X-Git-Url: https://git.ucc.asn.au/?a=blobdiff_plain;f=research%2Fellipsometry%2FWVASE32%2FEXAMPLES%2FPOLY-SI.MOD;fp=research%2Fellipsometry%2FWVASE32%2FEXAMPLES%2FPOLY-SI.MOD;h=bf2bc19a428e01d4fba425dfece9ede8022b7f88;hb=d6bdb39c05481f4deef15a535452a31a7019d09c;hp=0000000000000000000000000000000000000000;hpb=42977a93534c13419167a935c5ff9b1f1ab00019;p=matches%2Fhonours.git diff --git a/research/ellipsometry/WVASE32/EXAMPLES/POLY-SI.MOD b/research/ellipsometry/WVASE32/EXAMPLES/POLY-SI.MOD new file mode 100644 index 00000000..bf2bc19a --- /dev/null +++ b/research/ellipsometry/WVASE32/EXAMPLES/POLY-SI.MOD @@ -0,0 +1,10 @@ +Model for POLY-SI.DAT +6 +0 SI 20000000.000000 1.000000 +0 SIO2 85.560928 1.000000 +1 EMA 2630.521973 1.000000 + 3 0 0.333000 (SI) 0.000000 VOID 4.765779 ASI 2.360211 +0 SIO2 170.421310 1.000000 +0 SI3N4 105.402199 1.000000 +0 SIO2 133.251801 1.000000 +0 1 1 1.000000 \ No newline at end of file