000000	70.000000	9.88853	172.358	0.00970771	0.473804
700.000000	70.000000	9.79002	172.296	0.00962027	0.479602
710.000000	70.000000	9.72432	173.644	0.00953898	0.485542
720.000000	70.000000	9.64177	173.986	0.00946233	0.491559
730.000000	70.000000	9.56313	174.316	0.00939083	0.497703
740.000000	70.000000	9.47174	173.771	0.00932366	0.503944
750.000000	70.000000	9.40686	174.46	0.00926071	0.510281
760.000000	70.000000	9.31143	173.292	0.00920122	0.516689
770.000000	70.000000	9.25042	173.834	0.00914571	0.523192
780.000000	70.000000	9.18562	174.043	0.00909283	0.529737
790.000000	70.000000	9.13287	174.794	0.00904312	0.536352
800.000000	70.000000	9.07057	174.809	0.00899649	0.543034
810.000000	70.000000	8.99397	173.805	0.00895227	0.549755
820.000000	70.000000	8.94277	174.208	0.00891039	0.556517
830.000000	70.000000	8.89694	174.867	0.00887021	0.563293
840.000000	70.000000	8.82918	173.93	0.00883284	0.570131
850.000000	70.000000	8.77461	173.724	0.00879706	0.576979
860.000000	70.000000	8.74571	175.065	0.0087634	0.58385
870.000000	70.000000	8.69136	174.673	0.00873071	0.590699
880.000000	70.000000	8.65483	175.328	0.00870005	0.59758
890.000000	70.000000	8.60144	174.661	0.00867136	0.604495
900.000000	70.000000	8.55228	174.216	0.00864355	0.611385
910.000000	70.000000	8.51459	174.465	0.0086171	0.618274
920.000000	70.000000	8.46523	173.815	0.00859148	0.625143
930.000000	70.000000	8.42577	173.698	0.00856769	0.632039
940.000000	70.000000	8.40092	174.61	0.00854468	0.63891
950.000000	70.000000	8.37282	175.239	0.00852242	0.64576
960.000000	70.000000	8.34881	176.073	0.0085014	0.652609
970.000000	70.000000	8.30634	175.43	0.00848109	0.659433
980.000000	70.000000	8.28315	176.16	0.00846198	0.666254
990.000000	70.000000	8.24161	175.378	0.00844355	0.673049
1000.000000	70.000000	8.21394	175.564	0.00842626	0.67984
250.000000	75.000000	34.3253	91.0315	0.0266868	0.0573056
260.000000	75.000000	34.8246	96.3378	0.0268752	0.0576589
270.000000	75.000000	34.6996	104.132	0.026833	0.0591116
280.000000	75.000000	33.2323	113.304	0.0262846	0.0624411
290.000000	75.000000	29.8923	121.764	0.0247532	0.0673788
300.000000	75.000000	25.9783	124.55	0.0225345	0.0694519
310.000000	75.000000	23.7826	123.979	0.0211525	0.0691298
320.000000	75.000000	22.6455	124.543	0.0203401	0.0694792
330.000000	75.000000	21.7887	125.587	0.0197691	0.0705461
340.000000	75.000000	21.2493	127.543	0.0193605	0.0722948
350.000000	75.000000	21.1475	130.139	0.0192621	0.0748518
360.000000	75.000000	21.5551	136.28	0.0196012	0.0831053
370.000000	75.000000	20.4018	147.612	0.0187059	0.106645
380.000000	75.000000	17.2752	156.342	0.016246	0.142711
390.000000	75.000000	14.1885	158.857	0.0136321	0.160456
400.000000	75.000000	12.2646	159.035	0.0118781	0.15852
410.000000	75.000000	10.8962	158.817	0.0106175	0.156563
420.000000	75.000000	9.75393	158.29	0.00957702	0.155514
430.000000	75.000000	8.80175	158.169	0.00881071	0.156451
440.000000	75.000000	7.95316	157.587	0.00829132	0.159498
450.000000	75.000000	7.24356	157.585	0.00795805	0.164182
460.000000	75.000000	6.5949	156.926	0.00776999	0.170235
470.000000	75.000000	6.01679	155.994	0.00769854	0.177481
480.000000	75.000000	5.51964	155.284	0.00772261	0.185795
490.000000	75.000000	5.06889	154.205	0.00782664	0.195137
500.000000	75.000000	4.65318	152.644	0.00799883	0.205479
510.000000	75.000000	4.28234	151.036	0.00823085	0.216818
520.000000	75.000000	3.96471	149.777	0.00851658	0.229137
530.000000	75.000000	3.68074	148.526	0.0088532	0.242475
