Fri Feb 03 14:33:46 2012  VASE File c:\windows\desktop\3-2-12\data_files\au_si.dat  Au on Si (3.2A 1.5min 1e-6mbar) - Note: Couldn't align sample precisely
Fri Feb 03 14:57:48 2012  VASE File c:\windows\desktop\3-2-12\data_files\black-au_si.dat  Black-Au on Si (3.7A 0.5min 0.18mbar) - Note: Low intensity
Fri Feb 03 15:35:35 2012  VASE File c:\windows\desktop\3-2-12\data_files\au_si_(thick).dat  Gold on Si (Unknown preparation, thick yellow colour)

Mon Feb 06 09:32:26 2012  Init User: Sam (v3.698, 6.256 DLL)

Mon Feb 06 09:39:23 2012  
Mon Feb 06 09:39:23 2012  Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
Mon Feb 06 09:43:52 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Feb 06 09:43:56 2012  Coarse Calib: Wvl1=5000.0  Ps=2.0221±0.0072  Attn=1.0126±0.0003  As=136.224±0.008  Psi=9.266±0.015  Del=24.328±0.200  <I>=22.106,  MSE=2.24 (1.71)
Mon Feb 06 09:43:56 2012  Coarse Calib: MSE=2.236 (1.709)  AzOffset=0.037±0.029202  ElOffset=-0.002±0.009671
Mon Feb 06 09:45:46 2012  
Mon Feb 06 09:45:46 2012  Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
Mon Feb 06 09:55:05 2012  Calib: Wvl1=5000.0  Ps=2.0213±0.0020  Attn=1.0132±0.0002  As=136.163±0.005  Psi=9.266±0.007  Del=24.258±0.091  <I>=10.815,  MSE=1.33 (0.756)  Synch=-31.539±0.018 [-31.578,-31.494]  M1=0.0026±0.0012 [0.00077,0.0047]
Mon Feb 06 09:55:05 2012  Calib: Wvl2=11770.0  Ps=2.0213±0.0020  IrAttn=0.9713±0.0003  IrAs=133.882±0.006  IrPsi=13.806±0.002  IrDel=4.815±0.222  <I>=16.576  MSE=1.33 (0.756)  Synch=-34.425±0.015 [-34.462,-34.403]  M1=0.03±0.0094 [0.015,0.044]
Mon Feb 06 09:55:05 2012  Calib: MSE=1.326 (0.756)  AzOffset=-0.055±0.013130  ElOffset=0.013±0.004345  DP=-0.006±0.016
Mon Feb 06 10:38:30 2012  VASE File c:\windows\desktop\6-2-12\si.dat  Si (control)
Mon Feb 06 10:53:37 2012  
Mon Feb 06 10:53:37 2012  Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
Mon Feb 06 10:58:07 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Feb 06 10:58:09 2012  Coarse Calib: Wvl1=5000.0  Ps=2.0237±0.0047  Attn=1.0146±0.0002  As=136.022±0.005  Psi=9.298±0.010  Del=23.828±0.136  <I>=23.692,  MSE=1.51 (1.19)
Mon Feb 06 10:58:09 2012  Coarse Calib: MSE=1.515 (1.191)  AzOffset=-0.023±0.019400  ElOffset=0.019±0.006588
Mon Feb 06 10:59:57 2012  
Mon Feb 06 10:59:57 2012  Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
Mon Feb 06 11:09:19 2012  Calib: Wvl1=5000.0  Ps=2.0195±0.0016  Attn=1.0151±0.0001  As=136.016±0.004  Psi=9.295±0.005  Del=23.785±0.074  <I>=11.735,  MSE=1.08 (0.62)  Synch=-31.086±0.024 [-31.122,-31.039]  M1=0.0048±0.002 [0.0019,0.0079]
Mon Feb 06 11:09:19 2012  Calib: Wvl2=11770.0  Ps=2.0195±0.0016  IrAttn=0.9721±0.0002  IrAs=133.806±0.005  IrPsi=13.871±0.002  IrDel=5.613±0.155  <I>=17.441  MSE=1.08 (0.62)  Synch=-34.039±0.045 [-34.152,-33.984]  M1=0.014±0.0029 [0.0082,0.019]
Mon Feb 06 11:09:19 2012  Calib: MSE=1.078 (0.620)  AzOffset=-0.014±0.010550  ElOffset=0.009±0.003583  DP=0.167±0.013
Mon Feb 06 12:00:07 2012  VASE File c:\windows\desktop\6-2-12\ag_si.dat  Ag on Si (1e-6mbar 3.2A 1.5min)
Mon Feb 06 12:48:41 2012  VASE File c:\windows\desktop\6-2-12\black-ag_si.dat  Black-Ag on Si (0.18mbar 3.7A 0.5min)
Mon Feb 06 15:04:31 2012  
Mon Feb 06 15:04:31 2012  Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
Mon Feb 06 15:09:00 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Feb 06 15:09:03 2012  Coarse Calib: Wvl1=5000.0  Ps=2.0208±0.0073  Attn=1.0157±0.0003  As=135.942±0.008  Psi=9.286±0.015  Del=24.363±0.209  <I>=23.569,  MSE=2.34 (1.74)
Mon Feb 06 15:09:04 2012  Coarse Calib: MSE=2.340 (1.737)  AzOffset=0.013±0.030592  ElOffset=-0.005±0.010140
Mon Feb 06 15:17:01 2012  
Mon Feb 06 15:17:01 2012  Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Mon Feb 06 15:26:29 2012  Calib: Wvl1=5000.0  Ps=2.0308±0.0033  Attn=1.0163±0.0003  As=135.942±0.007  Psi=5.593±0.017  Del=135.800±0.185  <I>=10.096,  MSE=2.08 (3.21)  Synch=-30.797±0.031 [-30.841,-30.702]  M1=0.0026±0.00095 [0.0011,0.0082]
Mon Feb 06 15:26:29 2012  Calib: Wvl2=11770.0  Ps=2.0308±0.0033  IrAttn=0.9731±0.0003  IrAs=133.760±0.008  IrPsi=2.158±0.004  IrDel=36.044±0.159  <I>=9.676  MSE=2.08 (3.21)  Synch=-33.810±0.080 [-33.887,-33.459]  M1=0.023±0.0039 [0.0015,0.026]
Mon Feb 06 15:26:29 2012  Calib: MSE=2.082 (3.206)  AzOffset=-0.053±0.008960  ElOffset=0.101±0.022757  DP=0.004±0.024
Mon Feb 06 15:47:40 2012  VASE File c:\windows\desktop\6-2-12\calibration_si.dat  Calibration Wafer

