Si callibratrion wafer test
VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, MaxRevs=10, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jun 29 18:40:16 2011]
Original[290611_nick_si.dat]
nm
290.000000	65.000000	32.046005	152.68605	2.04569	9.8828
300.000000	65.000000	31.502947	150.89607	0.907254	4.18573
310.000000	65.000000	31.317411	152.24844	0.503207	2.43307
320.000000	65.000000	30.373102	154.08992	0.307225	1.61078
330.000000	65.000000	30.405107	152.37175	0.207693	1.02586
340.000000	65.000000	30.116146	154.02287	0.140081	0.736708
350.000000	65.000000	30.072403	154.53358	0.0974983	0.522787
360.000000	65.000000	30.708654	157.74071	0.0703862	0.423106
370.000000	65.000000	30.650436	163.66916	0.051632	0.418552
380.000000	65.000000	28.921856	168.10014	0.0372266	0.426282
390.000000	65.000000	27.132704	171.16084	0.0276004	0.442275
400.000000	65.000000	25.791698	170.80878	0.021671	0.346112
410.000000	65.000000	24.726686	172.2009	0.018641	0.361313
420.000000	65.000000	23.888906	171.54384	0.0173083	0.317683
430.000000	65.000000	23.250076	172.62019	0.0158954	0.340958
440.000000	65.000000	22.585257	173.14079	0.0147187	0.347287
450.000000	65.000000	22.08514	172.81633	0.0136907	0.314014
460.000000	65.000000	21.611849	172.75539	0.0132176	0.305876
470.000000	65.000000	21.19837	172.82118	0.0125235	0.297044
480.000000	65.000000	20.828629	173.07587	0.0126881	0.316449
490.000000	65.000000	20.464102	173.28914	0.0124349	0.324611
500.000000	65.000000	20.17169	173.09158	0.0122145	0.313494
510.000000	65.000000	19.887163	173.54128	0.0120088	0.333469
520.000000	65.000000	19.611609	174.48628	0.0118211	0.388754
530.000000	65.000000	19.376984	173.4968	0.0117096	0.330067
540.000000	65.000000	19.157885	174.21858	0.0115829	0.370597
550.000000	65.000000	18.937592	174.83971	0.0114604	0.414673
560.000000	65.000000	18.734467	174.36249	0.011363	0.379947
570.000000	65.000000	18.56299	173.91383	0.0112847	0.352384
580.000000	65.000000	18.380749	174.57416	0.0112405	0.396879
590.000000	65.000000	18.230419	174.13933	0.0111778	0.368091
600.000000	65.000000	18.103258	174.44928	0.0112481	0.393368
610.000000	65.000000	17.955786	174.38091	0.0111541	0.388082
620.000000	65.000000	17.839153	174.80452	0.0110798	0.419162
630.000000	65.000000	17.711496	174.8777	0.0110932	0.428306
640.000000	65.000000	17.586954	175.13216	0.011178	0.456851
650.000000	65.000000	17.488834	174.62877	0.011174	0.416059
660.000000	65.000000	17.37265	174.23837	0.0114413	0.399583
670.000000	65.000000	17.27944	174.26527	0.0113571	0.400378
680.000000	65.000000	17.201418	175.37041	0.0113865	0.498815
690.000000	65.000000	17.112494	175.491	0.011185	0.505341
700.000000	65.000000	17.036961	175.45088	0.0116926	0.525671
710.000000	65.000000	16.921902	174.49283	0.0117843	0.440546
720.000000	65.000000	16.858557	174.40361	0.0117662	0.434318
730.000000	65.000000	16.814362	174.75967	0.0119912	0.473672
740.000000	65.000000	16.739025	175.29597	0.0122776	0.542217
750.000000	65.000000	16.669476	175.91188	0.012592	0.641965
760.000000	65.000000	16.600489	175.51724	0.0131505	0.613831
770.000000	65.000000	16.538427	175.54579	0.0135796	0.64003
780.000000	65.000000	16.498148	175.66962	0.0164107	0.797237
790.000000	65.000000	16.430227	174.17456	0.0148162	0.537578
800.000000	65.000000	16.38726	175.00211	0.0166697	0.70621
