:Base Wvase.hlp>main 1 Introduction 2 WVASE32™ as a Windows™ application=WVASE32TasaWindowsTapplication 2 Organization of this manual=Organizationofthismanual 2 How to use this manual 3 How to use this manual=Howtousethismanual 3 All users=Allusers 3 VASE? users=VASE.users 3 M-44? users=M.44.users 1 A Short Course in Ellipsometry 2 Short course overview=Shortcourseoverview 2 What is ellipsometry? 3 What is ellipsometry?=Whatisellipsometry. 3 Why variable angle spectroscopic ellipsometry (VASE?)?=Whyvariableanglespectroscopicellipsometry.VASE... 3 What does an ellipsometer measure?=Whatdoesanellipsometermeasure. 3 What parameters can be determined?=Whatparameterscanbedetermined. 3 What are the regimes of applicability?=Whataretheregimesofapplicability. 3 Accuracy and precision of ellipsometric experiments=Accuracyandprecisionofellipsometricexperiments 2 General procedure for optical experiments 3 General procedure for optical experiments=Generalprocedureforopticalexperiments 3 Measurement=Measurement 3 Development of a model=Developmentofamodel 3 Fit model to measured data=Fitmodeltomeasureddata 3 Evaluate the best-fit model=Evaluatethebest.fitmodel 2 Polarized light 3 Polarized light=Polarizedlight 3 Maxwell's equations and the electromagnetic plane wave=Maxwell.sequationsandtheelectromagneticplanewave 3 Jones vectors and matrices=Jonesvectorsandmatrices 3 Light polarization states=Lightpolarizationstates 3 Unpolarized (randomly polarized) light=Unpolarized.randomlypolarized.light 3 Partially polarized light=Partiallypolarizedlight 2 Optical components used in ellipsometers 3 Optical components used in ellipsometers=Opticalcomponentsusedinellipsometers 3 Light sources=Lightsources 3 Optical fibers=Opticalfibers 3 Beam modulators=Beammodulators 3 Polarizers=Polarizers 3 Retarders=Retarders 3 Detectors=Detectors 2 Ellipsometer principles and configurations 3 Ellipsometer principles and configurations=Ellipsometerprinciplesandconfigurations 3 Principles of ellipsometer design=Principlesofellipsometerdesign 3 Null ellipsometry=Nullellipsometry 3 Polarization modulation ellipsometers=Polarizationmodulationellipsometers 3 Rotating element ellipsometers=Rotatingelementellipsometers 3 Rotating analyzer vs. rotating polarizer ellipsometers=Rotatinganalyzervs.rotatingpolarizerellipsometers 3 Rotating analyzer with variable retarder ellipsometry=Rotatinganalyzerwithvariableretarderellipsometry 3 Variable vs. fixed angle of incidence=Variablevs.fixedangleofincidence 2 The rotating analyzer ellipsometer 3 The rotating analyzer ellipsometer=Therotatinganalyzerellipsometer 3 Configuration=Configuration 3 Measurement of the reflected beam polarization state=Measurementofthereflectedbeampolarizationstate 3 Jones matrix analysis of the rotating analyzer ellipsometer=Jonesmatrixanalysisoftherotatinganalyzerellipsometer 3 Anisotropic or depolarizing samples=Anisotropicordepolarizingsamples 3 Calibration of the polarizer angles=Calibrationofthepolarizerangles 3 Error (sensitivity) analysis - polarizer tracking=Error.sensitivity.analysis.polarizertracking 2 The J. A. Woollam Co., Inc. VASE? instrument 3 The J. A. Woollam Co., Inc. VASE? instrument=TheJ.A.WoollamCo..Inc.VASE.instrument 2 Reflection of polarized light from planar structures 3 Reflection of polarized light from planar structures=Reflectionofpolarizedlightfromplanarstructures 3 Measurement geometry=Measurementgeometry 3 Optical constants and what they mean=Opticalconstantsandwhattheymean 3 Bulk materials=Bulkmaterials 3 Single films on thick substrates=Singlefilmsonthicksubstrates 3 Multilayer formalisms=Multilayerformalisms 3 Superlattices=Superlattices 3 Grading=Grading 3 Composite materials and roughness - EMA models=Compositematerialsandroughness.EMAmodels 2 Regression analysis of optical data 3 Regression analysis of optical data=Regressionanalysisofopticaldata 3 Description of the problem=Descriptionoftheproblem 3 The gradient method=Thegradientmethod 3 The inverse Hessian method=TheinverseHessianmethod 3 The Levenberg-Marquardt algorithm=TheLevenberg.Marquardtalgorithm 3 Evaluating the best-fit results=Evaluatingthebest.fitresults 3 Interpretation of confidence limits=Interpretationofconfidencelimits1 2 Optical properties of materials and thin films 3 Optical properties of materials and thin films=Opticalpropertiesofmaterialsandthinfilms 3 Optical constants - what are they?=Opticalconstants.whatarethey. 3 Kramers-Kronig relations=Kramers.Kronigrelations 3 Interband absorption=Interbandabsorption 3 Intraband absorption=Intrabandabsorption 3 Free carrier absorption=Freecarrierabsorption 3 Dielectric materials and semiconductors=Dielectricmaterialsandsemiconductors 3 Metals=Metals 3 Bulk vs. thin film optical constants=Bulkvs.thinfilmopticalconstants 1 Navigating WVASE32™ 2 Working in the Windows™ operating system 3 Working in the Windows™ operating system=WorkingintheWindowsToperatingsystem 3 Starting Windows?=StartingWindows. 3 Windows™ basics=WindowsTbasics 3 Working with windows and menus 4 Working with windows and menus=Workingwithwindowsandmenus 4 Menus=Menus 4 Minimizing and maximizing windows=Minimizingandmaximizingwindows 3 Dialog boxes 4 Dialog boxes=Dialogboxes 4 Drives=Drives 4 Directories=Directories 4 List files of type=Listfilesoftype 4 File name=Filename 4 Ok button=Okbutton1 4 Cancel button=Cancelbutton1 3 Summary of Windows™ functions 4 Summary of Windows™ functions=SummaryofWindowsTfunctions 2 Starting WVASE32™ 3 Starting WVASE32™=StartingWVASE32T 2 The "V.A.S.E. for Windows" frame 3 The "V.A.S.E. for Windows" frame=The.V.A.S.E.forWindows.frame 2 Summary of main window functions 3 Summary of main window functions=Summaryofmainwindowfunctions 3 Experimental Data window=ExperimentalDatawindow 3 Model window=Modelwindow 3 Generated Data window=GeneratedDatawindow 3 Graph window=Graphwindow 3 Fit window=Fitwindow 3 Hardware window=Hardwarewindow 2 The menubar and menu naming convention 3 The menubar and menu naming convention=Themenubarandmenunamingconvention 2 |Window menu 3 |Window menu=.Windowmenu 2 |Global menu 3 |Global menu=.Globalmenu 3 |Global|Help item=.Global.Helpitem 3 |Global|Defaults item=.Global.Defaultsitem 3 |Global|Save_Current_Environment item=.Global.Save.Current.Environmentitem 3 |Global|Load_New_Environment item=.Global.Load.New.Environmentitem 3 |Global|Run_WVASE_Tools item=.Global.Run.WVASE.Toolsitem 3 |Global|About item=.Global.Aboutitem 2 |File|Exit_WVASE item 3 |File|Exit_WVASE item=.File.Exit.WVASEitem 1 Hardware Window: VASE® 2 Hardware window overview for VASE® systems 3 Hardware window overview for VASE® systems=HardwarewindowoverviewforVASErsystems 3 Features displayed in the Hardware window 4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow1 4 Title bar=Titlebar1 4 Motor position=Motorposition1 4 Calibration constants=Calibrationconstants1 4 Translator position=Translatorposition 3 Hardware window menubar 4 Hardware window menubar=Hardwarewindowmenubar1 3 Summary of VASE® system options 4 Summary of VASE® system options=SummaryofVASErsystemoptions 4 Translator equipped systems=Translatorequippedsystems 4 Infrared extended system=Infraredextendedsystem 4 PTI monochromator=PTImonochromator 4 CVI monochromator=CVImonochromator 3 Common Hardware window message boxes 4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes1 2 Hardware|File menu 3 Hardware|File menu=Hardware.Filemenu1 3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem1 2 Hardware|Initialize command 3 Hardware|Initialize command=Hardware.Initializecommand1 2 Hardware|Acquire_Data menu 3 Hardware|Acquire_Data menu=Hardware.Acquire.Datamenu 2 Hardware|Acquire_Data|Align item 3 Hardware|Acquire_Data|Align item=Hardware.Acquire.Data.Alignitem 2 Hardware|Acquire_Data|Calibrate item 3 Hardware|Acquire_Data|Calibrate item=Hardware.Acquire.Data.Calibrateitem 3 When and why to calibrate=Whenandwhytocalibrate 3 Overview of calibration procedure=Overviewofcalibrationprocedure 3 What happens during the calibration=Whathappensduringthecalibration 3 The calibration dialog box 4 The calibration dialog box=Thecalibrationdialogbox1 4 Calibration mode=Calibrationmode 4 Revs per measurement=Revspermeasurement1 4 # of points=.ofpoints1 4 Degree span=Degreespan 3 Evaluating the calibration results 4 Evaluating the calibration results=Evaluatingthecalibrationresults 4 Bad calibration=Badcalibration 4 Calibration error, but calibration OK=Calibrationerror.butcalibrationOK 4 Check for polarizer off by 90°=Checkforpolarizeroffby90. 