VASEmethod[EllipsometerType=5, Aniso=Highly+Regressed, AutoRetarder=1, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Sep 02 18:06:35 2011]
Original[020911-e3.dat]
Angstroms
AnE	3000.000000	40.000000	37.6488	160.914	0.751391	2.72379
AnE	3100.000000	40.000000	37.7705	159.191	0.47027	1.69087
AnE	3200.000000	40.000000	38.153	158.621	0.167792	0.611045
AnE	3300.000000	40.000000	38.2902	158.87	0.18654	0.648237
AnE	3400.000000	40.000000	38.5346	159.042	0.108068	0.380069
AnE	3500.000000	40.000000	38.8487	158.964	0.0867853	0.309972
AnE	3600.000000	40.000000	38.834	158.738	0.0950181	0.343838
AnE	3700.000000	40.000000	39.0362	159.493	0.0903115	0.313194
AnE	3800.000000	40.000000	39.2336	159.829	0.0748177	0.265038
AnE	3900.000000	40.000000	39.3689	159.807	0.0654651	0.23673
AnE	4000.000000	40.000000	39.5372	160.135	0.0669448	0.247663
AnE	4100.000000	40.000000	39.6964	160.526	0.0587831	0.207827
AnE	4200.000000	40.000000	39.8162	160.695	0.0545818	0.19609
AnE	4300.000000	40.000000	39.9447	160.745	0.0341988	0.124639
AnE	4400.000000	40.000000	40.1027	160.855	0.0419888	0.155195
AnE	4500.000000	40.000000	40.2174	161.024	0.0337361	0.126508
AnE	4600.000000	40.000000	40.3526	161.121	0.0408674	0.145708
AnE	4700.000000	40.000000	40.5058	161.207	0.0369531	0.133434
AnE	4800.000000	40.000000	40.6783	161.308	0.0322356	0.11783
AnE	4900.000000	40.000000	40.8545	161.405	0.0304822	0.112778
AnE	5000.000000	40.000000	41.0633	161.483	0.0295565	0.110625
AnE	5100.000000	40.000000	41.2873	161.712	0.0348469	0.124232
AnE	5200.000000	40.000000	41.5077	161.963	0.0313191	0.113089
AnE	5300.000000	40.000000	41.7008	162.297	0.0377417	0.138139
AnE	5400.000000	40.000000	41.8479	162.571	0.0328075	0.121678
AnE	5500.000000	40.000000	41.9675	162.898	0.032764	0.123208
AnE	5600.000000	40.000000	42.1006	163.262	0.0379334	0.144681
AnE	5700.000000	40.000000	42.2102	163.652	0.0389339	0.141459
AnE	5800.000000	40.000000	42.2888	163.981	0.0422746	0.155672
AnE	5900.000000	40.000000	42.3785	164.291	0.0410238	0.153082
AnE	6000.000000	40.000000	42.4396	164.557	0.0416788	0.157557
AnE	6100.000000	40.000000	42.5062	164.793	0.0387051	0.148187
AnE	6200.000000	40.000000	42.5747	165.081	0.0463483	0.168753
AnE	6300.000000	40.000000	42.6301	165.38	0.0471761	0.173953
AnE	6400.000000	40.000000	42.6722	165.648	0.0469364	0.175238
AnE	6500.000000	40.000000	42.7076	165.801	0.046445	0.175429
AnE	6600.000000	40.000000	42.7596	165.971	0.0410548	0.156879
AnE	6700.000000	40.000000	42.7947	166.337	0.0414455	0.160484
AnE	6800.000000	40.000000	42.8423	166.491	0.046077	0.16939
AnE	6900.000000	40.000000	42.8658	166.665	0.0463421	0.172295
AnE	7000.000000	40.000000	42.9129	166.881	0.0444949	0.167323
AnE	7100.000000	40.000000	42.9418	167.145	0.0466254	0.177418
