1 VASE data from bare silicon wafer
\r
3 250.000000 70.000000 34.9325 110.932 0.0269043 0.0613638
\r
4 260.000000 70.000000 35.6808 115.667 0.02716 0.0636253
\r
5 270.000000 70.000000 35.982 122.68 0.0272417 0.0680813
\r
6 280.000000 70.000000 35.1234 130.694 0.0269667 0.07561
\r
7 290.000000 70.000000 32.6998 138.141 0.0260491 0.085882
\r
8 300.000000 70.000000 29.6424 141.426 0.0246125 0.0916495
\r
9 310.000000 70.000000 27.7934 141.606 0.0236595 0.0926149
\r
10 320.000000 70.000000 26.9357 142.729 0.0231167 0.0942828
\r
11 330.000000 70.000000 26.2925 143.701 0.0227705 0.097055
\r
12 340.000000 70.000000 25.9896 145.455 0.022561 0.100904
\r
13 350.000000 70.000000 25.9808 147.028 0.0225837 0.105724
\r
14 360.000000 70.000000 26.7008 151.257 0.023014 0.119627
\r
15 370.000000 70.000000 26.2502 159.253 0.0227225 0.161258
\r
16 380.000000 70.000000 24.0607 165.788 0.0213217 0.231198
\r
17 390.000000 70.000000 21.6609 168.549 0.0196357 0.27946
\r
18 400.000000 70.000000 20.0353 169.104 0.0184222 0.292479
\r
19 410.000000 70.000000 18.8343 168.712 0.0175255 0.303806
\r
20 420.000000 70.000000 17.8933 169.222 0.0167679 0.31695
\r
21 430.000000 70.000000 17.1034 170.173 0.0160987 0.330246
\r
22 440.000000 70.000000 16.3708 170.283 0.0154976 0.342602
\r
23 450.000000 70.000000 15.7387 170.768 0.0149554 0.353454
\r
24 460.000000 70.000000 15.1392 170.314 0.0144649 0.362611
\r
25 470.000000 70.000000 14.645 170.918 0.0140213 0.370115
\r
26 480.000000 70.000000 14.205 171.576 0.0136193 0.376146
\r
27 490.000000 70.000000 13.7808 171.369 0.0132549 0.381072
\r
28 500.000000 70.000000 13.4238 171.902 0.0129243 0.385254
\r
29 510.000000 70.000000 13.0915 172.127 0.0126232 0.389001
\r
30 520.000000 70.000000 12.747 170.98 0.0123483 0.392555
\r
31 530.000000 70.000000 12.4949 171.938 0.0120955 0.39612
\r
32 540.000000 70.000000 12.2332 171.84 0.0118626 0.399833
\r
33 550.000000 70.000000 12.0047 172.21 0.0116467 0.403722
\r
34 560.000000 70.000000 11.7733 171.844 0.0114467 0.40783
\r
35 570.000000 70.000000 11.5872 172.572 0.0112597 0.41213
\r
36 580.000000 70.000000 11.3936 172.551 0.0110844 0.416601
\r
37 590.000000 70.000000 11.199 171.99 0.0109206 0.421252
\r
38 600.000000 70.000000 11.0515 172.838 0.0107662 0.426027
\r
39 610.000000 70.000000 10.8866 172.579 0.0106215 0.430963
\r
40 620.000000 70.000000 10.7386 172.658 0.0104842 0.435992
\r
41 630.000000 70.000000 10.5918 172.432 0.0103545 0.441139
\r
42 640.000000 70.000000 10.4517 172.134 0.0102319 0.446391
\r
43 650.000000 70.000000 10.3287 172.254 0.010116 0.451732
\r
44 660.000000 70.000000 10.2209 172.792 0.0100056 0.457132
\r
45 670.000000 70.000000 10.1148 173.113 0.0099014 0.46263
\r
46 680.000000 70.000000 9.98683 172.17 0.00980152 0.468159
\r
47 690.000000 70.000000 9.88853 172.358 0.00970771 0.473804
\r
48 700.000000 70.000000 9.79002 172.296 0.00962027 0.479602
