1 100 nm thermal silicon dioxide on silicon
\r
3 225.454541 73.000000 39.8079 76.7581 1.3775 2.78255
\r
4 226.484009 73.000000 38.2511 84.1472 0.973454 1.94601
\r
5 227.522925 73.000000 34.598 84.584 1.12276 2.25003
\r
6 228.571436 73.000000 36.2399 92.6077 0.728938 1.52476
\r
7 229.629639 73.000000 36.7239 84.5473 0.616023 1.2909
\r
8 230.697681 73.000000 35.06 87.8377 0.487655 1.03661
\r
9 231.775708 73.000000 33.7284 94.4641 0.47376 1.02751
\r
10 232.863843 73.000000 34.2855 92.8176 0.401501 0.847551
\r
11 233.962256 73.000000 34.4297 96.4487 0.351119 0.757436
\r
12 235.071094 73.000000 33.8807 97.5447 0.319768 0.69683
\r
13 236.190479 73.000000 33.9307 98.0142 0.282034 0.6149
\r
14 237.320581 73.000000 34.5344 102.277 0.266856 0.58019
\r
15 238.461548 73.000000 33.2108 102.963 0.22228 0.497509
\r
16 239.613525 73.000000 32.6337 103.457 0.211542 0.476861
\r
17 240.776709 73.000000 32.8972 107.698 0.189563 0.435462
\r
18 241.951221 73.000000 32.2403 110.403 0.165878 0.391846
\r
19 243.137256 73.000000 32.4304 112.033 0.15848 0.377605
\r
20 244.334985 73.000000 31.6306 114.633 0.136828 0.336935
\r
21 245.544556 73.000000 31.7541 117.083 0.129201 0.324152
\r
22 246.766162 73.000000 31.7028 119.697 0.117505 0.302468
\r
23 248.000000 73.000000 31.2852 121.601 0.107455 0.284192
\r
24 249.246240 73.000000 31.4375 126.454 0.110678 0.309091
\r
25 250.505054 73.000000 31.3338 129.672 0.102729 0.300297
\r
26 251.776660 73.000000 31.1749 133.323 0.0943207 0.292595
\r
27 253.061230 73.000000 30.6301 137.019 0.0821021 0.274489
\r
28 254.358984 73.000000 31.078 139.439 0.0724529 0.251792
\r
29 255.670093 73.000000 30.9689 143.919 0.0747469 0.287404
\r
30 256.994824 73.000000 30.9857 146.993 0.0697271 0.289734
\r
31 258.333325 73.000000 31.0562 151.498 0.068497 0.324465
\r
32 259.685864 73.000000 31.1941 155.342 0.060941 0.329238
\r
33 261.052637 73.000000 30.9926 160.426 0.0559081 0.377422
\r
34 262.433862 73.000000 31.0577 164.748 0.0586946 0.504092
\r
35 263.829785 73.000000 31.3404 167.915 0.0536846 0.576146
\r
36 265.240649 73.000000 31.3804 172.793 0.0512119 0.916394
\r
37 266.666675 73.000000 31.5979 176.637 0.0474647 1.80851
\r
38 268.108105 73.000000 31.8339 173.65 0.0458296 0.922301
\r
39 269.565210 73.000000 31.9336 171.145 0.0401272 0.578723
\r
40 271.038257 73.000000 32.299 167.551 0.0391222 0.400389
\r
41 272.527466 73.000000 32.4121 162.959 0.0372982 0.280192
\r
42 274.033154 73.000000 32.6583 157.863 0.0357206 0.207804
\r
43 275.555566 73.000000 32.8063 153.819 0.0336348 0.166647
\r
44 277.094971 73.000000 32.9946 149.09 0.0319067 0.135331
\r
45 278.651685 73.000000 33.0496 144.556 0.029841 0.111971
\r
46 280.225977 73.000000 33.2115 140.877 0.0280616 0.096478
\r
