X-Git-Url: https://git.ucc.asn.au/?a=blobdiff_plain;f=research%2Fellipsometry%2FWVASE32%2FDAT%2F170709%20cal%20wafer.dat;fp=research%2Fellipsometry%2FWVASE32%2FDAT%2F170709%20cal%20wafer.dat;h=e36327ceaa9ff8d65979a5eef77701d52224da51;hb=d6bdb39c05481f4deef15a535452a31a7019d09c;hp=0000000000000000000000000000000000000000;hpb=42977a93534c13419167a935c5ff9b1f1ab00019;p=matches%2Fhonours.git diff --git a/research/ellipsometry/WVASE32/DAT/170709 cal wafer.dat b/research/ellipsometry/WVASE32/DAT/170709 cal wafer.dat new file mode 100644 index 00000000..e36327ce --- /dev/null +++ b/research/ellipsometry/WVASE32/DAT/170709 cal wafer.dat @@ -0,0 +1,430 @@ + +VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Jul 17 13:35:04 2009] +Original[170709 cal wafer.dat] +Angstroms +3000.000000 65.000000 38.59383 104.81626 0.183227 0.464415 +3100.000000 65.000000 37.418072 105.64664 0.164605 0.420696 +3200.000000 65.000000 36.591377 106.66417 0.166914 0.429875 +3300.000000 65.000000 35.984665 108.0694 0.172825 0.456731 +3400.000000 65.000000 35.511566 109.44796 0.134255 0.357852 +3500.000000 65.000000 35.297768 111.34016 0.125593 0.339208 +3600.000000 65.000000 35.367188 114.3586 0.134418 0.369936 +3700.000000 65.000000 34.672665 119.44384 0.113735 0.323619 +3800.000000 65.000000 32.878632 122.81858 0.110524 0.337285 +3900.000000 65.000000 31.19171 124.40734 0.0953422 0.306628 +4000.000000 65.000000 29.907795 125.41103 0.0957049 0.321594 +4100.000000 65.000000 28.847013 126.26962 0.101085 0.341033 +4200.000000 65.000000 27.965014 127.02903 0.092677 0.322924 +4300.000000 65.000000 27.199738 127.68358 0.0837028 0.300266 +4400.000000 65.000000 26.523003 128.35521 0.0824964 0.306069 +4500.000000 65.000000 25.911539 129.04514 0.0736012 0.281488 +4600.000000 65.000000 25.349405 129.72575 0.0801553 0.302904 +4700.000000 65.000000 24.842712 130.37077 0.0724129 0.280864 +4800.000000 65.000000 24.371912 130.97888 0.070568 0.281447 +4900.000000 65.000000 23.943602 131.60652 0.0651867 0.266821 +5000.000000 65.000000 23.548643 132.15115 0.0584301 0.24525 +5100.000000 65.000000 23.16975 132.8101 0.0648899 0.267354 +5200.000000 65.000000 22.824146 133.40115 0.0635725 0.268032 +5300.000000 65.000000 22.499687 133.98546 0.0596074 0.257191 +5400.000000 65.000000 22.195663 134.52199 0.0545093 0.241036 +5500.000000 65.000000 21.915497 135.06789 0.0512898 0.232126 +5600.000000 65.000000 21.642164 135.57452 0.0479764 0.222143 +5700.000000 65.000000 21.384411 136.15874 0.0511069 0.229791 +5800.000000 65.000000 21.145685 136.65231 0.051161 0.235263 +5900.000000 65.000000 20.915258 137.16711 0.0473725 0.222456 +6000.000000 65.000000 20.696428 137.64226 0.0420214 0.201417 +6100.000000 65.000000 20.500225 138.10167 0.0393347 0.192263 +6200.000000 65.000000 20.300798 138.61638 0.0380081 0.179945 +6300.000000 65.000000 20.117367 139.09258 0.0432163 0.208763 +6400.000000 65.000000 19.945015 139.58975 0.0431052 0.212151 +6500.000000 65.000000 19.777111 140.03212 0.0358227 0.179541 +6600.000000 65.000000 