4 Check the log file=Checkthelogfile 3 Choice of calibration sample 4 Choice of calibration sample=Choiceofcalibrationsample 2 Hardware|Acquire_Data|Spectroscopic_Scan item 3 Hardware|Acquire_Data|Spectroscopic_Scan item=Hardware.Acquire.Data.Spectroscopic.Scanitem 3 The spectroscopic scan dialog box 4 The spectroscopic scan dialog box=Thespectroscopicscandialogbox 4 Wavelength range boxes=Wavelengthrangeboxes1 4 Angle range boxes=Anglerangeboxes1 4 Revs per measurement=Revspermeasurement2 4 Acquisition settings list=Acquisitionsettingslist 4 Change settings button=Changesettingsbutton 4 Cancel button=Cancelbutton2 4 Ok button=Okbutton2 3 Ellipsometric data acquisition options 4 Ellipsometric data acquisition options=Ellipsometricdataacquisitionoptions 4 Optical components box=Opticalcomponentsbox 4 Track polarizer option=Trackpolarizeroption 4 Fixed polarizer setting option=Fixedpolarizersettingoption 4 Zone average polarizer checkbox=Zoneaveragepolarizercheckbox 4 Use auto retarder=Useautoretarder 4 Revs/Measurement=Revs.Measurement 4 Sample type box=Sampletypebox 4 Isotropic Jones matrix option=IsotropicJonesmatrixoption 4 Anisotropic Jones matrix option=AnisotropicJonesmatrixoption 4 Dynamic averaging box=Dynamicaveragingbox 4 Dynamic averaging enabled check box=Dynamicaveragingenabledcheckbox 4 Maximum # of revs=Maximum.ofrevs 4 Threshold intensity=Thresholdintensity 4 Monochromator slit width box=Monochromatorslitwidthbox 4 Max. slit width box=Max.slitwidthbox 4 Auto slit adjustment check box=Autoslitadjustmentcheckbox 4 Reset to defaults button=Resettodefaultsbutton 4 Cancel button=Cancelbutton3 4 Ok button=Okbutton3 2 Hardware|Acquire_Data|Dynamic_Scan item 3 Hardware|Acquire_Data|Dynamic_Scan item=Hardware.Acquire.Data.Dynamic.Scanitem 3 The dynamic scan dialog box 4 The dynamic scan dialog box=Thedynamicscandialogbox 4 # of wavelengths=.ofwavelengths 4 Wavelength list=Wavelengthlist 4 Revs/meas=Revs.meas1 4 Ellipsometric data acquisition settings=Ellipsometricdataacquisitionsettings 4 Change settings=Changesettings 4 Dynamic fit=Dynamicfit 2 Hardware|Acquire_Data|R&T_Data item 3 Hardware|Acquire_Data|R&T_Data item=Hardware.Acquire.Data.R.T.Dataitem 3 The R&T scan dialog box 4 The R&T scan dialog box=TheR.Tscandialogbox 4 Data acquisition mode=Dataacquisitionmode 4 Data type=Datatype1 4 Polarizer angle=Polarizerangle 4 Wavelength range boxes=Wavelengthrangeboxes2 4 Angle range boxes=Anglerangeboxes2 4 Revs per measurement=Revspermeasurement3 4 Go to white light for alignment=Gotowhitelightforalignment 4 Use auxiliary detector=Useauxiliarydetector 4 Acquire baseline from reference sample=Acquirebaselinefromreferencesample 2 Hardware|Acquire_Data|Translation_Scan item 3 Hardware|Acquire_Data|Translation_Scan item=Hardware.Acquire.Data.Translation.Scanitem 3 The translation scan dialog box 4 The translation scan dialog box=Thetranslationscandialogbox 4 Discrete wavelengths=Discretewavelengths 4 VASE? data=VASE.data 4 Reflection/Transmission data=Reflection.Transmissiondata 4 Angles=Angles1 4 Translator scan parameters=Translatorscanparameters 4 Revs/meas=Revs.meas2 4 Polarizer=Polarizer1 2 Hardware|Move menu 3 Hardware|Move menu=Hardware.Movemenu 3 Hardware|Move|Monochromator item 4 Hardware|Move|Monochromator item=Hardware.Move.Monochromatoritem 4 Enter new position=Enternewposition1 4 White light button=Whitelightbutton 3 Hardware|Move|Angle_of_Incidence item 4 Hardware|Move|Angle_of_Incidence item=Hardware.Move.Angle.of.Incidenceitem 4 Enter new angle=Enternewangle 3 Hardware|Move|Polarizer item 4 Hardware|Move|Polarizer item=Hardware.Move.Polarizeritem 4 Enter new position=Enternewposition2 3 Hardware|Move|Translator item 4 Hardware|Move|Translator item=Hardware.Move.Translatoritem 4 X in cm=Xincm 4 Y in cm=Yincm 4 Home stages button=Homestagesbutton 2 Hardware|Setup menu 3 Hardware|Setup menu=Hardware.Setupmenu 3 Hardware|Setup|Current_Motor_Settings item 4 Hardware|Setup|Current_Motor_Settings item=Hardware.Setup.Current.Motor.Settingsitem 4 Monochromator=Monochromator 4 Sample stage=Samplestage 4 Detector stage=Detectorstage 4 Auto home goniometers button=Autohomegoniometersbutton 4 Jog buttons=Jogbuttons 4 Grating position=Gratingposition 4 Slit width=Slitwidth 4 Enable auto slit adjustment=Enableautoslitadjustment 4 Detector system=Detectorsystem 3 Hardware|Setup|Display_Signal item 4 Hardware|Setup|Display_Signal item=Hardware.Setup.Display.Signalitem 4 exits=.Esc.exits1 4 nRevs=nRevs 4 Gain=Gain1 4 Slit=Slit 4 Chop=Chop 4 Chop +2A=Chop.2A 4 alpha and beta=alphaandbeta 4 Psi and Delta=PsiandDelta 3 Hardware|Setup|Home_Filter item 4 Hardware|Setup|Home_Filter item=Hardware.Setup.Home.Filteritem 4 Enter home filter constant=Enterhomefilterconstant 1 Hardware Window: M-44® 2 Hardware window overview, M-44® system 3 Hardware window overview, M-44® system=Hardwarewindowoverview.M.44rsystem 3 Features displayed in the Hardware window 4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow2 4 Title bar=Titlebar2 4 Motor position=Motorposition2 4 Calibration constants=Calibrationconstants2 3 Hardware window menubar 4 Hardware window menubar=Hardwarewindowmenubar2 3 Common Hardware window message boxes 4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes2 2 Hardware|File menu 3 Hardware|File menu=Hardware.Filemenu2 3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem2 2 Hardware|Initialize command 3 Hardware|Initialize command=Hardware.Initializecommand2 2 Hardware|Align command 3 Hardware|Align command=Hardware.Aligncommand 2 Hardware|Calibrate command 3 Hardware|Calibrate command=Hardware.Calibratecommand 3 The calibration dialog box 4 The calibration dialog box=Thecalibrationdialogbox2 4 Normal=Normal 4 Coarse=Coarse 4 Straight-through=Straight.through 4 Revs per measurement=Revspermeasurement4 4 # of points=.ofpoints2 4 Degree span (of polarizer)=Degreespan.ofpolarizer. 4 Short wavelength / Long wavelength=Shortwavelength.Longwavelength 3 Effect on other windows 4 Effect on other windows=Effectonotherwindows1 2 Hardware|Ellipsometric_Data command 3 Hardware|Ellipsometric_Data command=Hardware.Ellipsometric.Datacommand 3 The ellipsometric data dialog box 4 The ellipsometric data dialog box=Theellipsometricdatadialogbox 4 Revs/meas=Revs.meas3 4 Polarizer setting=Polarizersetting 4 Current angle of incidence=Currentangleofincidence 4 Fit data to model in real-time=Fitdatatomodelinreal.time 4 Don't save dynamic data=Don.tsavedynamicdata 4 Data type=Datatype2 4 Acquire single scan=Acquiresinglescan 4 Update graph, every n points=Updategraph.everynpoints 4 Selected channels=Selectedchannels 3 Effect on other windows 4 Effect on other windows=Effectonotherwindows2 2 Hardware|Signal command 3 Hardware|Signal command=Hardware.Signalcommand 3 Signal display options 4 Signal display options=Signaldisplayoptions 4 Channel #=Channel. 