47 281.818188 73.000000 33.2559 137.127 0.0586929 0.187866
\r
48 283.428564 73.000000 33.4351 133.072 0.0510258 0.151664
\r
49 285.057471 73.000000 33.5257 129.54 0.0517616 0.145555
\r
50 286.705200 73.000000 33.6947 125.669 0.0474319 0.126269
\r
51 288.372095 73.000000 33.743 122.178 0.0421427 0.107565
\r
52 290.058472 73.000000 33.7574 118.701 0.0386059 0.0950338
\r
53 291.764697 73.000000 33.6099 115.59 0.0350255 0.0839955
\r
54 293.491113 73.000000 33.5289 112.789 0.03382 0.0794276
\r
55 295.238086 73.000000 33.4895 110.164 0.0287392 0.0662554
\r
56 297.005981 73.000000 33.4213 107.934 0.0278709 0.0634493
\r
57 298.795190 73.000000 33.3825 105.993 0.0250815 0.0564917
\r
58 300.606055 73.000000 33.4546 104.028 0.0234674 0.0522806
\r
59 302.439014 73.000000 33.5268 102.339 0.0233781 0.0516688
\r
60 304.294482 73.000000 33.6257 100.702 0.0218138 0.0478226
\r
61 306.172852 73.000000 33.8103 99.2041 0.0219838 0.0478531
\r
62 308.074536 73.000000 33.9632 97.8276 0.0209444 0.0452998
\r
63 310.000000 73.000000 34.1483 96.4766 0.0203161 0.0436793
\r
64 311.949683 73.000000 34.4092 95.2312 0.0197477 0.0421932
\r
65 313.924048 73.000000 34.6231 94.0741 0.0191368 0.040684
\r
66 315.923560 73.000000 34.8729 92.9702 0.0188658 0.0399206
\r
67 317.948706 73.000000 35.1596 91.9163 0.0182448 0.0384132
\r
68 320.000000 73.000000 35.4287 90.9817 0.0183737 0.0385463
\r
69 322.077930 73.000000 35.7198 90.0678 0.0180838 0.0377899
\r
70 324.183008 73.000000 36.0592 89.1853 0.0178807 0.0372152
\r
71 326.315796 73.000000 36.3627 88.4307 0.0177408 0.0368047
\r
72 328.476831 73.000000 36.7359 87.682 0.017578 0.0363317
\r
73 330.666675 73.000000 37.1185 87.0333 0.0246202 0.0509699
\r
74 332.885913 73.000000 37.4679 86.4377 0.0243211 0.0502046
\r
75 335.135132 73.000000 37.8395 85.8446 0.0239554 0.0493073
\r
76 337.414966 73.000000 38.1932 85.4331 0.0236039 0.048454
\r
77 339.726025 73.000000 38.5862 85.0031 0.0221845 0.045388
\r
78 342.068970 73.000000 38.9435 84.6219 0.0224917 0.0459255
\r
79 344.444434 73.000000 39.4185 84.4293 0.0227195 0.0462526
\r
80 346.853149 73.000000 39.8576 84.2323 0.0224204 0.0455191
\r
81 349.295776 73.000000 40.341 84.1722 0.0221364 0.0448094
\r
82 351.773047 73.000000 40.8197 84.1487 0.0215107 0.0434152
\r
83 354.285718 73.000000 41.3614 84.2178 0.0217074 0.0436985
\r
84 356.834521 73.000000 41.9336 84.4235 0.0214581 0.0430736
\r
85 359.420288 73.000000 42.5653 84.6849 0.0222781 0.0446275
\r
86 362.043799 73.000000 43.2819 85.0334 0.0226623 0.0452999
\r
87 364.705884 73.000000 44.0185 85.4605 0.0224817 0.0448522
\r
88 367.407397 73.000000 44.9245 85.9134 0.0176547 0.0350446
\r
89 372.932324 73.000000 46.8216 86.9578 0.0175596 0.0348834
\r
90 378.625952 73.000000 48.9517 87.9975 0.0172308 0.0344484