540.000000	75.000000	3.42846	147.335	0.00923789	0.256803
550.000000	75.000000	3.1819	145.581	0.00967079	0.272069
560.000000	75.000000	2.96272	143.915	0.0101494	0.288125
570.000000	75.000000	2.74054	141.549	0.0106767	0.304855
580.000000	75.000000	2.56609	139.967	0.0112532	0.322006
590.000000	75.000000	2.3712	137.239	0.0118756	0.339203
600.000000	75.000000	2.22733	135.441	0.0125473	0.356041
610.000000	75.000000	2.06824	132.7	0.0132627	0.371962
620.000000	75.000000	1.96048	130.9	0.0140265	0.386293
630.000000	75.000000	1.83421	128.095	0.0148315	0.398194
640.000000	75.000000	1.70983	124.888	0.0156715	0.406709
650.000000	75.000000	1.64871	122.843	0.0165384	0.410793
660.000000	75.000000	1.54297	119.217	0.0174267	0.409258
670.000000	75.000000	1.47082	115.989	0.0183161	0.401381
680.000000	75.000000	1.41052	112.576	0.0192007	0.386085
690.000000	75.000000	1.33794	108.571	0.020056	0.363671
700.000000	75.000000	1.24931	104.064	0.0208647	0.335192
710.000000	75.000000	1.21985	100.312	0.0216056	0.303846
720.000000	75.000000	1.16607	95.9865	0.0222646	0.27503
730.000000	75.000000	1.17176	92.2594	0.022823	0.258682
740.000000	75.000000	1.14637	88.0829	0.0232711	0.264721
750.000000	75.000000	1.11877	83.8704	0.023603	0.296891
760.000000	75.000000	1.07209	79.3232	0.0238176	0.350402
770.000000	75.000000	1.1212	76.3131	0.0239227	0.416202
780.000000	75.000000	1.04482	71.0639	0.0239219	0.488302
790.000000	75.000000	1.09248	68.3421	0.0238317	0.561036
800.000000	75.000000	1.09847	64.8902	0.0236682	0.631146
810.000000	75.000000	1.11446	61.8079	0.023441	0.697282
820.000000	75.000000	1.11248	58.269	0.0231646	0.758272
830.000000	75.000000	1.12235	55.1265	0.0228442	0.81399
840.000000	75.000000	1.15849	53.1401	0.0225088	0.863511
850.000000	75.000000	1.17339	50.4679	0.022152	0.907797
860.000000	75.000000	1.23988	50.1624	0.0217911	0.946862
870.000000	75.000000	1.25878	47.9388	0.0214154	0.981509
880.000000	75.000000	1.24905	44.4802	0.0210491	1.01191
890.000000	75.000000	1.24731	41.4471	0.0206969	1.03869
900.000000	75.000000	1.32862	42.7043	0.0203437	1.06233
910.000000	75.000000	1.29388	38.0176	0.0200017	1.08321
920.000000	75.000000	1.31767	36.4464	0.0196639	1.10163
930.000000	75.000000	1.38592	37.6258	0.01935	1.11818
940.000000	75.000000	1.41748	36.8351	0.0190431	1.13292
950.000000	75.000000	1.43805	35.4585	0.0187443	1.14604
960.000000	75.000000	1.46233	34.4271	0.0184627	1.15801
970.000000	75.000000	1.49193	33.8014	0.0181902	1.1688
980.000000	75.000000	1.47302	30.1326	0.0179353	1.17885
990.000000	75.000000	1.5377	32.0219	0.0176899	1.18806
1000.000000	75.000000	1.51618	28.2523	0.0174617	1.19684
250.000000	80.000000	35.2917	65.1672	0.0270118	0.0631574
260.000000	80.000000	35.4249	70.2814	0.02705	0.0608978
270.000000	80.000000	34.6815	77.6469	0.0268125	0.0586498
280.000000	80.000000	32.4067	86.5435	0.0259174	0.0574024
290.000000	80.000000	27.808	93.611	0.0236557	0.0574135
300.000000	80.000000	23.2093	93.0599	0.0207786	0.0573833
310.000000	80.000000	21.1175	90.1003	0.0192623	0.0572959
320.000000	80.000000	19.8978	88.918	0.0183291	0.0573065
330.000000	80.000000	18.8889	88.9292	0.017554	0.0573055
340.000000	80.000000	18.0342	90.0741	0.0168521	0.0572958
350.000000	80.000000	17.4026	92.4158	0.016376	0.0573512
360.000000	80.000000	16.7064	101.014	0.0157719	0.0583679
370.000000	80.000000	13.3963	113.416	0.0129175	0.0624484
380.000000	80.000000	8.62926	117.189	0.00870383	0.0653474
390.000000	80.000000	5.58719	101.765	0.00771267	0.0695425
