TiN on thick SiO2 on Si
nm
250.000000	50.000000	31.244097	160.474121	0.363219	2.446202
260.000000	50.000000	30.859385	156.815384	0.161394	0.923581
270.000000	50.000000	30.793026	158.808716	0.091403	0.595781
280.000000	50.000000	29.307564	160.393417	0.052220	0.357649
290.000000	50.000000	29.277798	157.678894	0.050204	0.302361
300.000000	50.000000	29.827269	157.539825	0.040888	0.237905
310.000000	50.000000	30.270954	158.562683	0.034774	0.212997
320.000000	50.000000	29.260780	159.826736	0.034148	0.226172
330.000000	50.000000	27.983164	157.113510	0.035520	0.214282
340.000000	50.000000	28.832479	153.883759	0.035327	0.185121
350.000000	50.000000	30.010130	154.311172	0.034982	0.176440
360.000000	50.000000	30.592796	156.458221	0.032850	0.180047
370.000000	50.000000	30.182190	159.335480	0.034018	0.213934
380.000000	50.000000	28.528122	160.563782	0.032514	0.224391
390.000000	50.000000	26.662491	156.924484	0.031272	0.190634
400.000000	50.000000	27.120068	150.394196	0.031768	0.151321
410.000000	50.000000	29.336182	148.419144	0.035223	0.149769
420.000000	50.000000	30.964977	150.492096	0.036226	0.158718
430.000000	50.000000	31.429525	153.501801	0.035014	0.169769
440.000000	50.000000	31.062481	155.827087	0.033636	0.178908
450.000000	50.000000	30.189047	157.139847	0.032577	0.186941
460.000000	50.000000	29.095270	157.000534	0.031568	0.181945
470.000000	50.000000	28.028315	155.000031	0.031874	0.174458
480.000000	50.000000	27.634441	151.331345	0.030999	0.150216
490.000000	50.000000	28.212328	147.412354	0.034103	0.144604
500.000000	50.000000	29.566864	144.986618	0.035681	0.137405
510.000000	50.000000	31.060450	144.668732	0.036248	0.135062
520.000000	50.000000	32.134533	145.419189	0.036535	0.136026
530.000000	50.000000	32.873482	146.375565	0.037562	0.141724
540.000000	50.000000	33.437893	147.448959	0.036373	0.140181
550.000000	50.000000	33.793808	148.691895	0.037154	0.148022
560.000000	50.000000	33.872486	149.963181	0.036897	0.152123
570.000000	50.000000	33.654217	150.914047	0.036133	0.154252
580.000000	50.000000	33.301620	151.103943	0.036835	0.159631
590.000000	50.000000	33.015099	150.573380	0.035409	0.150431
600.000000	50.000000	32.978001	149.565140	0.036226	0.149119
610.000000	50.000000	33.191338	148.394867	0.036204	0.143683
620.000000	50.000000	33.621971	147.479691	0.036961	0.142299
630.000000	50.000000	34.167324	146.843628	0.037395	0.139457
640.000000	50.000000	34.769920	146.517624	0.037532	0.139172
650.000000	50.000000	35.359047	146.485886	0.036221	0.132522
660.000000	50.000000	35.967888	146.622925	0.038049	0.138997
670.000000	50.000000	36.567936	146.999969	0.039269	0.143438
680.000000	50.000000	37.069538	147.435379	0.038386	0.141916
690.000000	50.000000	37.537067	147.994217	0.038753	0.144287
700.000000	50.000000	37.945786	148.582306	0.039172	0.148187
710.000000	50.000000	38.307388	149.219910	0.038043	0.146279
720.000000	50.000000	38.618053	149.849258	0.037953	0.148067
730.000000	50.000000	38.896629	150.496506	0.038358	0.152188
740.000000	50.000000	39.137566	151.139679	0.037816	0.152991
750.000000	50.000000	39.344086	151.756577	0.038289	0.158544
760.000000	50.000000	39.504730	152.381531	0.037596	0.158397
770.000000	50.000000	39.655106	152.977676	0.039139	0.168786
780.000000	50.000000	39.785069	153.597305	0.038350	0.168075
790.000000	50.000000	39.899532	154.140717	0.038178	0.170715
800.000000	50.000000	39.989410	154.700195	0.037275	0.170062
810.000000	50.000000	40.054989	155.240021	0.037633	0.176165
820.000000	50.000000	40.096256	155.864120	0.036868	0.175310
830.000000	50.000000	40.068062	156.249771	0.038043	0.185605
840.000000	50.000000	40.023865	156.719971	0.037682	0.185753