Wed Feb 08 12:13:13 2012  Init User: Sam (v3.698, 6.256 DLL)

Wed Feb 08 12:15:26 2012  Low-level data acquisition timed out. #2
Try re-initializing hardware.
 If problem returns, contact J.A.Woollam Co. or a representative.

Wed Feb 08 12:21:55 2012  Init User: Sam (v3.698, 6.256 DLL)


Wed Feb 08 14:44:36 2012  Init User: Sam (v3.698, 6.256 DLL)


Thu Feb 09 11:09:36 2012  Init User: Sam (v3.698, 6.256 DLL)

Thu Feb 09 11:09:58 2012  
Thu Feb 09 11:09:58 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Thu Feb 09 11:22:17 2012  
Thu Feb 09 11:22:17 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Thu Feb 09 11:26:45 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Feb 09 11:26:48 2012  Coarse Calib: Wvl1=5000.0  Ps=2.0442±0.0113  Attn=1.0132±0.0002  As=177.532±0.009  Psi=20.263±0.006  Del=171.001±0.066  <I>=2.121,  MSE=1.12 (1.22)
Thu Feb 09 11:26:48 2012  Coarse Calib: MSE=1.119 (1.224)  AzOffset=-0.019±0.003632  ElOffset=0.005±0.005371

Mon Feb 13 15:09:44 2012  Init User: Sam (v3.698, 6.256 DLL)

Mon Feb 13 15:16:34 2012  
Mon Feb 13 15:16:34 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Mon Feb 13 15:21:02 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Feb 13 15:21:05 2012  Coarse Calib: Wvl1=5000.0  Ps=2.0825±0.0076  Attn=1.0128±0.0002  As=162.133±0.008  Psi=20.255±0.006  Del=171.189±0.077  <I>=19.164,  MSE=1.63 (1.16)
Mon Feb 13 15:21:06 2012  Coarse Calib: MSE=1.626 (1.158)  AzOffset=-0.011±0.004271  ElOffset=0.006±0.006250
Mon Feb 13 15:24:57 2012  
Mon Feb 13 15:24:57 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Mon Feb 13 15:34:15 2012  Calib: Wvl1=5000.0  Ps=2.0819±0.0025  Attn=1.0133±0.0001  As=162.079±0.005  Psi=20.259±0.003  Del=171.177±0.035  <I>=11.378,  MSE=0.974 (0.529)  Synch=-174.591±0.012 [-174.623,-174.554]  M1=0.0081±0.0022 [0.004,0.012]
Mon Feb 13 15:34:15 2012  Calib: Wvl2=11770.0  Ps=2.0819±0.0025  IrAttn=0.9716±0.0002  IrAs=159.811±0.006  IrPsi=15.349±0.002  IrDel=175.940±0.195  <I>=12.546  MSE=0.974 (0.529)  Synch=-177.434±0.017 [-177.476,-177.396]  M1=0.013±0.0057 [0.0045,0.022]
Mon Feb 13 15:34:15 2012  Calib: MSE=0.974 (0.529)  AzOffset=-0.001±0.001950  ElOffset=-0.007±0.002855  DP=0.010±0.018
Mon Feb 13 15:50:28 2012  RT File c:\windows\desktop\13-2-12\glass.dat  Microscope slide glass. R&T Scan
Mon Feb 13 16:05:59 2012  RT File c:\windows\desktop\13-2-12\glass.dat  Microscope slide glass. R&T Scan
Mon Feb 13 16:36:55 2012  VASE File c:\windows\desktop\13-2-12\glass-spectroscopic.dat  Microscope slide glass. Spectroscopic Scan

Tue Feb 14 09:35:43 2012  Init User: Sam (v3.698, 6.256 DLL)