\r
91 384.496118 73.000000 51.3095 89.1612 0.0169675 0.0344031
\r
92 390.551172 73.000000 53.9732 90.5887 0.016688 0.0346926
\r
93 396.800000 73.000000 56.9428 92.2965 0.0161672 0.0349685
\r
94 403.252026 73.000000 60.2681 94.3233 0.0154746 0.0355657
\r
95 409.917334 73.000000 63.9671 96.7146 0.0147406 0.0370913
\r
96 416.806738 73.000000 67.9621 99.5299 0.0142077 0.0407755
\r
97 423.931641 73.000000 72.2934 103.139 0.0142948 0.0498751
\r
98 431.304346 73.000000 76.9186 108.237 0.00981134 0.0452972
\r
99 438.938037 73.000000 81.6486 117.362 0.009245 0.0696023
\r
100 446.846826 73.000000 85.615 137.886 0.0121558 0.210604
\r
101 455.045850 73.000000 85.3401 120.456 0.0108385 0.128091
\r
102 463.551416 73.000000 81.3214 97.5698 0.00798639 0.0514535
\r
103 472.380957 73.000000 76.8928 89.0275 0.00898544 0.0390925
\r
104 481.553418 73.000000 72.5313 84.1843 0.0140584 0.0485719
\r
105 491.089111 73.000000 68.4413 80.8336 0.0148305 0.0433289
\r
106 501.010107 73.000000 64.6723 78.3112 0.0151001 0.0393205
\r
107 511.340186 73.000000 61.2392 76.264 0.0159535 0.038442
\r
108 522.105273 73.000000 58.1698 74.5518 0.0169764 0.0388572
\r
109 533.333350 73.000000 55.4037 73.1407 0.0179266 0.0396619
\r
110 545.054932 73.000000 52.8718 71.8665 0.0180388 0.0390335
\r
111 557.303369 73.000000 50.5772 70.7878 0.0183485 0.0392069
\r
112 570.114941 73.000000 48.5168 69.8689 0.0186456 0.0396209
\r
113 583.529395 73.000000 46.6406 69.1243 0.0190834 0.0405236
\r
114 597.590381 73.000000 44.9317 68.4794 0.0193992 0.0413171
\r
115 612.345703 73.000000 43.3377 67.9624 0.0197625 0.0423267
\r
116 627.848096 73.000000 41.8605 67.5875 0.0199112 0.04295
\r
117 644.155859 73.000000 40.5297 67.2872 0.0209348 0.0455767
\r
118 661.333350 73.000000 39.2496 67.0676 0.0205961 0.0452628
\r
119 679.452051 73.000000 38.0535 66.967 0.0201752 0.0447744
\r
120 698.591553 73.000000 36.927 66.9395 0.0207704 0.0466183
\r
121 718.840576 73.000000 35.8501 66.9498 0.0209791 0.0476441
\r
122 740.298486 73.000000 34.8215 67.0877 0.0241552 0.0556066
\r
123 763.076904 73.000000 33.7999 67.294 0.0235169 0.0547995
\r
124 787.301611 73.000000 32.843 67.5794 0.0197961 0.0465832
\r
125 813.114746 73.000000 31.8531 67.9302 0.019189 0.0457599
\r
126 837.837793 73.000000 30.9863 68.2408 0.0160487 0.0386286
\r
127 861.111133 73.000000 30.2384 68.605 0.0158311 0.0385475
\r
128 885.714258 73.000000 29.495 68.9905 0.0153326 0.037774
\r
129 911.764746 73.000000 28.7521 69.4187 0.0151033 0.0376895
\r
130 939.393945 73.000000 28.0173 69.8671 0.014829 0.0375063
\r
131 968.750000 73.000000 27.2736 70.3591 0.0145404 0.0373063
\r
132 1000.000000 73.000000 26.5071 70.89 0.0142371 0.0371076
\r