850.000000	50.000000	39.982342	156.962234	0.037456	0.186932
860.000000	50.000000	39.956059	157.146881	0.036828	0.184412
870.000000	50.000000	39.958618	157.341537	0.037466	0.191045
880.000000	50.000000	39.953934	157.514587	0.036638	0.186591
890.000000	50.000000	40.000839	157.657410	0.038033	0.195514
900.000000	50.000000	40.058510	157.773361	0.038256	0.196882
910.000000	50.000000	40.098995	157.940292	0.037423	0.195031
920.000000	50.000000	40.169327	158.033539	0.038045	0.199265
930.000000	50.000000	40.262211	158.136642	0.037000	0.193834
940.000000	50.000000	40.348072	158.353027	0.037917	0.201755
950.000000	50.000000	40.421497	158.452347	0.037120	0.196520
960.000000	50.000000	40.521103	158.622238	0.036950	0.198680
970.000000	50.000000	40.598648	158.892609	0.037728	0.204722
980.000000	50.000000	40.686970	159.001038	0.037644	0.205674
990.000000	50.000000	40.780479	159.196167	0.036300	0.198480
1000.000000	50.000000	40.839424	159.340805	0.037449	0.206648
250.000000	60.000000	25.009886	138.092804	0.409647	1.657276
260.000000	60.000000	23.945190	142.459824	0.195393	0.876284
270.000000	60.000000	22.302521	140.657242	0.135362	0.622916
280.000000	60.000000	22.445339	138.662033	0.071290	0.310169
290.000000	60.000000	22.777218	139.643005	0.051476	0.218175
300.000000	60.000000	22.180489	142.489777	0.034907	0.157766
310.000000	60.000000	21.052504	139.989822	0.030046	0.130689
320.000000	60.000000	21.138765	134.058395	0.031259	0.122553
330.000000	60.000000	22.536724	133.476166	0.032845	0.121078
340.000000	60.000000	23.327623	135.867462	0.031956	0.118981
350.000000	60.000000	23.280949	139.176849	0.032989	0.131189
360.000000	60.000000	22.114210	142.281372	0.030531	0.135903
370.000000	60.000000	19.407516	140.338272	0.026988	0.126912
380.000000	60.000000	19.082613	128.472626	0.029391	0.113539
390.000000	60.000000	22.058460	124.643852	0.034445	0.113893
400.000000	60.000000	24.246553	128.372055	0.035081	0.111723
410.000000	60.000000	24.798098	133.300644	0.033945	0.115578
420.000000	60.000000	24.207561	137.194199	0.031511	0.117068
430.000000	60.000000	22.966869	139.134995	0.031448	0.127521
440.000000	60.000000	21.436674	138.568024	0.028699	0.119671
450.000000	60.000000	20.136372	134.872208	0.028970	0.119133
460.000000	60.000000	19.771515	128.479050	0.030246	0.114165
470.000000	60.000000	20.940676	121.861832	0.032046	0.105485
480.000000	60.000000	23.274281	119.143959	0.037187	0.109199
490.000000	60.000000	25.352362	120.202980	0.038682	0.107599
500.000000	60.000000	26.696951	122.569672	0.039705	0.109438
510.000000	60.000000	27.531439	125.036804	0.040186	0.112103
520.000000	60.000000	27.947136	127.480522	0.038936	0.110732
530.000000	60.000000	27.914064	129.691025	0.039189	0.115930
540.000000	60.000000	27.507610	131.155975	0.037086	0.112560
550.000000	60.000000	26.937679	131.549988	0.037252	0.116085
560.000000	60.000000	26.443924	130.755661	0.036275	0.112644
570.000000	60.000000	26.222019	129.017273	0.037103	0.113232
580.000000	60.000000	26.472847	126.918808	0.037534	0.109963
590.000000	60.000000	27.055523	125.052155	0.039678	0.111706
600.000000	60.000000	27.957764	123.779831	0.039980	0.108732
610.000000	60.000000	28.969185	123.166588	0.041757	0.110068
620.000000	60.000000	29.964029	123.106903	0.042067	0.108403
630.000000	60.000000	30.910845	123.466240	0.043676	0.111080
640.000000	60.000000	31.778996	124.120956	0.043678	0.110368
650.000000	60.000000	32.550438	124.947563	0.043745	0.110202
660.000000	60.000000	33.267181	125.962120	0.043904	0.111226
670.000000	60.000000	33.944092	127.149612	0.043316	0.110167
680.000000	60.000000	34.480896	128.258728	0.043612	0.111740
690.000000	60.000000	34.970760	129.474670	0.043268	0.112001