AnE	7200.000000	40.000000	42.9588	167.22	0.0429431	0.165122
AnE	7300.000000	40.000000	42.9848	167.417	0.044515	0.173104
AnE	7400.000000	40.000000	43.0087	167.543	0.0481039	0.177605
AnE	7500.000000	40.000000	43.044	167.816	0.0480652	0.179462
AnE	7600.000000	40.000000	43.0584	167.926	0.0481338	0.181558
AnE	7700.000000	40.000000	43.0811	168.095	0.0480859	0.183296
AnE	7800.000000	40.000000	43.1203	168.22	0.0427152	0.164457
AnE	7900.000000	40.000000	43.1323	168.403	0.0435791	0.169587
AnE	8000.000000	40.000000	43.1648	168.492	0.0486232	0.191079
AnE	8100.000000	40.000000	43.1619	168.645	0.0494442	0.18453
AnE	8200.000000	40.000000	43.1887	168.707	0.0482419	0.181796
AnE	8300.000000	40.000000	43.1935	168.936	0.0480769	0.183088
AnE	8400.000000	40.000000	43.2365	169.015	0.0415532	0.159697
AnE	8500.000000	40.000000	43.2283	169.092	0.046227	0.179494
AnE	8600.000000	40.000000	43.2553	169.186	0.0452703	0.177378
AnE	8700.000000	40.000000	43.2782	169.383	0.0562194	0.2094
AnE	8800.000000	40.000000	43.2966	169.49	0.0497379	0.186929
AnE	8900.000000	40.000000	43.3113	169.554	0.0465812	0.176627
AnE	9000.000000	40.000000	43.3235	169.648	0.0509874	0.195045
AnE	9100.000000	40.000000	43.3341	169.729	0.0491855	0.189841
AnE	9200.000000	40.000000	43.3499	169.838	0.0470338	0.18316
AnE	9300.000000	40.000000	43.3547	169.921	0.0512997	0.201549
AnE	9400.000000	40.000000	43.3889	170.092	0.0533309	0.199348
AnE	9500.000000	40.000000	43.3943	170.188	0.0538808	0.203146
AnE	9600.000000	40.000000	43.4145	170.225	0.0521202	0.198126
AnE	9700.000000	40.000000	43.431	170.327	0.0545738	0.209192
AnE	9800.000000	40.000000	43.4345	170.431	0.0516473	0.199677
AnE	9900.000000	40.000000	43.4426	170.502	0.0522951	0.203847
AnE	10000.000000	40.000000	43.4573	170.573	0.0505463	0.19863
Aps	3000.000000	40.000000	2.63202	233.792	3.0262	46.9524
Aps	3100.000000	40.000000	0.628074	269.875	2.08945	106.851
Aps	3200.000000	40.000000	0.832473	114.738	0.65752	37.339
Aps	3300.000000	40.000000	0.744973	82.5993	0.808167	33.1847
Aps	3400.000000	40.000000	0.692918	97.0641	0.452868	22.9259
Aps	3500.000000	40.000000	0.394851	222.133	0.322476	40.3942
Aps	3600.000000	40.000000	0.456257	212.13	0.322887	42.8089
Aps	3700.000000	40.000000	0.277112	199.385	0.254935	71.2008
Aps	3800.000000	40.000000	0.375064	220.29	0.260855	36.2756
Aps	3900.000000	40.000000	0.331008	188.332	0.155617	45.8708
Aps	4000.000000	40.000000	0.222032	117.738	0.241346	51.149
Aps	4100.000000	40.000000	0.229548	149.142	0.142938	55.1556
Aps	4200.000000	40.000000	0.344979	206.577	0.152214	31.8736
Aps	4300.000000	40.000000	0.263346	205.443	0.0940952	26.5026
Aps	4400.000000	40.000000	0.224414	193.325	0.0984919	41.2997
Aps	4500.000000	40.000000	0.230837	194.43	0.0803437	32.2125
Aps	4600.000000	40.000000	0.248651	190.429	0.0897952	35.568