4 All channels=Allchannels 4 Revs per measurement=Revspermeasurement5 4 Gain=Gain2 4 Auto switching=Autoswitching 4 Calc. DC offset=Calc.DCoffset 4 Polarizer=Polarizer2 4 Angle of incidence=Angleofincidence 1 The Experimental Data Window 2 Experimental data window overview 3 Experimental data window overview=Experimentaldatawindowoverview 3 Features displayed in the Experimental Data window 4 Features displayed in the Experimental Data window=FeaturesdisplayedintheExperimentalDatawindow 4 Title bar=Titlebar3 4 Comment line=Commentline1 4 Scroll bar=Scrollbar1 4 Selected column=Selectedcolumn 4 Type column=Typecolumn1 4 Wavelength column=Wavelengthcolumn1 4 Angle column=Anglecolumn1 4 Data columns=Datacolumns1 4 Time column=Timecolumn1 3 The Experimental Data window menubar 4 The Experimental Data window menubar=TheExperimentalDatawindowmenubar 3 Data from samples with transparent substrates 4 Data from samples with transparent substrates=Datafromsampleswithtransparentsubstrates 3 The experimental data types 4 The experimental data types=Theexperimentaldatatypes 3 Ellipsometric data types 4 Ellipsometric data types=Ellipsometricdatatypes 4 E - Ellipsometry, standard=E.Ellipsometry.standard 4 Eb - Ellipsometry, back-side corrected=Eb.Ellipsometry.back.sidecorrected 4 Er - Ellipsometry, reverse side=Er.Ellipsometry.reverseside 4 Et - Ellipsometry, transmission=Et.Ellipsometry.transmission 4 aEp - Ellipsometry, special anisotropic=aEp.Ellipsometry.specialanisotropic 4 aEs - Ellipsometry, special anisotropic=aEs.Ellipsometry.specialanisotropic 4 aEpb - Ellipsometry, special anisotropic and backside corrected=aEpb.Ellipsometry.specialanisotropicandbacksidecorrected 4 aEsb - Ellipsometry, special anisotropic and backside corrected=aEsb.Ellipsometry.specialanisotropicandbacksidecorrected 3 Reflected intensity data types 4 Reflected intensity data types=Reflectedintensitydatatypes 4 pR - Reflection, p-polarized=pR.Reflection.p.polarized 4 sR - Reflection, s-polarized=sR.Reflection.s.polarized 4 uR - Reflection, unpolarized=uR.Reflection.unpolarized 4 pRb - Reflection, p-polarized and backside corrected=pRb.Reflection.p.polarizedandbacksidecorrected 4 sRb - Reflection, s-polarized and backside corrected=sRb.Reflection.s.polarizedandbacksidecorrected 4 uRb - Reflection, unpolarized and backside corrected=uRb.Reflection.unpolarizedandbacksidecorrected 3 Transmitted intensity data types 4 Transmitted intensity data types=Transmittedintensitydatatypes 4 pT - Transmission, p-polarized=pT.Transmission.p.polarized 4 sT - Transmission, s-polarized=sT.Transmission.s.polarized 4 uT - Transmission, unpolarized=uT.Transmission.unpolarized 3 Generalized anisotropic ellipsometric data types 4 Generalized anisotropic ellipsometric data types=Generalizedanisotropicellipsometricdatatypes 4 Ane - Anisotropic Ellipsometry, normal component=Ane.AnisotropicEllipsometry.normalcomponent 4 Aps - Anisotropic Ellipsometry, p into s component=Aps.AnisotropicEllipsometry.pintoscomponent 4 Asp - Anisotropic Ellipsometry, s into p component=Asp.AnisotropicEllipsometry.sintopcomponent 3 Other data types recognized by WVASE32? 4 Other data types recognized by WVASE32?=OtherdatatypesrecognizedbyWVASE32. 4 N - Neutron reflection=N.Neutronreflection 4 Tph - Transmitted phase=Tph.Transmittedphase 2 Exp_Data|File menu 3 Exp_Data|File menu=Exp.Data.Filemenu 3 Exp_Data|File|Open_Exp_File item=Exp.Data.File.Open.Exp.Fileitem 3 Exp_Data|File|Append_Exp_File item=Exp.Data.File.Append.Exp.Fileitem 3 Exp_Data|File|Merge_Exp_Data item=Exp.Data.File.Merge.Exp.Dataitem 3 Exp_Data|File|Save_Exp_Data item=Exp.Data.File.Save.Exp.Dataitem 3 Exp_Data|File|Comment_Data item=Exp.Data.File.Comment.Dataitem 3 Exp_Data|File|Copy_to_Clipboard item=Exp.Data.File.Copy.to.Clipboarditem 2 Exp_Data|Range_Select item 3 Exp_Data|Range_Select item=Exp.Data.Range.Selectitem 3 Range select for static spectroscopic data 4 Range select for static spectroscopic data=Rangeselectforstaticspectroscopicdata 4 Angles=Angles2 4 Wavelengths=Wavelengths 4 Selected data types=Selecteddatatypes 4 All data button=Alldatabutton1 4 Add to button=Addtobutton 4 Remove from button=Removefrombutton 4 OK button=OKbutton1 4 Global select box=Globalselectbox 3 Range select for dynamic data 4 Range select for dynamic data=Rangeselectfordynamicdata 4 Time boxes=Timeboxes 4 # to skip=.toskip 4 Selected wavelengths list=Selectedwavelengthslist 4 OK button=OKbutton2 4 All data button=Alldatabutton2 4 Spectroscopic mode=Spectroscopicmode 4 Select all wavelengths=Selectallwavelengths 4 Time slice list=Timeslicelist 4 Add to list button=Addtolistbutton 4 Delete button=Deletebutton1 4 Delete all button=Deleteallbutton 2 Exp_Data|Angles item 3 Exp_Data|Angles item=Exp.Data.Anglesitem 3 The angles of incidence dialog box 4 The angles of incidence dialog box=Theanglesofincidencedialogbox 4 Nominal angles=Nominalangles 4 Actual angles=Actualangles 2 Exp_Data|Delete_Data command 3 Exp_Data|Delete_Data command=Exp.Data.Delete.Datacommand 2 Exp_Data|Change_Data_Type command 3 Exp_Data|Change_Data_Type command=Exp.Data.Change.Data.Typecommand 3 The change data type dialog box 4 The change data type dialog box=Thechangedatatypedialogbox 4 Current data type=Currentdatatype 4 Change to=Changeto 1 The Model Window 2 Model window overview 3 Model window overview=Modelwindowoverview 3 Features displayed in the Model window 4 Features displayed in the Model window=FeaturesdisplayedintheModelwindow 4 Title bar=Titlebar4 4 Comment line=Commentline2 4 Layers=Layers 4 Current layer=Currentlayer 3 The Model window menubar 4 The Model window menubar=TheModelwindowmenubar 3 Layers and optical constants 4 Layers and optical constants=Layersandopticalconstants 3 Special properties of the substrate 4 Special properties of the substrate=Specialpropertiesofthesubstrate 3 Ideal and non-ideal models 4 Ideal and non-ideal models=Idealandnon.idealmodels 3 Multiple models 4 Multiple models=Multiplemodels 2 Model|File menu 3 Model|File menu=Model.Filemenu 3 Model|File|Open_Model item=Model.File.Open.Modelitem 3 Model|File|Save_Model item=Model.File.Save.Modelitem 3 Model|File|Comment_Model item=Model.File.Comment.Modelitem 3 Model|File|Copy_to_Clipboard item=Model.File.Copy.to.Clipboarditem 2 Model|AddLayer command 3 Model|AddLayer command=Model.AddLayercommand 3 File searching pattern for Model|AddLayer=FilesearchingpatternforModel.AddLayer 3 Coupling of layers=Couplingoflayers 2 Tabulated layers 3 Tabulated layers=Tabulatedlayers 3 Standard layers 4 Standard layers=Standardlayers 4 Layer name=Layername 4 Comment=Comment 4 Spectral range=Spectralrange 4 Thickness=Thickness1 4 Thickness fit box=Thicknessfitbox 4 Opt. con. fit boxes=Opt.con.fitboxes1 4 Reset n&k button=Resetn.kbutton 4 OK button=OKbutton3 4 Cancel button=Cancelbutton4 4 Replace layer button=Replacelayerbutton 4 Delete layer button=Deletelayerbutton1 4 Optical constants>> button=Opticalconstants..button1 4 Edit n&k button=Editn.kbutton 4 Smooth opt. const. button=Smoothopt.const.button 4 Revert to previous button=Reverttopreviousbutton 4 Save button=Savebutton 