133 225.454541 76.000000 38.7102 68.4553 1.22497 2.61783
\r
134 226.484009 76.000000 34.4537 68.8178 0.990627 2.25469
\r
135 227.522925 76.000000 39.3612 71.4309 1.42296 2.67014
\r
136 228.571436 76.000000 36.1694 70.5626 0.74375 1.64591
\r
137 229.629639 76.000000 38.7945 79.133 0.700294 1.41375
\r
138 230.697681 76.000000 35.8383 82.0521 0.497332 1.05603
\r
139 231.775708 76.000000 33.9294 82.7445 0.453262 0.983623
\r
140 232.863843 76.000000 33.8223 82.511 0.401877 0.875451
\r
141 233.962256 76.000000 33.028 86.5264 0.342221 0.750131
\r
142 235.071094 76.000000 32.1411 86.0176 0.307887 0.68069
\r
143 236.190479 76.000000 32.7451 87.8661 0.280392 0.616719
\r
144 237.320581 76.000000 31.5999 88.8852 0.240413 0.536616
\r
145 238.461548 76.000000 30.2427 93.5242 0.220717 0.508188
\r
146 239.613525 76.000000 31.8108 95.7226 0.198665 0.443807
\r
147 240.776709 76.000000 31.7358 96.3037 0.186438 0.418834
\r
148 241.951221 76.000000 31.5313 99.8094 0.177595 0.40314
\r
149 243.137256 76.000000 30.2738 103.276 0.155897 0.366996
\r
150 244.334985 76.000000 29.9631 105.872 0.140686 0.337869
\r
151 245.544556 76.000000 29.8367 109.276 0.132592 0.325333
\r
152 246.766162 76.000000 29.9434 111.83 0.123989 0.308562
\r
153 248.000000 76.000000 29.2913 115.769 0.113974 0.296491
\r
154 249.246240 76.000000 29.263 119.414 0.118372 0.318095
\r
155 250.505054 76.000000 28.9121 123.922 0.114491 0.325557
\r
156 251.776660 76.000000 28.6138 126.722 0.0984642 0.29204
\r
157 253.061230 76.000000 28.4352 131.582 0.0891015 0.284327
\r
158 254.358984 76.000000 28.2506 136.52 0.0783947 0.27304
\r
159 255.670093 76.000000 27.7357 141.34 0.079687 0.309459
\r
160 256.994824 76.000000 27.723 146.452 0.075207 0.330147
\r
161 258.333325 76.000000 27.7573 151.275 0.0748947 0.377796
\r
162 259.685864 76.000000 27.8566 156.357 0.0668961 0.403356
\r
163 261.052637 76.000000 27.9817 160.494 0.0612131 0.441861
\r
164 262.433862 76.000000 27.858 165.856 0.0635342 0.628587
\r
165 263.829785 76.000000 28.0055 172.527 0.0584669 1.08272
\r
166 265.240649 76.000000 28.4235 172.163 0.0561209 0.981612
\r
167 266.666675 76.000000 28.7539 172.767 0.0509063 0.956773
\r
168 268.108105 76.000000 29.0823 166.918 0.0481918 0.500127
\r
169 269.565210 76.000000 29.5082 161.848 0.0414799 0.309691
\r
170 271.038257 76.000000 29.7785 156.089 0.0397189 0.226619
\r
171 272.527466 76.000000 30.2602 151.486 0.0381338 0.182909
\r
172 274.033154 76.000000 30.7348 145.265 0.0356643 0.141969
\r
173 275.555566 76.000000 31.0441 139.866 0.0326903 0.114306
\r
174 277.094971 76.000000 31.3159 134.631 0.031255 0.0984788
\r
175 278.651685 76.000000 31.7027 129.847 0.0285655 0.0827938
\r
176 280.225977 76.000000 32.0618 125.623 0.0269861 0.0733998
\r