Tue Feb 14 09:41:38 2012  
Tue Feb 14 09:41:38 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Tue Feb 14 09:46:06 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Feb 14 09:46:08 2012  Coarse Calib: Wvl1=5000.0  Ps=2.1203±0.0069  Attn=1.0129±0.0002  As=50.471±0.008  Psi=20.256±0.006  Del=171.178±0.070  <I>=19.423,  MSE=1.48 (1.06)
Tue Feb 14 09:46:08 2012  Coarse Calib: MSE=1.484 (1.059)  AzOffset=-0.004±0.003895  ElOffset=-0.007±0.005705
Tue Feb 14 09:48:55 2012  
Tue Feb 14 09:48:55 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Tue Feb 14 09:58:14 2012  Calib: Wvl1=5000.0  Ps=2.1190±0.0022  Attn=1.0135±0.0001  As=50.396±0.004  Psi=20.261±0.003  Del=171.172±0.031  <I>=11.585,  MSE=0.862 (0.468)  Synch=-175.422±0.010 [-175.441,-175.398]  M1=0.0073±0.0025 [0.0028,0.01]
Tue Feb 14 09:58:15 2012  Calib: Wvl2=11770.0  Ps=2.1190±0.0022  IrAttn=0.9714±0.0002  IrAs=48.123±0.005  IrPsi=15.346±0.002  IrDel=175.947±0.172  <I>=12.419  MSE=0.862 (0.468)  Synch=-178.324±0.023 [-178.376,-178.289]  M1=0.013±0.0033 [0.0069,0.018]
Tue Feb 14 09:58:15 2012  Calib: MSE=0.862 (0.468)  AzOffset=0.003±0.001724  ElOffset=-0.010±0.002526  DP=-0.005±0.016
Tue Feb 14 10:44:11 2012  RT File c:\windows\desktop\14-2-12\au-glass-r&t.dat  Au on Glass (1e-5 mbar, 3.2A, 9min) R&T
Tue Feb 14 11:19:24 2012  VASE File c:\windows\desktop\14-2-12\au-glass-spectro.dat  Au on Glass (1e-5 mbar, 3.2A, 9min) Spectroscopic Scan
Tue Feb 14 11:48:29 2012  VASE File c:\windows\desktop\14-2-12\black-au_glass.dat  Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
Tue Feb 14 11:51:25 2012  VASE File c:\windows\desktop\14-2-12\black-au_glass.dat  Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
Tue Feb 14 12:20:55 2012  VASE File c:\windows\desktop\14-2-12\black-au_glass.dat  Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan

Tue Feb 14 14:51:21 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Feb 14 15:07:30 2012  Init User: Sam (v3.698, 6.256 DLL)

Tue Feb 14 15:09:32 2012  
Tue Feb 14 15:09:32 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Tue Feb 14 15:20:43 2012  Calib: Wvl1=5000.0  Ps=2.1521±0.0027  Attn=1.0151±0.0002  As=154.916±0.005  Psi=20.257±0.004  Del=171.113±0.038  <I>=10.622,  MSE=1.05 (0.572)  Synch=-117.299±0.028 [-117.353,-117.240]  M1=0.0028±0.0018 [0.00026,0.0054]
Tue Feb 14 15:20:44 2012  Calib: Wvl2=11770.0  Ps=2.1521±0.0027  IrAttn=0.9723±0.0002  IrAs=152.680±0.007  IrPsi=15.343±0.002  IrDel=175.786±0.202  <I>=12.389  MSE=1.05 (0.572)  Synch=-120.104±0.024 [-120.159,-120.041]  M1=0.021±0.0055 [0.01,0.028]
Tue Feb 14 15:20:44 2012  Calib: MSE=1.050 (0.572)  AzOffset=-0.007±0.002104  ElOffset=-0.004±0.003090  DP=0.012±0.020
Tue Feb 14 16:07:30 2012  VASE File c:\windows\desktop\14-2-12\black-au_si.dat  Black-Au (3.2A 1min 0.18mbar He) Spectroscopic

Thu Feb 16 09:26:57 2012  Init User: Sam (v3.698, 6.256 DLL)

Thu Feb 16 09:33:05 2012  
Thu Feb 16 09:33:05 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Thu Feb 16 09:37:33 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Feb 16 09:37:37 2012  Coarse Calib: Wvl1=5000.0  Ps=2.1779±0.0067  Attn=1.0132±0.0002  As=108.171±0.007  Psi=20.259±0.006  Del=171.161±0.068  <I>=18.910,  MSE=1.43 (1.02)
Thu Feb 16 09:37:37 2012  Coarse Calib: MSE=1.432 (1.023)  AzOffset=-0.007±0.003759  ElOffset=-0.009±0.005509
Thu Feb 16 09:37:55 2012  
Thu Feb 16 09:37:55 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Thu Feb 16 09:47:14 2012  Calib: Wvl1=5000.0  Ps=2.1851±0.0025  Attn=1.0133±0.0001  As=108.140±0.005  Psi=20.255±0.003  Del=171.166±0.035  <I>=11.141,  MSE=0.965 (0.524)  Synch=-31.424±0.015 [-31.460,-31.385]  M1=0.0089±0.0017 [0.0052,0.012]
Thu Feb 16 09:47:14 2012  Calib: Wvl2=11770.0  Ps=2.1851±0.0025  IrAttn=0.9715±0.0002  IrAs=105.881±0.006  IrPsi=15.341±0.002  IrDel=175.944±0.193  <I>=12.322  MSE=0.965 (0.524)  Synch=-34.310±0.028 [-34.378,-34.264]  M1=0.014±0.0049 [0.0065,0.022]
Thu Feb 16 09:47:14 2012  Calib: MSE=0.965 (0.524)  AzOffset=0.003±0.001931  ElOffset=0.003±0.002830  DP=0.000±0.018
Thu Feb 16 10:04:30 2012  RT File c:\windows\desktop\16-2-12\calibration_test.dat  Testing Reflection Measurements on Calibration Wafer
Thu Feb 16 10:57:56 2012  RT File c:\windows\desktop\16-2-12\calibration_test.dat  Testing Reflection Measurements on Calibration Wafer
Thu Feb 16 15:20:42 2012  RT File c:\windows\desktop\16-2-12\black-au_si.dat  Black-Au on Si (0.18mbar He, 3.2A, 1min)

