\contentsline {chapter}{\numberline {1}Introduction}{1}{chapter.1}
\contentsline {chapter}{\numberline {2}Overview of Theory}{3}{chapter.2}
\contentsline {chapter}{\numberline {3}Experimental Techniques}{4}{chapter.3}
\contentsline {section}{\numberline {3.1}Total Current Spectroscopy}{4}{section.3.1}
\contentsline {subsubsection}{Theory of Signal Formation in Total Current Spectroscopy Experiments}{5}{section*.3}
\contentsline {section}{\numberline {3.2}Ellipsometry}{7}{section.3.2}
\contentsline {subsection}{\numberline {3.2.1}Variable Angle Spectroscopic Ellipsometry}{8}{subsection.3.2.1}
\contentsline {section}{\numberline {3.3}Transmission Spectroscopy}{8}{section.3.3}
\contentsline {section}{\numberline {3.4}Scanning Electron Microscopy}{8}{section.3.4}
\contentsline {chapter}{\numberline {4}Results and Discussion}{9}{chapter.4}
\contentsline {section}{\numberline {4.1}Scanning Electron Microscopy}{9}{section.4.1}
\contentsline {section}{\numberline {4.2}Total Current Spectropy}{9}{section.4.2}
\contentsline {section}{\numberline {4.3}Variable Angle Spectroscopy Ellipsometry}{9}{section.4.3}
\contentsline {section}{\numberline {4.4}Optical Transmission Spectroscopy}{9}{section.4.4}
\contentsline {chapter}{\numberline {5}Conclusion}{10}{chapter.5}
\contentsline {section}{\numberline {.1}A two dimensional electron gun simulation}{13}{section..1}
\contentsline {part}{References}{11}{chapter.5}