700.000000	60.000000	35.376209	130.646744	0.043266	0.113567
710.000000	60.000000	35.702747	131.781708	0.043208	0.114665
720.000000	60.000000	35.969181	132.845139	0.043180	0.117034
730.000000	60.000000	36.206909	133.919006	0.042534	0.116393
740.000000	60.000000	36.390373	134.901550	0.042237	0.117789
750.000000	60.000000	36.536880	135.814316	0.041809	0.117948
760.000000	60.000000	36.690727	136.765213	0.041518	0.119479
770.000000	60.000000	36.788250	137.718872	0.040897	0.119760
780.000000	60.000000	36.802700	138.598419	0.041533	0.123887
790.000000	60.000000	36.780075	139.383759	0.041550	0.126328
800.000000	60.000000	36.714352	140.017822	0.041579	0.127755
810.000000	60.000000	36.669632	140.496902	0.040452	0.126077
820.000000	60.000000	36.650925	140.879196	0.039018	0.122641
830.000000	60.000000	36.644444	141.118332	0.040850	0.128915
840.000000	60.000000	36.698071	141.315979	0.040839	0.128980
850.000000	60.000000	36.781151	141.507706	0.040538	0.129305
860.000000	60.000000	36.893776	141.721878	0.040558	0.129572
870.000000	60.000000	37.012653	141.964188	0.040304	0.128755
880.000000	60.000000	37.158394	142.250961	0.039696	0.127364
890.000000	60.000000	37.292290	142.527847	0.039907	0.128970
900.000000	60.000000	37.428284	142.840622	0.039295	0.127933
910.000000	60.000000	37.566994	143.139511	0.039496	0.129633
920.000000	60.000000	37.705811	143.469208	0.040053	0.132839
930.000000	60.000000	37.858532	143.773575	0.038995	0.129751
940.000000	60.000000	37.993412	144.147034	0.040528	0.136133
950.000000	60.000000	38.113518	144.483658	0.040194	0.135100
960.000000	60.000000	38.244556	144.802429	0.038958	0.132630
970.000000	60.000000	38.385231	145.262405	0.039446	0.135337
980.000000	60.000000	38.484928	145.541550	0.039812	0.137859
990.000000	60.000000	38.632225	145.924225	0.039061	0.136100
1000.000000	60.000000	38.719940	146.229233	0.039275	0.138324
250.000000	70.000000	18.606033	100.394325	0.519998	1.736431
260.000000	70.000000	17.407429	98.826843	0.202998	0.723530
270.000000	70.000000	17.204700	96.209267	0.103441	0.373328
280.000000	70.000000	17.300873	97.531158	0.074976	0.266252
290.000000	70.000000	15.863896	99.472168	0.053041	0.194493
300.000000	70.000000	14.692114	91.022255	0.048715	0.186440
310.000000	70.000000	17.252693	88.300095	0.037115	0.121677
320.000000	70.000000	18.139835	90.828094	0.038842	0.121318
330.000000	70.000000	18.060190	94.481705	0.037173	0.116821
340.000000	70.000000	17.049849	97.429680	0.035086	0.117838
350.000000	70.000000	15.266356	96.252457	0.032413	0.118546
360.000000	70.000000	14.386981	85.265198	0.031361	0.120900
370.000000	70.000000	17.657532	76.994133	0.041117	0.134145
380.000000	70.000000	20.109871	83.195709	0.043154	0.123829
390.000000	70.000000	20.369488	90.261482	0.041573	0.117418
400.000000	70.000000	19.353226	95.353699	0.039505	0.116766
410.000000	70.000000	17.716442	97.236526	0.035360	0.113450
420.000000	70.000000	16.088846	94.740364	0.034482	0.120057
430.000000	70.000000	15.247602	87.838776	0.032913	0.119691
440.000000	70.000000	15.871657	79.209946	0.037060	0.131833
450.000000	70.000000	17.976009	73.828026	0.041734	0.135850
460.000000	70.000000	20.687244	74.062325	0.048559	0.140877
470.000000	70.000000	22.801138	78.279015	0.049999	0.131213
480.000000	70.000000	23.823389	83.209229	0.050055	0.125486
490.000000	70.000000	24.138714	87.517471	0.049213	0.121463
500.000000	70.000000	23.912079	91.140259	0.047933	0.119080
510.000000	70.000000	23.225897	93.587822	0.046203	0.117613
520.000000	70.000000	22.384417	94.308754	0.043734	0.114794
530.000000	70.000000	21.683775	93.302574	0.043164	0.116189
540.000000	70.000000	21.391981	91.082298	0.043442	0.117917