810.000000	65.000000	16.357124	176.01639	0.0194113	1.03269
820.000000	65.000000	16.281778	175.31871	0.0140314	0.638154
830.000000	65.000000	16.245241	176.40028	0.0102704	0.608196
840.000000	65.000000	16.186794	174.67641	0.0150464	0.605172
850.000000	65.000000	16.137146	176.9828	0.0187675	1.33324
860.000000	65.000000	16.107246	175.95383	0.0159802	0.848601
870.000000	65.000000	16.067553	175.44437	0.011642	0.550501
880.000000	65.000000	16.018183	175.60246	0.0095069	0.466933
890.000000	65.000000	16.012045	176.64398	0.00954587	0.614093
900.000000	65.000000	15.95464	175.53636	0.00945178	0.459
910.000000	65.000000	15.937002	176.81216	0.00947483	0.644292
920.000000	65.000000	15.893024	175.54568	0.00935575	0.456863
930.000000	65.000000	15.851421	176.59624	0.00951479	0.608997
940.000000	65.000000	15.834909	175.91754	0.00935916	0.500164
950.000000	65.000000	15.784935	176.15981	0.00932444	0.531156
960.000000	65.000000	15.780293	176.52916	0.009432	0.594452
970.000000	65.000000	15.729781	175.65614	0.0093713	0.473584
980.000000	65.000000	15.699099	177.30521	0.00925008	0.753864
990.000000	65.000000	15.691611	176.13866	0.00926787	0.527851
1000.000000	65.000000	15.655298	175.95235	0.00930233	0.506548
290.000000	70.000000	35.775742	152.66623	2.36571	10.8176
300.000000	70.000000	28.649239	141.52969	0.981054	3.7471
310.000000	70.000000	28.145662	140.38881	0.5352	2.01704
320.000000	70.000000	26.954367	139.28384	0.32769	1.24251
330.000000	70.000000	26.189934	142.15161	0.222078	0.913602
340.000000	70.000000	26.086143	142.83525	0.151341	0.634096
350.000000	70.000000	26.246639	145.43422	0.105971	0.470772
360.000000	70.000000	26.968899	149.39247	0.077392	0.376004
370.000000	70.000000	26.616587	157.5809	0.0568428	0.372024
380.000000	70.000000	24.126625	163.95076	0.0401539	0.388977
390.000000	70.000000	21.922892	166.39073	0.0299374	0.367086
400.000000	70.000000	20.280231	167.28995	0.0229883	0.32118
410.000000	70.000000	19.017445	167.8614	0.0192098	0.296382
420.000000	70.000000	18.005327	167.45616	0.0174697	0.273489
430.000000	70.000000	17.105976	168.72224	0.015629	0.284127
440.000000	70.000000	16.406286	168.65057	0.0135064	0.253144
450.000000	70.000000	15.747756	169.30304	0.0121163	0.249766
460.000000	70.000000	15.187457	168.842	0.0111909	0.228596
470.000000	70.000000	14.686779	169.53761	0.0100494	0.225533
480.000000	70.000000	14.22284	169.39316	0.0105486	0.240489
490.000000	70.000000	13.837603	169.6178	0.0100793	0.240682
500.000000	70.000000	13.468875	169.12917	0.00994999	0.232802
510.000000	70.000000	13.126602	169.26181	0.00959558	0.232728
520.000000	70.000000	12.831952	169.46402	0.00929264	0.234546
530.000000	70.000000	12.509687	169.52837	0.00922585	0.239927
540.000000	70.000000	12.267384	169.95329	0.00905608	0.249891
550.000000	70.000000	12.046311	169.81276	0.00890439	0.246519
560.000000	70.000000	11.804544	170.21407	0.00878232	0.257868
570.000000	70.000000	11.592168	170.04483	0.00892009	0.261983
580.000000	70.000000	11.387053	170.31686	0.00884147	0.271433
590.000000	70.000000	11.212399	170.60031	0.00879839	0.282274
600.000000	70.000000	11.054549	170.83821	0.00910233	0.303589
610.000000	70.000000	10.881466	170.30991	0.00895775	0.28689
620.000000	70.000000	10.728773	170.68658	0.00884092	0.298468
630.000000	70.000000	10.57031	170.14427	0.0093977	0.304297