\r
49 710.000000 70.000000 9.72432 173.644 0.00953898 0.485542
\r
50 720.000000 70.000000 9.64177 173.986 0.00946233 0.491559
\r
51 730.000000 70.000000 9.56313 174.316 0.00939083 0.497703
\r
52 740.000000 70.000000 9.47174 173.771 0.00932366 0.503944
\r
53 750.000000 70.000000 9.40686 174.46 0.00926071 0.510281
\r
54 760.000000 70.000000 9.31143 173.292 0.00920122 0.516689
\r
55 770.000000 70.000000 9.25042 173.834 0.00914571 0.523192
\r
56 780.000000 70.000000 9.18562 174.043 0.00909283 0.529737
\r
57 790.000000 70.000000 9.13287 174.794 0.00904312 0.536352
\r
58 800.000000 70.000000 9.07057 174.809 0.00899649 0.543034
\r
59 810.000000 70.000000 8.99397 173.805 0.00895227 0.549755
\r
60 820.000000 70.000000 8.94277 174.208 0.00891039 0.556517
\r
61 830.000000 70.000000 8.89694 174.867 0.00887021 0.563293
\r
62 840.000000 70.000000 8.82918 173.93 0.00883284 0.570131
\r
63 850.000000 70.000000 8.77461 173.724 0.00879706 0.576979
\r
64 860.000000 70.000000 8.74571 175.065 0.0087634 0.58385
\r
65 870.000000 70.000000 8.69136 174.673 0.00873071 0.590699
\r
66 880.000000 70.000000 8.65483 175.328 0.00870005 0.59758
\r
67 890.000000 70.000000 8.60144 174.661 0.00867136 0.604495
\r
68 900.000000 70.000000 8.55228 174.216 0.00864355 0.611385
\r
69 910.000000 70.000000 8.51459 174.465 0.0086171 0.618274
\r
70 920.000000 70.000000 8.46523 173.815 0.00859148 0.625143
\r
71 930.000000 70.000000 8.42577 173.698 0.00856769 0.632039
\r
72 940.000000 70.000000 8.40092 174.61 0.00854468 0.63891
\r
73 950.000000 70.000000 8.37282 175.239 0.00852242 0.64576
\r
74 960.000000 70.000000 8.34881 176.073 0.0085014 0.652609
\r
75 970.000000 70.000000 8.30634 175.43 0.00848109 0.659433
\r
76 980.000000 70.000000 8.28315 176.16 0.00846198 0.666254
\r
77 990.000000 70.000000 8.24161 175.378 0.00844355 0.673049
\r
78 1000.000000 70.000000 8.21394 175.564 0.00842626 0.67984
\r
79 250.000000 75.000000 34.3253 91.0315 0.0266868 0.0573056
\r
80 260.000000 75.000000 34.8246 96.3378 0.0268752 0.0576589
\r
81 270.000000 75.000000 34.6996 104.132 0.026833 0.0591116
\r
82 280.000000 75.000000 33.2323 113.304 0.0262846 0.0624411
\r
83 290.000000 75.000000 29.8923 121.764 0.0247532 0.0673788
\r
84 300.000000 75.000000 25.9783 124.55 0.0225345 0.0694519
\r
85 310.000000 75.000000 23.7826 123.979 0.0211525 0.0691298
\r
86 320.000000 75.000000 22.6455 124.543 0.0203401 0.0694792
\r
87 330.000000 75.000000 21.7887 125.587 0.0197691 0.0705461
\r
88 340.000000 75.000000 21.2493 127.543 0.0193605 0.0722948
\r
89 350.000000 75.000000 21.1475 130.139 0.0192621 0.0748518
\r
90 360.000000 75.000000 21.5551 136.28 0.0196012 0.0831053
\r
91 370.000000 75.000000 20.4018 147.612 0.0187059 0.106645
\r
92 380.000000 75.000000 17.2752 156.342 0.016246 0.142711
\r
93 390.000000 75.000000 14.1885 158.857 0.0136321 0.160456
\r
94 400.000000 75.000000 12.2646 159.035 0.0118781 0.15852