Aps	4700.000000	40.000000	0.240374	184.943	0.0766828	33.9944
Aps	4800.000000	40.000000	0.24941	186.208	0.0679466	28.5381
Aps	4900.000000	40.000000	0.270658	187.907	0.0655572	24.7811
Aps	5000.000000	40.000000	0.29556	195.502	0.0698476	21.3135
Aps	5100.000000	40.000000	0.291267	196.445	0.0806967	24.3967
Aps	5200.000000	40.000000	0.262157	192.019	0.0686683	24.8829
Aps	5300.000000	40.000000	0.284569	191.242	0.0820514	27.708
Aps	5400.000000	40.000000	0.288072	191.321	0.0715035	23.8201
Aps	5500.000000	40.000000	0.289981	192.389	0.0724359	23.5714
Aps	5600.000000	40.000000	0.312456	185.745	0.0780265	25.9958
Aps	5700.000000	40.000000	0.293046	180.915	0.0750978	27.6706
Aps	5800.000000	40.000000	0.323904	180.01	0.0813671	27.2893
Aps	5900.000000	40.000000	0.326819	189.842	0.0861014	25.6319
Aps	6000.000000	40.000000	0.327654	188.525	0.0864913	26.1976
Aps	6100.000000	40.000000	0.3486	195.319	0.0869511	22.3133
Aps	6200.000000	40.000000	0.333531	192.481	0.0979859	27.2743
Aps	6300.000000	40.000000	0.354155	189.658	0.0970149	26.5185
Aps	6400.000000	40.000000	0.36086	187.223	0.0945192	26.2029
Aps	6500.000000	40.000000	0.333396	190.095	0.0965404	27.9286
Aps	6600.000000	40.000000	0.341851	192.781	0.0880876	23.9268
Aps	6700.000000	40.000000	0.349035	185.672	0.0829747	24.3408
Aps	6800.000000	40.000000	0.367415	187.931	0.0919719	24.6433
Aps	6900.000000	40.000000	0.341307	184.126	0.0899238	27.0749
Aps	7000.000000	40.000000	0.34516	176.593	0.0834768	26.0781
Aps	7100.000000	40.000000	0.350181	185.767	0.0921154	26.6457
Aps	7200.000000	40.000000	0.348139	182.714	0.0832394	24.9933
Aps	7300.000000	40.000000	0.345891	185.022	0.0879239	26.0681
Aps	7400.000000	40.000000	0.331586	189.85	0.0969922	27.9948
Aps	7500.000000	40.000000	0.346709	183.505	0.0922372	27.3067
Aps	7600.000000	40.000000	0.346727	180.777	0.0912436	27.6048
Aps	7700.000000	40.000000	0.37712	186.825	0.0951429	25.1462
Aps	7800.000000	40.000000	0.364882	177.497	0.0804803	23.5562
Aps	7900.000000	40.000000	0.350185	190.617	0.089695	24.474
Aps	8000.000000	40.000000	0.371324	181.776	0.093608	26.4701
Aps	8100.000000	40.000000	0.367968	184.6	0.095116	26.1173
Aps	8200.000000	40.000000	0.378465	187.114	0.0947207	24.7345
Aps	8300.000000	40.000000	0.390624	183.587	0.0922249	24.1811
Aps	8400.000000	40.000000	0.380057	186.637	0.0816621	21.4178
Aps	8500.000000	40.000000	0.39382	191.211	0.093929	22.8012
Aps	8600.000000	40.000000	0.391077	189.707	0.0911411	22.706
Aps	8700.000000	40.000000	0.37571	183.437	0.106278	28.8447
Aps	8800.000000	40.000000	0.414347	182.524	0.0939756	23.2665
Aps	8900.000000	40.000000	0.398372	183.461	0.0887012	22.7258
Aps	9000.000000	40.000000	0.377737	186.485	0.099346	26.174
Aps	9100.000000	40.000000	0.41303	188.43	0.0975728	23.076