19.621937 140.44514 0.0332719 0.169738 +6700.000000 65.000000 19.473448 140.88652 0.0346446 0.180032 +6800.000000 65.000000 19.326706 141.31975 0.0345442 0.17309 +6900.000000 65.000000 19.187756 141.75119 0.0316817 0.161336 +7000.000000 65.000000 19.055986 142.16647 0.0302745 0.157026 +7100.000000 65.000000 18.927801 142.54929 0.0288777 0.152291 +7200.000000 65.000000 18.804796 142.94479 0.0240419 0.128956 +7300.000000 65.000000 18.689814 143.36507 0.0257165 0.140136 +7400.000000 65.000000 18.575918 143.73476 0.0276777 0.145124 +7500.000000 65.000000 18.468634 144.12506 0.0241011 0.128259 +7600.000000 65.000000 18.36573 144.4834 0.0226379 0.122178 +7700.000000 65.000000 18.266155 144.86299 0.0220241 0.120649 +7800.000000 65.000000 18.17201 145.24551 0.0217663 0.120831 +7900.000000 65.000000 18.082121 145.58112 0.0216697 0.122364 +8000.000000 65.000000 17.991898 145.89861 0.026168 0.149882 +8100.000000 65.000000 17.912312 146.37819 0.0257784 0.141627 +8200.000000 65.000000 17.828175 146.70041 0.0265505 0.148269 +8300.000000 65.000000 17.747911 147.05222 0.0235763 0.133674 +8400.000000 65.000000 17.660633 147.38103 0.0215207 0.123539 +8500.000000 65.000000 17.583094 147.73706 0.0297649 0.171041 +8600.000000 65.000000 17.524031 147.99123 0.0207727 0.121279 +8700.000000 65.000000 17.452831 148.27036 0.0206534 0.116397 +8800.000000 65.000000 17.383858 148.64946 0.0218922 0.125537 +8900.000000 65.000000 17.331388 148.82161 0.019204 0.111325 +9000.000000 65.000000 17.265802 149.10747 0.0171174 0.10046 +9100.000000 65.000000 17.201033 149.42395 0.0212451 0.126257 +9200.000000 65.000000 17.140144 149.68716 0.0188407 0.113291 +9300.000000 65.000000 17.080267 150.01735 0.0173339 0.10549 +9400.000000 65.000000 17.018885 150.31447 0.0178712 0.104336 +9500.000000 65.000000 16.972038 150.55177 0.0166645 0.0983214 +9600.000000 65.000000 16.92244 150.80161 0.015605 0.0930501 +9700.000000 65.000000 16.871578 151.08098 0.0180112 0.108598 +9800.000000 65.000000 16.813202 151.36687 0.0180109 0.110098 +9900.000000 65.000000 16.772182 151.60623 0.016879 0.1043 +10000.000000 65.000000 16.730366 151.77815 0.0152593 0.0952757 +3000.000000 70.000000 38.05439 87.955704 0.237506 0.588135 +3100.000000 70.000000 37.300434 88.653633 0.214912 0.522782 +3200.000000 70.000000 36.330364 89.582306 0.150607 0.369997 +3300.000000 70.000000 35.60532 90.763725 0.136791 0.34905 +3400.000000 70.000000 35.076221 92.297256 0.132199 0.336955 +3500.000000 70.000000 34.699181 94.208626 0.130845 0.332326 +3600.000000 70.000000 34.629734 97.339371 0.118246 0.300213 +3700.000000 70.000000 33.698013 102.64788 0.103965 0.279619 +3800.000000 70.000000 31.436121 106.2382 0.101034 0.284073 +3900.000000 70.000000 29.500572 107.40831 0.0978511 0.287606 +4000.000000 70.000000 28.000692 108.03434 0.0873122 0.266198 +4100.000000 70.000000 26.772335 108.53629 0.0912363 0.291622 +4200.000000 70.000000 25.742752 108.96813 0.0913473 0.299721 +4300.000000 70.000000 24.85602 109.38034 0.0835466 0.281216 +4400.000000 70.000000 