640.000000	70.000000	10.451164	170.79259	0.00980923	0.343456
650.000000	70.000000	10.325837	170.74872	0.00987878	0.348254
660.000000	70.000000	10.224872	170.72949	0.0105	0.37288
670.000000	70.000000	10.105412	171.07541	0.0103662	0.386587
680.000000	70.000000	10.005626	171.34727	0.010511	0.408056
690.000000	70.000000	9.8947544	171.79863	0.0100459	0.415706
700.000000	70.000000	9.8144894	171.4614	0.011494	0.460565
710.000000	70.000000	9.7188091	171.48418	0.0118571	0.480872
720.000000	70.000000	9.6239252	172.39667	0.0118676	0.543723
730.000000	70.000000	9.5179043	171.17155	0.0124274	0.496137
740.000000	70.000000	9.4643059	171.88652	0.0132355	0.577723
750.000000	70.000000	9.3968201	171.23491	0.0140665	0.572598
760.000000	70.000000	9.331955	170.75508	0.0153802	0.59781
770.000000	70.000000	9.1915531	172.23903	0.016315	0.765495
780.000000	70.000000	9.1737461	172.17554	0.0221836	1.03438
790.000000	70.000000	9.0857019	172.92474	0.0190536	0.991096
800.000000	70.000000	9.0564785	171.79248	0.0215873	0.971866
810.000000	70.000000	8.9633369	170.17284	0.0338826	1.28899
820.000000	70.000000	8.9240627	171.84749	0.00826762	0.380139
830.000000	70.000000	8.8748751	171.81473	0.00740846	0.341098
840.000000	70.000000	8.8344536	172.2504	0.0113031	0.551892
850.000000	70.000000	8.7934914	170.69238	0.0233391	0.954413
860.000000	70.000000	8.7104883	172.08075	0.0188245	0.911942
870.000000	70.000000	8.6643248	172.46146	0.0109729	0.561119
880.000000	70.000000	8.6300154	172.15919	0.00565909	0.279371
890.000000	70.000000	8.5908012	172.89787	0.00578976	0.316755
900.000000	70.000000	8.5617676	172.4642	0.00555843	0.287637
910.000000	70.000000	8.5164375	172.27467	0.00564334	0.286377
920.000000	70.000000	8.4768829	172.84923	0.00529383	0.291404
930.000000	70.000000	8.4418325	172.91759	0.00588737	0.328502
940.000000	70.000000	8.4049435	172.51062	0.00537377	0.284846
950.000000	70.000000	8.3683949	172.79749	0.00532248	0.294539
960.000000	70.000000	8.3400421	173.07684	0.00567676	0.327829
970.000000	70.000000	8.3004026	172.47905	0.00554218	0.296114
980.000000	70.000000	8.2682276	172.95331	0.00516482	0.295529
990.000000	70.000000	8.2302523	172.82959	0.00521676	0.294689
1000.000000	70.000000	8.2144413	172.62538	0.00539624	0.296985
290.000000	75.000000	33.940731	115.2794	2.19254	5.23358
300.000000	75.000000	27.071531	123.97619	1.08442	3.22663
310.000000	75.000000	24.565632	121.03437	0.555422	1.7074
320.000000	75.000000	22.45895	120.26434	0.349622	1.1422
330.000000	75.000000	22.278561	123.99647	0.253555	0.871694
340.000000	75.000000	21.758316	125.33086	0.171377	0.609857
350.000000	75.000000	21.419605	127.76673	0.119054	0.442574
360.000000	75.000000	21.961887	134.50545	0.0905906	0.36611
370.000000	75.000000	20.779236	145.09833	0.0665641	0.350623
380.000000	75.000000	17.437267	153.76134	0.046953	0.369666
390.000000	75.000000	14.617636	155.88144	0.0368917	0.368585
400.000000	75.000000	12.653976	155.97958	0.0289791	0.332384
410.000000	75.000000	11.107265	156.01967	0.0244269	0.317398
420.000000	75.000000	9.8861437	155.80338	0.0229977	0.331266
430.000000	75.000000	8.8887472	154.76689	0.0206705	0.317138
440.000000	75.000000	8.0873604	154.28624	0.016488	0.271617
450.000000	75.000000	7.3513665	154.53026	0.0129219	0.234722