\r
95 410.000000 75.000000 10.8962 158.817 0.0106175 0.156563
\r
96 420.000000 75.000000 9.75393 158.29 0.00957702 0.155514
\r
97 430.000000 75.000000 8.80175 158.169 0.00881071 0.156451
\r
98 440.000000 75.000000 7.95316 157.587 0.00829132 0.159498
\r
99 450.000000 75.000000 7.24356 157.585 0.00795805 0.164182
\r
100 460.000000 75.000000 6.5949 156.926 0.00776999 0.170235
\r
101 470.000000 75.000000 6.01679 155.994 0.00769854 0.177481
\r
102 480.000000 75.000000 5.51964 155.284 0.00772261 0.185795
\r
103 490.000000 75.000000 5.06889 154.205 0.00782664 0.195137
\r
104 500.000000 75.000000 4.65318 152.644 0.00799883 0.205479
\r
105 510.000000 75.000000 4.28234 151.036 0.00823085 0.216818
\r
106 520.000000 75.000000 3.96471 149.777 0.00851658 0.229137
\r
107 530.000000 75.000000 3.68074 148.526 0.0088532 0.242475
\r
108 540.000000 75.000000 3.42846 147.335 0.00923789 0.256803
\r
109 550.000000 75.000000 3.1819 145.581 0.00967079 0.272069
\r
110 560.000000 75.000000 2.96272 143.915 0.0101494 0.288125
\r
111 570.000000 75.000000 2.74054 141.549 0.0106767 0.304855
\r
112 580.000000 75.000000 2.56609 139.967 0.0112532 0.322006
\r
113 590.000000 75.000000 2.3712 137.239 0.0118756 0.339203
\r
114 600.000000 75.000000 2.22733 135.441 0.0125473 0.356041
\r
115 610.000000 75.000000 2.06824 132.7 0.0132627 0.371962
\r
116 620.000000 75.000000 1.96048 130.9 0.0140265 0.386293
\r
117 630.000000 75.000000 1.83421 128.095 0.0148315 0.398194
\r
118 640.000000 75.000000 1.70983 124.888 0.0156715 0.406709
\r
119 650.000000 75.000000 1.64871 122.843 0.0165384 0.410793
\r
120 660.000000 75.000000 1.54297 119.217 0.0174267 0.409258
\r
121 670.000000 75.000000 1.47082 115.989 0.0183161 0.401381
\r
122 680.000000 75.000000 1.41052 112.576 0.0192007 0.386085
\r
123 690.000000 75.000000 1.33794 108.571 0.020056 0.363671
\r
124 700.000000 75.000000 1.24931 104.064 0.0208647 0.335192
\r
125 710.000000 75.000000 1.21985 100.312 0.0216056 0.303846
\r
126 720.000000 75.000000 1.16607 95.9865 0.0222646 0.27503
\r
127 730.000000 75.000000 1.17176 92.2594 0.022823 0.258682
\r
128 740.000000 75.000000 1.14637 88.0829 0.0232711 0.264721
\r
129 750.000000 75.000000 1.11877 83.8704 0.023603 0.296891
\r
130 760.000000 75.000000 1.07209 79.3232 0.0238176 0.350402
\r
131 770.000000 75.000000 1.1212 76.3131 0.0239227 0.416202
\r
132 780.000000 75.000000 1.04482 71.0639 0.0239219 0.488302
\r
133 790.000000 75.000000 1.09248 68.3421 0.0238317 0.561036
\r
134 800.000000 75.000000 1.09847 64.8902 0.0236682 0.631146
\r
135 810.000000 75.000000 1.11446 61.8079 0.023441 0.697282
\r
136 820.000000 75.000000 1.11248 58.269 0.0231646 0.758272
\r
137 830.000000 75.000000 1.12235 55.1265 0.0228442 0.81399
\r
138 840.000000 75.000000 1.15849 53.1401 0.0225088 0.863511
\r
139 850.000000 75.000000 1.17339 50.4679 0.022152 0.907797
\r