Aps	9200.000000	40.000000	0.429879	191.787	0.0964277	21.0618
Aps	9300.000000	40.000000	0.428286	178.024	0.0964528	23.862
Aps	9400.000000	40.000000	0.424383	179.595	0.0989822	24.1936
Aps	9500.000000	40.000000	0.418212	187.394	0.10471	24.5589
Aps	9600.000000	40.000000	0.408138	186.841	0.101088	24.4765
Aps	9700.000000	40.000000	0.425866	187.442	0.10658	24.619
Aps	9800.000000	40.000000	0.423327	187.9	0.101463	23.5125
Aps	9900.000000	40.000000	0.427376	183.283	0.0997782	23.93
Aps	10000.000000	40.000000	0.424734	187.908	0.099717	23.1345
Asp	3000.000000	40.000000	1.89737	75.1706	2.13428	39.2837
Asp	3100.000000	40.000000	0.520089	112.923	1.41901	84.0706
Asp	3200.000000	40.000000	0.315339	-48.1243	0.461781	66.1338
Asp	3300.000000	40.000000	0.574844	-62.0523	0.546192	31.9824
Asp	3400.000000	40.000000	0.610568	-55.1576	0.30823	19.5292
Asp	3500.000000	40.000000	0.385788	18.5565	0.136408	40.3534
Asp	3600.000000	40.000000	0.263007	22.5769	0.158211	64.5976
Asp	3700.000000	40.000000	0.284179	-27.0589	0.192682	48.9116
Asp	3800.000000	40.000000	0.30608	9.18453	0.112564	43.9587
Asp	3900.000000	40.000000	0.238529	22.2769	0.11121	48.7983
Asp	4000.000000	40.000000	0.490971	-36.5078	0.167689	20.0698
Asp	4100.000000	40.000000	0.430656	-39.7088	0.147464	18.8397
Asp	4200.000000	40.000000	0.19479	19.9033	0.0916635	49.6371
Asp	4300.000000	40.000000	0.280128	-3.27839	0.0570205	22.0045
Asp	4400.000000	40.000000	0.287792	-9.57709	0.0755863	26.0806
Asp	4500.000000	40.000000	0.267992	-13.4421	0.064249	22.3616
Asp	4600.000000	40.000000	0.295249	-16.468	0.078679	23.4285
Asp	4700.000000	40.000000	0.310518	-9.81873	0.0663119	21.0051
Asp	4800.000000	40.000000	0.300973	-8.93251	0.0578981	19.1772
Asp	4900.000000	40.000000	0.278839	0.118764	0.0510287	20.2727
Asp	5000.000000	40.000000	0.288452	-7.40246	0.0533396	18.8669
Asp	5100.000000	40.000000	0.294689	-5.33882	0.0601637	21.2417
Asp	5200.000000	40.000000	0.295231	-8.34307	0.0563838	19.0705
Asp	5300.000000	40.000000	0.3133	-4.17408	0.0658752	22.1409
Asp	5400.000000	40.000000	0.331007	-10.7539	0.0617954	17.9815
Asp	5500.000000	40.000000	0.297489	-2.35875	0.0572795	20.6761
Asp	5600.000000	40.000000	0.324998	-8.70987	0.0708237	21.7009
Asp	5700.000000	40.000000	0.333879	-17.4073	0.0784139	20.1192
Asp	5800.000000	40.000000	0.326107	-10.8152	0.0792643	23.2366
Asp	5900.000000	40.000000	0.354478	-6.44807	0.0740196	21.216
Asp	6000.000000	40.000000	0.345773	-4.9216	0.0746045	22.3496
Asp	6100.000000	40.000000	0.354199	-6.88622	0.0709044	20.3015
Asp	6200.000000	40.000000	0.347336	-6.97186	0.0829765	23.9144
Asp	6300.000000	40.000000	0.340784	-1.82268	0.081596	25.275
Asp	6400.000000	40.000000	0.362174	-7.43305	0.0852828	23.482
Asp	6500.000000	40.000000	0.314266	-5.76947	0.0835656	27.093