24.055891 109.74979 0.0771134 0.265466 +4500.000000 70.000000 23.323738 110.11034 0.0749859 0.265319 +4600.000000 70.000000 22.648315 110.56165 0.0712411 0.260095 +4700.000000 70.000000 22.030386 110.94593 0.072045 0.269311 +4800.000000 70.000000 21.464191 111.31721 0.0654309 0.249455 +4900.000000 70.000000 20.941492 111.7086 0.061449 0.239784 +5000.000000 70.000000 20.452839 112.08941 0.058806 0.234349 +5100.000000 70.000000 19.989325 112.50218 0.0586448 0.239847 +5200.000000 70.000000 19.546886 112.92253 0.0549837 0.229153 +5300.000000 70.000000 19.145466 113.31458 0.0523819 0.222286 +5400.000000 70.000000 18.75629 113.66371 0.0529654 0.229823 +5500.000000 70.000000 18.400896 114.09119 0.0472456 0.209105 +5600.000000 70.000000 18.052052 114.4542 0.0441353 0.199161 +5700.000000 70.000000 17.722483 114.84671 0.0475481 0.218295 +5800.000000 70.000000 17.405903 115.22073 0.04249 0.198533 +5900.000000 70.000000 17.115105 115.5957 0.0411002 0.195377 +6000.000000 70.000000 16.835855 115.98276 0.0383963 0.185687 +6100.000000 70.000000 16.566931 116.36562 0.03853 0.190326 +6200.000000 70.000000 16.308865 116.73428 0.0326159 0.162879 +6300.000000 70.000000 16.051344 117.12234 0.0348636 0.176957 +6400.000000 70.000000 15.820391 117.48488 0.0311612 0.16065 +6500.000000 70.000000 15.59526 117.84181 0.0357619 0.187821 +6600.000000 70.000000 15.378958 118.19847 0.0296515 0.158414 +6700.000000 70.000000 15.172906 118.58093 0.0284495 0.154557 +6800.000000 70.000000 14.962476 118.93131 0.0284893 0.15545 +6900.000000 70.000000 14.776373 119.34226 0.0286569 0.158772 +7000.000000 70.000000 14.591568 119.70746 0.0296738 0.167319 +7100.000000 70.000000 14.416915 120.04185 0.0269729 0.154426 +7200.000000 70.000000 14.238911 120.39495 0.026817 0.155975 +7300.000000 70.000000 14.071085 120.77385 0.0218036 0.128892 +7400.000000 70.000000 13.908963 121.10714 0.0247544 0.146127 +7500.000000 70.000000 13.758819 121.44421 0.0147535 0.0882415 +7600.000000 70.000000 13.608225 121.80501 0.0228048 0.138643 +7700.000000 70.000000 13.456373 122.10883 0.0177827 0.109629 +7800.000000 70.000000 13.321056 122.50703 0.0214816 0.133955 +7900.000000 70.000000 13.190188 122.7936 0.0184288 0.116832 +8000.000000 70.000000 13.047751 123.17896 0.0172346 0.110915 +8100.000000 70.000000 12.898565 123.64297 0.0230452 0.139377 +8200.000000 70.000000 12.755855 124.11124 0.0250287 0.163979 +8300.000000 70.000000 12.678777 124.20348 0.0230087 0.151965 +8400.000000 70.000000 12.559628 124.59058 0.0268355 0.178129 +8500.000000 70.000000 12.452019 124.92403 0.0266076 0.176555 +8600.000000 70.000000 12.326067 125.21927 0.0217674 0.14743 +8700.000000 70.000000 12.228407 125.44205 0.0203165 0.137472 +8800.000000 70.000000 12.113501 125.92832 0.0193411 0.134546 +8900.000000 70.000000 12.032963 126.12432 0.0174521 0.122534 +9000.000000 70.000000 11.934955 126.37207 0.0159314 0.113251 +9100.000000 70.000000 11.841686 126.70992 0.013621 0.0980044 +9200.000000 70.000000 11.743728 126.99297 0.0160238 0.117448 +9300.000000 70.000000 