140 860.000000 75.000000 1.23988 50.1624 0.0217911 0.946862
\r
141 870.000000 75.000000 1.25878 47.9388 0.0214154 0.981509
\r
142 880.000000 75.000000 1.24905 44.4802 0.0210491 1.01191
\r
143 890.000000 75.000000 1.24731 41.4471 0.0206969 1.03869
\r
144 900.000000 75.000000 1.32862 42.7043 0.0203437 1.06233
\r
145 910.000000 75.000000 1.29388 38.0176 0.0200017 1.08321
\r
146 920.000000 75.000000 1.31767 36.4464 0.0196639 1.10163
\r
147 930.000000 75.000000 1.38592 37.6258 0.01935 1.11818
\r
148 940.000000 75.000000 1.41748 36.8351 0.0190431 1.13292
\r
149 950.000000 75.000000 1.43805 35.4585 0.0187443 1.14604
\r
150 960.000000 75.000000 1.46233 34.4271 0.0184627 1.15801
\r
151 970.000000 75.000000 1.49193 33.8014 0.0181902 1.1688
\r
152 980.000000 75.000000 1.47302 30.1326 0.0179353 1.17885
\r
153 990.000000 75.000000 1.5377 32.0219 0.0176899 1.18806
\r
154 1000.000000 75.000000 1.51618 28.2523 0.0174617 1.19684
\r
155 250.000000 80.000000 35.2917 65.1672 0.0270118 0.0631574
\r
156 260.000000 80.000000 35.4249 70.2814 0.02705 0.0608978
\r
157 270.000000 80.000000 34.6815 77.6469 0.0268125 0.0586498
\r
158 280.000000 80.000000 32.4067 86.5435 0.0259174 0.0574024
\r
159 290.000000 80.000000 27.808 93.611 0.0236557 0.0574135
\r
160 300.000000 80.000000 23.2093 93.0599 0.0207786 0.0573833
\r
161 310.000000 80.000000 21.1175 90.1003 0.0192623 0.0572959
\r
162 320.000000 80.000000 19.8978 88.918 0.0183291 0.0573065
\r
163 330.000000 80.000000 18.8889 88.9292 0.017554 0.0573055
\r
164 340.000000 80.000000 18.0342 90.0741 0.0168521 0.0572958
\r
165 350.000000 80.000000 17.4026 92.4158 0.016376 0.0573512
\r
166 360.000000 80.000000 16.7064 101.014 0.0157719 0.0583679
\r
167 370.000000 80.000000 13.3963 113.416 0.0129175 0.0624484
\r
168 380.000000 80.000000 8.62926 117.189 0.00870383 0.0653474
\r
169 390.000000 80.000000 5.58719 101.765 0.00771267 0.0695425
\r
170 400.000000 80.000000 4.77557 79.4765 0.00794438 0.0763598
\r
171 410.000000 80.000000 4.73911 61.526 0.00796088 0.0913865
\r
172 420.000000 80.000000 5.01786 47.9361 0.00784262 0.108912
\r
173 430.000000 80.000000 5.45145 38.0343 0.00773189 0.125506
\r
174 440.000000 80.000000 5.95726 31.0851 0.00769665 0.141336
\r
175 450.000000 80.000000 6.46069 25.8918 0.00774517 0.157124
\r
176 460.000000 80.000000 6.95707 22.2654 0.00786183 0.173238
\r
177 470.000000 80.000000 7.41699 19.4642 0.00802662 0.189696
\r
178 480.000000 80.000000 7.84519 17.4031 0.00822257 0.206397
\r
179 490.000000 80.000000 8.21886 15.3354 0.00843626 0.223248
\r
180 500.000000 80.000000 8.56448 13.764 0.00865793 0.240178
\r
181 510.000000 80.000000 8.88849 12.7219 0.00888138 0.257186
\r
182 520.000000 80.000000 9.18445 11.9006 0.00910231 0.274272
\r
183 530.000000 80.000000 9.46214 11.4343 0.00931887 0.291535
\r
184 540.000000 80.000000 9.71333 10.9747 0.00952908 0.308993
\r