Fri Feb 17 09:55:20 2012  Init User: Sam (v3.698, 6.256 DLL)


Fri Feb 17 10:33:18 2012  Init User: Sam (v3.698, 6.256 DLL)

Fri Feb 17 10:38:34 2012  
Fri Feb 17 10:38:34 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Fri Feb 17 10:43:03 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Fri Feb 17 10:43:06 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2090±0.0060  Attn=1.0142±0.0002  As=92.606±0.007  Psi=20.257±0.005  Del=171.375±0.061  <I>=17.366,  MSE=1.29 (0.925)
Fri Feb 17 10:43:06 2012  Coarse Calib: MSE=1.289 (0.925)  AzOffset=-0.000±0.003403  ElOffset=-0.001±0.004942
Fri Feb 17 10:43:17 2012  
Fri Feb 17 10:43:17 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Fri Feb 17 10:52:36 2012  Calib: Wvl1=5000.0  Ps=2.2224±0.0025  Attn=1.0143±0.0001  As=92.562±0.004  Psi=20.246±0.003  Del=171.333±0.035  <I>=10.265,  MSE=0.96 (0.524)  Synch=169.248±0.010 [169.225,169.278]  M1=0.0044±0.0021 [0.00044,0.0072]
Fri Feb 17 10:52:36 2012  Calib: Wvl2=11770.0  Ps=2.2224±0.0025  IrAttn=0.9712±0.0002  IrAs=90.295±0.006  IrPsi=15.341±0.002  IrDel=175.778±0.185  <I>=11.974  MSE=0.96 (0.524)  Synch=166.439±0.018 [166.414,166.474]  M1=0.013±0.004 [0.006,0.019]
Fri Feb 17 10:52:36 2012  Calib: MSE=0.960 (0.524)  AzOffset=0.003±0.001931  ElOffset=0.002±0.002809  DP=0.030±0.018
Fri Feb 17 11:28:50 2012  VASE File c:\windows\desktop\17-2-12\black-au_si.dat  Black-Au on Si (3.2A 1min 0.18mbar He) NOTE: Surface has been scratched slightly after accidentally being dropped
Fri Feb 17 12:10:48 2012  VASE File c:\windows\desktop\17-2-12\black-ag_si.dat  Black-Ag on Si (3.2A 0.5min 0.18mbar He)
Fri Feb 17 12:53:04 2012  VASE File c:\windows\desktop\17-2-12\black-au_si.dat  Black-Au on Si (3.2A 1min 0.18mbar He)

Mon Feb 20 10:38:53 2012  Init User: Sam (v3.698, 6.256 DLL)


Mon Feb 20 11:31:00 2012  Init User: Sam (v3.698, 6.256 DLL)

Mon Feb 20 11:33:39 2012  
Mon Feb 20 11:33:39 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Mon Feb 20 11:38:13 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Mon Feb 20 11:38:15 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2607±0.0057  Attn=1.0125±0.0002  As=143.578±0.006  Psi=20.248±0.005  Del=171.035±0.058  <I>=17.298,  MSE=1.22 (0.873)
Mon Feb 20 11:38:15 2012  Coarse Calib: MSE=1.224 (0.873)  AzOffset=0.007±0.003207  ElOffset=-0.002±0.004726
Mon Feb 20 11:38:56 2012  
Mon Feb 20 11:38:56 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Mon Feb 20 11:48:13 2012  Calib: Wvl1=5000.0  Ps=2.2594±0.0023  Attn=1.0133±0.0001  As=143.511±0.004  Psi=20.251±0.003  Del=171.073±0.032  <I>=10.343,  MSE=0.882 (0.479)  Synch=47.971±0.006 [47.957,47.986]  M1=0.0071±0.0018 [0.0036,0.0091]
Mon Feb 20 11:48:14 2012  Calib: Wvl2=11770.0  Ps=2.2594±0.0023  IrAttn=0.9707±0.0002  IrAs=141.213±0.006  IrPsi=15.341±0.002  IrDel=175.941±0.176  <I>=12.034  MSE=0.882 (0.479)  Synch=45.257±0.012 [45.237,45.285]  M1=0.012±0.004 [0.006,0.016]
Mon Feb 20 11:48:14 2012  Calib: MSE=0.882 (0.479)  AzOffset=-0.004±0.001763  ElOffset=0.005±0.002594  DP=-0.011±0.016
Mon Feb 20 14:39:23 2012  RT File c:\windows\desktop\20-2-12\au_glass.dat  Au on Glass (3.2A 1e-5mbar 6min)
Mon Feb 20 15:08:59 2012  VASE File c:\windows\desktop\20-2-12\au_glass_spectro.dat  Au on Glass (3.2A 1e-5mbar 6min) Spectroscopic

