VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol<0, Revs=20, AutoSlit=2000, WVASE=3.632, HardVer=6.256, Sat Jan 31 09:57:45 2009]
Original[2009.01.31.cw.1.dat]
Angstroms
3000.000000	75.000000	39.131317	71.667534	0.91754	2.39047
3100.000000	75.000000	37.155079	70.054161	0.478097	1.26583
3200.000000	75.000000	36.060028	71.184059	0.223639	0.584115
3300.000000	75.000000	35.536137	72.788246	0.134152	0.31155
3400.000000	75.000000	34.842823	74.087044	0.150293	0.38824
3500.000000	75.000000	34.398735	75.728508	0.109188	0.280469
3600.000000	75.000000	34.186775	78.8564	0.0834007	0.211392
3700.000000	75.000000	33.000507	84.213387	0.0677356	0.179583
3800.000000	75.000000	30.314823	87.308899	0.0564684	0.154772
3900.000000	75.000000	28.14814	87.745438	0.0677463	0.182206
4000.000000	75.000000	26.54504	87.400841	0.0636353	0.187746
4100.000000	75.000000	25.256643	87.1894	0.0543087	0.171498
4200.000000	75.000000	24.142403	86.729446	0.0499902	0.161326
4300.000000	75.000000	23.249439	86.373589	0.0466356	0.153365
4400.000000	75.000000	22.390928	86.02697	0.041344	0.138943
4500.000000	75.000000	21.633808	85.762863	0.0378586	0.129939
4600.000000	75.000000	20.936039	85.453026	0.03662	0.132703
4700.000000	75.000000	20.260559	85.119682	0.0475273	0.176009
4800.000000	75.000000	19.682875	84.786545	0.0377227	0.141952
4900.000000	75.000000	19.110777	84.532318	0.0342464	0.131137
5000.000000	75.000000	18.596821	84.321106	0.0424003	0.165435
5100.000000	75.000000	18.155684	84.017227	0.0553345	0.22727
5200.000000	75.000000	17.684135	83.770287	0.0461682	0.192373
5300.000000	75.000000	17.25148	83.422195	0.0408855	0.173458
5400.000000	75.000000	16.876232	83.150223	0.0497783	0.214042
5500.000000	75.000000	16.463503	82.961128	0.047469	0.207693
5600.000000	75.000000	16.124535	82.638359	0.0406374	0.179759
5700.000000	75.000000	15.77107	82.39257	0.0449869	0.208363
5800.000000	75.000000	15.449722	82.139702	0.042025	0.197747
5900.000000	75.000000	15.148183	81.941658	0.0467182	0.221625
6000.000000	75.000000	14.849362	81.665634	0.049542	0.237867
6100.000000	75.000000	14.566253	81.397766	0.0529467	0.25868
6200.000000	75.000000	14.299769	81.278015	0.061331	0.312417
6300.000000	75.000000	14.029967	80.903442	0.0553741	0.28566
6400.000000	75.000000	13.786235	80.670036	0.050462	0.263337
6500.000000	75.000000	13.546805	80.530144	0.0444988	0.234579
6600.000000	75.000000	13.317742	80.239212	0.0457465	0.245922
6700.000000	75.000000	13.094158	80.022957	0.057279	0.31056
6800.000000	75.000000	12.869748	79.728119	0.0591771	0.333902
6900.000000	75.000000	12.682401	79.567566	0.0450051	0.255938
7000.000000	75.000000	12.476959	79.319809	0.044875	0.258199
7100.000000	75.000000	12.306546	79.021591	0.0560189	0.326817
7200.000000	75.000000	12.104671	78.944962	0.0471372	0.277229
7300.000000	75.000000	11.916258	78.765793	0.0427299	0.254636
7400.000000	75.000000	11.725657	78.382706	0.0591085	0.365402
7500.000000	75.000000	11.569212	78.113457	0.0549	0.341849
7600.000000	75.000000	11.389219	78.261322	0.0432086	0.266101
7700.000000	75.000000	11.260108	77.693687	0.0411889	0.261074
7800.000000	75.000000	11.107617	77.588272	0.0766057	0.493411
7900.000000	75.000000	10.94045	77.260124	0.0668408	0.43217
8000.000000	75.000000	10.811079	77.190781	0.0565324	0.369474
8100.000000	75.000000	10.670317	76.758049	0.0558858	0.377538
8200.000000	75.000000	10.538293	76.783272	0.0537393	0.363357
8300.000000	75.000000	10.399337	76.56234	0.0649854	0.448409
8400.000000	75.000000	10.238442	76.274658	0.0512977	0.359702
8500.000000	75.000000	10.175324	76.196129	0.0656164	0.458256
8600.000000	75.000000	10.02127	75.903366	0.0593005	0.418035
8700.000000	75.000000	9.9037914	75.904778	0.0454685	0.322002
8800.000000	75.000000	9.7805958	75.50016	0.0563961	0.411376
8900.000000	75.000000	9.6857052	75.388374	0.0505961	0.372083
9000.000000	75.000000	9.5896425	75.17305	0.0582954	0.429663