4 Cancel button=Cancelbutton5 3 Alloy layers 4 Alloy layers=Alloylayers 4 Alloy fraction=Alloyfraction 4 Alloy fraction fit box=Alloyfractionfitbox 4 Opt. con. fit boxes=Opt.con.fitboxes2 4 Optical constants>> button=Opticalconstants..button2 3 Temp layers 4 Temp layers=Templayers 4 Temperature=Temperature 4 Temperature fit box=Temperaturefitbox 3 Alloy-temp layers 4 Alloy-temp layers=Alloy.templayers 2 Function based layers 3 Function based layers=Functionbasedlayers 3 Cauchy layer 4 Cauchy layer=Cauchylayer 4 Opt. con. fit boxes=Opt.con.fitboxes3 4 Optical constants>> button=Opticalconstants..button3 3 Lorentz oscillator layer 4 Lorentz oscillator layer=Lorentzoscillatorlayer 4 # of terms=.ofterms 4 Am=Am 4 Br=Br 4 En=En 4 e1inf=e1inf 3 User-defined dispersion model layer 4 User-defined dispersion model layer=User.defineddispersionmodellayer 4 Wvl units=Wvlunits 4 In terms of=Intermsof 4 Operators list>>=Operatorslist..1 4 n\==n. 4 k\==k. 4 Parameter name=Parametername1 4 Parameter value=Parametervalue1 4 Value button=Valuebutton1 4 Parameter fit box=Parameterfitbox 4 Fit button=Fitbutton1 4 Delete button=Deletebutton2 3 Parametric semiconductor layer 4 Parametric semiconductor layer=Parametricsemiconductorlayer 2 Composite layers 3 Composite layers=Compositelayers 3 Effective Medium Approximation (EMA) layer 4 Effective Medium Approximation (EMA) layer=EffectiveMediumApproximation.EMA.layer 4 # of constituents box=.ofconstituentsbox 4 Material #1 button=Material.1button1 4 Material #2 button=Material.2button1 4 Fraction #2 box=Fraction.2box 4 Material #3 button=Material.3button 4 Fraction #3 box=Fraction.3box 4 EMA type setting=EMAtypesetting 4 Depolarization factor box=Depolarizationfactorbox 3 EMA layer applications 4 EMA layer applications=EMAlayerapplications 4 Simulate interfacial intermixing=Simulateinterfacialintermixing 4 Simulate surface roughness=Simulatesurfaceroughness 4 Simulate oxidized surface roughness=Simulateoxidizedsurfaceroughness 4 Simulate index shifts=Simulateindexshifts 4 Model partially crystallized silicon (polysilicon)=Modelpartiallycrystallizedsilicon.polysilicon. 3 Graded layer 4 Graded layer=Gradedlayer 4 Opt. const. calc.=Opt.const.calc.1 4 Material #1 button=Material.1button2 4 Material #2 button=Material.2button2 4 EMA type=EMAtype 4 Profile definition=Profiledefinition1 4 # of nodes box=.ofnodesbox 4 Node position % box=Nodeposition.box 4 Value % box=Value.box 4 Slices per node box=Slicespernodebox 4 Opt. const. calc.=Opt.const.calc.2 4 Material button=Materialbutton1 4 Profile definition=Profiledefinition2 4 Operators list>>=Operatorslist..2 4 %\= box=..box 4 Parameter name=Parametername2 4 Parameter value=Parametervalue2 4 Parameter fit=Parameterfit 4 Fit button=Fitbutton2 4 Value button=Valuebutton2 4 Delete button=Deletebutton3 4 Slices per layer=Slicesperlayer 2 Anisotropic layers 3 Anisotropic layers=Anisotropiclayers 3 Standard anisotropic layers=Standardanisotropiclayers 3 Anisotropic Cauchy layer=AnisotropicCauchylayer 2 Specialty layers 3 Specialty layers=Specialtylayers 3 Kramers-Kronig layer 4 Kramers-Kronig layer=Kramers.Kroniglayer 4 Material button=Materialbutton2 4 Integration range boxes=Integrationrangeboxes 4 Step size box=Stepsizebox 4 e1 offset box=e1offsetbox 4 Pole #1 position=Pole.1position 4 Pole #1 magnitude=Pole.1magnitude 4 Pole #2 position=Pole.2position 4 Pole #2 magnitude=Pole.2magnitude 3 Delay layer 4 Delay layer=Delaylayer 4 Delay time box=Delaytimebox 4 Ok button=Okbutton4 4 Delete layer button=Deletelayerbutton2 3 Virtual interface layer 4 Virtual interface layer=Virtualinterfacelayer 4 Virtual type setting=Virtualtypesetting 4 Fixed at time box=Fixedattimebox 4 # of pts to average box=.ofptstoaveragebox 4 Running separation box=Runningseparationbox 4 Opt. const. fit boxes=Opt.const.fitboxes 4 Pseudo opt. constants=Pseudoopt.constants 3 Surface roughness layer 4 Surface roughness layer=Surfaceroughnesslayer 2 Model|DeleteMod command 3 Model|DeleteMod command=Model.DeleteModcommand 2 Model|Superlattice item 3 Model|Superlattice item=Model.Superlatticeitem 4 Superlattice #1/#2 enabled=Superlattice.1..2enabled 4 Start layer=Startlayer 4 End layer=Endlayer 4 # of periods=.ofperiods 2 Model|Growth item 3 Model|Growth item=Model.Growthitem 2 Model|Select item 3 Model|Select item=Model.Selectitem 3 Select model in standard mode 4 Select model in standard mode=Selectmodelinstandardmode 4 Current model=Currentmodel 4 Active in fit=Activeinfit 4 Model present=Modelpresent 4 Exp. data present=Exp.datapresent 3 Multiple models in dynamic-spectroscopic mode 4 Multiple models in dynamic-spectroscopic mode=Multiplemodelsindynamic.spectroscopicmode 2 Model|Options item 3 Model|Options item=Model.Optionsitem 3 The model options dialog box 4 The model options dialog box=Themodeloptionsdialogbox 4 Top layer is ambient=Toplayerisambient 4 # of backside reflections box=.ofbacksidereflectionsbox 4 % of first reflection collected box=.offirstreflectioncollectedbox 4 Polarizer angle for polarized refl./trans. box=Polarizerangleforpolarizedrefl..trans.box 4 Window effects retardation box=Windoweffectsretardationbox 4 Window effects azimuth box=Windoweffectsazimuthbox 4 Wavelength shift box=Wavelengthshiftbox 4 Thickness non-uniformity option=Thicknessnon.uniformityoption 4 Patterned layer option=Patternedlayeroption 4 Light bandwidth option=Lightbandwidthoption 4 Angular spread option=Angularspreadoption 4 Convolution profile shape setting=Convolutionprofileshapesetting 4 Convolution # of points box=Convolution.ofpointsbox 4 Fit profile width box=Fitprofilewidthbox 1 The Generated Data Window 2 Generated Data window overview 3 Generated Data window overview=GeneratedDatawindowoverview 3 Features displayed in the Generated Data window 4 Features displayed in the Generated Data window=FeaturesdisplayedintheGeneratedDatawindow 4 Title bar=Titlebar5 4 Comment line=Commentline3 4 Scroll bar=Scrollbar2 4 Type column=Typecolumn2 4 Wavelength column=Wavelengthcolumn2 4 Angle column=Anglecolumn2 4 Data columns=Datacolumns2 4 Time column=Timecolumn2 3 The Generated Data window menubar 4 The Generated Data window menubar=TheGeneratedDatawindowmenubar 3 Calculations performed for the different data types 4 Calculations performed for the different data types=Calculationsperformedforthedifferentdatatypes 3 Simulated data 4 Simulated data=Simulateddata 3 Simulated data standard deviations 4 Simulated data standard deviations=Simulateddatastandarddeviations 2 Gen_Data|File menu 3 Gen_Data|File menu=Gen.Data.Filemenu 3 Gen_Data|File|Open_Gen_File item=Gen.Data.File.Open.Gen.Fileitem 3 Gen_Data|File|Append_Gen_File item=Gen.Data.File.Append.Gen.Fileitem 3 Gen_Data|File|Save_Gen_Data item=Gen.Data.File.Save.Gen.Dataitem 3 Gen_Data|File|Comment_Data item=Gen.Data.File.Comment.Dataitem 3 Gen_Data|File|Copy_to_Clipboard item=Gen.Data.File.Copy.to.Clipboarditem 2 Gen_Data|Range item 3 Gen_Data|Range item=Gen.Data.Rangeitem 3 The generation range dialog box 4 The generation range dialog box=Thegenerationrangedialogbox 4 Range setting=Rangesetting 4 Angle range=Anglerange 4 Wavelength range=Wavelengthrange 4 Data type=Datatype3 4 Dynamic data=Dynamicdata 4 Time increment box=Timeincrementbox 4 Random noise box=Randomnoisebox 4 Generation mode setting=Generationmodesetting 2 Gen_Data|Generate_Data command 3 Gen_Data|Generate_Data command=Gen.Data.Generate.Datacommand 3 Normal generation mode=Normalgenerationmode 3 Sensitivity generation