Tue Mar 06 15:15:07 2012  Init User: Sam (v3.698, 6.256 DLL)

Tue Mar 06 15:19:34 2012  
Tue Mar 06 15:19:34 2012  Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
Tue Mar 06 15:24:04 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Mar 06 15:24:07 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2769±0.0064  Attn=1.0152±0.0002  As=144.408±0.005  Psi=5.439±0.014  Del=137.905±0.171  <I>=20.087,  MSE=1.39 (1.73)
Tue Mar 06 15:24:08 2012  Coarse Calib: MSE=1.387 (1.727)  AzOffset=0.002±0.008823  ElOffset=0.031±0.028284
Tue Mar 06 15:24:17 2012  
Tue Mar 06 15:24:17 2012  Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Tue Mar 06 15:33:52 2012  Calib: Wvl1=5000.0  Ps=2.2807±0.0026  Attn=1.0155±0.0002  As=144.317±0.005  Psi=5.439±0.013  Del=137.835±0.150  <I>=9.378,  MSE=1.6 (2.71)  Synch=112.702±0.036 [112.624,112.792]  M1=0.0058±0.00099 [0.002,0.0076]
Tue Mar 06 15:33:52 2012  Calib: Wvl2=11770.0  Ps=2.2807±0.0026  IrAttn=0.9721±0.0002  IrAs=142.103±0.006  IrPsi=2.130±0.003  IrDel=34.966±0.136  <I>=8.869  MSE=1.6 (2.71)  Synch=109.633±0.064 [109.555,109.902]  M1=0.018±0.0018 [0.01,0.024]
Tue Mar 06 15:33:52 2012  Calib: MSE=1.598 (2.707)  AzOffset=0.020±0.007457  ElOffset=-0.056±0.023467  DP=0.016±0.017
Tue Mar 06 15:43:36 2012  VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat  "Standard Scan" of Calibration Wafer
Tue Mar 06 15:44:14 2012  VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat  uv scan Si)2 Wafer 250nm to 1000nm
Tue Mar 06 15:53:23 2012  VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat  uv scan Si)2 Wafer 250nm to 1000nm
Tue Mar 06 16:16:58 2012  VASE File c:\windows\desktop\6-3-12\data_files\glass.dat  Angular Scan of Microscope Slide Glass
Tue Mar 06 16:17:49 2012  VASE File c:\windows\desktop\6-3-12\data_files\glass.dat  Angular Scan of Microscope Slide Glass
Tue Mar 06 16:39:47 2012  Goniometer limit switch error. #1
Tue Mar 06 16:43:31 2012  VASE File c:\windows\desktop\6-3-12\data_files\glass.dat  Angular Scan of Microscope Slide Glass
Tue Mar 06 16:43:41 2012  Goniometer limit switch error. #1
Tue Mar 06 17:02:52 2012  Goniometer limit switch error. #1
Tue Mar 06 17:16:40 2012  VASE File c:\windows\desktop\6-3-12\data_files\si.dat  Angular Scan of Si Calibration Wafer
Tue Mar 06 17:23:12 2012  Low-level data acquisition timed out. #2
Try re-initializing hardware.
 If problem returns, contact J.A.Woollam Co. or a representative.
Tue Mar 06 17:23:22 2012  VASE File c:\windows\desktop\6-3-12\data_files\si.dat  Angular Scan of Si Calibration Wafer

Tue Mar 06 17:27:04 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Mar 06 17:42:35 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Mar 06 17:44:06 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Mar 06 17:46:22 2012  Init User: Sam (v3.698, 6.256 DLL)


Wed Mar 07 09:38:13 2012  Init User: Sam (v3.698, 6.256 DLL)