Asp	6600.000000	40.000000	0.326145	-4.41203	0.0734273	23.3222
Asp	6700.000000	40.000000	0.34631	-7.33596	0.0762726	22.1313
Asp	6800.000000	40.000000	0.335113	-9.30051	0.0844552	24.3889
Asp	6900.000000	40.000000	0.340726	-5.19675	0.0823026	24.5639
Asp	7000.000000	40.000000	0.345684	-6.1571	0.0800079	23.3345
Asp	7100.000000	40.000000	0.337844	-9.85944	0.0870487	24.8802
Asp	7200.000000	40.000000	0.336544	-3.49387	0.07629	23.5691
Asp	7300.000000	40.000000	0.326266	-4.46782	0.0799208	25.3061
Asp	7400.000000	40.000000	0.333182	2.61887	0.0817401	26.1244
Asp	7500.000000	40.000000	0.350143	-12.2033	0.0908593	24.132
Asp	7600.000000	40.000000	0.355888	-8.08588	0.0877867	24.2585
Asp	7700.000000	40.000000	0.347931	-8.88713	0.0886426	24.8717
Asp	7800.000000	40.000000	0.36762	-0.754656	0.0745478	21.4331
Asp	7900.000000	40.000000	0.339365	-11.9169	0.0832978	23.1475
Asp	8000.000000	40.000000	0.332728	0.926102	0.084892	27.3388
Asp	8100.000000	40.000000	0.318215	-4.56759	0.0869998	27.8084
Asp	8200.000000	40.000000	0.35093	-8.03002	0.0877282	24.5391
Asp	8300.000000	40.000000	0.344426	-2.59191	0.0844372	25.3533
Asp	8400.000000	40.000000	0.364049	2.11871	0.0718054	20.9767
Asp	8500.000000	40.000000	0.377887	-1.79066	0.0810767	22.5112
Asp	8600.000000	40.000000	0.378057	-14.0433	0.088321	21.4138
Asp	8700.000000	40.000000	0.366506	-6.28457	0.100251	27.2067
Asp	8800.000000	40.000000	0.375435	-6.08293	0.0889369	23.6269
Asp	8900.000000	40.000000	0.377401	-6.80437	0.0840163	22.0912
Asp	9000.000000	40.000000	0.387489	-5.19554	0.0911793	23.7631
Asp	9100.000000	40.000000	0.396988	-0.137608	0.0858809	22.683
Asp	9200.000000	40.000000	0.424761	-3.67752	0.0837961	20.2735
Asp	9300.000000	40.000000	0.426454	-4.90295	0.0923515	22.0895
Asp	9400.000000	40.000000	0.426319	-8.56549	0.0969127	22.029
Asp	9500.000000	40.000000	0.403047	-5.42335	0.0959214	23.8406
Asp	9600.000000	40.000000	0.410733	-2.08994	0.0913094	22.8881
Asp	9700.000000	40.000000	0.410167	-4.48321	0.0971597	24.0156
Asp	9800.000000	40.000000	0.412337	-5.56604	0.0928527	22.665
Asp	9900.000000	40.000000	0.415381	-6.6113	0.0949518	22.8402
Asp	10000.000000	40.000000	0.415121	-3.50195	0.0901725	22.3481
qJ	3000.000000	40.000000	0.0265736	0.0739021
qJ	3100.000000	40.000000	0.0113544	0.0498285
qJ	3200.000000	40.000000	0.0048404	0.017737
qJ	3300.000000	40.000000	0.00497009	0.0190617
qJ	3400.000000	40.000000	0.00393621	0.0106574
qJ	3500.000000	40.000000	0.00422241	0.00801274
qJ	3600.000000	40.000000	0.00447359	0.00877279
qJ	3700.000000	40.000000	0.00169402	0.00947131
qJ	3800.000000	40.000000	0.00309749	0.00688665
qJ	3900.000000	40.000000	0.0034037	0.00544825
qJ	4000.000000	40.000000	0.00320189	0.00566209
qJ	4100.000000	40.000000	0.00203033	0.00563113