460.000000	75.000000	6.7340083	152.1463	0.0112227	0.20294
470.000000	75.000000	6.1851687	151.33063	0.00847591	0.160989
480.000000	75.000000	5.6714411	150.33647	0.0100753	0.200054
490.000000	75.000000	5.2585521	148.84254	0.00942103	0.190555
500.000000	75.000000	4.8701935	147.37477	0.00900855	0.186083
510.000000	75.000000	4.5244741	146.27058	0.00865841	0.184261
520.000000	75.000000	4.1824169	144.8172	0.0083592	0.182157
530.000000	75.000000	3.9031804	142.75102	0.00826914	0.179865
540.000000	75.000000	3.6157637	141.96919	0.00820454	0.186077
550.000000	75.000000	3.3708749	139.26184	0.00829003	0.18463
560.000000	75.000000	3.1507051	138.19539	0.00840704	0.192187
570.000000	75.000000	2.9441755	135.98119	0.00862196	0.196002
580.000000	75.000000	2.7838781	133.35469	0.00894826	0.198154
590.000000	75.000000	2.6057038	131.53152	0.00929794	0.206626
600.000000	75.000000	2.4663565	128.65346	0.0104783	0.224994
610.000000	75.000000	2.3034024	127.21901	0.0106653	0.232283
620.000000	75.000000	2.2344828	123.13329	0.0112851	0.225129
630.000000	75.000000	2.0369868	121.83449	0.0122661	0.252749
640.000000	75.000000	1.9043649	119.46942	0.0139312	0.281987
650.000000	75.000000	1.883921	115.38365	0.0153914	0.279168
660.000000	75.000000	1.7991301	113.05562	0.017946	0.313472
670.000000	75.000000	1.7259065	109.3699	0.0195592	0.314238
680.000000	75.000000	1.6801722	104.64394	0.0226584	0.321709
690.000000	75.000000	1.5609517	103.40665	0.023018	0.325202
700.000000	75.000000	1.4985896	99.780617	0.0308008	0.397919
710.000000	75.000000	1.5476795	95.807716	0.0339449	0.397717
720.000000	75.000000	1.4251146	93.733223	0.0377296	0.431535
730.000000	75.000000	1.3793603	89.832542	0.0423255	0.471785
740.000000	75.000000	1.4368627	87.008522	0.0431064	0.488076
750.000000	75.000000	1.3304161	83.396347	0.046392	0.567086
760.000000	75.000000	1.3703707	79.824097	0.0457868	0.615416
770.000000	75.000000	1.3335459	76.550316	0.0451705	0.685318
780.000000	75.000000	1.4014449	73.2117	0.0549391	0.913304
790.000000	75.000000	1.4415561	71.006302	0.0436208	0.769453
800.000000	75.000000	1.4376944	68.994072	0.0468424	0.886591
810.000000	75.000000	1.3678758	64.994888	0.0638992	1.43781
820.000000	75.000000	1.3750401	62.083847	0.0124954	0.309141
830.000000	75.000000	1.3895907	61.013195	0.0104256	0.265069
840.000000	75.000000	1.3743631	57.829262	0.0167352	0.477033
850.000000	75.000000	1.2817296	53.213673	0.03351	1.1814
860.000000	75.000000	1.3905541	53.282234	0.0266699	0.87218
870.000000	75.000000	1.4985989	53.755367	0.014779	0.44578
880.000000	75.000000	1.4761547	50.95145	0.00543646	0.181609
890.000000	75.000000	1.4758823	49.180355	0.00557945	0.1972
900.000000	75.000000	1.4852053	47.282475	0.00501237	0.187121
910.000000	75.000000	1.5000799	45.898571	0.00509334	0.196938
920.000000	75.000000	1.51442	44.139229	0.00437319	0.177372
930.000000	75.000000	1.5355268	42.601734	0.00530889	0.223442
940.000000	75.000000	1.5536515	41.308815	0.00440108	0.191136
950.000000	75.000000	1.5685475	39.960682	0.0042699	0.192172
960.000000	75.000000	1.5935202	39.278904	0.0048228	0.218776
970.000000	75.000000	1.6195701	38.677101	0.00460793	0.210061
980.000000	75.000000	1.6278176	36.862617	0.00393591	0.189946
990.000000	75.000000	1.6571352	36.532291	0.0040342	0.193614
1000.000000	75.000000	1.6740266	35.915588	0.004298	0.208717