Wed Mar 07 09:43:31 2012  
Wed Mar 07 09:43:31 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Wed Mar 07 09:48:00 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Wed Mar 07 09:48:04 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2352±0.0084  Attn=1.0134±0.0003  As=102.594±0.009  Psi=20.187±0.007  Del=171.632±0.085  <I>=16.500,  MSE=1.79 (1.29)
Wed Mar 07 09:48:04 2012  Coarse Calib: MSE=1.785 (1.288)  AzOffset=-0.000±0.004746  ElOffset=-0.018±0.006817
Wed Mar 07 09:57:13 2012  
Wed Mar 07 09:57:13 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Wed Mar 07 10:06:32 2012  Calib: Wvl1=5000.0  Ps=2.2332±0.0023  Attn=1.0138±0.0001  As=102.535±0.004  Psi=20.194±0.003  Del=171.808±0.032  <I>=9.613,  MSE=0.88 (0.479)  Synch=-45.365±0.020 [-45.387,-45.313]  M1=0.0089±0.0026 [0.0044,0.012]
Wed Mar 07 10:06:32 2012  Calib: Wvl2=11770.0  Ps=2.2332±0.0023  IrAttn=0.9718±0.0002  IrAs=100.300±0.006  IrPsi=15.329±0.002  IrDel=175.914±0.176  <I>=11.013  MSE=0.88 (0.479)  Synch=-48.038±0.014 [-48.059,-48.012]  M1=0.014±0.0057 [0.0055,0.023]
Wed Mar 07 10:06:32 2012  Calib: MSE=0.880 (0.479)  AzOffset=0.001±0.001787  ElOffset=0.004±0.002547  DP=-0.001±0.016
Wed Mar 07 10:27:56 2012  VASE File c:\windows\desktop\7-3-12\data_files\si.dat  Angular scan of Si Calibration Wafer 20 -> 80 degrees
Wed Mar 07 11:03:50 2012  VASE File c:\windows\desktop\7-3-12\data_files\si.dat  Angular scan of Si Calibration Wafer 20 -> 80 degrees
Wed Mar 07 14:19:00 2012  
Wed Mar 07 14:19:00 2012  Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
Wed Mar 07 14:30:05 2012  Calib: Wvl1=5000.0  Ps=2.2330±0.0017  Attn=1.0147±0.0001  As=102.405±0.004  Psi=9.063±0.005  Del=20.992±0.078  <I>=9.054,  MSE=1.09 (0.643)  Synch=-45.348±0.027 [-45.382,-45.278]  M1=0.0076±0.0013 [0.0046,0.0098]
Wed Mar 07 14:30:05 2012  Calib: Wvl2=11770.0  Ps=2.2330±0.0017  IrAttn=0.9725±0.0002  IrAs=100.228±0.005  IrPsi=13.851±0.002  IrDel=4.389±0.202  <I>=14.020  MSE=1.09 (0.643)  Synch=-48.064±0.014 [-48.082,-48.031]  M1=0.014±0.0045 [0.0062,0.02]
Wed Mar 07 14:30:06 2012  Calib: MSE=1.089 (0.643)  AzOffset=-0.001±0.010101  ElOffset=0.005±0.003830  DP=0.036±0.011
Wed Mar 07 15:26:04 2012  VASE File c:\windows\desktop\7-3-12\data_files\au.dat  Angular scan of Au on Glass 20 -> 80 degrees

Tue Mar 13 11:24:44 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Mar 13 11:34:42 2012  Init User: Sam (v3.698, 6.256 DLL)


Tue Mar 13 16:17:14 2012  Init User: Sam (v3.698, 6.256 DLL)

Tue Mar 13 16:26:59 2012  
Tue Mar 13 16:26:59 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Tue Mar 13 16:31:34 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Tue Mar 13 16:31:37 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2459±0.0070  Attn=1.0133±0.0002  As=53.437±0.008  Psi=20.229±0.006  Del=172.826±0.070  <I>=14.426,  MSE=1.48 (1.06)
Tue Mar 13 16:31:38 2012  Coarse Calib: MSE=1.477 (1.064)  AzOffset=-0.015±0.004007  ElOffset=-0.020±0.005464
Tue Mar 13 16:32:20 2012  
Tue Mar 13 16:32:20 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Tue Mar 13 16:41:38 2012  Calib: Wvl1=5000.0  Ps=2.2540±0.0024  Attn=1.0137±0.0001  As=53.410±0.004  Psi=20.237±0.003  Del=172.852±0.033  <I>=8.507,  MSE=0.913 (0.498)  Synch=-47.398±0.020 [-47.424,-47.349]  M1=0.0047±0.0016 [0.0019,0.0071]
Tue Mar 13 16:41:38 2012  Calib: Wvl2=11770.0  Ps=2.2540±0.0024  IrAttn=0.9712±0.0002  IrAs=51.133±0.006  IrPsi=15.332±0.002  IrDel=176.551±0.217  <I>=9.571  MSE=0.913 (0.498)  Synch=-50.023±0.030 [-50.068,-49.976]  M1=0.027±0.0073 [0.014,0.037]
Tue Mar 13 16:41:39 2012  Calib: MSE=0.913 (0.498)  AzOffset=0.001±0.001887  ElOffset=-0.012±0.002570  DP=-0.005±0.016
Tue Mar 13 17:06:59 2012  RT File c:\windows\desktop\13-03-12\baseline.dat  Baseline for rP and rS scan of Black-Au on Glass
Tue Mar 13 18:30:55 2012  RT File c:\windows\desktop\13-03-12\black-au_glass.dat  Black-Au on Glass  (0.18mbar, 3.5A, 1min)

Thu Mar 15 10:57:59 2012  Init User: Sam (v3.698, 6.256 DLL)