11.64901 127.35324 0.0165788 0.12303 +9400.000000 70.000000 11.558251 127.66142 0.0169664 0.124596 +9500.000000 70.000000 11.474538 127.94635 0.0168512 0.125219 +9600.000000 70.000000 11.392602 128.22409 0.0159457 0.119715 +9700.000000 70.000000 11.311904 128.54996 0.0147242 0.111981 +9800.000000 70.000000 11.231153 128.86427 0.0160433 0.123647 +9900.000000 70.000000 11.153594 129.15271 0.0155497 0.12129 +10000.000000 70.000000 11.089598 129.31142 0.0133048 0.104611 +3000.000000 75.000000 38.838036 68.442055 0.420891 1.09535 +3100.000000 75.000000 37.77655 69.017258 0.198722 0.518903 +3200.000000 75.000000 36.845707 69.80024 0.156841 0.4114 +3300.000000 75.000000 36.199036 70.72448 0.157128 0.415699 +3400.000000 75.000000 35.529411 72.08194 0.149466 0.396294 +3500.000000 75.000000 35.098885 73.762108 0.167907 0.442712 +3600.000000 75.000000 34.881813 76.765091 0.12464 0.32366 +3700.000000 75.000000 33.616978 81.704323 0.104927 0.279321 +3800.000000 75.000000 31.094215 84.55526 0.0919473 0.25109 +3900.000000 75.000000 29.037924 84.943451 0.0877691 0.2474 +4000.000000 75.000000 27.47934 84.726524 0.0816109 0.236828 +4100.000000 75.000000 26.199207 84.478264 0.079892 0.248049 +4200.000000 75.000000 25.128763 84.208595 0.0683893 0.217011 +4300.000000 75.000000 24.207788 83.922379 0.0712465 0.230601 +4400.000000 75.000000 23.373346 83.652336 0.0653006 0.214985 +4500.000000 75.000000 22.614412 83.415573 0.0660036 0.221936 +4600.000000 75.000000 21.905315 83.171043 0.0555669 0.1973 +4700.000000 75.000000 21.26837 82.919113 0.0527842 0.190902 +4800.000000 75.000000 20.670168 82.688408 0.0537918 0.197705 +4900.000000 75.000000 20.119022 82.474495 0.0491202 0.183604 +5000.000000 75.000000 19.602261 82.257416 0.0445596 0.169015 +5100.000000 75.000000 19.10619 82.034424 0.0405016 0.161741 +5200.000000 75.000000 18.643562 81.835701 0.0378464 0.153195 +5300.000000 75.000000 18.212492 81.622375 0.0349456 0.143269 +5400.000000 75.000000 17.796623 81.406616 0.0359209 0.149842 +5500.000000 75.000000 17.417713 81.185165 0.0330993 0.139834 +5600.000000 75.000000 17.036896 81.000244 0.0291278 0.124797 +5700.000000 75.000000 16.68844 80.796059 0.0332943 0.149419 +5800.000000 75.000000 16.347364 80.597244 0.0277069 0.125854 +5900.000000 75.000000 16.032211 80.433083 0.0288306 0.132471 +6000.000000 75.000000 15.72661 80.226677 0.0255337 0.119002 +6100.000000 75.000000 15.431907 80.068192 0.0241993 0.114187 +6200.000000 75.000000 15.146017 79.870956 0.0215236 0.1058 +6300.000000 75.000000 14.874742 79.689819 0.0260594 0.129493 +6400.000000 75.000000 14.618031 79.499199 0.0243039 0.122578 +6500.000000 75.000000 14.366498 79.305145 0.023371 0.119118 +6600.000000 75.000000 14.133286 79.10479 0.0208244 0.10736 +6700.000000 75.000000 13.897146 78.926468 0.0166573 0.0867814 +6800.000000 75.000000 13.666899 78.775871 0.021524 0.116286 +6900.000000 75.000000 13.454371 78.56749 0.0201939 0.110731 +7000.000000 75.000000 13.243559 78.410477 0.0170449 0.0943933 +7100.000000 75.000000 13.04803 