177 281.818188 76.000000 32.2804 121.272 0.0253452 0.0652913
\r
178 283.428564 76.000000 32.7069 117.045 0.0231657 0.0568211
\r
179 285.057471 76.000000 32.8564 113.137 0.0495134 0.117977
\r
180 286.705200 76.000000 33.2626 109.142 0.045408 0.104634
\r
181 288.372095 76.000000 33.462 105.532 0.0399968 0.0900618
\r
182 290.058472 76.000000 33.6014 102.078 0.0369996 0.0818947
\r
183 291.764697 76.000000 33.6445 98.9717 0.0340853 0.074612
\r
184 293.491113 76.000000 33.6579 96.1097 0.0320516 0.0696611
\r
185 295.238086 76.000000 33.7065 93.6091 0.0274345 0.0592994
\r
186 297.005981 76.000000 33.8048 91.487 0.0262602 0.0565665
\r
187 298.795190 76.000000 33.8619 89.4675 0.0239486 0.0514824
\r
188 300.606055 76.000000 33.9953 87.6736 0.0226562 0.0486182
\r
189 302.439014 76.000000 34.1479 86.1077 0.0226429 0.0485577
\r
190 304.294482 76.000000 34.32 84.6093 0.0213189 0.04567
\r
191 306.172852 76.000000 34.5068 83.1873 0.0213191 0.0456748
\r
192 308.074536 76.000000 34.7606 82.0005 0.020565 0.0440056
\r
193 310.000000 76.000000 35.0125 80.7747 0.0199171 0.0425958
\r
194 311.949683 76.000000 35.2577 79.7067 0.019569 0.0418434
\r
195 313.924048 76.000000 35.5535 78.655 0.019162 0.0409519
\r
196 315.923560 76.000000 35.8289 77.7729 0.0189867 0.040568
\r
197 317.948706 76.000000 36.1287 76.8553 0.018414 0.0393276
\r
198 320.000000 76.000000 36.4295 76.012 0.0185937 0.0397265
\r
199 322.077930 76.000000 36.7909 75.2907 0.0259145 0.0555883
\r
200 324.183008 76.000000 37.0592 74.5228 0.0251876 0.0540628
\r
201 326.315796 76.000000 37.4818 73.8788 0.0241554 0.0517753
\r
202 328.476831 76.000000 37.7898 73.3565 0.0231686 0.0496269
\r
203 330.666675 76.000000 38.1414 72.7819 0.0241192 0.0516853
\r
204 332.885913 76.000000 38.5086 72.3633 0.0237678 0.0508842
\r
205 335.135132 76.000000 38.879 71.9418 0.0234363 0.0501383
\r
206 337.414966 76.000000 39.2299 71.6862 0.0233031 0.0497935
\r
207 339.726025 76.000000 39.6363 71.3685 0.0220698 0.0470788
\r
208 342.068970 76.000000 40.0605 71.1631 0.0223813 0.0476813
\r
209 344.444434 76.000000 40.4368 71.0879 0.0224419 0.0477282
\r
210 346.853149 76.000000 40.8795 70.9568 0.0222957 0.0473379
\r
211 349.295776 76.000000 41.3289 70.9508 0.022097 0.0468111
\r
212 351.773047 76.000000 41.8303 71.0616 0.0214179 0.0452264
\r
213 354.285718 76.000000 42.3288 71.2721 0.0215819 0.0454404
\r
214 356.834521 76.000000 42.8931 71.5759 0.0214338 0.0449707
\r
215 359.420288 76.000000 43.4862 71.9172 0.0219963 0.0460182
\r
216 362.043799 76.000000 44.1948 72.4303 0.0225308 0.0469708
\r
217 364.705884 76.000000 44.9279 72.9125 0.0222859 0.0463147
\r
218 367.407397 76.000000 45.9136 73.6139 0.0180248 0.0372075
\r
219 372.932324 76.000000 47.934 74.9171 0.0178329 0.0367464
\r