mode 4 Sensitivity generation mode=Sensitivitygenerationmode 4 Parameter name=Parametername3 4 Increment value box=Incrementvaluebox 3 Vary parameter generation mode 4 Vary parameter generation mode=Varyparametergenerationmode 4 Parameter name=Parametername4 4 Start box=Startbox 4 End box=Endbox 4 Incr box=Incrbox 2 Gen_Data|Copy_to_Exp command 3 Gen_Data|Copy_to_Exp command=Gen.Data.Copy.to.Expcommand 2 Gen_Data|Delete_Data command 3 Gen_Data|Delete_Data command=Gen.Data.Delete.Datacommand 1 The Graph Window 2 Graph window overview 3 Graph window overview=Graphwindowoverview 3 Features of a 2-D graph 4 Features of a 2-D graph=Featuresofa2.Dgraph 4 Title=Title1 4 X axis=Xaxis1 4 X-axis label=X.axislabel1 4 Y1 axis=Y1axis 4 Y1-axis label=Y1.axislabel 4 Legend=Legend1 4 Data curves=Datacurves 3 Features of a 3-D graph 4 Features of a 3-D graph=Featuresofa3.Dgraph 4 Title=Title2 4 X axis=Xaxis2 4 X-axis label=X.axislabel2 4 Y axis=Yaxis 4 Y-axis label=Y.axislabel 4 Z axis=Zaxis 4 Z-axis label=Z.axislabel 3 The Graph window menubar 4 The Graph window menubar=TheGraphwindowmenubar 3 Preparing formatted graphs 4 Preparing formatted graphs=Preparingformattedgraphs 2 Graph|File menu 3 Graph|File menu=Graph.Filemenu 3 Graph|File|Print item=Graph.File.Printitem 3 Graph|File|Copy_Graph_to_Clipboard item=Graph.File.Copy.Graph.to.Clipboarditem 3 Graph|File|Copy_Data_Points_to_Clipboard item 4 Graph|File|Copy_Data_Points_to_Clipboard item=Graph.File.Copy.Data.Points.to.Clipboarditem 4 Data format #1=Dataformat.1 4 Data format #2=Dataformat.2 3 Graph|File|Output_Data_Points_to_Text_File item 4 Graph|File|Output_Data_Points_to_Text_File item=Graph.File.Output.Data.Points.to.Text.Fileitem 2 Graph|Edit menu 3 Graph|Edit menu=Graph.Editmenu 3 Graph|Edit|Titles item 4 Graph|Edit|Titles item=Graph.Edit.Titlesitem 4 Title=Title3 4 X axis=Xaxis3 4 Y1-axis=Y1.axis 4 Y2-axis=Y2.axis 4 Scale=Scale1 3 Graph|Edit|Legends item 4 Graph|Edit|Legends item=Graph.Edit.Legendsitem 4 Legend=Legend2 4 Legend text=Legendtext 4 Color=Color 4 Style=Style 4 Scale=Scale2 4 Black default legends=Blackdefaultlegends 4 Suppress legend display=Suppresslegenddisplay 3 Graph|Edit|Font item 4 Graph|Edit|Font item=Graph.Edit.Fontitem 3 Graph|Edit|Scale item 4 Graph|Edit|Scale item=Graph.Edit.Scaleitem 4 X column=Xcolumn 4 Y1 column=Y1column 4 Y2 column=Y2column 4 Automatic=Automatic 4 Manual=Manual 4 Reset=Reset 4 Minimum=Minimum 4 Maximum=Maximum 4 # of divisions=.ofdivisions 4 Precision box=Precisionbox 4 Scale box=Scalebox 4 Grid lines vertical=Gridlinesvertical 4 Grid lines horizontal=Gridlineshorizontal 4 Tick marks=Tickmarks 4 Log scale on Y axis=LogscaleonYaxis 2 Graph|Data menu 3 Graph|Data menu=Graph.Datamenu 3 Generated and/or experimental data types 4 Generated and/or experimental data types=Generatedand.orexperimentaldatatypes 4 Generated and experimental=Generatedandexperimental 4 Difference between gen. and exp.=Differencebetweengen.andexp. 4 Generated only=Generatedonly 4 Experimental only=Experimentalonly 3 Optical constant data types 4 Optical constant data types=Opticalconstantdatatypes 4 Current layer (opt. const.)=Currentlayer.opt.const.. 4 All layers (opt. const.)=Alllayers.opt.const.. 4 Depth profile (opt. const.)=Depthprofile.opt.const.. 3 Point by point fit parameters data type 4 Point by point fit parameters data type=Pointbypointfitparametersdatatype 3 Calibration data type 4 Calibration data type=Calibrationdatatype 2 Graph|Type menu 3 Graph|Type menu=Graph.Typemenu 3 Displayable data types 4 Displayable data types=Displayabledatatypes 4 Psi=Psi 4 Delta=Delta 4 Tan(Psi)=Tan.Psi. 4 Cos(Delta)=Cos.Delta. 4 =..1. 4 =..2. 4 =.n. 4 =.k. 4 Re(rho)=Re.rho. 4 Im(rho)=Im.rho. 4 Transmission=Transmission 4 Reflection=Reflection 4 Absorption=Absorption 4 Transmitted phase=Transmittedphase 4 Neutron reflectivity=Neutronreflectivity 4 R*k^4=R.k.4 2 Graph|Style menu 3 Graph|Style menu=Graph.Stylemenu 3 Graph|Style|2D item 4 Graph|Style|2D item=Graph.Style.2Ditem 4 Double Y-axis=DoubleY.axis 4 Graph as a function of angle=Graphasafunctionofangle 4 Trajectory plot=Trajectoryplot 4 Plot derivatives=Plotderivatives 3 Graph|Style|3D item 4 Graph|Style|3D item=Graph.Style.3Ditem 4 Elevation=Elevation 4 Reverse axis=Reverseaxis 4 Color surface=Colorsurface 1 The Fit Window 2 Fit window overview 3 Fit window overview=Fitwindowoverview 3 Features displayed in the Fit window 4 Features displayed in the Fit window=FeaturesdisplayedintheFitwindow 4 Title bar=Titlebar6 4 Final=Final 4 MSE=MSE 4 Parameter names and values=Parameternamesandvalues 4 Init=Init 4 Iter=Iter 4 exits=.Esc.exits2 3 The Fit window menubar 4 The Fit window menubar=TheFitwindowmenubar 3 Fit parameter naming conventions 4 Fit parameter naming conventions=Fitparameternamingconventions 4 Thickness=Thickness2 4 Optical constants=Opticalconstants 4 Cauchy parameters=Cauchyparameters 4 EMA layer fraction=EMAlayerfraction 3 Fitting optical constants at every wavelength 4 Fitting optical constants at every wavelength=Fittingopticalconstantsateverywavelength 2 Fit|File menu 3 Fit|File menu=Fit.Filemenu 3 Fit|File|Copy_to_Clipboard item=Fit.File.Copy.to.Clipboarditem 2 Fit|Normal_Fit command 3 Fit|Normal_Fit command=Fit.Normal.Fitcommand 2 Fit|Pt_by_Pt command 3 Fit|Pt_by_Pt command=Fit.Pt.by.Ptcommand 3 Point by point fitting of static spectroscopic data 4 Point by point fitting of static spectroscopic data=Pointbypointfittingofstaticspectroscopicdata 4 Starting position=Startingposition 4 # pts to ave.=.ptstoave.1 4 Show iterations=Showiterations 4 Fit parameter boxes=Fitparameterboxes1 4 Cancel=Cancel 4 Ok=Ok 3 Point by point fitting of dynamic data 4 Point by point fitting of dynamic data=Pointbypointfittingofdynamicdata 4 # pts to ave.=.ptstoave.2 4 Fit parameter boxes=Fitparameterboxes2 2 Fit|Reset command 3 Fit|Reset command=Fit.Resetcommand 2 Fit|MSE command 3 Fit|MSE command=Fit.MSEcommand 2 Fit|Edit_Parms item 3 Fit|Edit_Parms item=Fit.Edit.Parmsitem 3 The edit fit parameters dialog box 4 The edit fit parameters dialog box=Theeditfitparametersdialogbox 4 Parameter list=Parameterlist 4 Change selected parms=Changeselectedparms 4 Parameter limits=Parameterlimits 4 Coupled parameter=Coupledparameter 4 Do not fit all parameters option=Donotfitallparametersoption1 4 Delete all parms=Deleteallparms 3 Range limits on fit parameters 4 Range limits on fit parameters=Rangelimitsonfitparameters 3 Coupling fit parameters 4 Coupling fit parameters=Couplingfitparameters 3 Do not fit all parameters option 4 Do not fit all parameters option=Donotfitallparametersoption2 4 Parameter names=Parameternames 4 Total # of parms=Total.ofparms 4 Selected parms=Selectedparms 4 Select all=Selectall 2 Fit|Stats command 3 Fit|Stats command=Fit.Statscommand 3 The fit statistics dialog box 4 The fit statistics dialog box=Thefitstatisticsdialogbox 4 Confidence limits=Confidencelimits 4 Correlation matrix=Correlationmatrix 2 Fit|Defaults item 3 Fit|Defaults item=Fit.Defaultsitem 3 The fit defaults dialog box 4 The fit defaults dialog box=Thefitdefaultsdialogbox 4 Fit weighting=Fitweighting 4 R&T weighting=R.Tweighting 4 Maximum iterations=Maximumiterations 4 Minimum MSE=MinimumMSE 4 Change in MSE=ChangeinMSE 4 Derivative increment=Derivativeincrement 3 Weighting of ellipsometric data 4 Weighting of ellipsometric data=Weightingofellipsometricdata 4 Psi and delta=Psianddelta 4 Tan(Psi) and cos(Delta)=Tan.Psi.andcos.Delta. 4 Psi only=Psionly 4 Cos(Delta) only=Cos.Delta.only 4 and =..1.and..2. 