Thu Mar 15 11:02:52 2012  
Thu Mar 15 11:02:52 2012  Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
Thu Mar 15 11:07:21 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Thu Mar 15 11:07:24 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2123±0.0060  Attn=1.0123±0.0002  As=35.196±0.007  Psi=13.516±0.007  Del=168.154±0.108  <I>=14.457,  MSE=1.6 (1.21)
Thu Mar 15 11:07:25 2012  Coarse Calib: MSE=1.603 (1.208)  AzOffset=-0.002±0.005757  ElOffset=-0.020±0.009823
Thu Mar 15 11:07:31 2012  
Thu Mar 15 11:07:31 2012  Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
Thu Mar 15 11:16:49 2012  Calib: Wvl1=5000.0  Ps=2.2175±0.0036  Attn=1.0122±0.0003  As=35.140±0.009  Psi=13.517±0.008  Del=168.074±0.119  <I>=7.393,  MSE=2.33 (1.37)  Synch=-47.125±0.154 [-47.269,-46.634]  M1=0.0022±0.00078 [0.00036,0.0041]
Thu Mar 15 11:16:49 2012  Calib: Wvl2=11770.0  Ps=2.2175±0.0036  IrAttn=0.9714±0.0005  IrAs=32.842±0.011  IrPsi=7.807±0.004  IrDel=172.853±0.320  <I>=7.021  MSE=2.33 (1.37)  Synch=-49.757±0.052 [-49.860,-49.676]  M1=0.023±0.005 [0.0087,0.029]
Thu Mar 15 11:16:50 2012  Calib: MSE=2.335 (1.366)  AzOffset=-0.006±0.006366  ElOffset=0.023±0.010903  DP=0.055±0.027
Thu Mar 15 11:29:55 2012  RT File c:\windows\desktop\15-03-12\data_files\baseline.dat  Baseline data for Transmission scan of Black-Au on Glass
Thu Mar 15 12:22:50 2012  RT File c:\windows\desktop\15-03-12\data_files\black-au_glass.dat  Black-Au on Glass (0.18mbar 3.5A 1min)
Thu Mar 15 15:10:01 2012  RT File c:\windows\desktop\15-03-12\data_files\baseline_glass.dat  Basline scan for glass
Thu Mar 15 15:54:57 2012  RT File c:\windows\desktop\15-03-12\data_files\glass.dat  Glass Transmission scan

Fri Mar 16 10:41:28 2012  Init User: Sam (v3.698, 6.256 DLL)


Fri Mar 16 11:43:01 2012  Init User: Sam (v3.698, 6.256 DLL)

Fri Mar 16 11:49:42 2012  
Fri Mar 16 11:49:42 2012  Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
Fri Mar 16 11:54:10 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Fri Mar 16 11:54:14 2012  Coarse Calib: Wvl1=5000.0  Ps=2.2240±0.0055  Attn=1.0124±0.0002  As=116.821±0.006  Psi=20.231±0.004  Del=172.762±0.055  <I>=14.912,  MSE=1.16 (0.828)
Fri Mar 16 11:54:14 2012  Coarse Calib: MSE=1.157 (0.828)  AzOffset=0.003±0.003132  ElOffset=0.009±0.004283
Fri Mar 16 11:57:13 2012  
Fri Mar 16 11:57:13 2012  Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
Fri Mar 16 12:06:31 2012  Calib: Wvl1=5000.0  Ps=2.2299±0.0023  Attn=1.0126±0.0001  As=116.783±0.004  Psi=20.234±0.003  Del=172.714±0.033  <I>=8.727,  MSE=0.905 (0.494)  Synch=98.284±0.021 [98.255,98.335]  M1=0.0078±0.0031 [0.0035,0.013]
Fri Mar 16 12:06:31 2012  Calib: Wvl2=11770.0  Ps=2.2299±0.0023  IrAttn=0.9712±0.0002  IrAs=114.523±0.006  IrPsi=15.324±0.002  IrDel=176.777±0.233  <I>=8.439  MSE=0.905 (0.494)  Synch=95.797±0.023 [95.755,95.854]  M1=0.013±0.0068 [0.0044,0.021]
Fri Mar 16 12:06:31 2012  Calib: MSE=0.905 (0.494)  AzOffset=0.005±0.001862  ElOffset=0.019±0.002551  DP=-0.012±0.016
Fri Mar 16 13:33:30 2012  VASE File c:\windows\desktop\16-03-12\black-au_glass.dat  Black-Au on glass Spectro Scan (0.18mbar, 3.5A, 1min)

Wed Sep 19 12:42:38 2012  Init User: Sam (v3.698, 6.256 DLL)