78.246246 0.0186625 0.10432 +7200.000000 75.000000 12.848892 78.075768 0.0155133 0.0877086 +7300.000000 75.000000 12.656706 77.864067 0.0167616 0.095731 +7400.000000 75.000000 12.479704 77.702942 0.0189831 0.112406 +7500.000000 75.000000 12.304377 77.536224 0.0152799 0.0913777 +7600.000000 75.000000 12.132442 77.33667 0.0187339 0.113003 +7700.000000 75.000000 11.96738 77.162247 0.0145635 0.0886957 +7800.000000 75.000000 11.800897 77.019356 0.0141829 0.0871157 +7900.000000 75.000000 11.642787 76.815369 0.0130541 0.0809752 +8000.000000 75.000000 11.493078 76.664589 0.0120955 0.0760432 +8100.000000 75.000000 11.326191 76.45723 0.0175471 0.112961 +8200.000000 75.000000 11.16056 76.219452 0.0147944 0.0972931 +8300.000000 75.000000 11.060984 76.143822 0.014916 0.0983857 +8400.000000 75.000000 10.912731 75.968437 0.0144762 0.096127 +8500.000000 75.000000 10.77387 75.77948 0.0186246 0.124112 +8600.000000 75.000000 10.660096 75.531662 0.0202373 0.136953 +8700.000000 75.000000 10.530028 75.475731 0.0187646 0.130887 +8800.000000 75.000000 10.397212 75.243889 0.0144875 0.102672 +8900.000000 75.000000 10.297494 75.108772 0.0144196 0.10277 +9000.000000 75.000000 10.184095 74.950447 0.0153325 0.110128 +9100.000000 75.000000 10.068949 74.765297 0.0135673 0.098328 +9200.000000 75.000000 9.9610043 74.582405 0.0128321 0.0938387 +9300.000000 75.000000 9.8451319 74.366646 0.0133742 0.0986784 +9400.000000 75.000000 9.7346544 74.191742 0.0158566 0.119899 +9500.000000 75.000000 9.6325102 73.996613 0.0155369 0.118262 +9600.000000 75.000000 9.5410604 73.8489 0.0139647 0.107008 +9700.000000 75.000000 9.4388571 73.659615 0.0134913 0.104248 +9800.000000 75.000000 9.3398046 73.47641 0.0136645 0.106491 +9900.000000 75.000000 9.2423477 73.278404 0.0123189 0.0967789 +10000.000000 75.000000 9.1675587 73.165115 0.0128433 0.101288 +dpolE 3000.000000 65.000000 0.826502 2.26212 +dpolE 3100.000000 65.000000 1.01513 2.06115 +dpolE 3200.000000 65.000000 0.452122 2.13284 +dpolE 3300.000000 65.000000 0.512588 2.01129 +dpolE 3400.000000 65.000000 0.519395 1.58891 +dpolE 3500.000000 65.000000 0.659812 1.50719 +dpolE 3600.000000 65.000000 0.448836 1.63778 +dpolE 3700.000000 65.000000 0.598494 1.25315 +dpolE 3800.000000 65.000000 0.262624 1.17013 +dpolE 3900.000000 65.000000 0.291443 0.986032 +dpolE 4000.000000 65.000000 0.109481 0.975801 +dpolE 4100.000000 65.000000 0.2644 0.943777 +dpolE 4200.000000 65.000000 0.21948 0.856878 +dpolE 4300.000000 65.000000 0.134322 0.766939 +dpolE 4400.000000 65.000000 0.144718 0.751015 +dpolE 4500.000000 65.000000 0.143077 0.664778 +dpolE 4600.000000 65.000000 0.0954908 0.674315 +dpolE 4700.000000 65.000000 0.1007 0.604562 +dpolE 4800.000000 65.000000 0.131998 0.585763 +dpolE 4900.000000 65.000000 0.0936994 0.537896 +dpolE 5000.000000 65.000000 0.0662896 0.479636 +dpolE 5100.000000 65.000000 0.0680304 0.501077 +dpolE 5200.000000 65.000000 0.0742636 0.487869 +dpolE 5300.000000 65.000000 0.090569 0.454643 +dpolE 5400.000000 65.000000 0.0648481 0.414133 +dpolE 5500.000000 65.000000 