550.000000	70.000000	21.623360	88.455994	0.044902	0.120734
560.000000	70.000000	22.303778	86.160217	0.047010	0.123714
570.000000	70.000000	23.404997	84.605286	0.048765	0.123808
580.000000	70.000000	24.659430	84.131645	0.051031	0.124345
590.000000	70.000000	25.920141	84.472466	0.052690	0.124154
600.000000	70.000000	27.151285	85.492737	0.054307	0.123447
610.000000	70.000000	28.238827	86.895515	0.054556	0.120560
620.000000	70.000000	29.163174	88.552109	0.055482	0.120232
630.000000	70.000000	29.951565	90.287865	0.056040	0.119359
640.000000	70.000000	30.634918	92.083076	0.055001	0.115653
650.000000	70.000000	31.202818	93.897156	0.055508	0.115720
660.000000	70.000000	31.693365	95.746391	0.054635	0.113233
670.000000	70.000000	32.129707	97.734184	0.054758	0.113209
680.000000	70.000000	32.448227	99.482254	0.053811	0.111280
690.000000	70.000000	32.702679	101.228844	0.053851	0.111683
700.000000	70.000000	32.894604	102.881660	0.052694	0.109671
710.000000	70.000000	33.033596	104.398666	0.052350	0.109496
720.000000	70.000000	33.126282	105.794067	0.051503	0.108213
730.000000	70.000000	33.150784	107.192657	0.051747	0.109598
740.000000	70.000000	33.153187	108.443024	0.051176	0.109324
750.000000	70.000000	33.073196	109.550285	0.050121	0.107664
760.000000	70.000000	32.975258	110.487030	0.049619	0.107895
770.000000	70.000000	32.885246	111.253151	0.048205	0.105303
780.000000	70.000000	32.850677	111.864410	0.049726	0.109361
790.000000	70.000000	32.819775	112.286934	0.047885	0.105282
800.000000	70.000000	32.887634	112.690788	0.049588	0.109505
810.000000	70.000000	32.978790	113.065903	0.048692	0.107767
820.000000	70.000000	33.145187	113.506493	0.049154	0.108970
830.000000	70.000000	33.286556	113.851357	0.048663	0.107555
840.000000	70.000000	33.490345	114.312790	0.048197	0.106924
850.000000	70.000000	33.681702	114.790771	0.048231	0.107602
860.000000	70.000000	33.851540	115.320541	0.049162	0.109320
870.000000	70.000000	34.080246	115.900223	0.048192	0.107330
880.000000	70.000000	34.284393	116.540688	0.047304	0.105693
890.000000	70.000000	34.460384	117.119614	0.047098	0.105611
900.000000	70.000000	34.651699	117.760208	0.047861	0.107902
910.000000	70.000000	34.834839	118.383514	0.047575	0.107280
920.000000	70.000000	34.979145	118.984001	0.047667	0.107905
930.000000	70.000000	35.146198	119.612938	0.047504	0.108371
940.000000	70.000000	35.293816	120.208595	0.047251	0.108147
950.000000	70.000000	35.425209	120.821991	0.045589	0.105110
960.000000	70.000000	35.557961	121.397881	0.046554	0.107777
970.000000	70.000000	35.703621	122.067162	0.046168	0.107467
980.000000	70.000000	35.824921	122.673065	0.045527	0.106391
990.000000	70.000000	35.953960	123.335556	0.045983	0.108285
1000.000000	70.000000	36.057014	123.860878	0.045841	0.108397
250.000000	80.000000	24.733803	37.170368	0.261328	1.145329
260.000000	80.000000	24.764841	36.467808	0.139573	0.589041
270.000000	80.000000	24.749754	37.216541	0.089021	0.372481
280.000000	80.000000	23.943766	36.585503	0.066188	0.283100
290.000000	80.000000	23.842218	31.962042	0.074980	0.362353
300.000000	80.000000	25.372658	31.556139	0.067681	0.309142
310.000000	80.000000	26.013380	35.130745	0.067242	0.271941
320.000000	80.000000	25.522427	36.450310	0.065468	0.260325
330.000000	80.000000	24.603563	36.363277	0.063633	0.260998
340.000000	80.000000	23.899408	33.502186	0.062152	0.279885
350.000000	80.000000	24.866442	29.138994	0.065198	0.322948
360.000000	80.000000	27.066395	29.247820	0.068497	0.317605
370.000000	80.000000	28.074461	33.776798	0.070116	0.279445
380.000000	80.000000	27.240709	37.380146	0.070256	0.261170