Wed Sep 19 12:48:15 2012  
Wed Sep 19 12:48:15 2012  Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
Wed Sep 19 12:52:44 2012  Calib: Coarse Calibration was successful.  A Fine Calibration must be performed before ellipsometric data acquisition.
Wed Sep 19 12:52:47 2012  Coarse Calib: Wvl1=5000.0  Ps=2.1894±0.0060  Attn=1.0112±0.0002  As=102.669±0.006  Psi=8.936±0.009  Del=19.874±0.157  <I>=17.121,  MSE=1.64 (1.51)
Wed Sep 19 12:52:47 2012  Coarse Calib: MSE=1.644 (1.506)  AzOffset=-0.031±0.019458  ElOffset=-0.028±0.007767
Wed Sep 19 12:58:23 2012  
Wed Sep 19 12:58:23 2012  Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
Wed Sep 19 13:07:41 2012  Calib: Wvl1=5000.0  Ps=2.1948±0.0021  Attn=1.0118±0.0002  As=102.524±0.005  Psi=8.942±0.006  Del=20.022±0.097  <I>=8.155,  MSE=1.34 (0.759)  Synch=114.008±0.019 [113.973,114.048]  M1=0.0055±0.0022 [0.00031,0.0089]
Wed Sep 19 13:07:41 2012  Calib: Wvl2=11770.0  Ps=2.1948±0.0021  IrAttn=0.9691±0.0003  IrAs=100.117±0.006  IrPsi=13.845±0.002  IrDel=4.566±0.239  <I>=11.603  MSE=1.34 (0.759)  Synch=110.980±0.013 [110.958,111.022]  M1=0.013±0.0033 [0.0066,0.017]
Wed Sep 19 13:07:42 2012  Calib: MSE=1.335 (0.759)  AzOffset=0.025±0.012142  ElOffset=0.006±0.004793  DP=-0.025±0.013
Wed Sep 19 13:20:24 2012  RT File c:\windows\desktop\19-09-12\control.dat  Si calibration wafer Rp and Rs scan
Wed Sep 19 13:31:16 2012  
Wed Sep 19 13:31:16 2012  Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Wed Sep 19 13:42:24 2012  Calib: Wvl1=5000.0  Ps=2.2192±0.0019  Attn=1.0128±0.0002  As=102.288±0.004  Psi=6.689±0.011  Del=120.031±0.059  <I>=6.805,  MSE=1.12 (2.02)  Synch=114.116±0.025 [114.075,114.163]  M1=0.004±0.0014 [0.00056,0.0061]
Wed Sep 19 13:42:25 2012  Calib: Wvl2=11770.0  Ps=2.2192±0.0019  IrAttn=0.9703±0.0002  IrAs=99.982±0.005  IrPsi=3.208±0.002  IrDel=52.666±0.041  <I>=6.183  MSE=1.12 (2.02)  Synch=111.003±0.069 [110.905,111.386]  M1=0.014±0.0027 [0.004,0.017]
Wed Sep 19 13:42:25 2012  Calib: MSE=1.121 (2.015)  AzOffset=0.020±0.004272  ElOffset=0.025±0.008055  DP=1.421±0.019
Wed Sep 19 14:43:19 2012  RT File c:\windows\desktop\19-09-12\control.dat  Si calibration wafer Rp and Rs scan
Wed Sep 19 16:36:31 2012  RT File c:\windows\desktop\19-09-12\au+black_au+au_si.dat  Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Rp and Rs scan
Wed Sep 19 16:54:38 2012  VASE File c:\windows\desktop\19-09-12\au+black_au+au_si_ellipso.dat  Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Ellipsometric scans

Thu Sep 20 09:55:31 2012  Init User: Sam (v3.698, 6.256 DLL)

Thu Sep 20 10:11:31 2012  
Thu Sep 20 10:11:31 2012  Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
Thu Sep 20 10:22:40 2012  Calib: Wvl1=5000.0  Ps=2.2385±0.0029  Attn=1.0106±0.0002  As=52.651±0.004  Psi=5.114±0.009  Del=142.152±0.134  <I>=5.817,  MSE=1.27 (3.41)  Synch=113.959±0.049 [113.848,114.209]  M1=0.0035±0.00083 [0.00064,0.005]
Thu Sep 20 10:22:40 2012  Calib: Wvl2=11770.0  Ps=2.2385±0.0029  IrAttn=0.9686±0.0002  IrAs=50.302±0.005  IrPsi=2.078±0.004  IrDel=31.462±0.170  <I>=5.961  MSE=1.27 (3.41)  Synch=111.123±0.103 [110.915,111.683]  M1=0.039±0.0057 [0.0081,0.043]
Thu Sep 20 10:22:41 2012  Calib: MSE=1.265 (3.406)  AzOffset=0.012±0.006674  ElOffset=0.014±0.023358  DP=0.071±0.012
Thu Sep 20 11:15:29 2012  VASE File c:\windows\desktop\2012-09-20\au+blackau+au_si_ellipso.dat  Au (30min 4A e-6mbar) + BlackAu (30min 3.2A 0.2mbar) + Au (125min 3.5A e-8mbar) on Si Ellipsometric scan
Thu Sep 20 12:43:09 2012  VASE File c:\windows\desktop\2012-09-20\jeremy.dat  Jeremy's sample (Ta/Py/Ni/Ta/Si Fe20Ni80)
Thu Sep 20 15:18:20 2012  VASE File c:\windows\desktop\2012-09-20\au_glass_ellipso.dat  Au on Glass (6min 3.2A e-5mbar)
Thu Sep 20 15:48:20 2012  VASE File c:\windows\desktop\2012-09-20\ni+au_si.dat  Ni on Au/Si provided by Mikhail Kostylev
Thu Sep 20 16:10:52 2012  VASE File c:\windows\desktop\2012-09-20\whiteni+au_si.dat  "White" Ni on Au/Si provided by Mikhail Kostylev
Thu Sep 20 16:31:15 2012  VASE File c:\windows\desktop\2012-09-20\ni+au_si(2).dat  Ni on Au/Si provided by Mikhail Kostylev (this time I removed the alignment detector)
Thu Sep 20 16:38:52 2012  SendMonoCmd Error:  Monochromator Command Return Failed 31. DK
Thu Sep 20 16:39:27 2012  GetMonoStatus Error:  Mono Return Failed 27. rtn=1. DK
Thu Sep 20 16:39:27 2012  d=01 cmd=255 00 86 A2 00 18 00 00 18 00 00 
Thu Sep 20 16:39:27 2012  MonoCheck Error:  Monochromator Communication Failed. DK
Thu Sep 20 16:39:27 2012  Could Not Adjust Slit Width. DK