0.0732082 0.38778 +dpolE 5600.000000 65.000000 0.0506478 0.361099 +dpolE 5700.000000 65.000000 0.0414228 0.364553 +dpolE 5800.000000 65.000000 0.0557258 0.363495 +dpolE 5900.000000 65.000000 0.0655338 0.334853 +dpolE 6000.000000 65.000000 0.0648943 0.295668 +dpolE 6100.000000 65.000000 0.0280737 0.275787 +dpolE 6200.000000 65.000000 0.0387677 0.254728 +dpolE 6300.000000 65.000000 0.0275843 0.288604 +dpolE 6400.000000 65.000000 0.0436191 0.286483 +dpolE 6500.000000 65.000000 0.029611 0.237095 +dpolE 6600.000000 65.000000 0.0199789 0.219422 +dpolE 6700.000000 65.000000 0.0445245 0.227501 +dpolE 6800.000000 65.000000 0.0154289 0.218658 +dpolE 6900.000000 65.000000 0.00535571 0.199614 +dpolE 7000.000000 65.000000 0.00499674 0.190239 +dpolE 7100.000000 65.000000 0.0215347 0.180728 +dpolE 7200.000000 65.000000 0.0549735 0.149816 +dpolE 7300.000000 65.000000 0.0116675 0.159743 +dpolE 7400.000000 65.000000 0.00406972 0.166867 +dpolE 7500.000000 65.000000 0.0188837 0.144678 +dpolE 7600.000000 65.000000 0.00015972 0.135436 +dpolE 7700.000000 65.000000 0.029132 0.131218 +dpolE 7800.000000 65.000000 0.0240638 0.129392 +dpolE 7900.000000 65.000000 0.0185087 0.12845 +dpolE 8000.000000 65.000000 0.0236131 0.15471 +dpolE 8100.000000 65.000000 0.013131 0.148897 +dpolE 8200.000000 65.000000 0.0176559 0.152258 +dpolE 8300.000000 65.000000 0.033913 0.134423 +dpolE 8400.000000 65.000000 0.0418253 0.122438 +dpolE 8500.000000 65.000000 0.039391 0.171518 +dpolE 8600.000000 65.000000 0.05579 0.118933 +dpolE 8700.000000 65.000000 0.0251182 0.115071 +dpolE 8800.000000 65.000000 0.0326293 0.120736 +dpolE 8900.000000 65.000000 0.0383211 0.105689 +dpolE 9000.000000 65.000000 0.0396685 0.093845 +dpolE 9100.000000 65.000000 0.0550635 0.116014 +dpolE 9200.000000 65.000000 0.0277742 0.102561 +dpolE 9300.000000 65.000000 0.0300046 0.0940429 +dpolE 9400.000000 65.000000 0.0294022 0.0955277 +dpolE 9500.000000 65.000000 0.0312202 0.0888037 +dpolE 9600.000000 65.000000 0.0401561 0.082908 +dpolE 9700.000000 65.000000 0.0420563 0.0953423 +dpolE 9800.000000 65.000000 0.0176867 0.0950599 +dpolE 9900.000000 65.000000 0.0352007 0.0888301 +dpolE 10000.000000 65.000000 0.0482394 0.0801325 +dpolE 3000.000000 70.000000 1.70279 2.95521 +dpolE 3100.000000 70.000000 -0.612439 2.75798 +dpolE 3200.000000 70.000000 1.18303 1.95232 +dpolE 3300.000000 70.000000 0.27561 1.6157 +dpolE 3400.000000 70.000000 0.496784 1.59094 +dpolE 3500.000000 70.000000 0.490847 1.60469 +dpolE 3600.000000 70.000000 0.42576 1.47936 +dpolE 3700.000000 70.000000 0.458123 1.1696 +dpolE 3800.000000 70.000000 0.197705 1.11029 +dpolE 3900.000000 70.000000 0.420318 1.05215 +dpolE 4000.000000 70.000000 0.297544 0.926039 +dpolE 4100.000000 70.000000 0.320708 0.869233 +dpolE 4200.000000 70.000000 0.273441 0.862288 +dpolE 4300.000000 70.000000 0.268049 0.782506 +dpolE 4400.000000 70.000000 0.212597 0.716337 +dpolE 4500.000000 70.000000 0.169535 0.693528 +dpolE 4600.000000 70.000000 0.18375 0.598124 +dpolE 4700.000000 70.000000 0.167138 0.601856 +dpolE 4800.000000 70.000000 0.128795 0.54336 +dpolE 4900.000000 70.000000 0.11091 0.50836 +dpolE 5000.000000 70.000000 0.105684 0.483894 +dpolE 5100.000000 70.000000 0.0985929 0.442677 +dpolE 5200.000000 70.000000 0.0903202 0.412542 +dpolE 5300.000000 70.000000 0.0914929 0.390918 +dpolE 5400.000000 70.000000 0.0763556 0.394309 +dpolE 5500.000000 70.000000 0.0952927 0.350105 +dpolE 5600.000000 70.000000 0.0851157 0.32557 +dpolE 5700.000000 70.000000 0.0502785 0.324191 +dpolE 5800.000000 70.000000 0.0524304 0.288329 +dpolE 5900.000000 70.000000 0.0634207 0.277697 +dpolE 6000.000000 70.000000 0.0615635 0.258336 +dpolE 6100.000000 70.000000 0.027504 0.259014 +dpolE 6200.000000 70.000000 0.0393055 0.203522 +dpolE 6300.000000 70.000000 0.0329546 0.216514 +dpolE 6400.000000 70.000000 0.0439464 0.192755 +dpolE 6500.000000 70.000000 0.014255 0.220998 +dpolE 6600.000000 70.000000 0.0395622 0.18256 +dpolE 6700.000000 70.000000 0.0248613 0.17461 +dpolE 6800.000000 70.000000 -0.00447615 0.163255 +dpolE 6900.000000 70.000000 0.0310334 0.163469 +dpolE 7000.000000 70.000000 0.0193176 0.169186 +dpolE 7100.000000 70.000000 0.026506 0.153331 +dpolE 7200.000000 70.000000 0.0169586 0.151927 +dpolE 7300.000000 70.000000 0.0337611 0.123072 +dpolE 7400.000000 70.000000 -0.00196607 0.131315 +dpolE 7500.000000 70.000000 0.0115 0.0780116 +dpolE 7600.000000 70.000000 -0.00315458 0.120611 +dpolE 7700.000000 70.000000 -0.0101998 0.0937968 +dpolE 7800.000000 70.000000 -0.00442489 0.113292 +dpolE 7900.000000 70.000000 0.0191694 0.0967493 +dpolE 8000.000000 70.000000 0.0416202 0.0901722 +dpolE 8100.000000 70.000000 -0.00239892 0.112941 +dpolE 8200.000000 70.000000 0.0693801 0.12256 +dpolE 8300.000000 70.000000 -0.00920042 0.112964 +dpolE 8400.000000 70.000000 -0.0137171 0.132379 +dpolE 8500.000000 70.000000 0.00828678 0.132549 +dpolE 8600.000000 70.000000 0.0669751 0.10742 +dpolE 8700.000000 70.000000 -0.0058812 0.0945132 +dpolE 8800.000000 70.000000 0.00881958 0.0884584 +dpolE 8900.000000 70.000000 -0.00162058 0.0798094 +dpolE 9000.000000 70.000000 -0.00305506 0.0726263 +dpolE 9100.000000 70.000000 -0.00679922 0.0619275 +dpolE 9200.000000 70.000000 -0.0165118 0.0728236 +dpolE 9300.000000 70.000000 -0.0152953 0.0752064 +dpolE 9400.000000 70.000000 -0.0176024 0.0732289 +dpolE 9500.000000 70.000000 -0.00919154 0.0725182 +dpolE 9600.000000 70.000000 -0.00158585 0.06852 +dpolE 9700.000000 70.000000 0.0139808 0.0630356 +dpolE 9800.000000 70.000000 -0.000159432 0.0684123 +dpolE 9900.000000 70.000000 0.0108108 0.0661236 +dpolE 10000.000000 70.000000 -0.0242606 0.0566428 +dpolE 3000.000000 75.000000 0.789816 5.14328 +dpolE 3100.000000 75.000000 0.528562 2.47576 +dpolE 3200.000000 75.000000 0.48593 1.99316 +dpolE 3300.000000 75.000000 0.510591 1.82982 +dpolE 3400.000000 75.000000 0.714773 1.77095 +dpolE 3500.000000 75.000000 0.711263 2.02984 +dpolE 3600.000000 75.000000 0.486928 1.54962 +dpolE 3700.000000 75.000000 0.409248 1.1872 +dpolE 3800.000000 75.000000 0.632926 1.01846 +dpolE 3900.000000 75.000000 