400.000000	80.000000	4.77557	79.4765	0.00794438	0.0763598
410.000000	80.000000	4.73911	61.526	0.00796088	0.0913865
420.000000	80.000000	5.01786	47.9361	0.00784262	0.108912
430.000000	80.000000	5.45145	38.0343	0.00773189	0.125506
440.000000	80.000000	5.95726	31.0851	0.00769665	0.141336
450.000000	80.000000	6.46069	25.8918	0.00774517	0.157124
460.000000	80.000000	6.95707	22.2654	0.00786183	0.173238
470.000000	80.000000	7.41699	19.4642	0.00802662	0.189696
480.000000	80.000000	7.84519	17.4031	0.00822257	0.206397
490.000000	80.000000	8.21886	15.3354	0.00843626	0.223248
500.000000	80.000000	8.56448	13.764	0.00865793	0.240178
510.000000	80.000000	8.88849	12.7219	0.00888138	0.257186
520.000000	80.000000	9.18445	11.9006	0.00910231	0.274272
530.000000	80.000000	9.46214	11.4343	0.00931887	0.291535
540.000000	80.000000	9.71333	10.9747	0.00952908	0.308993
550.000000	80.000000	9.92529	9.94057	0.00973292	0.326696
560.000000	80.000000	10.1361	9.53047	0.00992706	0.344531
570.000000	80.000000	10.328	9.03092	0.0101074	0.362379
580.000000	80.000000	10.5173	8.96251	0.0102752	0.380238
590.000000	80.000000	10.6843	8.59414	0.0104305	0.398056
600.000000	80.000000	10.8136	7.18319	0.010576	0.415903
610.000000	80.000000	10.9646	7.04971	0.0107113	0.433725
620.000000	80.000000	11.1286	7.82678	0.0108389	0.451619
630.000000	80.000000	11.2367	6.64574	0.0109586	0.469537
640.000000	80.000000	11.3812	7.37271	0.0110711	0.487464
650.000000	80.000000	11.4832	6.57239	0.0111769	0.505388
660.000000	80.000000	11.6094	7.14121	0.0112773	0.523363
670.000000	80.000000	11.6764	5.26883	0.0113714	0.541298
680.000000	80.000000	11.7696	4.81449	0.0114613	0.559303
690.000000	80.000000	11.8952	6.25288	0.0115462	0.577297
700.000000	80.000000	11.9522	4.50304	0.0116267	0.595301
710.000000	80.000000	12.0656	5.88622	0.0117028	0.613269
720.000000	80.000000	12.1408	5.48341	0.0117759	0.63127
730.000000	80.000000	12.2092	4.93037	0.0118452	0.649246
740.000000	80.000000	12.276	4.45811	0.0119113	0.667224
750.000000	80.000000	12.3599	5.15723	0.0119743	0.685178
760.000000	80.000000	12.4393	5.79264	0.0120347	0.703151
770.000000	80.000000	12.5047	5.83864	0.0120919	0.72105
780.000000	80.000000	12.5561	5.16208	0.0121473	0.73899
790.000000	80.000000	12.6014	4.26359	0.0122001	0.756882
800.000000	80.000000	12.6374	2.93105	0.0122502	0.774702
810.000000	80.000000	12.7215	4.78788	0.0122985	0.792505
820.000000	80.000000	12.7708	4.57264	0.0123449	0.810271
830.000000	80.000000	12.7937	2.68711	0.01239	0.828065
840.000000	80.000000	12.8434	2.75098	0.0124325	0.845709
850.000000	80.000000	12.9056	3.79325	0.0124736	0.863347
860.000000	80.000000	12.9522	3.9293	0.0125129	0.880858
870.000000	80.000000	12.9802	2.78836	0.0125515	0.898415
880.000000	80.000000	13.0418	4.21979	0.0125882	0.915836
890.000000	80.000000	13.0936	5.13996	0.0126228	0.933106
900.000000	80.000000	13.1126	3.67702	0.0126569	0.950382
910.000000	80.000000	13.1681	5.06917	0.0126896	0.967564
920.000000	80.000000	13.1918	4.09175	0.0127217	0.98474
930.000000	80.000000	13.2292	4.3505	0.0127518	1.00171
940.000000	80.000000	13.2246	1.31381	0.0127813	1.01865
950.000000	80.000000	13.304	5.05016	0.0128101	1.03556
960.000000	80.000000	13.3175	3.61101	0.0128376	1.05232
970.000000	80.000000	13.358	4.44079	0.0128645	1.06903
980.000000	80.000000	13.3568	1.90223	0.01289	1.08558
990.000000	80.000000	13.3728	0.836291	0.0129148	1.10206
1000.000000	80.000000	13.41	1.70027	0.0129384	1.11835