220 378.625952 76.000000 50.2151 76.0123 0.0174027 0.0360768
\r
221 384.496118 76.000000 52.8083 77.02 0.0170003 0.0358224
\r
222 390.551172 76.000000 55.6964 78.0507 0.016543 0.0358933
\r
223 396.800000 76.000000 58.9341 79.0751 0.0158197 0.0359842
\r
224 403.252026 76.000000 62.5558 79.9596 0.0149129 0.0364978
\r
225 409.917334 76.000000 66.5618 80.5052 0.0138581 0.0378674
\r
226 416.806738 76.000000 70.8455 80.308 0.0133108 0.0427858
\r
227 423.931641 76.000000 75.4567 78.5681 0.0137728 0.0568452
\r
228 431.304346 76.000000 80.1525 72.7998 0.00908626 0.0543278
\r
229 438.938037 76.000000 84.3532 53.6812 0.00931016 0.105815
\r
230 446.846826 76.000000 85.2309 30.1315 0.010555 0.238984
\r
231 455.045850 76.000000 81.771 50.3877 0.008479 0.0744079
\r
232 463.551416 76.000000 77.3459 58.3406 0.0131393 0.0708506
\r
233 472.380957 76.000000 73.0679 61.1767 0.013103 0.0526387
\r
234 481.553418 76.000000 68.9716 62.0209 0.0142949 0.0475232
\r
235 491.089111 76.000000 65.2218 62.0025 0.0156139 0.0458073
\r
236 501.010107 76.000000 61.8349 61.5556 0.0162647 0.0438516
\r
237 511.340186 76.000000 58.7773 60.9353 0.017087 0.0435458
\r
238 522.105273 76.000000 56.0878 60.2237 0.0179072 0.0440386
\r
239 533.333350 76.000000 53.6615 59.5404 0.0186682 0.0448765
\r
240 545.054932 76.000000 51.4882 58.7985 0.0188121 0.0446452
\r
241 557.303369 76.000000 49.5112 58.1421 0.0190924 0.0450308
\r
242 570.114941 76.000000 47.7355 57.5437 0.0193412 0.0455649
\r
243 583.529395 76.000000 46.1194 57.0254 0.0196579 0.0464166
\r
244 597.590381 76.000000 44.6425 56.5703 0.0199191 0.0472562
\r
245 612.345703 76.000000 43.2834 56.1609 0.0201912 0.0482242
\r
246 627.848096 76.000000 42.0073 55.8269 0.0202785 0.0488054
\r
247 644.155859 76.000000 40.8396 55.5865 0.0209712 0.0509093
\r
248 661.333350 76.000000 39.7283 55.3722 0.0207664 0.05086
\r
249 679.452051 76.000000 38.6901 55.2692 0.0204635 0.050541
\r
250 698.591553 76.000000 37.6717 55.1913 0.020807 0.0519023
\r
251 718.840576 76.000000 36.7184 55.184 0.0209506 0.0527617
\r
252 740.298486 76.000000 35.7785 55.1504 0.0233544 0.0595592
\r
253 763.076904 76.000000 34.8716 55.2735 0.0227848 0.0586507
\r
254 787.301611 76.000000 33.9609 55.4723 0.0308554 0.0805001
\r
255 813.114746 76.000000 33.0949 55.5655 0.0295261 0.0779097
\r
256 837.837793 76.000000 32.3026 55.7341 0.0174158 0.0460581
\r
257 861.111133 76.000000 31.6449 55.8862 0.0176046 0.0470138
\r
258 885.714258 76.000000 30.9475 56.113 0.0167727 0.0451873
\r
259 911.764746 76.000000 30.2612 56.3213 0.0166661 0.045381
\r
260 939.393945 76.000000 29.5727 56.5461 0.0163994 0.0451488
\r
261 968.750000 76.000000 28.8809 56.7997 0.0161618 0.0450139
\r
262 1000.000000 76.000000 28.16 57.0873 0.0158081 0.0445824