0.395287 0.956139 +dpolE 4000.000000 75.000000 0.276802 0.877813 +dpolE 4100.000000 75.000000 0.292569 0.767489 +dpolE 4200.000000 75.000000 0.309923 0.650812 +dpolE 4300.000000 75.000000 0.271148 0.673134 +dpolE 4400.000000 75.000000 0.260307 0.61161 +dpolE 4500.000000 75.000000 0.159002 0.616192 +dpolE 4600.000000 75.000000 0.170665 0.467679 +dpolE 4700.000000 75.000000 0.150721 0.442486 +dpolE 4800.000000 75.000000 0.249501 0.4475 +dpolE 4900.000000 75.000000 0.148108 0.407655 +dpolE 5000.000000 75.000000 0.117464 0.367947 +dpolE 5100.000000 75.000000 0.0801695 0.304582 +dpolE 5200.000000 75.000000 0.0972168 0.282975 +dpolE 5300.000000 75.000000 0.10964 0.259827 +dpolE 5400.000000 75.000000 0.0722268 0.266656 +dpolE 5500.000000 75.000000 0.0365118 0.244872 +dpolE 5600.000000 75.000000 0.0607605 0.214305 +dpolE 5700.000000 75.000000 0.0541972 0.224571 +dpolE 5800.000000 75.000000 0.0350277 0.186091 +dpolE 5900.000000 75.000000 0.0384696 0.192856 +dpolE 6000.000000 75.000000 -0.0138215 0.17068 +dpolE 6100.000000 75.000000 -0.0187004 0.161188 +dpolE 6200.000000 75.000000 0.0106867 0.131643 +dpolE 6300.000000 75.000000 0.0363437 0.158616 +dpolE 6400.000000 75.000000 0.0364772 0.147846 +dpolE 6500.000000 75.000000 -0.00966218 0.141803 +dpolE 6600.000000 75.000000 0.0216687 0.125888 +dpolE 6700.000000 75.000000 -0.0150307 0.100383 +dpolE 6800.000000 75.000000 0.000518199 0.119635 +dpolE 6900.000000 75.000000 -0.00237482 0.112277 +dpolE 7000.000000 75.000000 -0.0208956 0.0945145 +dpolE 7100.000000 75.000000 -0.0405233 0.103252 +dpolE 7200.000000 75.000000 -0.00616365 0.0854381 +dpolE 7300.000000 75.000000 -0.0190286 0.0920096 +dpolE 7400.000000 75.000000 -0.0362139 0.0970514 +dpolE 7500.000000 75.000000 -0.016951 0.0778627 +dpolE 7600.000000 75.000000 -0.0433767 0.0952642 +dpolE 7700.000000 75.000000 -0.0263037 0.0738186 +dpolE 7800.000000 75.000000 -0.0231853 0.0717349 +dpolE 7900.000000 75.000000 -0.0348382 0.065769 +dpolE 8000.000000 75.000000 -0.0294563 0.0610636 +dpolE 8100.000000 75.000000 0.0140791 0.0828947 +dpolE 8200.000000 75.000000 0.038737 0.0687601 +dpolE 8300.000000 75.000000 -0.0380954 0.0695364 +dpolE 8400.000000 75.000000 -0.0130261 0.0673782 +dpolE 8500.000000 75.000000 -0.0433014 0.0868714 +dpolE 8600.000000 75.000000 -0.0125382 0.0945659 +dpolE 8700.000000 75.000000 -0.0393688 0.0816704 +dpolE 8800.000000 75.000000 -0.0476614 0.062456 +dpolE 8900.000000 75.000000 -0.0626994 0.0621736 +dpolE 9000.000000 75.000000 -0.079934 0.065981 +dpolE 9100.000000 75.000000 -0.0682644 0.0581972 +dpolE 9200.000000 75.000000 -0.065251 0.0548747 +dpolE 9300.000000 75.000000 -0.0549496 0.0570029 +dpolE 9400.000000 75.000000 -0.057195 0.063249 +dpolE 9500.000000 75.000000 -0.0728675 0.0618259 +dpolE 9600.000000 75.000000 -0.0476719 0.0554386 +dpolE 9700.000000 75.000000 -0.0390049 0.053338 +dpolE 9800.000000 75.000000 -0.0404725 0.0537981 +dpolE 9900.000000 75.000000 -0.0329047 0.0483149 +dpolE 10000.000000 75.000000 -0.0560879 0.0504004 \ No newline at end of file