185 550.000000 80.000000 9.92529 9.94057 0.00973292 0.326696
\r
186 560.000000 80.000000 10.1361 9.53047 0.00992706 0.344531
\r
187 570.000000 80.000000 10.328 9.03092 0.0101074 0.362379
\r
188 580.000000 80.000000 10.5173 8.96251 0.0102752 0.380238
\r
189 590.000000 80.000000 10.6843 8.59414 0.0104305 0.398056
\r
190 600.000000 80.000000 10.8136 7.18319 0.010576 0.415903
\r
191 610.000000 80.000000 10.9646 7.04971 0.0107113 0.433725
\r
192 620.000000 80.000000 11.1286 7.82678 0.0108389 0.451619
\r
193 630.000000 80.000000 11.2367 6.64574 0.0109586 0.469537
\r
194 640.000000 80.000000 11.3812 7.37271 0.0110711 0.487464
\r
195 650.000000 80.000000 11.4832 6.57239 0.0111769 0.505388
\r
196 660.000000 80.000000 11.6094 7.14121 0.0112773 0.523363
\r
197 670.000000 80.000000 11.6764 5.26883 0.0113714 0.541298
\r
198 680.000000 80.000000 11.7696 4.81449 0.0114613 0.559303
\r
199 690.000000 80.000000 11.8952 6.25288 0.0115462 0.577297
\r
200 700.000000 80.000000 11.9522 4.50304 0.0116267 0.595301
\r
201 710.000000 80.000000 12.0656 5.88622 0.0117028 0.613269
\r
202 720.000000 80.000000 12.1408 5.48341 0.0117759 0.63127
\r
203 730.000000 80.000000 12.2092 4.93037 0.0118452 0.649246
\r
204 740.000000 80.000000 12.276 4.45811 0.0119113 0.667224
\r
205 750.000000 80.000000 12.3599 5.15723 0.0119743 0.685178
\r
206 760.000000 80.000000 12.4393 5.79264 0.0120347 0.703151
\r
207 770.000000 80.000000 12.5047 5.83864 0.0120919 0.72105
\r
208 780.000000 80.000000 12.5561 5.16208 0.0121473 0.73899
\r
209 790.000000 80.000000 12.6014 4.26359 0.0122001 0.756882
\r
210 800.000000 80.000000 12.6374 2.93105 0.0122502 0.774702
\r
211 810.000000 80.000000 12.7215 4.78788 0.0122985 0.792505
\r
212 820.000000 80.000000 12.7708 4.57264 0.0123449 0.810271
\r
213 830.000000 80.000000 12.7937 2.68711 0.01239 0.828065
\r
214 840.000000 80.000000 12.8434 2.75098 0.0124325 0.845709
\r
215 850.000000 80.000000 12.9056 3.79325 0.0124736 0.863347
\r
216 860.000000 80.000000 12.9522 3.9293 0.0125129 0.880858
\r
217 870.000000 80.000000 12.9802 2.78836 0.0125515 0.898415
\r
218 880.000000 80.000000 13.0418 4.21979 0.0125882 0.915836
\r
219 890.000000 80.000000 13.0936 5.13996 0.0126228 0.933106
\r
220 900.000000 80.000000 13.1126 3.67702 0.0126569 0.950382
\r
221 910.000000 80.000000 13.1681 5.06917 0.0126896 0.967564
\r
222 920.000000 80.000000 13.1918 4.09175 0.0127217 0.98474
\r
223 930.000000 80.000000 13.2292 4.3505 0.0127518 1.00171
\r
224 940.000000 80.000000 13.2246 1.31381 0.0127813 1.01865
\r
225 950.000000 80.000000 13.304 5.05016 0.0128101 1.03556
\r
226 960.000000 80.000000 13.3175 3.61101 0.0128376 1.05232
\r
227 970.000000 80.000000 13.358 4.44079 0.0128645 1.06903
\r
228 980.000000 80.000000 13.3568 1.90223 0.01289 1.08558
\r
229 990.000000 80.000000 13.3728 0.836291 0.0129148 1.10206
\r
230 1000.000000 80.000000 13.41 1.70027 0.0129384 1.11835