4 only=..1.only 4 only=..2.only 4 Rho=Rho 3 Weighting of reflection / transmission data 4 Weighting of reflection / transmission data=Weightingofreflection.transmissiondata 1 Quick Start: VASE® 2 Overview of the VASE? quick start=OverviewoftheVASE.quickstart 2 Power-up and hardware initialization=Power.upandhardwareinitialization 2 Initial inspection of the system 3 Initial inspection of the system=Initialinspectionofthesystem 3 Goniometer settings, vertical VASE? systems=Goniometersettings.verticalVASE.systems 3 Goniometer settings, horizontal VASE? systems=Goniometersettings.horizontalVASE.systems 3 Detector and monochromator settings=Detectorandmonochromatorsettings 3 Correct fiber type=Correctfibertype 3 Beam alignment, vertical VASE? instrument=Beamalignment.verticalVASE.instrument 3 Beam alignment, horizontal VASE? instrument=Beamalignment.horizontalVASE.instrument 2 Sample alignment 3 Sample alignment=Samplealignment1 3 Vertical VASE? sample alignment=VerticalVASE.samplealignment 3 Horizontal VASE? sample alignment=HorizontalVASE.samplealignment 2 Calibration of the VASE? 3 Calibration of the VASE?=CalibrationoftheVASE. 2 Acquisition of VASE? data 3 Acquisition of VASE? data=AcquisitionofVASE.data 2 Analysis of data 3 Analysis of data=Analysisofdata 2 Summary 3 Summary=Summary 1 VASE? Data Acquisition Procedures and Strategies 2 Overview=Overview1 2 General principles of VASE? data acquisition=GeneralprinciplesofVASE.dataacquisition 2 Sample preparation 3 Sample preparation=Samplepreparation 3 Sample cleaning=Samplecleaning 3 Roughening transparent substrates=Rougheningtransparentsubstrates 3 Very thin transparent substrates=Verythintransparentsubstrates 2 Choice of data type and acquisition parameters 3 Choice of data type and acquisition parameters=Choiceofdatatypeandacquisitionparameters 3 Choice of spectral range=Choiceofspectralrange 3 Choice of angles of incidence=Choiceofanglesofincidence 3 Choice of data types=Choiceofdatatypes 2 Simulation of optical experiments with WVASE32? 3 Simulation of optical experiments with WVASE32?=SimulationofopticalexperimentswithWVASE32. 2 Ellipsometric data acquisition 3 Ellipsometric data acquisition=Ellipsometricdataacquisition1 3 Reflection from the top of the sample=Reflectionfromthetopofthesample 3 Reflection from the bottom of the film, beam incident through the substrate=Reflectionfromthebottomofthefilm.beamincidentthroughthesubstrate 3 Transmission ellipsometry=Transmissionellipsometry 2 Advanced spectroscopic scans 3 Advanced spectroscopic scans=Advancedspectroscopicscans 2 Acquisition of dynamic data 3 Acquisition of dynamic data=Acquisitionofdynamicdata 2 Acquisition of intensity transmittance data 3 Acquisition of intensity transmittance data=Acquisitionofintensitytransmittancedata 2 Acquisition of intensity reflectance data 3 Acquisition of intensity reflectance data=Acquisitionofintensityreflectancedata 1 VASE? Data Analysis 2 Introduction=Introduction2 2 Modeling of experimental optical data 3 Modeling of experimental optical data=Modelingofexperimentalopticaldata 3 Building the 'most physical' model=Buildingthe.mostphysical.model 3 Correlation and uniquenes=Correlationanduniquenes 3 Interpretation of confidence limits=Interpretationofconfidencelimits2 3 Errors due to random noise=Errorsduetorandomnoise 3 Systematic errors due to model deficiencies=Systematicerrorsduetomodeldeficiencies 3 Assessing the quality of a fit=Assessingthequalityofafit 3 Assessing the quality of a best-fit model=Assessingthequalityofabest.fitmodel 2 Bare substrates 3 Bare substrates=Baresubstrates 3 Opaque bulk samples=Opaquebulksamples 3 Transparent bulk samples 4 Transparent bulk samples=Transparentbulksamples 4 Glass=Glass 4 Glass with UV absorption edge=GlasswithUVabsorptionedge 4 Float glass=Floatglass 4 Plastics=Plastics 4 Semiconductors below the bandgap energy=Semiconductorsbelowthebandgapenergy 3 Very thin transparent bulk samples 4 Very thin transparent bulk samples=Verythintransparentbulksamples 3 Anisotropic bulk samples 4 Anisotropic bulk samples=Anisotropicbulksamples 4 c-oriented=c.oriented 4 a- or b-oriented=a.orb.oriented 3 Modeling surface oxidation and roughness 4 Modeling surface oxidation and roughness=Modelingsurfaceoxidationandroughness 2 Single films - general principles 3 Single films - general principles=Singlefilms.generalprinciples 3 What do we want to measure?=Whatdowewanttomeasure. 3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates1 3 Substrate characterization=Substratecharacterization 3 Quick analysis with reference optical constants=Quickanalysiswithreferenceopticalconstants 3 Optical constant determination with the film thickness known=Opticalconstantdeterminationwiththefilmthicknessknown 3 Parameterization of the film optical constants=Parameterizationofthefilmopticalconstants 3 EMA models and surface roughness=EMAmodelsandsurfaceroughness 3 Film inhomogeneity=Filminhomogeneity 2 Single transparent or partially transparent films 3 Single transparent or partially transparent films=Singletransparentorpartiallytransparentfilms 3 Analysis with standard optical constants=Analysiswithstandardopticalconstants 3 Direct fit for n and t=Directfitfornandt 3 Cauchy parameterization to determine film thickness=Cauchyparameterizationtodeterminefilmthickness 3 Lorentz oscillators - Drude model for free electron absorption=Lorentzoscillators.Drudemodelforfreeelectronabsorption 3 User-defined dispersion models=User.defineddispersionmodels 3 Surface roughness=Surfaceroughness1 3 Index grading=Indexgrading 3 Anisotropic films 4 Anisotropic films=Anisotropicfilms 4 c-axis perpendicular to the film plane=c.axisperpendiculartothefilmplane 4 c-axis in the film plane=c.axisinthefilmplane 3 Very thin transparent films 4 Very thin transparent films=Verythintransparentfilms 3 Very thick transparent films 4 Very thick transparent films=Verythicktransparentfilms 2 Single absorbing films 3 Single absorbing films=Singleabsorbingfilms 3 Opaque substrates vs. transparent substrates=Opaquesubstratesvs.transparentsubstrates 3 Analysis of VASE? and T data for films on transparent substrates=AnalysisofVASE.andTdataforfilmsontransparentsubstrates 3 Lorentz oscillator models=Lorentzoscillatormodels 3 Surface oxidation of the film=Surfaceoxidationofthefilm 3 Surface roughness=Surfaceroughness2 2 Single films - special 3 Single films - special=Singlefilms.special 3 Alloy models=Alloymodels 3 Transparent conducting oxides=Transparentconductingoxides 3 Polycrystalline silicon=Polycrystallinesilicon 2 Single films - advanced modeling techniques 3 Single films - advanced modeling techniques=Singlefilms.advancedmodelingtechniques 3 Optical constant parameterization=Opticalconstantparameterization 3 Non-ideal films 4 Non-ideal films=Non.idealfilms 4 Graded dielectric films=Gradeddielectricfilms 4 Graded absorbing films=Gradedabsorbingfilms 2 Two layer systems 3 Two layer systems=Twolayersystems 3 General principles 4 General principles=Generalprinciples1 4 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates2 4 Characterization of reference films=Characterizationofreferencefilms 4 Surface and interfacial roughness=Surfaceandinterfacialroughness 4 Indistinct interfaces between the films=Indistinctinterfacesbetweenthefilms 3 Dielectric / dielectric / substrate 4 Dielectric / dielectric / substrate=Dielectric.dielectric.substrate 3 Dielectric / metal / substrate 4 Dielectric / metal / substrate=Dielectric.metal.substrate 