qJ	4200.000000	40.000000	0.0022928	0.00489243
qJ	4300.000000	40.000000	0.00129528	0.003188
qJ	4400.000000	40.000000	0.00185801	0.00372082
qJ	4500.000000	40.000000	0.002013	0.00237838
qJ	4600.000000	40.000000	0.00198991	0.00350256
qJ	4700.000000	40.000000	0.00162004	0.00320573
qJ	4800.000000	40.000000	0.00160436	0.00267281
qJ	4900.000000	40.000000	0.00126574	0.00276723
qJ	5000.000000	40.000000	0.00112983	0.0027236
qJ	5100.000000	40.000000	0.00133648	0.00315817
qJ	5200.000000	40.000000	0.00124007	0.00287788
qJ	5300.000000	40.000000	0.00123908	0.00363374
qJ	5400.000000	40.000000	0.00139594	0.00285672
qJ	5500.000000	40.000000	0.00142583	0.00286381
qJ	5600.000000	40.000000	0.00143931	0.00358922
qJ	5700.000000	40.000000	0.00142502	0.00362278
qJ	5800.000000	40.000000	0.00138486	0.00395983
qJ	5900.000000	40.000000	0.00201794	0.00351378
qJ	6000.000000	40.000000	0.00231919	0.0032109
qJ	6100.000000	40.000000	0.00199328	0.00320362
qJ	6200.000000	40.000000	0.00188657	0.00420283
qJ	6300.000000	40.000000	0.00228742	0.00396673
qJ	6400.000000	40.000000	0.00215215	0.00411067
qJ	6500.000000	40.000000	0.00243233	0.00351618
qJ	6600.000000	40.000000	0.0013601	0.00379112
qJ	6700.000000	40.000000	0.00185777	0.0036859
qJ	6800.000000	40.000000	0.00168519	0.00421673
qJ	6900.000000	40.000000	0.00160095	0.00437364
qJ	7000.000000	40.000000	0.0016736	0.00404785
qJ	7100.000000	40.000000	0.00164672	0.00439342
qJ	7200.000000	40.000000	0.00155814	0.00399106
qJ	7300.000000	40.000000	0.00154722	0.0041283
qJ	7400.000000	40.000000	0.00172402	0.00443333
qJ	7500.000000	40.000000	0.00144528	0.00462841
qJ	7600.000000	40.000000	0.0016857	0.00448309
qJ	7700.000000	40.000000	0.00162732	0.0044888
qJ	7800.000000	40.000000	0.00157656	0.00401623
qJ	7900.000000	40.000000	0.00178518	0.00387955
qJ	8000.000000	40.000000	0.00183875	0.00448084
qJ	8100.000000	40.000000	0.0016225	0.00461779
qJ	8200.000000	40.000000	0.00128871	0.00473141
qJ	8300.000000	40.000000	0.00170827	0.00440463
qJ	8400.000000	40.000000	0.00123258	0.0040564
qJ	8500.000000	40.000000	0.00181025	0.00412908
qJ	8600.000000	40.000000	0.00129866	0.0043659
qJ	8700.000000	40.000000	0.00182415	0.00524395
qJ	8800.000000	40.000000	0.00135923	0.00487599
qJ	8900.000000	40.000000	0.00151787	0.00439053
qJ	9000.000000	40.000000	0.00158922	0.00479771
qJ	9100.000000	40.000000	0.00172634	0.00454361
qJ	9200.000000	40.000000	0.00119284	0.00467067
qJ	9300.000000	40.000000	0.00188802	0.00473498
qJ	9400.000000	40.000000	0.00144096	0.0052222
qJ	9500.000000	40.000000	0.0015343	0.00521617
qJ	9600.000000	40.000000	0.00165711	0.00498763
qJ	9700.000000	40.000000	0.0017266	0.00518106
qJ	9800.000000	40.000000	0.00139306	0.00502973
qJ	9900.000000	40.000000	0.00171313	0.00497328
qJ	10000.000000	40.000000	0.00150602	0.00485969