9100.000000	75.000000	9.4805803	74.894432	0.0563713	0.419284
9200.000000	75.000000	9.3690281	74.747406	0.0516859	0.38774
9300.000000	75.000000	9.2648001	74.497765	0.0539237	0.410433
9400.000000	75.000000	9.1594172	74.319603	0.0502842	0.388858
9500.000000	75.000000	9.0593758	74.077965	0.0507528	0.395172
9600.000000	75.000000	8.9741411	73.889473	0.0543435	0.427496
9700.000000	75.000000	8.8879099	73.715324	0.0509376	0.402602
9800.000000	75.000000	8.7907085	73.434471	0.0498945	0.39797
9900.000000	75.000000	8.7049189	73.290413	0.0521751	0.413151
10000.000000	75.000000	8.6314888	73.088974	0.0485114	0.390961
dpolE	3000.000000	75.000000	5.3189	11.0156
dpolE	3100.000000	75.000000	1.85907	5.88016
dpolE	3200.000000	75.000000	1.94184	2.81917
dpolE	3300.000000	75.000000	-1.20536	2.09638
dpolE	3400.000000	75.000000	0.39192	1.75477
dpolE	3500.000000	75.000000	0.551011	1.30487
dpolE	3600.000000	75.000000	0.186296	1.03085
dpolE	3700.000000	75.000000	0.440067	0.768769
dpolE	3800.000000	75.000000	0.347662	0.626045
dpolE	3900.000000	75.000000	0.0294842	0.870068
dpolE	4000.000000	75.000000	0.458343	0.674154
dpolE	4100.000000	75.000000	0.401374	0.515642
dpolE	4200.000000	75.000000	0.282974	0.47073
dpolE	4300.000000	75.000000	0.131714	0.436274
dpolE	4400.000000	75.000000	0.218167	0.380646
dpolE	4500.000000	75.000000	0.206639	0.347349
dpolE	4600.000000	75.000000	0.195266	0.304612
dpolE	4700.000000	75.000000	0.181995	0.391401
dpolE	4800.000000	75.000000	0.220423	0.30832
dpolE	4900.000000	75.000000	0.105165	0.279457
dpolE	5000.000000	75.000000	0.0809016	0.34134
dpolE	5100.000000	75.000000	0.148519	0.407354
dpolE	5200.000000	75.000000	0.1545	0.337282
dpolE	5300.000000	75.000000	0.187356	0.29511
dpolE	5400.000000	75.000000	0.238718	0.361274
dpolE	5500.000000	75.000000	0.202817	0.339926
dpolE	5600.000000	75.000000	0.216388	0.290663
dpolE	5700.000000	75.000000	0.0444433	0.295265
dpolE	5800.000000	75.000000	0.119877	0.27393
dpolE	5900.000000	75.000000	0.103536	0.303901
dpolE	6000.000000	75.000000	0.0549857	0.320593
dpolE	6100.000000	75.000000	0.0876429	0.341797
dpolE	6200.000000	75.000000	0.095376	0.363511
dpolE	6300.000000	75.000000	0.116849	0.325998
dpolE	6400.000000	75.000000	0.0382147	0.295531
dpolE	6500.000000	75.000000	0.0665752	0.262753
dpolE	6600.000000	75.000000	0.196193	0.266455
dpolE	6700.000000	75.000000	0.0771068	0.333393
dpolE	6800.000000	75.000000	0.115295	0.315927
dpolE	6900.000000	75.000000	0.0970067	0.240217
dpolE	7000.000000	75.000000	0.119566	0.240717
dpolE	7100.000000	75.000000	0.163691	0.298248
dpolE	7200.000000	75.000000	0.0478957	0.249786
dpolE	7300.000000	75.000000	0.040771	0.224847
dpolE	7400.000000	75.000000	0.0814809	0.288327
dpolE	7500.000000	75.000000	0.0964384	0.26698
dpolE	7600.000000	75.000000	-0.0326485	0.225727
dpolE	7700.000000	75.000000	-0.0126026	0.201327
dpolE	7800.000000	75.000000	0.0892742	0.370113
dpolE	7900.000000	75.000000	0.048165	0.323547
dpolE	8000.000000	75.000000	-0.0636638	0.274066
dpolE	8100.000000	75.000000	0.140156	0.250664
dpolE	8200.000000	75.000000	0.00915174	0.242169
dpolE	8300.000000	75.000000	0.0761481	0.290578
dpolE	8400.000000	75.000000	0.0637905	0.227514
dpolE	8500.000000	75.000000	-0.0111647	0.295374
dpolE	8600.000000	75.000000	-0.0327796	0.264948
dpolE	8700.000000	75.000000	0.0615683	0.222866
dpolE	8800.000000	75.000000	0.0937036	0.235547
dpolE	8900.000000	75.000000	0.076108	0.211235
dpolE	9000.000000	75.000000	0.0207567	0.24323
dpolE	9100.000000	75.000000	0.0590093	0.234988
dpolE	9200.000000	75.000000	0.0138578	0.214994
dpolE	9300.000000	75.000000	0.0472416	0.22174
dpolE	9400.000000	75.000000	0.0398628	0.196412
dpolE	9500.000000	75.000000	0.0533177	0.197732
dpolE	9600.000000	75.000000	0.0452659	0.208073
dpolE	9700.000000	75.000000	0.0477791	0.194766
dpolE	9800.000000	75.000000	0.0492171	0.189893
dpolE	9900.000000	75.000000	0.0473646	0.201107
dpolE	10000.000000	75.000000	0.0539311	0.183914