3 Metal / dielectric / substrate 4 Metal / dielectric / substrate=Metal.dielectric.substrate 3 Metal / metal / substrate 4 Metal / metal / substrate=Metal.metal.substrate 2 Multilayer structures 3 Multilayer structures=Multilayerstructures 3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates3 3 Choice of optimal experimental data=Choiceofoptimalexperimentaldata 3 Transparent layers=Transparentlayers 3 Superlattices and other periodic structures=Superlatticesandotherperiodicstructures 3 Use of parametric models to suppress correlation=Useofparametricmodelstosuppresscorrelation 2 Advanced modeling techniques 3 Advanced modeling techniques=Advancedmodelingtechniques 3 Partial polarization effects and other non-idealities 4 Partial polarization effects and other non-idealities=Partialpolarizationeffectsandothernon.idealities 4 Back-surface reflection=Back.surfacereflection 4 Film thickness non-uniformity=Filmthicknessnon.uniformity 4 Patterned films and structures=Patternedfilmsandstructures 4 Monochromator bandwidth effects=Monochromatorbandwidtheffects 4 Angular spread of the beam entering the detector=Angularspreadofthebeamenteringthedetector 3 Use of multiple optical data types 4 Use of multiple optical data types=Useofmultipleopticaldatatypes 3 Fit parameter coupling and limiting 4 Fit parameter coupling and limiting=Fitparametercouplingandlimiting 3 Multiple sample analysis 4 Multiple sample analysis=Multiplesampleanalysis 2 The parametric semiconductor model 3 The parametric semiconductor model=Theparametricsemiconductormodel 3 Mathematical description=Mathematicaldescription 3 Parametric semiconductor model for GaAs=ParametricsemiconductormodelforGaAs 3 Parametric semiconductor model fits to other materials=Parametricsemiconductormodelfitstoothermaterials 3 Using the parametric semiconductor layer within WVASE32?=UsingtheparametricsemiconductorlayerwithinWVASE32. 3 Fitting the silicon dielectric function with the parametric semiconductor model=Fittingthesilicondielectricfunctionwiththeparametricsemiconductormodel 1 VASE? Data Analysis Examples 2 Overview=Overview2 2 Important WVASE32? procedures 3 Important WVASE32? procedures=ImportantWVASE32.procedures 3 Activate a WVASE32? window=ActivateaWVASE32.window 3 Loading an experimental data file=Loadinganexperimentaldatafile 3 Saving an experimental data file=Savinganexperimentaldatafile 3 Adding a substrate to the model=Addingasubstratetothemodel 3 Adding a layer to the model=Addingalayertothemodel 3 Viewing the optical constants of a layer=Viewingtheopticalconstantsofalayer 3 Saving the optical constants of a layer=Savingtheopticalconstantsofalayer 3 Saving a model=Savingamodel 3 Loading a model=Loadingamodel 3 Changing data types=Changingdatatypes 3 Setting the range of active data=Settingtherangeofactivedata 3 Defining layer thicknesses as fit variables=Defininglayerthicknessesasfitvariables 3 Fitting for the optical constants of a layer=Fittingfortheopticalconstantsofalayer 3 Fitting for parameters in a function-based layer dispersion model=Fittingforparametersinafunction.basedlayerdispersionmodel 3 Setting the fit weighting=Settingthefitweighting 3 Performing a normal fit=Performinganormalfit 3 Performing a point-by-point fit=Performingapoint.by.pointfit 3 Viewing the fit statistics after a fit=Viewingthefitstatisticsafterafit 3 Generating data from the model=Generatingdatafromthemodel 3 Choosing the set of data to be graphed=Choosingthesetofdatatobegraphed 3 Choosing the type of data to be graphed=Choosingthetypeofdatatobegraphed 3 Comparing different sets of optical constants=Comparingdifferentsetsofopticalconstants 3 Deleting all existing fit parameters=Deletingallexistingfitparameters 2 Troubleshooting 3 Troubleshooting=Troubleshooting 3 Singular matrix error=Singularmatrixerror 3 Obviously incorrect layer thicknesses=Obviouslyincorrectlayerthicknesses 3 Unphysical optical constants=Unphysicalopticalconstants 3 Tiny MSE values=TinyMSEvalues 3 Huge MSE values=HugeMSEvalues 3 Huge 90% confidence limits=Huge90.confidencelimits 3 'NAN' displayed for correlation matrix element=.NAN.displayedforcorrelationmatrixelement 3 Can't reproduce example analysis results=Can.treproduceexampleanalysisresults 3 Abrupt discontinuity in optical constants=Abruptdiscontinuityinopticalconstants 3 Abrupt discontinuity in EMA optical constants=AbruptdiscontinuityinEMAopticalconstants 3 Strange behaviour using anisotropic Cauchy layer=StrangebehaviourusinganisotropicCauchylayer 3 Very large roughness thickness=Verylargeroughnessthickness 2 WVASE32? settings for the examples 3 WVASE32? settings for the examples=WVASE32.settingsfortheexamples 3 Memory allocation=Memoryallocation 3 Fit defaults=Fitdefaults 3 Global units=Globalunits 2 Example 1: Bare silicon wafer (?) 3 Example 1: Bare silicon wafer (?)=Example1.Baresiliconwafer... 3 Determination of native oxide thickness=Determinationofnativeoxidethickness 3 Optical constant determination with no native oxide=Opticalconstantdeterminationwithnonativeoxide 3 Optical constant determination with native oxide=Opticalconstantdeterminationwithnativeoxide 3 Further experiments=Furtherexperiments1 2 Example 2: Optically thick chromium film (?) 3 Example 2: Optically thick chromium film (?)=Example2.Opticallythickchromiumfilm... 3 Determination of optical constants with no native oxide=Determinationofopticalconstantswithnonativeoxide 3 Determination of optical constants with native oxide=Determinationofopticalconstantswithnativeoxide 3 Further experiments=Furtherexperiments2 2 Example 3: Bulk HgCdTe (??) 3 Example 3: Bulk HgCdTe (??)=Example3.BulkHgCdTe.... 3 Determination of alloy fraction and surface roughness=Determinationofalloyfractionandsurfaceroughness 3 Further experiments=Furtherexperiments3 2 Example 4: Uncoated glass cover slip (???) 3 Example 4: Uncoated glass cover slip (???)=Example4.Uncoatedglasscoverslip..... 3 General principles=Generalprinciples2 3 Analysis of psi to obtain the glass index=Analysisofpsitoobtaintheglassindex 3 Analysis of transmission to obtain the extinction coefficient=Analysisoftransmissiontoobtaintheextinctioncoefficient 3 Further experiments=Furtherexperiments4 2 Example 5: Organic film on silicon (??) 3 Example 5: Organic film on silicon (??)=Example5.Organicfilmonsilicon.... 3 General information=Generalinformation 3 Cauchy fit for thickness and index=Cauchyfitforthicknessandindex 3 Determination of optical constants with thickness fixed=Determinationofopticalconstantswiththicknessfixed 3 Further experiments=Furtherexperiments5 2 Example 6: Anisotropic organic film on silicon (???) 3 Example 6: Anisotropic organic film on silicon (???)=Example6.Anisotropicorganicfilmonsilicon..... 3 Anisotropic Cauchy fit for thickness and index=AnisotropicCauchyfitforthicknessandindex 3 Direct fit for isotropic optical constants in the UV=DirectfitforisotropicopticalconstantsintheUV 3 Further experiments=Furtherexperiments6 2 Example 7: Silver film on fused silica (??) 3 Example 7: Silver film on fused silica (??)=Example7.Silverfilmonfusedsilica.... 3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants1 3 Further experiments=Furtherexperiments7 2 Example 8: Indium tin oxide (ITO) on glass (?????) 3 Example 8: Indium tin oxide (ITO) on glass (?????)=Example8.Indiumtinoxide.ITO.onglass....... 3 Uniform Lorentz oscillator layer model=UniformLorentzoscillatorlayermodel 3 Graded Lorentz oscillator layer model=GradedLorentzoscillatorlayermodel 3 Further experiments=Furtherexperiments8 2 Example 9: Diamond-like carbon (DLC) on glass (??) 