390.000000	80.000000	25.928825	38.548183	0.066304	0.248617
400.000000	80.000000	24.731962	37.074268	0.062740	0.251806
410.000000	80.000000	24.239742	33.558796	0.063103	0.280585
420.000000	80.000000	24.890694	29.656261	0.063992	0.310983
430.000000	80.000000	26.459654	27.475727	0.068286	0.341121
440.000000	80.000000	28.364748	27.895050	0.070178	0.330461
450.000000	80.000000	29.852879	30.705753	0.073306	0.305625
460.000000	80.000000	30.408918	34.424541	0.073856	0.275275
470.000000	80.000000	30.235355	37.676804	0.072084	0.249019
480.000000	80.000000	29.656412	40.148228	0.070338	0.233274
490.000000	80.000000	28.834286	41.507256	0.069524	0.228096
500.000000	80.000000	28.019634	41.538242	0.068132	0.227838
510.000000	80.000000	27.485666	40.415867	0.067681	0.234222
520.000000	80.000000	27.437111	38.818943	0.067875	0.243433
530.000000	80.000000	27.837852	37.327766	0.068573	0.251763
540.000000	80.000000	28.514980	36.415981	0.069017	0.254537
550.000000	80.000000	29.340734	36.151451	0.070448	0.256906
560.000000	80.000000	30.215725	36.489212	0.072379	0.257394
570.000000	80.000000	31.113316	37.388927	0.072793	0.248965
580.000000	80.000000	31.885130	38.659626	0.074795	0.245603
590.000000	80.000000	32.539898	40.132015	0.073992	0.232658
600.000000	80.000000	33.098755	41.841400	0.075883	0.228589
610.000000	80.000000	33.533390	43.550694	0.072832	0.211048
620.000000	80.000000	33.851246	45.224819	0.074188	0.207470
630.000000	80.000000	34.097805	46.934849	0.074692	0.202707
640.000000	80.000000	34.261730	48.586853	0.074480	0.195985
650.000000	80.000000	34.354382	50.151272	0.074271	0.190777
660.000000	80.000000	34.396515	51.752045	0.073806	0.185132
670.000000	80.000000	34.353298	53.369804	0.072883	0.179119
680.000000	80.000000	34.294476	54.778046	0.071643	0.172988
690.000000	80.000000	34.187038	56.171860	0.072040	0.171457
700.000000	80.000000	34.058079	57.414883	0.070419	0.165108
710.000000	80.000000	33.886833	58.542591	0.071284	0.166002
720.000000	80.000000	33.701916	59.507496	0.070118	0.161940
730.000000	80.000000	33.493656	60.366825	0.070468	0.161819
740.000000	80.000000	33.317558	61.019066	0.068660	0.157132
750.000000	80.000000	33.167351	61.543098	0.068999	0.157255
760.000000	80.000000	33.086075	62.027637	0.068457	0.155721
770.000000	80.000000	33.069462	62.435585	0.069094	0.156752
780.000000	80.000000	33.090923	62.927334	0.068632	0.154599
790.000000	80.000000	33.164402	63.407413	0.069746	0.156482
800.000000	80.000000	33.258045	63.945229	0.069818	0.155584
810.000000	80.000000	33.389698	64.550079	0.069004	0.152805
820.000000	80.000000	33.522949	65.234444	0.067720	0.148931
830.000000	80.000000	33.624535	65.785110	0.068577	0.149853
840.000000	80.000000	33.735676	66.549774	0.069048	0.149784
850.000000	80.000000	33.841194	67.258797	0.067802	0.146251
860.000000	80.000000	33.944412	67.979446	0.068272	0.145876
870.000000	80.000000	34.046459	68.802475	0.067085	0.142598
880.000000	80.000000	34.133514	69.665710	0.066698	0.140895
890.000000	80.000000	34.228081	70.399506	0.066971	0.140292
900.000000	80.000000	34.285385	71.229866	0.068269	0.142367
910.000000	80.000000	34.368645	72.084755	0.067257	0.139296
920.000000	80.000000	34.409996	72.811806	0.067690	0.139774
930.000000	80.000000	34.468563	73.620979	0.065937	0.135554
940.000000	80.000000	34.526180	74.385307	0.067038	0.137082
950.000000	80.000000	34.571335	75.151787	0.065854	0.133966
960.000000	80.000000	34.593567	75.893402	0.066534	0.134873
970.000000	80.000000	34.643593	76.745140	0.065192	0.131665
980.000000	80.000000	34.663940	77.496216	0.065069	0.130868
990.000000	80.000000	34.700005	78.341316	0.063852	0.128118
1000.000000	80.000000	34.709366	79.019188	0.064487	0.129039