3 Example 9: Diamond-like carbon (DLC) on glass (??)=Example9.Diamond.likecarbon.DLC.onglass.... 3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants2 3 Further experiments=Furtherexperiments9 2 Example 10: GaAs / AlGaAs / GaAs (?) 3 Example 10: GaAs / AlGaAs / GaAs (?)=Example10.GaAs.AlGaAs.GaAs... 3 Determination of AlGaAs alloy fraction and thickness=DeterminationofAlGaAsalloyfractionandthickness 3 Further experiments=Furtherexperiments10 2 Example 11: Polycrystalline silicon / SiO2 / silicon (????) 3 Example 11: Polycrystalline silicon / SiO2 / silicon (????)=Example11.Polycrystallinesilicon.SiO2.silicon...... 3 EMA model for poly-Si=EMAmodelforpoly.Si1 3 Parametric semiconductor model for poly-Si=Parametricsemiconductormodelforpoly.Si 3 Further experiments=Furtherexperiments11 2 Example 12: TiN / SiO2 / silicon (??) 3 Example 12: TiN / SiO2 / silicon (??)=Example12.TiN.SiO2.silicon.... 3 Determination of both film thicknesses and the TiN optical constants=DeterminationofbothfilmthicknessesandtheTiNopticalconstants 3 Further experiments=Furtherexperiments12 2 Example 13: Five layer high-low stack on silicon (???) 3 Example 13: Five layer high-low stack on silicon (???)=Example13.Fivelayerhigh.lowstackonsilicon..... 3 Determination of layer thicknesses and index spectra=Determinationoflayerthicknessesandindexspectra 3 Further experiments=Furtherexperiments13 2 Example 14: SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???) 3 Example 14: SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???)=Example14.SiO2.Si3N4.SiO2.poly.Si.SiO2.Si..... 3 EMA model for poly-Si=EMAmodelforpoly.Si2 3 Further experiments=Furtherexperiments14 2 Example 15: Thermal oxides on silicon - multiple sample analysis (?????) 3 Example 15: Thermal oxides on silicon - multiple sample analysis (?????)=Example15.Thermaloxidesonsilicon.multiplesampleanalysis....... 3 Direct fit for silicon optical constants=Directfitforsiliconopticalconstants 3 Parametric semiconductor model for silicon=Parametricsemiconductormodelforsilicon 3 Inclusion of thin interfacial layer 4 Inclusion of thin interfacial layer=Inclusionofthininterfaciallayer 4 Further experiments=Furtherexperiments15 1 Quick Start: M-44® 2 Quick start overview for M-44® systems 3 Quick start overview for M-44® systems=QuickstartoverviewforM.44rsystems 3 System alignment=Systemalignment1 3 System calibration=Systemcalibration1 3 Sample alignment=Samplealignment2 3 Sample calibration=Samplecalibration1 2 Basic setup 3 Basic setup=Basicsetup 2 Basic system alignment 3 Basic system alignment=Basicsystemalignment 2 Fundamental system calibration 3 Fundamental system calibration=Fundamentalsystemcalibration 2 Sample alignment 3 Sample alignment=Samplealignment3 2 Normal system calibration 3 Normal system calibration=Normalsystemcalibration 2 Ex-situ data acquisition 3 Ex-situ data acquisition=Ex.situdataacquisition 2 Ex-situ data analysis 3 Ex-situ data analysis=Ex.situdataanalysis 2 In-situ data acquisition 3 In-situ data acquisition=In.situdataacquisition 1 M-44? Data Acquisition Procedures and Strategies 2 Overview=Overview3 2 Ex-situ operation 3 Ex-situ operation=Ex.situoperation 3 Powering up the system=Poweringupthesystem 3 Calibration and alignment procedures 4 Calibration and alignment procedures=Calibrationandalignmentprocedures 4 System alignment=Systemalignment2 4 System calibration=Systemcalibration2 4 Sample alignment=Samplealignment4 4 Sample calibration=Samplecalibration2 3 System alignment 4 System alignment=Systemalignment3 3 System calibration 4 System calibration=Systemcalibration3 3 Sample alignment 4 Sample alignment=Samplealignment5 3 Sample calibration 4 Sample calibration=Samplecalibration3 3 Ellipsometric data acquisition 4 Ellipsometric data acquisition=Ellipsometricdataacquisition2 3 Turning off the M-44? system after data acquisition 4 Turning off the M-44? system after data acquisition=TurningofftheM.44.systemafterdataacquisition 2 In-situ operation 3 In-situ operation=In.situoperation 3 Removal of the M-44? from the multiple angle base=RemovaloftheM.44.fromthemultipleanglebase 3 Window hardware requirements for a UHV chamber=WindowhardwarerequirementsforaUHVchamber 3 Installation of the window mounts on the process chamber=Installationofthewindowmountsontheprocesschamber 3 Installation of the M-44? on the window hardware=InstallationoftheM.44.onthewindowhardware 3 In-situ sample alignment=In.situsamplealignment 3 In-situ sample calibration=In.situsamplecalibration 3 Ellipsometric data acquisition=Ellipsometricdataacquisition3 3 Real-time feedback control of processes=Real.timefeedbackcontrolofprocesses 1 Dynamic Data Analysis 2 In-situ, real-time VASE? data 3 In-situ, real-time VASE? data=In.situ.real.timeVASE.data 3 Etching of SiO2 on silicon=EtchingofSiO2onsilicon 3 MBE growth of III-V film=MBEgrowthofIII.Vfilm 3 MBE growth of 2-layer AlGaAs structure=MBEgrowthof2.layerAlGaAsstructure 2 In-situ, real-time M-44? data 3 In-situ, real-time M-44? data=In.situ.real.timeM.44.data 3 DLC etching by electron cyclotron resonance (ECR)=DLCetchingbyelectroncyclotronresonance.ECR. 3 GaAs and AlGaAs growth at 600°C 4 GaAs and AlGaAs growth at 600°C=GaAsandAlGaAsgrowthat600.C 4 Determination of the substrate optical constants at 600°C=Determinationofthesubstrateopticalconstantsat600.C 4 Growth of Al0.1Ga0.9As on GaAs at 600°C=GrowthofAl0.1Ga0.9AsonGaAsat600.C 4 GaAs layer=GaAslayer 3 Growth of AlGaAs/GaAs/AlGaAs quantum wells 4 Growth of AlGaAs/GaAs/AlGaAs quantum wells=GrowthofAlGaAs.GaAs.AlGaAsquantumwells 4 500 Angstrom AlGaAs layer=500AngstromAlGaAslayer 4 100 Angstrom GaAs Layer=100AngstromGaAsLayer 3 Growth of ZnS/cryolite multilayer stack on BK7 glass 4 Growth of ZnS/cryolite multilayer stack on BK7 glass=GrowthofZnS.cryolitemultilayerstackonBK7glass 4 Stage 1: Determination of the angle of incidence=Stage1.Determinationoftheangleofincidence 4 Stage 2: Determination of the film optical constants and the first six layer thicknesses=Stage2.Determinationofthefilmopticalconstantsandthefirstsixlayerthicknesses 4 Stage 3: Determination of the remaining layer thicknesses=Stage3.Determinationoftheremaininglayerthicknesses 1 Appendix A: Installation of WVASE32? 2 System requirements=Systemrequirements 2 Installation of WVASE32? and Win32s 3 Installation of WVASE32? and Win32s=InstallationofWVASE32.andWin32s 3 Win32s installation=Win32sinstallation 3 WVASE32? installation=WVASE32.installation 3 Special instructions for upgrade customers=Specialinstructionsforupgradecustomers 3 Special instructions for hardware customers=Specialinstructionsforhardwarecustomers 1 Appendix B: Analysis File Formats 2 Experimental and generated data files 3 Experimental and generated data files=Experimentalandgenerateddatafiles 3 Ellipsometric data=Ellipsometricdata 3 Reflection and transmission data=Reflectionandtransmissiondata 3 Neutron reflection data=Neutronreflectiondata 3 Experimental data file examples=Experimentaldatafileexamples 2 Optical constant files (material files) 3 Optical constant files (material files)=Opticalconstantfiles.materialfiles. 3 Interpolation table=Interpolationtable 3 Semiconductor alloy=Semiconductoralloy 3 Temperature dependent=Temperaturedependent 1 Appendix C: Configuration File Formats 2 Overview=Overview4 2 WVASE.CNF=WVASE.CNF 2 HARDWARE.CNF=HARDWARE.CNF 1 Glossary of Terms 2 Glossary of Terms=GlossaryOfTerms.D2H